| Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
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| 02/26/2013 | US8383019 Sputtering target, transparent conductive film and transparent electrode |
| 02/26/2013 | US8382967 Magnetic device and magnetron sputtering device using the same |
| 02/26/2013 | US8382966 Sputtering system |
| 02/26/2013 | US8382965 Tools and methods for mounting transport rails in a substrate processing system |
| 02/21/2013 | WO2013025172A1 A cooling apparatus for a rotating sample holder |
| 02/21/2013 | WO2013024915A1 Sputtering apparatus and method for forming a transmissive conductive layer of a light emitting device |
| 02/21/2013 | WO2013024845A1 Alloy for soft-magnetic thin-film layer on perpendicular magnetic recording medium, and sputtering-target material |
| 02/21/2013 | WO2013024837A1 Component manufacturing method and component |
| 02/21/2013 | WO2013024769A1 Film formation device and film formation method |
| 02/21/2013 | WO2013024707A1 Method and device for manufacturing organic el element |
| 02/21/2013 | WO2013024646A1 Thin film transistor, method for producing same, display device, image sensor, x-ray sensor, and x-ray digital imaging device |
| 02/21/2013 | WO2013024641A1 Sputtering device and film formation method using same |
| 02/21/2013 | WO2013023802A1 Smoothing layer for metal workpieces |
| 02/21/2013 | US20130045367 Coating based on diamond-like carbon |
| 02/21/2013 | US20130045348 Housing and method for making the same |
| 02/21/2013 | US20130045091 Rotatable component, coating and method of coating the rotatable component of an engine |
| 02/21/2013 | US20130043128 Sputtering system |
| 02/21/2013 | US20130043121 Method and Apparatus for Sputtering with a Plasma Lens |
| 02/21/2013 | US20130043120 Sputtering target with reverse erosion profile surface and sputtering system and method using the same |
| 02/21/2013 | US20130042809 Ion implanter |
| 02/21/2013 | DE102012200665A1 Verfahren und Vorrichtung zur Herstellung eines niedrigemittierenden Schichtsystems Method and apparatus for producing a low emissivity layer system |
| 02/21/2013 | DE102011089884A1 Verfahren zur Herstellung eines niedrigemittierenden Schichtsystems A process for producing a low emissivity layer system |
| 02/20/2013 | EP2559785A1 Coating on the basis of a diamond-like carbon based material |
| 02/20/2013 | EP2559050A1 Target for spark vaporization with physical limiting of the propogation of the spark |
| 02/20/2013 | EP2558610A1 Hard carbon coating and method of forming the same |
| 02/20/2013 | EP2558609A1 Device for coating a substrate inside a vacuum chamber by means of plasma-assisted chemical vapor deposition |
| 02/20/2013 | EP2558608A1 Coating source and process for the production thereof |
| 02/20/2013 | EP2557932A2 Method of making coated article having anti-bacterial and/or anti-fungal coating and resulting product |
| 02/20/2013 | CN202746604U Umbrella stand sealed transmission device for vacuum plating equipment |
| 02/20/2013 | CN202744624U Observation window for vacuum plating equipment |
| 02/20/2013 | CN202744623U Adjustable vacuum magnetron sputtering anode cap |
| 02/20/2013 | CN202744622U Gas distributing structure of magnetic control sputtering box body |
| 02/20/2013 | CN202744621U Cavity structure of vacuum plating machine |
| 02/20/2013 | CN202744620U Carbon layer structure with protective layer structure |
| 02/20/2013 | CN1476278B Shadow mask and manufacturing method of plane display apparatus made of said shadow mask |
| 02/20/2013 | CN102939404A Method for producing plasma flow, method for plasma processing, apparatus for producing plasma, and apparatus for plasma processing |
| 02/20/2013 | CN102939403A Coating source and process for the production thereof |
| 02/20/2013 | CN102938447A Organic electroluminescent (EL) apparatus manufacturing installation |
| 02/20/2013 | CN102936719A Magnetron sputtering coating system |
| 02/20/2013 | CN102936718A Multi-structure coupling magnetic field adaptability type rotating arc ion plating device |
| 02/20/2013 | CN102936717A Compact and efficient cold cathode arc source of quasi diffusion arc |
| 02/20/2013 | CN102936716A Method for preparing cobalt-based alloy layer on surface of TC4 titanium alloy |
| 02/20/2013 | CN102936715A Method for preparing precursor metal film by gas condensation |
| 02/20/2013 | CN102936714A Device and method for preparing hard carbide ceramic coating based on composite treatment of large-area high-current pulsed electron beam |
| 02/20/2013 | CN102936100A Rotary type continuous coating device and method thereof |
| 02/20/2013 | CN102350364B Preparation method of nitrogen-doped titanium dioxide photochemical catalyst loaded with foam metal carrier |
| 02/20/2013 | CN102264941B Particulate material metering and vaporization |
| 02/20/2013 | CN102251214B Preparation method of boron phosphide wear-resistant corrosion-resistant coating |
| 02/20/2013 | CN102242339B Preparation method of oxygen-stabilized yttrium fluoride film |
| 02/20/2013 | CN102199752B Magneto-controlled sputter growing method for amorphous cadmium telluride thin films |
| 02/20/2013 | CN102161106B Preparation process of Ti-TiN & Ti-MoS2/Ti double-cutting-surface coated cutting tool |
| 02/20/2013 | CN101988207B Electrode material for electrolysis, electrode for electrolysis, and method for producing same |
