Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
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12/20/1983 | CA1159161A1 Method and apparatus for conducting heat to or from an article being treated under vacuum |
12/13/1983 | US4420386 Vacuum deposition |
12/13/1983 | US4420385 Wear resistant dielectric coatings |
12/07/1983 | EP0095879A2 Apparatus and method for working surfaces with a low energy high intensity ion beam |
12/06/1983 | US4419416 Turbines |
12/06/1983 | US4419380 Method for ion-aided coating on electrically insulating substrates |
12/06/1983 | US4419379 Oscillation frequency |
12/06/1983 | US4419202 Metal coatings |
12/06/1983 | US4418646 Load lock valve |
12/06/1983 | US4418473 Vapor deposition of alumina |
12/06/1983 | CA1158075A1 Mcraly type coating alloy |
11/30/1983 | EP0095384A2 Vacuum deposition apparatus |
11/30/1983 | EP0095369A2 Air lock vacuum pumping methods and apparatus |
11/30/1983 | EP0095367A2 Rapid pumpdown for high vacuum processing |
11/30/1983 | EP0095366A2 Compact plug connectable ion source |
11/30/1983 | EP0095211A2 Magnetron cathode sputtering system |
11/29/1983 | US4417968 Magnetron cathode sputtering apparatus |
11/29/1983 | CA1157806A1 Cubic boron nitride preparation |
11/22/1983 | US4416952 Passivation, dielectrics, optical absorbers |
11/22/1983 | US4416760 Apparatus for asymmetrically contouring the thickness of sputter coated layers |
11/22/1983 | US4416759 Sputter system incorporating an improved blocking shield for contouring the thickness of sputter coated layers |
11/22/1983 | US4416755 Apparatus and method for producing semiconducting films |
11/22/1983 | US4416217 Apparatus for forming an inhomogeneous optical layer |
11/22/1983 | US4416216 Apparatus for forming an inhomogeneous optical layer |
11/22/1983 | CA1157363A1 Metallised composite structure and a method of preparing same |
11/16/1983 | EP0093838A2 Perpendicular magnetic recording medium and method for producing the same |
11/15/1983 | US4415602 Reactive plating method and product |
11/15/1983 | US4415427 Thin film deposition by sputtering |
11/15/1983 | US4415421 Process for manufacturing ornamental parts and ion plating apparatus to be used therefor |
11/15/1983 | US4415420 Cubic boron nitride preparation |
11/15/1983 | CA1156968A1 Deposited films with improved microstructures and methods for making |
11/09/1983 | EP0093706A1 Tool and method for its production |
11/09/1983 | EP0093412A1 Magnetron sputtering apparatusand a method for forming a magnetic thinfilm on the surface of a substrate |
11/09/1983 | EP0093246A1 Process for adhering a metal on the surface of an insulator |
11/08/1983 | US4414249 Method for producing metallic articles having durable ceramic thermal barrier coatings |
11/08/1983 | US4414087 Magnetically-assisted sputtering method for producing vertical recording media |
11/08/1983 | US4414086 Magnetic targets for use in sputter coating apparatus |
11/08/1983 | US4414085 Sputtering, carbon |
11/08/1983 | CA1156603A1 Low energy ion beam oxidation process |
11/01/1983 | US4413302 Structural member made from a metallic material having an upper surface exposed to the danger of electric charge building-up thereon and the use of such structural member |
11/01/1983 | US4412906 Decreasing chamber gas pressure from target region to substrate holder region |
11/01/1983 | US4412905 Vacuum deposition apparatus |
11/01/1983 | US4412901 Method for the manufacture of solid electrolyte layers for galvanic cells |
11/01/1983 | US4412899 Cubic boron nitride preparation utilizing nitrogen gas |
11/01/1983 | US4412771 Sample transport system |
11/01/1983 | US4412508 Nozzle beam source for vapor deposition |
11/01/1983 | US4412507 Magnetic recording medium manufacturing device |
11/01/1983 | US4412504 Device for holding substrate wafers |
11/01/1983 | CA1156179A1 Method for surface modification of synthetic, artificial and natural polymers and polymer compositions using metals, non-metals and gases |
10/26/1983 | EP0092452A1 Coating for photothermal conversion |
