Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
07/2012
07/04/2012CN101911275B Vacuum processing device, and vacuum processing method
07/04/2012CN101911265B Electronic member wherein barrier-seed layer is formed on base
07/04/2012CN101911264B Electronic member wherein barrier-seed layer is formed on base
07/04/2012CN101910447B Method and system for galvanizing by plasma evaporation
07/04/2012CN101886848B Solar spectrum selective absorbing film and preparation method thereof
07/04/2012CN101880865B Apparatus for depositing organic material and depositing method and depositing system thereof
07/04/2012CN101864559B Grid mesh magnetron sputtering hafnium evaporation method
07/04/2012CN101855381B Sputtering system and film deposition method
07/04/2012CN101851742B Preparation method of compound semiconductor film
07/04/2012CN101838799B Horizontal high-temperature vacuum coating production line
07/04/2012CN101838797B Ion implantation method
07/04/2012CN101824599B Method for preparing Cr target by adopting vacuum casting method
07/04/2012CN101805887B Steel material with surface containing rare earth yttrium element and preparation method thereof
07/04/2012CN101798680B Magnetron sputtering preparation process for Mg2Si thin film made of environment-friendly semiconductor material
07/04/2012CN101792893B Evaporation device
07/04/2012CN101786348B Ultra-fine cemented carbide tool and method for preparing surface nano-composite film thereof
07/04/2012CN101775587B Micro-drill for copper alloy processing and preparation method thereof
07/04/2012CN101775580B Preparation method of microwave plasma of aluminium nitride film
07/04/2012CN101736304B Vacuum aluminizing method of surface of neodymium-iron-boron permanent magnet
07/04/2012CN101736302B Preparation method of homogeneous multilayer nanometer metallic film material
07/04/2012CN101689569B Method for producing a metal rear contact of a semiconductor element, particularly a solar cell
07/04/2012CN101580927B Method for preparing manganese-stabilized hafnia film
07/04/2012CN101573001B Method for forming conducting wire on insulated heat-conducting metal substrate in a vacuum sputtering way
07/04/2012CN101554790B Ultra-hard carbon film and preparation method thereof
07/04/2012CN101543923B Method for welding target material and back board
07/04/2012CN101535193B Temperable solar control layer system and method for the production thereof
07/04/2012CN101517759B Method for manufacturing group iii nitride compound semiconductor light-emitting device, group iii nitride compound semiconductor light-emitting device, and lamp
07/04/2012CN101444983B Coating material and preparation method thereof
07/04/2012CN101437981B In-situ chamber clean process to remove by-product deposits from chemical vapor etch chamber
07/04/2012CN101437644B Coating method
07/04/2012CN101432459B Film forming method, and film forming device
07/04/2012CN101422977B Filming material and preparation method thereof
07/04/2012CN101380835B ZrB2/W nano multilayer film and preparation method thereof
07/04/2012CN101376965B Sputtering method and apparatus
07/04/2012CN101256940B Gas supply system and integrated unit for semiconductor manufacturing device
07/04/2012CN101187010B Substrate holder assembly device
07/04/2012CN101078613B Coating layer thickness measurement mechanism and coating layer forming apparatus using the same
07/03/2012US8212335 Semiconductor substrate having a flexible, heat resistant, graphite substrate
07/03/2012US8211337 Material for transparent conductive film and transparent conductive film
07/03/2012US8211245 Modification of surfaces to increase the surface tension
07/03/2012CA2541479C Vapour deposition method
07/03/2012CA2481932C Target designed to be vaporized by an electron beam, the process for manufacturing the said target, thermal barrier and coating obtained from the use of such a target, and mechanical parts on which such a coating is used
06/2012
06/28/2012WO2012086767A1 Evacuation device, vacuum processing device, and evacuation method
06/28/2012WO2012086661A1 Gallium nitride sintered body or gallium nitride molded article, and method for producing same
06/28/2012WO2012086578A1 Fe-pt ferromagnetic sputtering target and method for producing same
06/28/2012WO2012086575A1 Ferromagnetic sputtering target
06/28/2012WO2012086568A1 Vapor deposition device, vapor deposition method, and method of manufacturing organic electroluminescent display device
