Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
02/1983
02/22/1983US4374722 Cathodic sputtering target including means for detecting target piercing
02/22/1983US4374717 Plasma polymerized interfacial coatings for improved adhesion of sputtered bright metal on plastic
02/17/1983WO1983000481A1 High hardness material
02/16/1983EP0071865A2 Glass body provided with an alkali diffusion-preventing silicon oxide layer
02/16/1983EP0020633B1 Method of coating a polycarbonate substrate with glass
02/15/1983US4374391 Device fabrication procedure
02/15/1983US4374162 Ejection of heated vapor into a vacuum; deposition on substrate; controlling ejection velocity to produce fine structures
02/15/1983US4373952 Containing titanium diboride, boron nitride, and tungsten
02/15/1983US4373470 Mask positioning carriage assembly
02/09/1983EP0070982A2 Sputtering system
02/08/1983US4372989 Process for producing coarse-grain crystalline/mono-crystalline metal and alloy films
02/08/1983US4372987 Vacuum deposited oxides of tantalum and aluminum
02/08/1983US4372986 Polyvinyl alcohol-clad shaped article of vinyl chloride resin
02/08/1983US4372985 Magnetic bubbles
02/08/1983US4372248 Apparatus for accurately registering a member and a substrate in an interdependent relationship
02/01/1983US4371565 Process for adhering an organic resin to a substrate by means of plasma polymerized phosphines
01/1983
01/26/1983EP0070715A1 Glow discharge method and apparatus and photoreceptor devices made therewith
01/26/1983EP0070682A2 Method of producing a semiconductor layer of amorphous silicon and a device including such a layer
01/26/1983EP0070574A1 Film forming method
01/25/1983US4370217 Target assembly comprising, for use in a magnetron-type sputtering device, a magnetic target plate and permanent magnet pieces
01/25/1983US4369876 Multi-layer coating apparatus, system and method
01/25/1983CA1140078A1 Method and apparatus for pretreating and depositing thin films on substrates
01/25/1983CA1140002A1 Vacuum deposition system and method
01/20/1983WO1983000208A1 Method for the manufacture of a reflecting metal surface, reflector obtained by said method and utilization thereof for a lighting projector
01/20/1983WO1983000104A1 Masking portions of a substrate
01/18/1983US4369225 Flexible lustrously metallized resinous articles and a process for manufacturing same
01/18/1983US4368689 Beam source for deposition of thin film alloys
01/12/1983EP0069635A1 Process for manufacturing a metallic reflecting surface, reflector obtained according to this process, and its use in a light projector
01/12/1983EP0020615B1 Glass coated polycarbonate articles
01/11/1983US4367579 Method of connecting a crystal to a crystal holder
01/05/1983EP0068843A2 Method of producing a conductor in a desired pattern on a semiconductor substrate
01/05/1983EP0068651A2 Method of sputtering an exhaust electrode on to an exhaust gas oxygen sensor
01/05/1983EP0068087A1 Boatless evaporation method
01/04/1983CA1138795A1 Escape slide and life raft
12/1982
12/22/1982EP0067705A2 Wafer transport system
12/22/1982EP0067432A1 Arrangement for measuring the electric resistance and the temperature of thin metallic conducting films deposited by vapour deposition or sputtering on substrates during the manufacture of the films
12/21/1982US4365013 Amorphous silicon doped with hydrogen
12/21/1982US4364995 Metal/metal oxide coatings
12/21/1982US4364969 Coating with metal, bombardment with ions
12/21/1982US4364792 Radiation with high energy heavy ions
12/08/1982EP0066288A1 Method for ion-implanting metal elements
12/08/1982EP0066042A2 Methods of processing a silicon substrate for the formation of an integrated circuit therein
12/07/1982US4362611 Quadrupole R.F. sputtering system having an anode/cathode shield and a floating target shield
11/1982
11/30/1982US4361604 Adhesive alloy
11/30/1982US4361114 Method and apparatus for forming thin film oxide layers using reactive evaporation techniques
11/30/1982CA1136402A1 Reactant delivery system
11/25/1982EP0051639A4 Implantation of vaporized material on melted substrates.
