| Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
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| 05/02/2012 | CN202208756U Driving end device for rotating target |
| 05/02/2012 | CN202208755U Metal mask device with magnetic protecting film |
| 05/02/2012 | CN202207799U Target manufacture device |
| 05/02/2012 | CN1672274B Conductive fluid dispensing members |
| 05/02/2012 | CN102439761A Electrode compositions and processes |
| 05/02/2012 | CN102439697A High pressure rf-dc sputtering and methods to improve film uniformity and step-coverage of this process |
| 05/02/2012 | CN102439488A Modified oblique incident angle deposition apparatus, method for manufacturing non-reflective optical thin film using the same, and non-reflective optical thin film |
| 05/02/2012 | CN102439196A Reactive sputtering with multiple sputter sources |
| 05/02/2012 | CN102439195A Process for production of semiconductor light-emitting element substrate |
| 05/02/2012 | CN102437274A Fluorescence lens, manufacturing method thereof and white-light lighting lamp manufactured by using fluorescence lens |
| 05/02/2012 | CN102437042A Method for producing crystalline-state high-K gate dielectric material |
| 05/02/2012 | CN102437040A Method for preparing hafnium lanthanum oxide (HfLaO) high-dielectric gate dielectric film |
| 05/02/2012 | CN102436110A Flexible electro-chromic device |
| 05/02/2012 | CN102436016A Antireflection film and manufacturing method therefor, optical member and plastic lens |
| 05/02/2012 | CN102434990A Solar heat collecting pipe with scattering surface |
| 05/02/2012 | CN102434794A White-light light emitting diode (LED) lamp with large color-rendering index and manufacturing method thereof |
| 05/02/2012 | CN102433541A Rotating mechanism for loop line rotating chamber |
| 05/02/2012 | CN102433540A Window type device for detecting surface parameters of material in direct contact way in vacuum environment |
| 05/02/2012 | CN102433539A 腔系列 Chamber series |
| 05/02/2012 | CN102433538A Sputtering equipment |
| 05/02/2012 | CN102433537A Coating piece and manufacturing method thereof |
| 05/02/2012 | CN102433536A Preparation method of high-bonding-strength titanium nitride (TIN) ceramic membrane on surface of low-carbon steel |
| 05/02/2012 | CN102433535A Plasma equipment with function of treating coiled circuit board material |
| 05/02/2012 | CN102433534A Triple prism double-sized coated clamp and process method thereof |
| 05/02/2012 | CN102433533A Vacuum jet coating machine for preparing polymer functional film |
| 05/02/2012 | CN102433532A Vapor deposition material for forming film, film sheet and laminated sheet provided with film |
| 05/02/2012 | CN102433531A Vapor deposition material for forming film, film sheet and laminated sheet provided with film |
| 05/02/2012 | CN102433530A Solar selective absorption coating and preparation method |
| 05/02/2012 | CN102433529A Method for preparing metal nano particles on GaAs substrate |
| 05/02/2012 | CN102433528A Vapor deposition material for forming film, film sheet and laminated sheet provided with film |
| 05/02/2012 | CN102430865A Welding method of target material and back plate and target material component formed thereby |
| 05/02/2012 | CN102430718A Mould for preparing aluminum and aluminum alloy rotary target and manufacturing method thereof |
| 05/02/2012 | CN102130067B Surface palladium-plated bonding brass wire |
| 05/02/2012 | CN102031489B AZO anti-reflecting film preparation method |
| 05/02/2012 | CN101956176B Continuous evaporation apparatus |
| 05/02/2012 | CN101835922B Method for manufacturing workpieces and apparatus |
| 05/02/2012 | CN101831612B Precise positioning sputtering device and positioning method thereof |
| 05/02/2012 | CN101804467B Tool of surface-coated cubic boron nitride sintered compact and process for producing the same |
| 05/02/2012 | CN101787521B Method for preparing metal sulfide diamond-like carbon composite film |
| 05/02/2012 | CN101775581B Hot processing chamber |
| 05/02/2012 | CN101582461B Novel multilayer transparent conductive film structure and preparation method thereof |
| 05/02/2012 | CN101566077B Last stage vane of steam turbine and preparation method thereof |
| 05/02/2012 | CN101437926B Operable transmission, working fluid for such a transmission, and method for commissioning the same |
| 05/02/2012 | CN101191194B Sputtering target and manufacturing method therefor, and optical recording medium and manufacturing method therefor |
| 05/01/2012 | US8168483 Manufacturing method for light emitting device |
| 05/01/2012 | US8168118 Powder metallurgy sputtering targets and methods of producing same |
| 05/01/2012 | US8168050 Electrode pattern for resistance heating element and wafer processing apparatus |
| 05/01/2012 | US8168049 Sputtering apparatus and method of manufacturing solar battery and image display device by using the same |
| 04/26/2012 | WO2012054467A2 Sodium salt containing cig targets, methods of making and methods of use thereof |
| 04/26/2012 | WO2012054308A2 Rf/vhf impedance matching, 4 quadrant, dual directional coupler with vrms/irms responding detector circuitry |
| 04/26/2012 | WO2012054306A2 Pulse mode capability for operation of an rf/vhf impedance matching network with 4 quadrant, vrms/irms responding detector circuitry |
