Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
12/1983
12/20/1983CA1159161A1 Method and apparatus for conducting heat to or from an article being treated under vacuum
12/13/1983US4420386 Vacuum deposition
12/13/1983US4420385 Wear resistant dielectric coatings
12/07/1983EP0095879A2 Apparatus and method for working surfaces with a low energy high intensity ion beam
12/06/1983US4419416 Turbines
12/06/1983US4419380 Method for ion-aided coating on electrically insulating substrates
12/06/1983US4419379 Oscillation frequency
12/06/1983US4419202 Metal coatings
12/06/1983US4418646 Load lock valve
12/06/1983US4418473 Vapor deposition of alumina
12/06/1983CA1158075A1 Mcraly type coating alloy
11/1983
11/30/1983EP0095384A2 Vacuum deposition apparatus
11/30/1983EP0095369A2 Air lock vacuum pumping methods and apparatus
11/30/1983EP0095367A2 Rapid pumpdown for high vacuum processing
11/30/1983EP0095366A2 Compact plug connectable ion source
11/30/1983EP0095211A2 Magnetron cathode sputtering system
11/29/1983US4417968 Magnetron cathode sputtering apparatus
11/29/1983CA1157806A1 Cubic boron nitride preparation
11/22/1983US4416952 Passivation, dielectrics, optical absorbers
11/22/1983US4416760 Apparatus for asymmetrically contouring the thickness of sputter coated layers
11/22/1983US4416759 Sputter system incorporating an improved blocking shield for contouring the thickness of sputter coated layers
11/22/1983US4416755 Apparatus and method for producing semiconducting films
11/22/1983US4416217 Apparatus for forming an inhomogeneous optical layer
11/22/1983US4416216 Apparatus for forming an inhomogeneous optical layer
11/22/1983CA1157363A1 Metallised composite structure and a method of preparing same
11/16/1983EP0093838A2 Perpendicular magnetic recording medium and method for producing the same
11/15/1983US4415602 Reactive plating method and product
11/15/1983US4415427 Thin film deposition by sputtering
11/15/1983US4415421 Process for manufacturing ornamental parts and ion plating apparatus to be used therefor
11/15/1983US4415420 Cubic boron nitride preparation
11/15/1983CA1156968A1 Deposited films with improved microstructures and methods for making
11/09/1983EP0093706A1 Tool and method for its production
11/09/1983EP0093412A1 Magnetron sputtering apparatusand a method for forming a magnetic thinfilm on the surface of a substrate
11/09/1983EP0093246A1 Process for adhering a metal on the surface of an insulator
11/08/1983US4414249 Method for producing metallic articles having durable ceramic thermal barrier coatings
11/08/1983US4414087 Magnetically-assisted sputtering method for producing vertical recording media
11/08/1983US4414086 Magnetic targets for use in sputter coating apparatus
11/08/1983US4414085 Sputtering, carbon
11/08/1983CA1156603A1 Low energy ion beam oxidation process
11/01/1983US4413302 Structural member made from a metallic material having an upper surface exposed to the danger of electric charge building-up thereon and the use of such structural member
11/01/1983US4412906 Decreasing chamber gas pressure from target region to substrate holder region
11/01/1983US4412905 Vacuum deposition apparatus
11/01/1983US4412901 Method for the manufacture of solid electrolyte layers for galvanic cells
11/01/1983US4412899 Cubic boron nitride preparation utilizing nitrogen gas
11/01/1983US4412771 Sample transport system
11/01/1983US4412508 Nozzle beam source for vapor deposition
11/01/1983US4412507 Magnetic recording medium manufacturing device
11/01/1983US4412504 Device for holding substrate wafers
11/01/1983CA1156179A1 Method for surface modification of synthetic, artificial and natural polymers and polymer compositions using metals, non-metals and gases
10/1983
10/26/1983EP0092452A1 Coating for photothermal conversion
10/26/1983EP0092346A1 Method and apparatus for heating a semiconductor substrate under reduced pressure
10/26/1983EP0091942A1 Metallization of support members
10/25/1983US4411763 Sputtering apparatus
10/25/1983US4411733 SPER Device for material working
10/25/1983CA1155798A1 Reactive deposition method and apparatus
10/25/1983CA1155797A1 Method of transfer for optical recording track
10/19/1983EP0091734A1 Improvements in or relating to the bulk production of alloys by deposition from the vapour phase and apparatus therefor
10/18/1983US4410408 Method of preparing zinc oxide film
10/18/1983US4410407 Sputtering apparatus and methods
10/18/1983US4410406 Cobalt-nickel-phosphorus alloy
10/12/1983EP0091222A2 Process for the diffusion bonding of aluminium based materials
10/12/1983EP0090817A1 Thin films of compounds and alloy compounds of group iii and group v elements.
