Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
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03/24/1987 | CA1219549A1 Cutting tool and method of manufacture thereof |
03/24/1987 | CA1219548A1 Stainless steel primer for sputtered films |
03/24/1987 | CA1219547A1 Apparatus for and method of continuously depositing a highly conductive, highly transmissive film |
03/18/1987 | EP0214827A2 Surface-metallized, moulded resin article |
03/18/1987 | EP0214515A2 Method and apparatus for forming metal silicide |
03/18/1987 | CN85106536A Method for forming a platinum resistance thermometer |
03/17/1987 | US4650700 Vapor deposition of epoxide to improve bondability |
03/17/1987 | US4650557 Substoichiometric indium-tin oxide |
03/17/1987 | US4650539 Manufacture of cadmium mercury telluride |
03/17/1987 | US4650064 Substrate rotation method and apparatus |
03/17/1987 | US4649860 Vacuum evaporation coating equipment |
03/17/1987 | CA1219180A1 Method of providing a metal layer on a substrate |
03/11/1987 | EP0213922A2 Planar magnetron sputtering device with combined circumferential and radial movement of magnetic fields |
03/11/1987 | EP0213716A2 Method and apparatus for removing short-circuiting deposits from high-voltage cathodes in a sputtering chamber |
03/11/1987 | EP0213556A2 Apparatus for the continuous evaporation of inorganic compounds using a photon-producing thermal-radiation source |
03/11/1987 | EP0213191A1 Thin-film storage disk and method |
03/11/1987 | CN86105020A Arc ignition device |
03/10/1987 | US4649024 Method for forming evaporated pnictide and alkali metal polypnictide films |
03/10/1987 | US4648952 Nitriding |
03/10/1987 | US4648347 Vacuum depositing apparatus |
03/04/1987 | EP0212712A1 Process for manufacturing seamless hollow bodies, hollow bodies obtained by this process and apparatus used in these hollow spheres |
03/04/1987 | EP0211939A1 Process of manufacturing seal members having a low friction coefficient |
03/04/1987 | EP0211938A1 System and method for depositing plural thin film layers on a substrate. |
03/03/1987 | US4647548 Targets for cathode sputtering |
03/03/1987 | US4647361 Plates, electrodes, semiconductors, heaters |
03/03/1987 | US4647266 Wafer coating system |
03/03/1987 | US4646429 Method of making magnetic head |
03/03/1987 | US4646424 Liquid crystal display devices |
02/26/1987 | DE3530087A1 Appliance for high-capacity cathode sputtering |
02/26/1987 | DE3530074A1 Appliance for producing a plurality of successive layers by high-capacity cathode sputtering |
02/25/1987 | EP0211557A2 Metal-ceramics jointed articles |
02/25/1987 | EP0211529A1 Method for forming CuInSe2 films |
02/25/1987 | EP0211413A2 Arc ignition device |
02/25/1987 | EP0211412A2 Planar magnetron sputtering apparatus and its magnetic source |
02/25/1987 | EP0211370A2 Deposition and hardening of titanium gate electrode material for use in inverted thin film field effect transistors |
02/25/1987 | EP0211057A1 Sputtering installation for reactive coating of a substrate with hard materials. |
02/24/1987 | US4646282 Stylus for capacity change detection type disc system |
02/24/1987 | US4645895 Method and apparatus for surface-treating workpieces |
02/24/1987 | US4645715 Oxide, boride, carbide or nitride of one or more transition metals |
02/24/1987 | US4645690 Method of manufacturing a magnetic media |
02/24/1987 | US4645685 Method for producing an optical recording medium by a chalcogenide suboxide |
02/17/1987 | US4643952 Coating film by ion plating |
02/17/1987 | US4643915 Process for producing magnetic recording medium |
02/17/1987 | US4643914 Process and apparatus for the growth of films of silicides of refractory metals and films obtained by this process |
02/17/1987 | US4643912 Method for forming a metal layer with pattern on a substrate |
02/17/1987 | US4643799 Method of dry etching |
02/17/1987 | US4643629 Automatic loader |
02/17/1987 | US4643627 Vacuum transfer device |