| 02/20/2013 | CN101545094B Rectangular magnetron with assistant edge magnets |
| 02/20/2013 | CN101272846B Method for the production of a reflective membrane, and membrane produced therewith |
| 02/20/2013 | CN101224648B Hard coating film for forming tool and forming tool |
| 02/19/2013 | US8377764 Manufacturing method for light emitting device |
| 02/19/2013 | US8377591 Anode material for secondary battery, anode for secondary battery and secondary battery therewith |
| 02/19/2013 | US8377506 Method of manufacturing a substrate structure |
| 02/19/2013 | US8377503 Method for real-time monitoring thickness chance of coating film |
| 02/19/2013 | US8377501 Coating and developing system control method of controlling coating and developing system |
| 02/19/2013 | US8377460 Method for modifying the wettability and/or other biocompatibility characteristics of a surface of a biological material by the application of gas cluster ion beam technology and biological materials made thereby |
| 02/19/2013 | US8377343 Optical function layers, in particular zinc-oxide sulfide layers, exhibiting variable dielectric responses |
| 02/19/2013 | US8377270 Plasma processing apparatus, magnetoresistive device manufacturing apparatus, magnetic thin film forming method, and film formation control program |
| 02/19/2013 | US8377269 Sputtering apparatus |
| 02/19/2013 | US8377265 Method of forming inorganic insulating layer and method of fabricating array substrate for display device using the same |
| 02/19/2013 | US8377210 Film forming apparatus |
| 02/14/2013 | WO2013023173A2 Sputtering systems for liquid target materials |
| 02/14/2013 | WO2013022097A1 Structure including thin primer film, and process for producing said structure |
| 02/14/2013 | WO2013022057A1 Transparent conductive material, substrate having transparent conductive layer, and method for producing substrate having transparent conductive layer |
| 02/14/2013 | WO2013021737A1 Zn-Sn-O TYPE OXIDE SINTERED BODY AND METHOD FOR PRODUCING SAME |
| 02/14/2013 | WO2013021632A1 Thin-film transistor |
| 02/14/2013 | WO2013021149A2 Methods for forming an organic layer on a substrate |
| 02/14/2013 | WO2013020589A1 Adjustable mask |
| 02/14/2013 | US20130040516 Transparent electrode based on combination of transparent conductive oxides, metals and oxides |
| 02/14/2013 | US20130040247 Liquid immersion member, method for manufacturing liquid immersion member, exposure apparatus, and device manufacturing method |
| 02/14/2013 | US20130040119 Coated article and method for making said article |
| 02/14/2013 | US20130037974 Liquid material vaporizer |
| 02/14/2013 | US20130037408 Indium Target And Manufacturing Method Thereof |
| 02/14/2013 | US20130037407 In-Line Metallizer Assemblies and Part-Coating Conveyor Systems Incorporating The Same |
| 02/14/2013 | US20130037406 Sputtering apparatus |
| 02/14/2013 | US20130037090 Capping Layers for Improved Crystallization |
| 02/14/2013 | DE102011110048A1 Coating support materials to produce composite, by unwinding support material from supply reel, thermally processing the material, cleaning surface of material and coating surface of material with nanoparticles reactive for matrix polymer |
| 02/14/2013 | DE102011109669A1 Position detector in a vacuum chamber comprising a device for directed transportation of substrates, comprises a carrier adjacent to at least one transmitter and at least one receiver, and on which the transmitter and receiver are mounted |
| 02/14/2013 | DE102011080898A1 Einglättende Schicht für metallische Werkstücke Einglättende layer for metal workpieces |
| 02/14/2013 | DE102011080810A1 Long term stable coating of substrates, comprises evaporating an evaporating material arranged in a crucible, using an electron beam, and depositing on the substrate in a coating window |
| 02/13/2013 | EP2557573A1 Transparent conductive zinc oxide film, process for production thereof, and use thereof |
| 02/13/2013 | EP2556954A1 Transparent conductive film, method for producing same, and electronic device using transparent conductive film |
| 02/13/2013 | CN202730229U Control device of nanometer grating deposition substrate location within vacuum container |
| 02/13/2013 | CN202730225U Coating clamp ring for special-shaped optical element |
| 02/13/2013 | CN202730224U Deposition equipment for conducting film of flexible thin-film solar cell |
| 02/13/2013 | CN202730223U Ion sputter coating device |
| 02/13/2013 | CN202730222U Cooling device of target cooling copper backboard of thin film sputtering equipment |
| 02/13/2013 | CN202730221U Aluminizing machine for lampshade |
| 02/13/2013 | CN102934253A Apparatus for manufacturing organic semiconductor |
| 02/13/2013 | CN102934175A Transparent conductive zinc oxide film, process for production thereof, and use thereof |
| 02/13/2013 | CN102933741A Sputtering target and process for production thereof |
| 02/13/2013 | CN102933740A Indium target and process for producing same |
| 02/13/2013 | CN102933739A Hot wire chemical vapor deposition (HWCVD) with carbide filaments |
| 02/13/2013 | CN102933738A Arc evaporation source having fast film-forming speed, film formation device and manufacturing method for coating film using the arc evaporation source |
| 02/13/2013 | CN102933737A Pvd hybrid method for depositing mixed crystal layers |