10/11/1983US4409087 Wafer detection circuitry for high vacuum use
10/11/1983US4408563 Apparatus for regulating the evaporation rate of oxidizable substances in reactive vacuum deposition
10/05/1983EP0090613A2 Improvements in methods of making layered electrical devices
10/05/1983EP0090461A2 Magazine and disc holders for supporting discs in the magazine
10/05/1983EP0090081A1 Process for depositing films on both sides of a plurality of thin substrates
10/04/1983US4408254 Noble gas doped amorphous titanate dielectric separator
10/04/1983US4407894 Flexible magnetic tape
10/04/1983US4407871 Corrosion resistant
10/04/1983US4407713 Cylindrical magnetron sputtering cathode and apparatus
10/04/1983US4407712 Hollow cathode discharge source of metal vapor
10/04/1983US4407709 Method and apparatus for forming oxide coating by reactive sputtering technique
10/04/1983US4407685 Metallized film transfer process
09/1983
09/27/1983US4406252 Inductive heating arrangement for evaporating thin film alloy onto a substrate
09/26/1983EP0051635A4 Sputter target and glow discharge coating apparatus.
09/20/1983US4405989 Spectral monitoring device for both plasma etching and sputtering
09/20/1983US4405702 Electrophotographic image-forming member with ladder-type silicon resin layer
09/20/1983US4405678 Organic material, abrasion resistant
09/20/1983US4405660 Method for producing metallic articles having durable ceramic thermal barrier coatings
09/20/1983US4405659 Multilayer, vapor deposition of metal-chromium-aluminum-yttrium alloy, then alumina, then ceramic
09/20/1983US4405658 Stabilization of inert gas pressure
09/20/1983US4405436 Magnetic pole shields and target of same ferromagnetic material
09/20/1983US4405435 Conveyor, sputtering
09/14/1983EP0088463A1 Magnetron cathode sputtering system
09/14/1983EP0088074A1 Plasma reactor and method therefor
09/13/1983US4404263 Substrate with facing which is metal, metal oxide and plastic matrix antifriction substance sputtered by electrical discharge
09/13/1983US4404235 Exposure to gaseous tungsten fluoride and hydrogen to form discontinuous tungsten islands
09/13/1983US4404233 Ion implanting method
09/13/1983CA1153733A1 Magnetically enhanced sputtering device including means for sputtering magnetically permeable targets
09/07/1983EP0087559A1 Thin-film permanent magnet
09/06/1983US4403014 Group eight metal with group four nitrides, carbides, or borides
09/06/1983US4403002 Vacuum deposition of magnetic layers on moving flexible tape
09/06/1983US4402994 Carbides, nitrides, and carbonitrides of titanium, zirconium and hafnium
08/1983
08/31/1983EP0087309A1 Protected vapor-deposited metal layers
08/31/1983EP0086930A2 Process for producing thin layers on substrates by cathodic sputtering
08/30/1983US4401719 Highly hard material coated articles
08/30/1983US4401697 In situ formation of alumina between alloy and ceramic layers
08/30/1983US4401546 Ferromagnetic high speed sputtering apparatus
08/30/1983US4401053 Coating fixture