| Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
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| 08/30/1983 | US4401052 Apparatus for continuous deposition by vacuum evaporation |
| 08/30/1983 | CA1152802A1 Electrophotographic member including a layer of amorphous silicon containing hydrogen |
| 08/24/1983 | EP0086728A2 Apparatus for the sealed introduction and/or withdrawal of bodies through at least one aperture of a treating chamber which may be under vacuum |
| 08/23/1983 | US4400407 Method for deposition of thin film alloys utilizing electron beam vaporization |
| 08/23/1983 | US4400255 Electrodeposition of electodes onto zirconia solid electrolyte isolated from reference electrode |
| 08/23/1983 | US4400254 Method for preparing transparent, electrically conducting indium oxide (In2 O3) films |
| 08/16/1983 | US4399016 Plasma device comprising an intermediate electrode out of contact with a high frequency electrode to induce electrostatic attraction |
| 08/16/1983 | US4399015 Method for fabricating an indium tin oxide film for a transparent electrode |
| 08/10/1983 | EP0085536A2 Primed surface and charge transfer media and process of making |
| 08/09/1983 | CA1223228B Oriented polypropylene film substrate and method of manufacture |
| 08/09/1983 | CA1151590A1 Oriented polypropylene film substrate and method of manufacture |
| 08/03/1983 | EP0084971A2 A method for reactive bias sputtering |
| 08/02/1983 | US4396640 Semiconductors, heat exchanging |
| 08/02/1983 | US4396479 Ion etching process with minimized redeposition |
| 07/27/1983 | EP0084287A1 Device for limiting and controlling the temperature of a target situated on a holder inside a vacuum enclosure and receiving an energy beam, and its use in thermal measures |
| 07/27/1983 | EP0084126A1 Equipment for feeding evaporators in vapour-deposition apparatuses |
| 07/26/1983 | US4395440 Vapor deposition of evaporated matter reacted with a gas |
| 07/26/1983 | US4395439 Method of manufacturing magnetic recording medium |
| 07/26/1983 | US4395437 Method of forming a secondary emissive coating on a dynode |
| 07/26/1983 | US4395323 Apparatus for improving a sputtering process |
| 07/26/1983 | US4395313 Etching and bonding oxygen to acrylonitrile-butadiene-styrene terpolymer or polyphenylene ethers, vacuum deposition, followed by electrodeposition of metal films |
| 07/26/1983 | CA1150668A1 Implantation of vaporized material on melted substrates |
| 07/19/1983 | US4394400 Method and apparatus for depositing coatings in a glow discharge |
| 07/19/1983 | US4394245 Electrode surface plate of soft magnetic material such as iron or an iron alloy |
| 07/19/1983 | US4394236 Magnetron cathode sputtering apparatus |
| 07/19/1983 | US4394210 Process for forming a lead film |
| 07/19/1983 | CA1150112A1 Vapour coating of particles dispersed by application of an electrostatic field |
| 07/12/1983 | US4393120 Plastic coated with golden evaporated film |
| 07/12/1983 | US4393091 Method of vacuum depositing a layer on a plastic film substrate |
| 07/12/1983 | US4392939 Magnetron cathode sputtering system |
| 07/12/1983 | US4392931 Reactive deposition method and apparatus |
| 07/12/1983 | US4392453 Molecular beam converters for vacuum coating systems |
| 07/12/1983 | US4392452 Evaporation device |
| 07/12/1983 | US4392451 Apparatus for forming thin-film heterojunction solar cells employing materials selected from the class of I-III-VI2 chalcopyrite compounds |
| 07/12/1983 | CA1149773A1 Control of the hydrogen bonding in reactively sputtered amorphous silicon |
| 07/06/1983 | EP0083020A2 Process for making multilayer integrated circuit substrate |
| 07/05/1983 | US4391697 High rate magnetron sputtering of high permeability materials |
| 07/05/1983 | US4391696 Method and apparatus for holding styli |
| 07/05/1983 | US4391034 Thermally compensated shadow mask |
| 06/29/1983 | EP0082654A1 Apparatus for and a method of coating a length of material |
| 06/29/1983 | EP0082588A2 Photolithographic elements for the production of metal images |
| 06/29/1983 | EP0082189A1 Masking portions of a substrate. |
| 06/28/1983 | US4390571 Vapor deposition; coating with a melted metal having a convex surface |
| 06/22/1983 | EP0082001A1 Apparatus for and a method of metallising a length of material |
| 06/22/1983 | EP0081785A2 Plasma monitor |
| 06/22/1983 | EP0081599A1 Process for making metallic leafing pigments |
| 06/21/1983 | US4389299 Sputtering device |
| 06/21/1983 | CA1148655A1 Magnetic recording medium and process for production thereof |
| 06/15/1983 | EP0081331A1 Vacuum sputtering apparatus |
