Patents
Sitemap › C23 - Coating metallic material; Coating material with metallic material; Chemical surface treatment; Diffusion treatment of metallic material; Coating by vacuum evaporation, by sputtering, by ion implantation or by chemical vapour deposition, in general; Inhibiting corrosion of metallic material or incrustation in general › C23C - Coating metallic material; Coating material with metallic material; Surface treatment of metallic material by diffusion into the surface, by chemical conversion or substitution; Coating by vacuum evaporation, by sputtering, by ion implantation or by chemical vapour deposition, in general › C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
08/1982
08/17/1982US4344383 Retainer ring for securing substrates in a vacuum deposition system
08/17/1982CA1129637A1 Electrically conductive boat for vacuum evaporation of metals
08/11/1982EP0057374A2 Method for increasing the peel strength of metal-clad polymers
08/10/1982US4343658 Depositing tungsten or tantalum
08/10/1982CA1129374A1 Process for depositing a metal or alloy layer on an electrically conductive work piece and apparatus for conducting the same
08/03/1982US4342631 Gasless ion plating process and apparatus
08/03/1982CA1128820A1 Method for altering the composition and structure of aluminum bearing overlay alloy coatings during deposition from metallic vapor
07/1982
07/28/1982EP0056737A2 Method of manufacturing a semiconductor device using molecular beam epitaxy
07/28/1982EP0056373A1 Solar energy collector having semiconductive coating formed from metal and dielectric
07/27/1982US4342044 Method for optimizing photoresponsive amorphous alloys and devices
07/27/1982US4341843 Refractory coatings
07/27/1982US4341816 Method for attaching disc- or plate-shaped targets to cooling plates for sputtering systems
07/22/1982WO1982002459A1 Methods and apparatus for forming thin-film heterojunction solar cells from i-iii-vi2 chalcopyrite compounds,and solar cells produced thereby
07/13/1982USRE30995 High integrity CoCrAl(Y) coated nickel-base superalloys
07/13/1982US4338883 Vacuum vapor-deposition installation with a vacuum chamber, a vaporizing chamber and an evaporizing chamber
07/07/1982EP0055542A1 Improvements in or relating to the bulk production of alloys by deposition from the vapour phase and apparatus thereof
07/07/1982EP0055344A1 Inductive heating arrangement for evaporating a thin alloy film onto a substrate, and method therefor
07/07/1982EP0055328A1 A beam source for deposition of thin film alloys and method therefor
07/07/1982EP0055326A1 System and method for deflecting and focusing a broad plasma beam
07/06/1982US4338145 Chrome-tantalum alloy thin film resistor and method of producing the same
06/1982
06/30/1982EP0054641A1 Thermally compensated shadow mask
06/29/1982US4337300 A vapor deposited coating of titanium and a lyaer of a titanium carbide, nitride, or combination
06/29/1982US4337279 Method for increasing the peel strength of metal-clad polymers
06/29/1982US4337133 Hard gold surfaces
06/29/1982US4337132 Getter mask, resist mask
06/23/1982EP0054269A2 Perpendicular magnetic recording medium, method for producing the same, and sputtering device
06/22/1982US4336277 Of low melting metals and alloys
06/22/1982US4336120 Method of fabricating a zinc oxide thin film
06/22/1982US4336119 Oxide-containing coatings
06/22/1982US4336118 Methods for making deposited films with improved microstructures
06/22/1982US4336117 Refractory coatings and method of producing the same
06/16/1982EP0053912A1 Process for oxidising a metal sample
06/15/1982US4335266 Interdiffusion of vacuum-deposited semiconductor multilayers; stability
06/15/1982CA1125700A1 Vacuum deposition method
06/10/1982EP0044329A4 Columnar grain ceramic thermal barrier coatings on polished substrates.
06/10/1982EP0042872A4 Columnar grain ceramic thermal barrier coatings.
06/09/1982EP0053150A1 Method for manufacturing a thin layer with orientated structure, device for implementing such method and products obtained thereby
06/08/1982US4333962 Vapor deposition, nitrogen, carbon compound, arc discharge, biasing
06/08/1982US4333808 Method for manufacture of ultra-thin film capacitor
06/08/1982CA1125424A1 Method of fabricating conducting oxide-silicon solar cells
06/08/1982CA1124957A1 Metallization process
06/01/1982US4332838 Vapor deposition
06/01/1982CA1124679A1 Electrode sputtering process for exhaust gas oxygen sensor
06/01/1982CA1124678A1 Exhaust electrode process for exhaust gas oxygen sensor
05/1982
05/25/1982US4331737 Oxynitride film and its manufacturing method
05/25/1982US4331702 Method for reproducible manufacture of metallic layers
05/25/1982US4331526 Radio frequency, plasma/gases
05/25/1982US4331476 Sputtering targets with low mobile ion contamination
05/19/1982EP0051639A1 Implantation of vaporized material on melted substrates.
