Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
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02/25/1986 | CA1201192A2 Apparatus for forming thin film heterojunction solar cells thereby |
02/18/1986 | US4571286 Process for selectively depositing a refractory metal layer on a graphite piece |
02/13/1986 | WO1986000937A1 Process for production of highly wear-resistant titanium coatings |
02/13/1986 | WO1986000831A1 Method for producing thin films of rare earth chalcogenides |
02/12/1986 | EP0171068A2 Method of forming ultrafine patterns |
02/12/1986 | EP0171063A2 Aromatic polyester films |
02/12/1986 | EP0170800A1 Heater assembly for molecular beam epitaxy furnace |
02/11/1986 | US4569746 Magnetron sputter device using the same pole piece for coupling separate confining magnetic fields to separate targets subject to separate discharges |
02/11/1986 | US4569745 Sputtering apparatus |
02/11/1986 | US4569743 Accurate dry electrodeposition; semiconductors |
02/11/1986 | US4569742 Reactively sputtered chrome silicon nitride resistors |
02/11/1986 | US4569592 Plasma monitor |
02/11/1986 | US4569307 Silicon melting and evaporation apparatus for high purity applications |
02/11/1986 | CA1200447A1 Primed surface and charge transfer media and process of making |
02/05/1986 | EP0170359A1 Multilayer coating |
02/04/1986 | US4568614 Steel article having a disordered silicon oxide coating thereon and method of preparing the coating |
02/04/1986 | US4568598 Semicrystalline sputter etched support coated with functional layer |
02/04/1986 | US4568413 Vapor-vacuum deposition followed by electrodeposition |
02/04/1986 | US4568396 Implanting carbon ions at two different energy levels and heating in vacuum |
01/30/1986 | WO1986000650A1 Method for the preparation of gold-coloured titanium nitride layers |
01/30/1986 | WO1986000649A1 Method for improving the colour effect of titanium nitride layers |
01/29/1986 | EP0169532A2 Magnet driving method and device for same |
01/29/1986 | CN85200343U Astronomical telescope with all-plastic lens for the use of popular science |
01/28/1986 | US4566177 Formation of electromigration resistant aluminum alloy conductors |
01/22/1986 | EP0169020A1 A process for ion implantation activation in a compound semiconductor crystal |
01/22/1986 | EP0168437A1 Wafer processing machine |
01/22/1986 | EP0168436A1 Wafer processing machine |
01/21/1986 | US4565741 Boron nitride film and process for preparing same |
01/21/1986 | US4565711 Method of and apparatus for the coating of quartz crucibles with protective layers |
01/21/1986 | US4565710 Process for producing carbide coatings |
01/21/1986 | US4565618 Apparatus for producing diamondlike carbon flakes |
01/21/1986 | US4565601 Method and apparatus for controlling sample temperature |
01/21/1986 | US4565158 Evaporator cell for vacuum deposition on substrates |
01/21/1986 | CA1199716A1 Low voltage operation of arc discharge devices |
01/15/1986 | EP0168143A2 Magnetron sputtering cathode assembly and magnet assembly therefor |
01/15/1986 | EP0167800A1 Hard metallic watch case having a wear-resistant coating |
01/14/1986 | US4564435 Target assembly for sputtering magnetic material |
01/10/1986 | CN85104006A Dieletric / alloy / dieletric trarsparent conducting film |
01/08/1986 | EP0167383A2 Apparatus for and a method of modifying the properties of a material |
01/08/1986 | EP0167360A2 Programmable ion beam patterning system |
01/08/1986 | EP0167255A2 High rate sputtering of exhaust oxygen sensor electrode |
01/08/1986 | EP0167213A2 Method of producing layers of ferrimagnetic garnet substituted by bismuth |
01/08/1986 | EP0167118A2 Oxygen-containing ferromagnetic amorphous alloy and method of preparing the same |
01/08/1986 | EP0166991A2 Method of controlling deposition amount distribution in a vacuum deposition plating |
01/08/1986 | EP0166960A2 Method of rapidly changing deposition amount in a continuous vacuum deposition process |
01/08/1986 | EP0090817B1 Thin films of compounds and alloy compounds of group iii and group v elements |
01/07/1986 | US4563610 Device for generating negative-ion beams by alkaline metal ion sputtering |
01/07/1986 | US4563400 Primer for metal films on nonmetallic substrates |
01/07/1986 | US4563262 Consumable cathode for electric-arc metal vaporizer |