| 06/15/1983 | EP0081284A1 Device and method for rolling up flexible material webs, particularly for metallising installations |
| 06/15/1983 | EP0081176A1 Apparatus for cathode sputtering of a metal |
| 06/14/1983 | US4388164 Method of coating the surface of an elastic body with a continuous layer |
| 06/14/1983 | US4388034 Processing apparatus comprising a cassette member temporarily swingable to vertically hold a plurality of substrates |
| 05/31/1983 | US4386116 Depositing chrome-copper-chrome, photoetching circuitry applying a polyimide, photoetching via holes to form interfaces |
| 05/31/1983 | US4386115 Process for the preparation of superconducting compound materials |
| 05/31/1983 | US4386113 Vapor deposition of ferromagnetic layer from container of magnesium oxide |
| 05/31/1983 | US4385979 Bonding means such as a silver-epoxy mixture |
| 05/31/1983 | US4385976 Solderable layer system, its use and method for manufacturing same |
| 05/31/1983 | US4385804 Mirror using transparent synthetic resin plate |
| 05/31/1983 | US4385645 Method for use in making a selectively vapor deposition coated tubular article, and product made thereby |
| 05/31/1983 | CA1147369A1 Contact-free sealing member |
| 05/25/1983 | EP0079437A2 Thin film capacitor |
| 05/24/1983 | US4385080 Method for evaporating large quantities of metals and semiconductors by electromagnetic levitation |
| 05/24/1983 | US4384933 High frequency excitation of target material |
| 05/24/1983 | US4384918 Method and apparatus for dry etching and electrostatic chucking device used therein |
| 05/24/1983 | US4384911 Method for depositing hard film on a substrate |
| 05/24/1983 | CA1146909A1 Method and apparatus for forming films from vapors using a contained plasma source |
| 05/17/1983 | CA1146348A1 Coating apparatus and method |
| 05/10/1983 | US4383178 System for driving rotary member in vacuum |
| 05/10/1983 | US4383003 Transfer lamination of copper thin sheets and films, method and product |
| 05/10/1983 | US4382975 Method for coating thin film alloy on a substrate utilizing inductive heating |
| 05/03/1983 | US4382110 Ferromagnetic material such as cobalt or a cobalt alloy |
| 05/03/1983 | US4382101 Method for increasing the peel strength of metal-clad polymers |
| 05/03/1983 | US4381894 Deposition monitor and control system |
| 05/03/1983 | US4381818 Porous film heat transfer |
| 04/28/1983 | WO1983001466A1 Thin films of compounds and alloy compounds of group iii and group v elements |
| 04/28/1983 | WO1983001418A1 Metallization of support members |
| 04/26/1983 | US4381453 System and method for deflecting and focusing a broad ion beam |
| 04/19/1983 | US4380212 Arrangement for uniformly coating surfaces of revolution by vapor deposition in a high vacuum |
| 04/19/1983 | US4380211 Vacuum evaporation system for deposition of thin films |
| 04/13/1983 | EP0076570A2 Method of making alloyed metal contact layers on integrated circuits |
| 04/12/1983 | US4379832 Method for making low barrier Schottky devices of the electron beam evaporation of reactive metals |
| 04/12/1983 | US4379743 Sputtering apparatus comprising control means for preventing impurity gases from entering a sputtering chamber |
| 04/05/1983 | US4379040 Method of and apparatus for control of reactive sputtering deposition |
| 03/31/1983 | WO1983001151A1 Semi-conductor material and process for its production |
| 03/31/1983 | WO1983001075A1 Plasma reactor and method therefor |
| 03/30/1983 | EP0075316A1 Coating composition and method |
| 03/29/1983 | US4378382 Method and apparatus for producing laminated capacitors |
| 03/29/1983 | US4378189 Wafer loading device |
| 03/22/1983 | US4377607 Alloys or intermetallics of metals with different vapor pressures |
| 03/22/1983 | US4377437 Device lithography by selective ion implantation |
| 03/16/1983 | EP0074322A2 Very hard chromium layer capable to simultaneously resist wear, deformation, fatigue of surfaces and corrosion |
| 03/16/1983 | EP0073949A2 Process for applying non metallized stripes by the vapour coating of a web of insulating material, and apparatus therefor |
| 03/16/1983 | EP0073924A2 Method for producing coatings of organic resins on substrates |
| 03/15/1983 | US4376688 Method for producing semiconductor films |
| 03/15/1983 | CA1143005A1 Rf sputtering apparatus including multi-network power supply |
| 03/09/1983 | EP0073643A1 Sputtering apparatus |
| 03/09/1983 | EP0073327A1 Method for the deposition of metals on electrically conductive, polymeric substrates, and use of the obtained materials |
| 03/09/1983 | EP0073312A2 Method of electron beam evaporating reactive metals onto semiconductors |
| 03/08/1983 | US4376025 Cylindrical cathode for magnetically-enhanced sputtering |