10/26/1983 | EP0092346A1 Method and apparatus for heating a semiconductor substrate under reduced pressure |
10/26/1983 | EP0091942A1 Metallization of support members |
10/25/1983 | US4411763 Sputtering apparatus |
10/25/1983 | US4411733 SPER Device for material working |
10/25/1983 | CA1155798A1 Reactive deposition method and apparatus |
10/25/1983 | CA1155797A1 Method of transfer for optical recording track |
10/19/1983 | EP0091734A1 Improvements in or relating to the bulk production of alloys by deposition from the vapour phase and apparatus therefor |
10/18/1983 | US4410408 Method of preparing zinc oxide film |
10/18/1983 | US4410407 Sputtering apparatus and methods |
10/18/1983 | US4410406 Cobalt-nickel-phosphorus alloy |
10/12/1983 | EP0091222A2 Process for the diffusion bonding of aluminium based materials |
10/12/1983 | EP0090817A1 Thin films of compounds and alloy compounds of group iii and group v elements. |
10/11/1983 | US4409087 Wafer detection circuitry for high vacuum use |
10/11/1983 | US4408563 Apparatus for regulating the evaporation rate of oxidizable substances in reactive vacuum deposition |
10/05/1983 | EP0090613A2 Improvements in methods of making layered electrical devices |
10/05/1983 | EP0090461A2 Magazine and disc holders for supporting discs in the magazine |
10/05/1983 | EP0090081A1 Process for depositing films on both sides of a plurality of thin substrates |
10/04/1983 | US4408254 Noble gas doped amorphous titanate dielectric separator |
10/04/1983 | US4407894 Flexible magnetic tape |
10/04/1983 | US4407871 Corrosion resistant |
10/04/1983 | US4407713 Cylindrical magnetron sputtering cathode and apparatus |
10/04/1983 | US4407712 Hollow cathode discharge source of metal vapor |
10/04/1983 | US4407709 Method and apparatus for forming oxide coating by reactive sputtering technique |
10/04/1983 | US4407685 Metallized film transfer process |
09/27/1983 | US4406252 Inductive heating arrangement for evaporating thin film alloy onto a substrate |
09/26/1983 | EP0051635A4 Sputter target and glow discharge coating apparatus. |
09/20/1983 | US4405989 Spectral monitoring device for both plasma etching and sputtering |
09/20/1983 | US4405702 Electrophotographic image-forming member with ladder-type silicon resin layer |
09/20/1983 | US4405678 Organic material, abrasion resistant |
09/20/1983 | US4405660 Method for producing metallic articles having durable ceramic thermal barrier coatings |
09/20/1983 | US4405659 Multilayer, vapor deposition of metal-chromium-aluminum-yttrium alloy, then alumina, then ceramic |
09/20/1983 | US4405658 Stabilization of inert gas pressure |
09/20/1983 | US4405436 Magnetic pole shields and target of same ferromagnetic material |
09/20/1983 | US4405435 Conveyor, sputtering |
09/14/1983 | EP0088463A1 Magnetron cathode sputtering system |
09/14/1983 | EP0088074A1 Plasma reactor and method therefor |
09/13/1983 | US4404263 Substrate with facing which is metal, metal oxide and plastic matrix antifriction substance sputtered by electrical discharge |
09/13/1983 | US4404235 Exposure to gaseous tungsten fluoride and hydrogen to form discontinuous tungsten islands |
09/13/1983 | US4404233 Ion implanting method |
09/13/1983 | CA1153733A1 Magnetically enhanced sputtering device including means for sputtering magnetically permeable targets |
09/07/1983 | EP0087559A1 Thin-film permanent magnet |
09/06/1983 | US4403014 Group eight metal with group four nitrides, carbides, or borides |
09/06/1983 | US4403002 Vacuum deposition of magnetic layers on moving flexible tape |
09/06/1983 | US4402994 Carbides, nitrides, and carbonitrides of titanium, zirconium and hafnium |
08/31/1983 | EP0087309A1 Protected vapor-deposited metal layers |
08/31/1983 | EP0086930A2 Process for producing thin layers on substrates by cathodic sputtering |
08/30/1983 | US4401719 Highly hard material coated articles |
08/30/1983 | US4401697 In situ formation of alumina between alloy and ceramic layers |
08/30/1983 | US4401546 Ferromagnetic high speed sputtering apparatus |
08/30/1983 | US4401053 Coating fixture |