Patents for C23F 3 - Brightening metals by chemical means (1,427) |
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09/10/2004 | WO2004076574A2 Cmp composition comprising a sulfonic acid and a method for polishing noble metals |
09/09/2004 | US20040173574 CMP composition containing organic nitro compounds |
09/09/2004 | US20040173307 Apparatus and method for supplying chemicals in chemical mechanical polishing systems |
09/02/2004 | WO2004053008A3 Passivative chemical mechanical polishing composition for copper film planarization |
08/19/2004 | WO2004070072A2 Heat treatable coated article with chromium nitride ir reflecting layer and method of making same |
08/12/2004 | WO2004067660A1 Selective barrier metal polishing solution |
08/12/2004 | US20040157458 Methods for planarization of metal-containing surfaces using halogens and halides salts |
08/10/2004 | US6774041 Polishing method, metallization fabrication method, method for manufacturing semiconductor device and semiconductor device |
08/10/2004 | US6773476 Silicon dioxide or aluminum oxide abrasive; polyether; citric acid, oxalic acid, tartaric acid, glycine, alpha -alanine or histidine accelerant; benzotriazole, benzimidazole, triazole, imidazole or tolyltriazole stabilizer; h2o2 and water |
08/05/2004 | WO2004066027A2 Electron beam processing for mask repair |
08/05/2004 | US20040152308 heating a rare earth carboxylates with alkoxyalcoholst to form solutions, then adding a silicon alkoxide and activators, mixing with water to form gels and thermal decomposition under slightly reductive atmosphere, to form rare earth element-activated rare earth silicate phosphors |
08/04/2004 | EP1443129A1 Method for treating a metallic workpiece |
07/29/2004 | WO2004063083A2 Apparatus for transfer of an array of liquids and methods for manufacturing same |
07/29/2004 | US20040147118 Selective barrier metal polishing solution |
07/27/2004 | US6767476 Polishing composition for metal CMP |
07/22/2004 | WO2004061028A1 Methods for polishing and/or cleaning copper interconnects and/or film and compositions therefor |
07/22/2004 | WO2004061027A1 Methods for polishing and/or cleaning copper interconnects and/or film and compositions therefor |
07/21/2004 | CN1514862A CMP polishing pad including solid catalyst |
07/21/2004 | CN1158694C Material for polishing liquid for metal, polishing liquid for metal, method for preparation thereof and polishing method using same |
07/15/2004 | US20040134873 Abrasive-free chemical mechanical polishing composition and polishing process containing same |
07/08/2004 | US20040129676 Apparatus for transfer of an array of liquids and methods for manufacturing same |
06/30/2004 | EP1432852A2 Electrolytic processing apparatus and method |
06/24/2004 | WO2004053008A2 Passivative chemical mechanical polishing composition for copper film planarization |
06/22/2004 | US6752844 Ceric-ion slurry for use in chemical-mechanical polishing |
06/17/2004 | US20040112759 Methods for polishing and/or cleaning copper interconnects and/or film and compositions therefor |
06/17/2004 | US20040112753 Using a perfluoro(sulfone or imidosulfone)compound |
06/10/2004 | US20040108302 Mixture of 5-aminotetrazole, oxidizer, abrasives, chelate compound and solvent |
06/01/2004 | US6743268 Acidic slurry of an oxidizer, deionized water, a corrosion inhibitor and a surfactant |
06/01/2004 | CA2254362C Composition and method for reducing copper oxide to metallic copper |
05/27/2004 | WO2004044264A1 Method for finishing shot |
05/27/2004 | US20040102049 Method and system to provide material removal and planarization employing a reactive pad |
05/25/2004 | US6740591 Slurry and method for chemical mechanical polishing of copper |
05/21/2004 | WO2004041477A1 Surface treatment method for vacuum member |
05/13/2004 | US20040092102 Chemical mechanical polishing composition and method |
05/11/2004 | US6734103 Method of polishing a semiconductor device |
05/06/2004 | US20040084414 Polishing method and polishing composition used for polishing |
05/05/2004 | CN1494740A SLurry and method for chemical mechanical polishing of copper |
05/04/2004 | US6730592 Methods for planarization of metal-containing surfaces using halogens and halide salts |
04/29/2004 | WO2004035861A1 Pickling or brightening/passivating solution and process for steel and stainless steel |
04/28/2004 | EP1413650A1 Metal surface protection film forming agent and application thereof |
04/22/2004 | WO2003029531A3 Electrolytic processing apparatus and method |
04/21/2004 | CN1491146A Chemical mechanical machining and surface finishing |
04/15/2004 | US20040072439 Chemical mechanical polishing composition and process |
04/13/2004 | US6720250 Method of manufacturing a semiconductor device using a slurry for chemical mechanical polishing of copper |
04/08/2004 | US20040067649 Silica and silica-based slurry |
04/08/2004 | US20040065346 Hydrofluoric acid generating composition and method of treating surfaces |
04/07/2004 | CN1488170A Planarizers for spin etch planarization of electronic components and methods of use thereof |
04/07/2004 | CN1488167A Viscous protective overlayers for planarization of integrated circuits |
