Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
03/1987
03/24/1987CA1219549A1 Cutting tool and method of manufacture thereof
03/24/1987CA1219548A1 Stainless steel primer for sputtered films
03/24/1987CA1219547A1 Apparatus for and method of continuously depositing a highly conductive, highly transmissive film
03/18/1987EP0214827A2 Surface-metallized, moulded resin article
03/18/1987EP0214515A2 Method and apparatus for forming metal silicide
03/18/1987CN85106536A Method for forming a platinum resistance thermometer
03/17/1987US4650700 Vapor deposition of epoxide to improve bondability
03/17/1987US4650557 Substoichiometric indium-tin oxide
03/17/1987US4650539 Manufacture of cadmium mercury telluride
03/17/1987US4650064 Substrate rotation method and apparatus
03/17/1987US4649860 Vacuum evaporation coating equipment
03/17/1987CA1219180A1 Method of providing a metal layer on a substrate
03/11/1987EP0213922A2 Planar magnetron sputtering device with combined circumferential and radial movement of magnetic fields
03/11/1987EP0213716A2 Method and apparatus for removing short-circuiting deposits from high-voltage cathodes in a sputtering chamber
03/11/1987EP0213556A2 Apparatus for the continuous evaporation of inorganic compounds using a photon-producing thermal-radiation source
03/11/1987EP0213191A1 Thin-film storage disk and method
03/11/1987CN86105020A Arc ignition device
03/10/1987US4649024 Method for forming evaporated pnictide and alkali metal polypnictide films
03/10/1987US4648952 Nitriding
03/10/1987US4648347 Vacuum depositing apparatus
03/04/1987EP0212712A1 Process for manufacturing seamless hollow bodies, hollow bodies obtained by this process and apparatus used in these hollow spheres
03/04/1987EP0211939A1 Process of manufacturing seal members having a low friction coefficient
03/04/1987EP0211938A1 System and method for depositing plural thin film layers on a substrate.
03/03/1987US4647548 Targets for cathode sputtering
03/03/1987US4647361 Plates, electrodes, semiconductors, heaters
03/03/1987US4647266 Wafer coating system
03/03/1987US4646429 Method of making magnetic head
03/03/1987US4646424 Liquid crystal display devices
02/1987
02/26/1987DE3530087A1 Appliance for high-capacity cathode sputtering
02/26/1987DE3530074A1 Appliance for producing a plurality of successive layers by high-capacity cathode sputtering
02/25/1987EP0211557A2 Metal-ceramics jointed articles
02/25/1987EP0211529A1 Method for forming CuInSe2 films
02/25/1987EP0211413A2 Arc ignition device
02/25/1987EP0211412A2 Planar magnetron sputtering apparatus and its magnetic source
02/25/1987EP0211370A2 Deposition and hardening of titanium gate electrode material for use in inverted thin film field effect transistors
02/25/1987EP0211057A1 Sputtering installation for reactive coating of a substrate with hard materials.
02/24/1987US4646282 Stylus for capacity change detection type disc system
02/24/1987US4645895 Method and apparatus for surface-treating workpieces
02/24/1987US4645715 Oxide, boride, carbide or nitride of one or more transition metals
02/24/1987US4645690 Method of manufacturing a magnetic media
02/24/1987US4645685 Method for producing an optical recording medium by a chalcogenide suboxide
02/17/1987US4643952 Coating film by ion plating
02/17/1987US4643915 Process for producing magnetic recording medium
02/17/1987US4643914 Process and apparatus for the growth of films of silicides of refractory metals and films obtained by this process
02/17/1987US4643912 Method for forming a metal layer with pattern on a substrate
02/17/1987US4643799 Method of dry etching
02/17/1987US4643629 Automatic loader
02/17/1987US4643627 Vacuum transfer device
02/17/1987US4643131 Combined continuous plating apparatus for hot-dip plating and vacuum deposition plating
02/17/1987US4643128 Multiple holder for substrates to be treated
02/12/1987WO1987000966A1 Control of uniformity of growing alloy film
02/12/1987EP0174977A4 Controlled vacuum arc material deposition, method and apparatus.
