Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
05/2012
05/30/2012EP1843972B1 Patterning by energetically-stimulated local removal of solid-condensed-gas layers and solid state chemical reactions produced with such layers
05/30/2012EP1637624B1 Thin film forming apparatus
05/30/2012EP1541706B1 Masking mechanism for film-forming device
05/30/2012EP1295961B1 Decorative article having a white film
05/30/2012CN202246871U Integrated vacuum coating equipment with multi-cavity star-type structure
05/30/2012CN202246851U Deposition cavity
05/30/2012CN202246846U Horizontal reciprocating type ion film plating machine for plating ceramics by physical vapor deposition method
05/30/2012CN202246845U Mobile phone lens shielding type optical coating jig
05/30/2012CN202246844U Magnet and water separated type plane magnetron sputtering target
05/30/2012CN202246843U Coating machine for flat-plate solar collector
05/30/2012CN202246842U Magnetic control monitoring and managing device for sputtering target consumption
05/30/2012CN202246841U Sputtering device for preparing nano silicon film by medium-frequency magnetic control sputtering method
05/30/2012CN202246840U Copper-free environment-friendly special target for mirror alloy sputtering
05/30/2012CN202246839U Reactive sputtering vacuum chamber system
05/30/2012CN202246838U Vacuum coating machine
05/30/2012CN202246837U Aluminum evaporation device
05/30/2012CN202246836U Resistance heating type evaporation source
05/30/2012CN202246835U Vacuum film plating machine
05/30/2012CN202246834U Thin-film deposition device and soaking plate
05/30/2012CN202246833U Piston ring of nitrided excircle ultrahard electric arc ion multi-variant composite metal ceramic coating
05/30/2012CN202246832U Oil shielding device
05/30/2012CN202242220U Metal ceramic solar energy absorbing coating layer embedded with lanthanum and aluminum alloy nanometer clusters
05/30/2012CN1990901B Application method
05/30/2012CN102484024A 电子枪、真空处理装置 An electron gun, the vacuum processing apparatus
05/30/2012CN102482797A 半导体基板、半导体基板的制造方法、半导体生长用基板、半导体生长用基板的制造方法、半导体元件、发光元件、显示面板、电子元件、太阳能电池元件及电子设备 The method of manufacturing a semiconductor substrate, a semiconductor substrate, the semiconductor growth substrate for growth, a method of manufacturing a semiconductor substrate, a semiconductor element, a light emitting element, a display panel, electronic components, solar cell element and an electronic device
05/30/2012CN102482770A 通过真空沉积技术以连续工艺活化电极表面 By vacuum deposition techniques in order to activate the electrode surface a continuous process
05/30/2012CN102482769A Ion beam assisted sputtering device and ion beam assisted sputtering method
05/30/2012CN102482768A 用于溅射靶的铜材料及其制造方法 A method for producing a copper material and a sputtering target
05/30/2012CN102482767A 溅射靶用铜材料及其制造方法 Sputtering target material and a method of manufacturing a copper
05/30/2012CN102482766A Method for producing thermoelectric layers
05/30/2012CN102482765A Sputtering target of ferromagnetic material with low generation of particles
05/30/2012CN102482764A 无机物粒子分散型溅射靶 Inorganic particle dispersion type sputtering target
05/30/2012CN102482763A Method for manufacturing thin film
05/30/2012CN102482762A Method for manufacturing thin film
05/30/2012CN102482761A 蒸发器、由蒸发器组成的机构和覆层设备 Evaporator, the evaporator body composition and coating equipment
05/30/2012CN102482760A Vapor deposition method and vapor deposition apparatus
05/30/2012CN102482759A 用于将衬底保持在材料沉积设备中的装置 Keeping the substrate material in the apparatus for deposition apparatus
