Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
02/1986
02/25/1986CA1201192A2 Apparatus for forming thin film heterojunction solar cells thereby
02/18/1986US4571286 Process for selectively depositing a refractory metal layer on a graphite piece
02/13/1986WO1986000937A1 Process for production of highly wear-resistant titanium coatings
02/13/1986WO1986000831A1 Method for producing thin films of rare earth chalcogenides
02/12/1986EP0171068A2 Method of forming ultrafine patterns
02/12/1986EP0171063A2 Aromatic polyester films
02/12/1986EP0170800A1 Heater assembly for molecular beam epitaxy furnace
02/11/1986US4569746 Magnetron sputter device using the same pole piece for coupling separate confining magnetic fields to separate targets subject to separate discharges
02/11/1986US4569745 Sputtering apparatus
02/11/1986US4569743 Accurate dry electrodeposition; semiconductors
02/11/1986US4569742 Reactively sputtered chrome silicon nitride resistors
02/11/1986US4569592 Plasma monitor
02/11/1986US4569307 Silicon melting and evaporation apparatus for high purity applications
02/11/1986CA1200447A1 Primed surface and charge transfer media and process of making
02/05/1986EP0170359A1 Multilayer coating
02/04/1986US4568614 Steel article having a disordered silicon oxide coating thereon and method of preparing the coating
02/04/1986US4568598 Semicrystalline sputter etched support coated with functional layer
02/04/1986US4568413 Vapor-vacuum deposition followed by electrodeposition
02/04/1986US4568396 Implanting carbon ions at two different energy levels and heating in vacuum
01/1986
01/30/1986WO1986000650A1 Method for the preparation of gold-coloured titanium nitride layers
01/30/1986WO1986000649A1 Method for improving the colour effect of titanium nitride layers
01/29/1986EP0169532A2 Magnet driving method and device for same
01/29/1986CN85200343U Astronomical telescope with all-plastic lens for the use of popular science
01/28/1986US4566177 Formation of electromigration resistant aluminum alloy conductors
01/22/1986EP0169020A1 A process for ion implantation activation in a compound semiconductor crystal
01/22/1986EP0168437A1 Wafer processing machine
01/22/1986EP0168436A1 Wafer processing machine
01/21/1986US4565741 Boron nitride film and process for preparing same
01/21/1986US4565711 Method of and apparatus for the coating of quartz crucibles with protective layers
01/21/1986US4565710 Process for producing carbide coatings
01/21/1986US4565618 Apparatus for producing diamondlike carbon flakes
01/21/1986US4565601 Method and apparatus for controlling sample temperature
01/21/1986US4565158 Evaporator cell for vacuum deposition on substrates
01/21/1986CA1199716A1 Low voltage operation of arc discharge devices
01/15/1986EP0168143A2 Magnetron sputtering cathode assembly and magnet assembly therefor
01/15/1986EP0167800A1 Hard metallic watch case having a wear-resistant coating
01/14/1986US4564435 Target assembly for sputtering magnetic material
01/10/1986CN85104006A Dieletric / alloy / dieletric trarsparent conducting film
01/08/1986EP0167383A2 Apparatus for and a method of modifying the properties of a material
01/08/1986EP0167360A2 Programmable ion beam patterning system
01/08/1986EP0167255A2 High rate sputtering of exhaust oxygen sensor electrode
01/08/1986EP0167213A2 Method of producing layers of ferrimagnetic garnet substituted by bismuth
01/08/1986EP0167118A2 Oxygen-containing ferromagnetic amorphous alloy and method of preparing the same
01/08/1986EP0166991A2 Method of controlling deposition amount distribution in a vacuum deposition plating
01/08/1986EP0166960A2 Method of rapidly changing deposition amount in a continuous vacuum deposition process
01/08/1986EP0090817B1 Thin films of compounds and alloy compounds of group iii and group v elements
01/07/1986US4563610 Device for generating negative-ion beams by alkaline metal ion sputtering
01/07/1986US4563400 Primer for metal films on nonmetallic substrates
01/07/1986US4563262 Consumable cathode for electric-arc metal vaporizer
01/07/1986CA1199140A1 Polypropylene resin film for aluminum deposition