02/12/1987DE3620908A1 Target plate for cathode sputtering
02/12/1987DE3527948A1 Process for the production of tools with coated flute, such as drills, milling tools or the like
02/10/1987US4641450 Tube having strain-hardened inside coating
02/10/1987CA1217872A Distributed arbitration for multiple processors
02/05/1987DE3527969A1 Method for fabricating printed-circuit boards
02/04/1987EP0210858A2 Reactive ion etching deposition apparatus and method of using it
02/04/1987EP0210724A1 Methods of depositing germanium carbide
02/04/1987EP0210473A2 Sputtering cathode according to the magnetron principle
02/04/1987CN85104662A Process and uses of plating hardfilm for optical plastics lens
02/03/1987US4641002 Titanium and zirconium nitride
02/03/1987US4640869 Multilayer vapor deposition wear resistant protective coating
02/03/1987US4640756 Method of making a piezoelectric shear wave resonator
02/03/1987US4640755 Method for producing magnetic medium
02/03/1987CA1217532A1 Ion beam machining device
01/1987
01/29/1987DE3541911A1 Process for coating micro-indentations
01/28/1987EP0209972A1 Methods of depositing germanium hydrogen carbide
01/28/1987EP0209925A1 Method of improving wear resistance of titanium bodies
01/28/1987CN85105634A Combined magnetic-controlled sputter target and its plating method
01/27/1987US4639377 Thin film formation technique and equipment
01/27/1987CA1217095A1 Method of making oxide films
01/22/1987DE3524799A1 Process for preparing a treated surface layer, and molecular sieve membrane prepared according to this process
01/21/1987EP0209257A1 Ion implantation
01/21/1987EP0208851A1 Fabricating a semiconductor device by means of molecular beam epitaxy
01/20/1987US4637869 Dual ion beam deposition of amorphous semiconductor films
01/20/1987US4637853 Hollow cathode enhanced plasma for high rate reactive ion etching and deposition
01/20/1987US4637342 Vacuum processing apparatus
01/20/1987CA1216821A1 Transparent, heat reflective, metal oxide films
01/15/1987WO1987000208A1 Device for making metallized plastic films with clearly defined non-metallized areas
01/14/1987EP0208487A2 Coating improvements
01/14/1987CN85105267A Ion-beam treatment method of thermocompression forming steel die surface
01/13/1987US4636403 Method of repairing a defective photomask
01/13/1987US4636285 Method of manufacturing wear resistant sliding member
01/13/1987US4635586 Setup for producing metallic coatings
01/08/1987DE3614398A1 Arrangement for the treatment of workpieces using an evacuatable chamber
01/07/1987EP0207801A2 Cathode/ground shield arrangement in a target for a sputter coating apparatus
01/07/1987EP0207768A2 Coating improvements
01/07/1987EP0207767A2 Pulsed plasma apparatus and process
01/07/1987EP0207646A1 Dual ion beam deposition of dense films
01/07/1987CN86104429A Improved cathode/ground shield arrangement in a sputter coating apparatus target
01/07/1987CN85104968A Glow discharge decomposing device
01/07/1987CN85104959A Body with superhard coating
01/06/1987US4634600 Surface treatment process
01/06/1987US4634512 Disk and plug
01/06/1987US4633810 Apparatus for accurately registering a first member and a second member in an interdependent relationship
01/06/1987CA1216252A1 Coating application method
01/06/1987CA1216133A1 Compositionally varied materials and method for synthesizing the materials
01/02/1987DE3613801A1 Arrangement for cooling surfaces
12/1986
12/31/1986CN85105151A Apparatus for coating nuclear pellets with a burnable absorber