11/17/1982EP0064760A1 Hydrogen-containing silicic substance, process for producing the same, and use thereof
11/16/1982CA1135601A1 Method for forming a crystalline film for a paramagnetic sodium thallium type intermetallic compound
11/10/1982EP0064288A1 Method and apparatus for the production and utilization of activated molecular beams
11/09/1982US4358472 Automatic, vapor deposition
11/09/1982CA1135044A1 Amorphous magnetic film
11/09/1982CA1135035A1 Aging treatment for exhaust gas oxygen sensor
11/03/1982EP0063989A1 Process for making luminescent glass layers, application to the making of devices provided with these layers and to the making of photoscintillators
11/03/1982EP0063716A2 Method of manufacturing a semiconductor-layer solar cell
11/02/1982US4357395 Transfer lamination of vapor deposited foils, method and product
11/02/1982CA1134902A1 Sputtered electrodes
11/02/1982CA1134776A1 Process for producing adhesive metallic coatings on nonconductors particularly on plastics
10/1982
10/27/1982EP0063493A2 Ion-processing method and apparatus and a product made thereby
10/26/1982US4356210 Method for forming a protecting film on side walls of a semiconductor device
10/26/1982US4356073 Magnetron cathode sputtering apparatus
10/19/1982US4354910 Method and apparatus for the partial coating of a substrate by cathode sputtering
10/19/1982US4354909 Cluster ion beam deposition, cobalt, cobalt alloy, chromium dioxide
10/19/1982US4354908 Process for the production of magnetic recording members
10/19/1982US4354686 Contact-free sealing member
10/19/1982US4354456 Apparatus for use in making a selectively vapor deposition coated tubular article
10/13/1982EP0062550A1 Process for the thermochemical treatments of metals by ion bombardment
10/12/1982US4353938 Vapor deposition within evacuated rotating drum
10/12/1982US4353788 RF Sputtering for preparing substantially pure amorphous silicon monohydride
10/12/1982CA1133424A1 Cathode for sputtering
10/12/1982CA1133420A1 Method for producing separating nozzle elements used for separating gaseous or vaporous mixtures
10/06/1982EP0061906A1 A method of, and an apparatus for, processing a workpiece with energetic particles and a product processed thereby
10/06/1982EP0061887A1 A method of producing a resistance element for a resistance thermometer
10/05/1982US4352835 Masking portions of a substrate
10/05/1982US4352834 Method for fabricating a semiconductor device
10/05/1982US4352698 Method of improving the wear resistance of metals
10/05/1982CA1132857A1 Method of selectively depositing metal on a ceramic substrate with a metallurgy pattern
09/1982
09/28/1982US4351855 Noncrucible method of and apparatus for the vapor deposition of material upon a substrate using voltaic arc in vacuum
09/28/1982US4351714 Sputter-etching device
09/28/1982US4351712 Low energy ion beam oxidation process
09/22/1982EP0060626A2 Isolation valve
09/16/1982WO1982003036A1 Coating for metal-cutting tool
09/14/1982US4349425 Transparent conductive films and methods of producing same
09/14/1982US4348981 Vertical type vapor-phase growth apparatus
09/14/1982US4348886 Vacuum deposition of aluminum on an integrated circuit, measurement of resistivity or resistance
09/14/1982CA1131438A1 Method and alloying elements for producing high coercive force and high squareness magnetic film for magnetic recording medium
09/02/1982WO1982002906A1 Consumable cathode for electric-arc evaporator of metal
08/1982
08/31/1982US4346669 Vacuum chamber seals
08/25/1982EP0058560A2 Sputtering apparatus
08/25/1982EP0058543A1 Photoresponsive amorphous semiconductor alloys
08/24/1982US4346123 Evaporation of titanium, zirconium or hafnium in reactive atmosphe
08/24/1982US4345985 Method of producing solid electrolyte oxygen-sensing element of laminated structure
08/24/1982CA1130476A1 Pretreatment of substrates prior to thin film deposition
08/19/1982WO1982002725A1 Magnetron cathode sputtering apparatus
08/19/1982WO1982002687A1 Metal/metal oxide coatings
08/17/1982US4345005 Coextrusion of polypropylene and ethylene-propylene copolymer, subjecting a surface to corona discharge then coating with aluminum, copper, silver or chromium
08/17/1982US4345000 Transparent electrically conductive film
08/17/1982US4344998 Peelable film, lacquer release agent, metal layer and substrate; lamination; packaging
08/17/1982US4344996 Surface texturing of fluoropolymers
08/17/1982US4344988 Method for forming patterned coating