01/07/1986 | CA1199140A1 Polypropylene resin film for aluminum deposition |
01/03/1986 | WO1986000092A1 Evaporator for vacuum deposition of films |
01/02/1986 | EP0166477A2 Method and system for producing a reactively sputtered conducting transparent metal oxide film onto a continuous web |
01/02/1986 | EP0166349A1 Surface treatment process |
01/02/1986 | EP0166256A2 Apparatus for coating nuclear fuel pellets with a burnable absorber |
01/02/1986 | EP0166119A1 Method for depositing material with nanometer dimensions |
12/31/1985 | US4562093 Process for the production of glass panes having a glare protection filter and apparatus for carrying out the process |
12/31/1985 | US4562089 Measuring direct current resistance at two different test currentsof known magnitudes |
12/31/1985 | US4561954 Sputtering, elastomeric mask |
12/31/1985 | US4561382 Vacuum vapor deposition gun assembly |
12/27/1985 | EP0165413A1 Process for the deposition of silicon compound optical layers by cathodic sputtering, and use of a formed silicon body as a target for this process |
12/24/1985 | US4560593 Deposition of metals on electrically conductive, polymeric carriers |
12/24/1985 | US4560577 Oxidation protection coatings for polymers |
12/24/1985 | US4560576 Vacuum, cleaning |
12/24/1985 | US4560462 Rotatable drum, enclosed pallet having screened parts, sputtering machine |
12/24/1985 | US4559901 Ion beam deposition apparatus |
12/20/1985 | CN85102057A Method and instruinents used in metal surface treatment by plasma |
12/19/1985 | WO1985005571A1 Device for detonation spraying |
12/18/1985 | EP0165104A1 Repair method by diffusion |
12/18/1985 | EP0164383A1 Support for producing abrasion-proof catalysts. |
12/17/1985 | US4559280 Metallized rare earth garnet and metal seal to same |
12/17/1985 | US4559125 Confinement ring surrounding target and covering permeable ring |
12/17/1985 | US4559121 Surrounding target with confinement ring having low secondary emission ratio |
12/17/1985 | US4558984 Workpiece handling apparatus |
12/17/1985 | CA1198085A1 Rapid rate reactive sputtering of metallic compounds |
12/17/1985 | CA1198084A1 Rapid rate reactive sputtering of a group ivb metal |
12/11/1985 | EP0164132A2 Vapour deposition apparatus |
12/11/1985 | EP0163830A2 Multi-layer integrated circuit substrates and method of manufacture |
12/10/1985 | US4558388 Substrate and substrate holder |
12/10/1985 | US4557981 Alloy of carbon, cobalt, chromium and tungsten in matrix with chromium and tungsten carbides |
12/10/1985 | US4557819 System for igniting and controlling a wafer processing plasma |
12/04/1985 | EP0163446A1 Apparatus for and method of controlling magnetron sputter device having separate confining magnetic fields to separate targets subject to separate discharges |
12/04/1985 | EP0163445A1 Magnetron sputter device having planar and concave targets |
12/04/1985 | EP0162842A1 Gas distribution system for sputtering cathodes |
12/03/1985 | US4556607 Surface coatings and subcoats |
12/03/1985 | US4556471 Mounting assembly for source plate |
12/03/1985 | CA1197493A1 High pressure, non-local thermal equilibrium arc plasma generating apparatus for deposition of coating upon substrates |
11/27/1985 | EP0162643A1 Sputter coating source having plural target rings |
11/27/1985 | EP0162642A1 Magnetron sputter device using the same pole piece for coupling separate confining magnetic field to separate targets subject to separate discharges |
11/26/1985 | US4555611 Method and apparatus for uniformly heating articles in a vacuum container |
11/26/1985 | CA1197088A1 Vapour deposition regulating apparatus |
11/21/1985 | EP0161928A2 Transfer plate rotation system |
11/21/1985 | EP0161927A2 Load lock pumping mechanism |
11/21/1985 | EP0161409A2 Multipiece fuze for a missile |
11/19/1985 | US4554217 Process for creating wear and corrosion resistant film for magnetic recording media |
11/19/1985 | US4553853 End point detector for a tin lead evaporator |
11/19/1985 | CA1196777A1 Chemical vapor deposition apparatus and process |
11/13/1985 | EP0161088A1 Apparatus for plasma-assisted deposition of thin films |
11/13/1985 | EP0161026A2 Formation of electromigration resistant aluminium alloy conductors |
11/12/1985 | US4553022 Effusion cell assembly |
11/12/1985 | US4552824 Electrophotographic photosensitive member and process for production thereof |