06/28/2012WO2012086535A1 Method of recovering film-forming material
06/28/2012WO2012086484A1 Transparent electroconductive film and manufacturing method therefor
06/28/2012WO2012086480A1 Vapor deposition device, vapor deposition method, and method of manufacturing organic electroluminescent display device
06/28/2012WO2012086456A1 Vapor deposition method, vapor deposition device, and organic el display device
06/28/2012WO2012086453A1 Vapor deposition device, vapor deposition method, and organic el display device
06/28/2012WO2012086388A1 Sintered body sputtering target
06/28/2012WO2012086335A1 Fe-pt-based sputtering target with dispersed c particles
06/28/2012WO2012086300A1 Sputtering target for magnetic recording film, and process for production thereof
06/28/2012WO2012086230A1 Vacuum deposition equipment and vacuum deposition method
06/28/2012WO2012086229A1 Sputtering device
06/28/2012WO2012086119A1 Take-up-type continuous film-forming apparatus
06/28/2012WO2012084261A1 Method and device for depositing silicon on a substrate
06/28/2012WO2012084187A1 Retaining device for substrates and method for coating a substrate
06/28/2012WO2012084165A1 Vaporization source, vaporization chamber, coating method and nozzle plate
06/28/2012US20120164784 Integrated deposition of thin film layers in cadmium telluride based photovoltaic module manufacture
06/28/2012US20120164517 Thin film buried anode devices
06/28/2012US20120164488 Perpendicular magnetic recording media and methods for producing the same
06/28/2012US20120164482 Coated article and method for making same
06/28/2012US20120164481 Coated article and method for making same
06/28/2012US20120164480 Coated article and method for making the same
06/28/2012US20120164478 Process for coating parts made of aluminium alloy and parts of obtained therefrom
06/28/2012US20120164477 Coated article and method for making same
06/28/2012US20120164476 Coated article and method for making the same
06/28/2012US20120164475 Coated article and method for manufacturing coated article
06/28/2012US20120164471 Housing and method for making the same
06/28/2012US20120164460 Coated article and method for making the same
06/28/2012US20120164459 Coated article and method for making the same
06/28/2012US20120164443 Material and glazing comprising said material
06/28/2012US20120164439 Heat dissipating substrate and method for manufacturing the same
06/28/2012US20120164438 Process for surface treating aluminum or aluminum alloy and article made with same
06/28/2012US20120164437 Coated article and method for making same
06/28/2012US20120164436 Article having hard film and method for making the article
06/28/2012US20120164435 Coated article and method of making the same
06/28/2012US20120164418 Article having hard film and method for making the article
06/28/2012US20120164412 Formation of Photoconductive and Photovoltaic Films
06/28/2012US20120164410 Coated article and method for manufacturing coated article
06/28/2012US20120164376 Method of modifying a substrate for passage hole formation therein, and related articles
06/28/2012US20120164375 Composite carbon nanotube structure and method for fabricating the same
06/28/2012US20120164356 Process for surface treating aluminum or aluminum alloy and article made with same
06/28/2012US20120164354 Sputtering apparatus and manufacturing method of electronic device
06/28/2012US20120164344 Activation of Electrode Surfaces by Means of Vacuum Deposition Techniques in a Continuous Process
06/28/2012US20120164051 Method for the production of oxide and nitride coatings and its use
06/28/2012US20120161591 Golden color enclosure and method for making same
06/28/2012US20120160807 System, method and apparatus for reducing plasma noise on power path of electrostatic chuck
06/28/2012US20120160675 Loading device and sputtering device using same
06/28/2012US20120160674 Substrate conveyer and vacuum processing apparatus
06/28/2012US20120160673 Magnet unit and magnetron sputtering apparatus
06/28/2012US20120160672 Sputtering apparatus
06/28/2012US20120160671 Sputtering device
06/28/2012US20120160670 Target Cooling Device
06/28/2012US20120160669 Resin product manufacturing system
06/28/2012US20120160665 Method for producing coatings with a single composite target
06/28/2012US20120160664 Cathodic arc vapor deposition coatings for dimensional restoration of surfaces