02/17/1987 | US4643131 Combined continuous plating apparatus for hot-dip plating and vacuum deposition plating |
02/17/1987 | US4643128 Multiple holder for substrates to be treated |
02/12/1987 | WO1987000966A1 Control of uniformity of growing alloy film |
02/12/1987 | EP0174977A4 Controlled vacuum arc material deposition, method and apparatus. |
02/12/1987 | DE3620908A1 Target plate for cathode sputtering |
02/12/1987 | DE3527948A1 Process for the production of tools with coated flute, such as drills, milling tools or the like |
02/10/1987 | US4641450 Tube having strain-hardened inside coating |
02/10/1987 | CA1217872A Distributed arbitration for multiple processors |
02/05/1987 | DE3527969A1 Method for fabricating printed-circuit boards |
02/04/1987 | EP0210858A2 Reactive ion etching deposition apparatus and method of using it |
02/04/1987 | EP0210724A1 Methods of depositing germanium carbide |
02/04/1987 | EP0210473A2 Sputtering cathode according to the magnetron principle |
02/04/1987 | CN85104662A Process and uses of plating hardfilm for optical plastics lens |
02/03/1987 | US4641002 Titanium and zirconium nitride |
02/03/1987 | US4640869 Multilayer vapor deposition wear resistant protective coating |
02/03/1987 | US4640756 Method of making a piezoelectric shear wave resonator |
02/03/1987 | US4640755 Method for producing magnetic medium |
02/03/1987 | CA1217532A1 Ion beam machining device |
01/29/1987 | DE3541911A1 Process for coating micro-indentations |
01/28/1987 | EP0209972A1 Methods of depositing germanium hydrogen carbide |
01/28/1987 | EP0209925A1 Method of improving wear resistance of titanium bodies |
01/28/1987 | CN85105634A Combined magnetic-controlled sputter target and its plating method |
01/27/1987 | US4639377 Thin film formation technique and equipment |
01/27/1987 | CA1217095A1 Method of making oxide films |
01/22/1987 | DE3524799A1 Process for preparing a treated surface layer, and molecular sieve membrane prepared according to this process |
01/21/1987 | EP0209257A1 Ion implantation |
01/21/1987 | EP0208851A1 Fabricating a semiconductor device by means of molecular beam epitaxy |
01/20/1987 | US4637869 Dual ion beam deposition of amorphous semiconductor films |
01/20/1987 | US4637853 Hollow cathode enhanced plasma for high rate reactive ion etching and deposition |
01/20/1987 | US4637342 Vacuum processing apparatus |
01/20/1987 | CA1216821A1 Transparent, heat reflective, metal oxide films |
01/15/1987 | WO1987000208A1 Device for making metallized plastic films with clearly defined non-metallized areas |
01/14/1987 | EP0208487A2 Coating improvements |
01/14/1987 | CN85105267A Ion-beam treatment method of thermocompression forming steel die surface |
01/13/1987 | US4636403 Method of repairing a defective photomask |
01/13/1987 | US4636285 Method of manufacturing wear resistant sliding member |
01/13/1987 | US4635586 Setup for producing metallic coatings |
01/08/1987 | DE3614398A1 Arrangement for the treatment of workpieces using an evacuatable chamber |
01/07/1987 | EP0207801A2 Cathode/ground shield arrangement in a target for a sputter coating apparatus |
01/07/1987 | EP0207768A2 Coating improvements |
01/07/1987 | EP0207767A2 Pulsed plasma apparatus and process |
01/07/1987 | EP0207646A1 Dual ion beam deposition of dense films |
01/07/1987 | CN86104429A Improved cathode/ground shield arrangement in a sputter coating apparatus target |
01/07/1987 | CN85104968A Glow discharge decomposing device |
01/07/1987 | CN85104959A Body with superhard coating |
01/06/1987 | US4634600 Surface treatment process |
01/06/1987 | US4634512 Disk and plug |
01/06/1987 | US4633810 Apparatus for accurately registering a first member and a second member in an interdependent relationship |
01/06/1987 | CA1216252A1 Coating application method |
01/06/1987 | CA1216133A1 Compositionally varied materials and method for synthesizing the materials |
01/02/1987 | DE3613801A1 Arrangement for cooling surfaces |
12/31/1986 | CN85105151A Apparatus for coating nuclear pellets with a burnable absorber |