05/19/1982EP0051635A1 Sputter target and glow discharge coating apparatus.
05/19/1982EP0051628A1 High pressure plasma deposition of silicon
05/18/1982US4329938 Evaporator tool with remote substrate reorientation mechanism
05/11/1982US4328763 Vaporizer for vacuum deposition installations
04/1982
04/27/1982US4327122 Evaporated electrodes for zirconia exhaust gas oxygen sensors
04/27/1982US4326305 Method for making artifacts usable in vivo and a artifacts made by said method
04/27/1982CA1122687A1 Amorphous semiconductors equivalent to crystalline semiconductors
04/20/1982US4325986 Method for continuous deposition by vacuum evaporation
04/14/1982EP0049588A2 Method and apparatus for dry etching and electrostatic chucking device used therein
04/14/1982EP0049586A1 Method and apparatus for forming thin film oxide layers using reactive evaporation techniques
04/13/1982US4324803 Process for depositing on substrates, by cathode sputtering, a self-lubricating coating of metal chalcogenides and the coating obtained by this process
04/13/1982US4324631 Heating to curie temperature to temporarily demagnetize target
04/13/1982US4324630 Method for forming a dental caries preventive coating
04/07/1982EP0048884A2 Vacuum evaporation system for deposition of thin films
04/07/1982EP0048732A1 Deposited films with improved microstructures and methods for making
04/06/1982US4323589 Fabrication of intergrated circuits
04/06/1982US4323031 Crystal plating apparatus
03/1982
03/30/1982US4322277 Protecting substrate edges by positioning in a groove having preferential dimensions; uniformity
03/30/1982US4322276 Method for producing an inhomogeneous film for selective reflection/transmission of solar radiation
03/30/1982CA1120889A1 Method of making charge rings
03/30/1982CA1120887A1 Method for producing uniform parallel alignment in liquid crystal cells
03/30/1982CA1120846A1 Highly reflective multilayer metal/polymer composites
03/23/1982US4321311 Columnar grain ceramic thermal barrier coatings
03/23/1982US4321310 Columnar grain ceramic thermal barrier coatings on polished substrates
03/23/1982US4321126 Process for forming a metal or alloy layer on an electricity-conducting work piece and device for executing same
03/23/1982CA1120345A1 Deposition of thin film organic coatings by ion implantation
03/17/1982EP0047456A1 Ion plating without the introduction of gas
03/16/1982CA1120153A1 Two-sided planar magnetron sputtering apparatus
03/09/1982US4318796 For non metals
03/09/1982US4318767 Apparatus for the treatment of semiconductor wafers by plasma reaction
03/09/1982CA1119554A1 Deposition process monitoring and control system
02/1982
02/24/1982EP0046154A1 Apparatus for coating substrates by high-rate cathodic sputtering, as well as sputtering cathode for such apparatus
02/23/1982CA1118715A1 Assembly and method to extend useful life of sputtering targets
02/23/1982CA1118714A1 Vacuum treating apparatus
02/18/1982WO1982000510A1 Solar energy collector having semiconductive coating formed from metal and dielectric
02/17/1982EP0045822A1 Cylindrical magnetron sputtering cathode
02/16/1982US4315960 Method of making a thin film
02/10/1982EP0045416A1 Process to produce a protective layer on metallic pieces
02/09/1982US4314837 Oxidation
02/09/1982CA1117855A1 Metallization process
02/03/1982EP0045204A2 Electrophotographic member and electrophotographic apparatus including the member
02/03/1982EP0045058A2 Method of making layered capacitors, and apparatus therefor
02/03/1982EP0045057A1 Apparatus for holding disc-shaped substrates
02/02/1982US4313815 Sputter-coating system, and vaccuum valve, transport, and sputter source array arrangements therefor
01/1982
01/27/1982EP0044329A1 Columnar grain ceramic thermal barrier coatings on polished substrates.
01/19/1982US4311725 Control of deposition of thin films
01/19/1982US4311427 Wafer transfer system
01/13/1982EP0043781A1 Method to produce a composite layer resistant to galling, abrasion, corrosion, alternating-stress fatigues, and composite layer produced by this process
01/13/1982EP0043644A2 Method of making a magnetic recording medium and a ceramic crucible for such a method
01/12/1982US4310759 System for removal of material from the surface of a sample
01/12/1982US4310614 Method and apparatus for pretreating and depositing thin films on substrates
1 ... 656 657 658 659 660 661 662 663 664 665 666 667 668 669 670 671 672 673 674