01/03/1986WO1986000092A1 Evaporator for vacuum deposition of films
01/02/1986EP0166477A2 Method and system for producing a reactively sputtered conducting transparent metal oxide film onto a continuous web
01/02/1986EP0166349A1 Surface treatment process
01/02/1986EP0166256A2 Apparatus for coating nuclear fuel pellets with a burnable absorber
01/02/1986EP0166119A1 Method for depositing material with nanometer dimensions
12/1985
12/31/1985US4562093 Process for the production of glass panes having a glare protection filter and apparatus for carrying out the process
12/31/1985US4562089 Measuring direct current resistance at two different test currentsof known magnitudes
12/31/1985US4561954 Sputtering, elastomeric mask
12/31/1985US4561382 Vacuum vapor deposition gun assembly
12/27/1985EP0165413A1 Process for the deposition of silicon compound optical layers by cathodic sputtering, and use of a formed silicon body as a target for this process
12/24/1985US4560593 Deposition of metals on electrically conductive, polymeric carriers
12/24/1985US4560577 Oxidation protection coatings for polymers
12/24/1985US4560576 Vacuum, cleaning
12/24/1985US4560462 Rotatable drum, enclosed pallet having screened parts, sputtering machine
12/24/1985US4559901 Ion beam deposition apparatus
12/20/1985CN85102057A Method and instruinents used in metal surface treatment by plasma
12/19/1985WO1985005571A1 Device for detonation spraying
12/18/1985EP0165104A1 Repair method by diffusion
12/18/1985EP0164383A1 Support for producing abrasion-proof catalysts.
12/17/1985US4559280 Metallized rare earth garnet and metal seal to same
12/17/1985US4559125 Confinement ring surrounding target and covering permeable ring
12/17/1985US4559121 Surrounding target with confinement ring having low secondary emission ratio
12/17/1985US4558984 Workpiece handling apparatus
12/17/1985CA1198085A1 Rapid rate reactive sputtering of metallic compounds
12/17/1985CA1198084A1 Rapid rate reactive sputtering of a group ivb metal
12/11/1985EP0164132A2 Vapour deposition apparatus
12/11/1985EP0163830A2 Multi-layer integrated circuit substrates and method of manufacture
12/10/1985US4558388 Substrate and substrate holder
12/10/1985US4557981 Alloy of carbon, cobalt, chromium and tungsten in matrix with chromium and tungsten carbides
12/10/1985US4557819 System for igniting and controlling a wafer processing plasma
12/04/1985EP0163446A1 Apparatus for and method of controlling magnetron sputter device having separate confining magnetic fields to separate targets subject to separate discharges
12/04/1985EP0163445A1 Magnetron sputter device having planar and concave targets
12/04/1985EP0162842A1 Gas distribution system for sputtering cathodes
12/03/1985US4556607 Surface coatings and subcoats
12/03/1985US4556471 Mounting assembly for source plate
12/03/1985CA1197493A1 High pressure, non-local thermal equilibrium arc plasma generating apparatus for deposition of coating upon substrates
11/1985
11/27/1985EP0162643A1 Sputter coating source having plural target rings
11/27/1985EP0162642A1 Magnetron sputter device using the same pole piece for coupling separate confining magnetic field to separate targets subject to separate discharges
11/26/1985US4555611 Method and apparatus for uniformly heating articles in a vacuum container
11/26/1985CA1197088A1 Vapour deposition regulating apparatus
11/21/1985EP0161928A2 Transfer plate rotation system
11/21/1985EP0161927A2 Load lock pumping mechanism
11/21/1985EP0161409A2 Multipiece fuze for a missile
11/19/1985US4554217 Process for creating wear and corrosion resistant film for magnetic recording media
11/19/1985US4553853 End point detector for a tin lead evaporator
11/19/1985CA1196777A1 Chemical vapor deposition apparatus and process
11/13/1985EP0161088A1 Apparatus for plasma-assisted deposition of thin films
11/13/1985EP0161026A2 Formation of electromigration resistant aluminium alloy conductors
11/12/1985US4553022 Effusion cell assembly
11/12/1985US4552824 Electrophotographic photosensitive member and process for production thereof