03/30/2004 | US6713149 Magnetic recording medium |
03/18/2004 | WO2004022818A1 The surface treatment of magnesium and its alloys |
03/17/2004 | EP1397458A1 A silica and a silica-based slurry |
03/17/2004 | CN1142322C Chemically polishing method for stainless steel |
03/11/2004 | US20040046148 Composition for chemical mechanical planarization of copper, tantalum and tantalum nitride |
03/10/2004 | CN1481283A Bond enhancement antitarnish coatings |
03/04/2004 | WO2002102920A8 A silica and a silica-based slurry |
03/04/2004 | US20040043702 Chemical-mechanical polishing slurry for polishing metal films |
03/02/2004 | US6699402 Chemical mechanical polishing (cmp) slurry of abrasive polishing particles, a bromide compound, a bromate compound for providing free bromine oxidizing agent and an organic acid for mediating bromate decomposition; capacitors |
02/24/2004 | US6696358 Viscous protective overlayers for planarization of integrated circuits |
02/12/2004 | US20040029495 Catalytic composition for chemical-mechanical polishing, method of using same, and substrate treated with same |
02/12/2004 | US20040025444 Mixture of oxidizer and abrasive; activation free radicals; for semiconductors, integrated circuits |
01/29/2004 | DE10229564A1 Verfahren und Vorrichtung zum chemischen Entgraten und Polieren Method and apparatus for chemical polishing and deburring |
01/15/2004 | US20040006924 For chemical mechanical polishing (CMP) of semiconductors |
01/14/2004 | EP1380048A1 Method and composition for polishing by cmp |
01/13/2004 | US6676989 Atomic level surface smoothing of coronary stents to prolong stability within body |
12/18/2003 | WO2003104350A1 Metal polish composition, polishing method using the composition and method for producing wafer using the polishing method |
12/17/2003 | CN1131125C Composition and slurry used for metal CMP |
12/09/2003 | US6660639 Method of fabricating a copper damascene structure |
12/04/2003 | US20030224236 Stainless steel separator for low-temperature fuel cell |
11/27/2003 | US20030217518 Abrasive, a method of polishing with the abrasive, and a method of washing a polished object |
11/18/2003 | US6649523 Method and system to provide material removal and planarization employing a reactive pad |
11/13/2003 | WO2003060980A3 Methods for planarization of group viii metal-containing surfaces using oxidizing gases |
11/13/2003 | WO2003018252A3 Metal polishing |
11/13/2003 | US20030211745 Slurry and method for chemical mechanical polishing of copper |
11/13/2003 | US20030209523 Planarization by chemical polishing for ULSI applications |
11/05/2003 | EP1358044A2 Chemical mechanical machining and surface finishing |
10/30/2003 | US20030203635 Polishing composition for metal CMP |
10/30/2003 | US20030203624 Manufacturing method of semiconductor device |
10/23/2003 | US20030199112 Copper wiring module control |
10/22/2003 | EP1354355A1 Planarizers for spin etch planarization of electronic components and methods of use thereof |
10/22/2003 | EP1354347A2 Viscous protective overlayers for planarization of integrated circuits |
10/22/2003 | EP1354012A2 A cmp polishing pad including a solid catalyst |
10/21/2003 | US6635186 Chemical mechanical polishing composition and process |
10/16/2003 | WO2002059966A8 Planarizers for spin etch planarization of electronic components and methods of use thereof |
10/16/2003 | US20030194879 Compositions for chemical-mechanical planarization of noble-metal-featured substrates, associated methods, and substrates produced by such methods |
10/15/2003 | EP1352109A1 Composition for chemical mechanical planarization of copper, tantalum and tantalum nitride |
10/14/2003 | US6632377 Chemical-mechanical planarization of metallurgy |
10/09/2003 | WO2002061824A9 Slurry and method for chemical mechanical polishing of copper |
10/09/2003 | US20030189186 Chemical-mechanical polishing composition for metal layers |
10/08/2003 | CN1447401A Mfg. method of semiconductor device |
10/07/2003 | US6630433 Oxidizing reactant selected from ammonium persulfate, hydrogen peroxide, nitric acid, co-reactant selected from phosphoric acid, sulfuric acid, nitric acid, oxalic acid, acetic acid, organic acids, additives |
10/01/2003 | EP1165983B1 A friction member and a method for its surface treatment |
09/25/2003 | US20030181142 CMP method for noble metals |
09/25/2003 | US20030180546 Heat treatable coated article with chromium nitride IR reflecting layer and method of making same |
09/18/2003 | US20030176072 Polishing compositions for noble metals |
09/18/2003 | US20030176068 Chemical mechanical polishing composition and process |
09/18/2003 | US20030173329 Polishing slurry for aluminum-based metal, and method of manufacturing semiconductor device |
09/11/2003 | US20030171239 Methods and compositions for chemically treating a substrate using foam technology |
09/04/2003 | WO2003072670A1 Improved chemical-mechanical polishing slurry for polishing of copper or silver films |
09/04/2003 | US20030166337 Chemical mechanical polishing systems and methods for their use |
08/28/2003 | US20030162398 Catalytic composition for chemical-mechanical polishing, method of using same, and substrate treated with same |