| 04/26/2012 | WO2012053532A1 Apparatus for organic film formation and method for organic film formation |
| 04/26/2012 | WO2012053430A1 Deposition apparatus and deposition method |
| 04/26/2012 | WO2012053402A1 Vapor deposition device, vapor deposition method, and method for producing organic electroluminescence display device |
| 04/26/2012 | WO2012053174A1 Magnetron sputtering device, method for controlling magnetron sputtering device, and film forming method |
| 04/26/2012 | WO2012053171A1 Vacuum processing apparatus |
| 04/26/2012 | WO2012052437A1 Target for arc processes |
| 04/26/2012 | WO2012052428A1 Modular coater separation |
| 04/26/2012 | WO2012052182A1 Device and process for coating a substrate |
| 04/26/2012 | WO2012052073A1 Method for producing a firm bond between a polymer substrate and an inorganic layer |
| 04/26/2012 | WO2012051980A1 Sputtering sources for high-pressure sputtering with large targets and sputtering method |
| 04/26/2012 | WO2012051799A1 Gate dielectric material of high dielectric constant and method for preparing same |
| 04/26/2012 | WO2012005539A3 Pre-treatment apparatus and method for improving adhesion of thin film |
| 04/26/2012 | WO2010088642A3 Method of manufacturing a high density capacitor or other microscopic layered mechanical device |
| 04/26/2012 | US20120100491 Semiconductor Production Equipment Including Fluorine Gas Generator |
| 04/26/2012 | US20120100467 Sputtering target material, silicon-containing film forming method, and photomask blank |
| 04/26/2012 | US20120100396 Method for manufacturing perpendicular magnetic recording medium |
| 04/26/2012 | US20120100389 Coated article and method for making the same |
| 04/26/2012 | US20120100312 Methods for enhancing tantalum filament life in hot wire chemical vapor deposition processes |
| 04/26/2012 | US20120100301 Nucleation of Ultrathin, Continuous, Conformal Metal Films Using Atomic Layer Deposition And Application As Fuel Cell Catalysts |
| 04/26/2012 | US20120097535 Sputtering Target of Ferromagnetic Material with Low Generation of Particles |
| 04/26/2012 | US20120097534 Magnetron sputtering cathode and film formation apparatus |
| 04/26/2012 | US20120097533 Double-layer shutter sputtering apparatus |
| 04/26/2012 | US20120097530 Target of Sintered Compact, and Method of Producing the Sintered Compact |
| 04/26/2012 | US20120097529 Magnetron coating module and magnetron coating method |
| 04/26/2012 | US20120097528 Deposition of Material to Form a Coating |
| 04/26/2012 | US20120097527 Film formation apparatus and film forming method |
| 04/26/2012 | US20120097526 Rotary magnetron |
| 04/26/2012 | US20120097525 Method and apparatus to control ionic deposition |
| 04/26/2012 | US20120097524 Rf impedance matching network with secondary frequency and sub-harmonic variant |
| 04/26/2012 | DE102011116358A1 Nucleating metal film on substrate, comprises providing metal layer having surface energy, and depositing continuous, conformal layer of platinum or platinum alloy on metal layer by hydrogen plasma assisted atomic layer deposition |
| 04/26/2012 | DE102011007596B3 Method for observing status of plasma chamber to control process of coating e.g. glass substrate, during semiconductor manufacturing process, involves supplying measurement signal into plasma chamber with measurement signal frequency |
| 04/26/2012 | DE102010049329A1 Sputterquellen für Hochdrucksputtern mit großen Targets und Sputterverfahren Sputter sources for high pressure sputtering with big targets and sputtering |
| 04/26/2012 | DE102010049017A1 Vorrichtung zum Beschichten eines Substrats An apparatus for coating a substrate |
| 04/26/2012 | DE102010048984A1 Verfahren zum Herstellen eines haftfesten Verbundes aus einem Polymersubstrat und einer anorganischen Schicht A method for producing a firmly adhesive bonding of a polymer substrate and an inorganic layer |
| 04/26/2012 | DE102010042839A1 Method for operating target in continuous vacuum coating installation, has movable covering that is provided above the transport unit, for covering the substrate provided on the transport unit |
| 04/26/2012 | DE102010042828A1 Target für Lichtbogenverfahren Target for arc method |
| 04/26/2012 | DE102006055971B4 Bedienelement mit metallischer Beschichtung für ein Kraftfahrzeug Control panel with metallic coating for a motor vehicle |
| 04/25/2012 | EP2444771A2 Barrel |
| 04/25/2012 | EP2444518A1 Fabrication system and a fabrication method of a light emitting device |
| 04/25/2012 | EP2444517A1 Sputtering target material, silicon-containing film forming method, and photomask blank |
| 04/25/2012 | EP2443267A1 Protective coating, a coated member having a protective coating as well as method for producing a protective coating |
| 04/25/2012 | EP1942204B1 Sputtering target |
| 04/25/2012 | EP1862565B1 Droplet removing device and method in plasma generator |
| 04/25/2012 | EP1795624B1 SiO DEPOSITION MATERIAL |
| 04/25/2012 | EP1774053B8 Method for producing a coat on a piston ring and piston ring |
| 04/25/2012 | EP1457582B1 Device for vacuum deposition |
| 04/25/2012 | CN202205725U 提高硅片背封时硅片厚度均匀性的托盘 When silicon wafers back closure improve thickness uniformity of the tray |
| 04/25/2012 | CN202201966U 平板集热条带卧式镀膜机 Horizontal flat-plate collector strip coating machine |
| 04/25/2012 | CN202201965U 金属条带连续卷绕真空镀膜机真空箱体 Metal strip is continuously wound vacuum coating machine vacuum box |