05/30/2012CN102482758A 基板处理方法 The substrate processing method
05/30/2012CN102482156A Sintered in-ga-zn-o-type oxide
05/30/2012CN102482155A 氧化物烧结体和其制造方法、靶及透明导电膜 The oxide sintered body and the manufacturing method thereof, the target and the transparent conductive film
05/30/2012CN102482154A 离子镀用片料和其制造方法以及透明导电膜 Ion plating, and a method for producing sheet material, and a transparent conductive film
05/30/2012CN102480879A 铝制品及其制备方法 Aluminum products and its preparation method
05/30/2012CN102480863A 壳体及其制作方法 Housing and manufacturing method thereof
05/30/2012CN102480533A 一种金属壳体及其制备方法 Of a metal casing and preparation method
05/30/2012CN102479891A 一种发光二极管外延片、芯片及其制作方法 A light-emitting diode epitaxial wafers, chip and its manufacturing method
05/30/2012CN102477540A 掺杂类金刚石与油脂复合润滑薄膜的制备方法 Preparation DLC and grease lubrication film composite doping
05/30/2012CN102477539A Al基合金溅射靶 Al-based alloy sputtering target
05/30/2012CN102477538A 面型蒸镀源及其蒸镀方法与系统 Surface type evaporation source and deposition method and system
05/30/2012CN102477537A 壳体及其制造方法 Housing and manufacturing method
05/30/2012CN102477536A 壳体及其制造方法 Housing and manufacturing method
05/30/2012CN102477535A 在低压力下进行等离子体感应涂覆的方法和设备 Methods and apparatus for coating a plasma induced under low pressure
05/30/2012CN102477534A 镀膜件及其制备方法 Coated pieces and its preparation method
05/30/2012CN102477533A 壳体及其制作方法 Housing and manufacturing method thereof
05/30/2012CN102477532A 镀膜件及其制作方法 Coating device and manufacturing method
05/30/2012CN102477531A 被覆件及其制造方法 And a method of manufacturing the covering member
05/30/2012CN102477530A 壳体及其制作方法 Housing and manufacturing method thereof
05/30/2012CN102477529A 真空镀膜件及其制造方法 Vacuum coating device and the manufacturing method
05/30/2012CN102477528A Coating part and preparation method thereof
05/30/2012CN102477527A 壳体的制作方法及由该方法制得的壳体 The method of making the housing and prepared by the method of housing
05/30/2012CN102477526A 壳体及其制造方法 Housing and manufacturing method
05/30/2012CN102475986A 真空薄膜蒸发凝结提纯机 Vacuum thin film evaporation condensation purification machine
05/30/2012CN102080211B Shielding baffle plate mechanism used for vertical multi-target vacuum coating machine
05/30/2012CN102021518B Method and device for coating film on surface of inner cavity by using pulse laser process
05/30/2012CN102005362B Calibration system and calibration method for dual-Faraday cup measuring ratios of ion implantation machine
05/30/2012CN101960041B Film forming source, deposition apparatus and apparatus for manufacturing organic el element
05/30/2012CN101943214B Low frictional sliding member and method for reducing frictional of a first sliding member and a second sliding member
05/30/2012CN101898871B Low-reflection plating glass and preparation method thereof
05/30/2012CN101886243B Method for preparing iron thin film
05/30/2012CN101831606B Ball valve surface treatment method
05/30/2012CN101824598B Sputtering apparatus, double rotary shutter unit, and sputtering method
05/30/2012CN101824595B Nano crystal Cr2N/amorphous WC superhard film with superlattice structure and preparation method thereof
05/30/2012CN101820003B Doubles-layer zinc oxide transparent and conductive film for film solar cell and preparation method thereof
05/30/2012CN101819030B Method and system for monitoring surface roughness of magnetic control spattering target
05/30/2012CN101812670B Vacuum cavity isolating mechanism
05/30/2012CN101812667B Magnetron sputtering plating film cathode device
05/30/2012CN101809186B ZnO vapor deposition material, process for producing the same, and ZnO film
05/30/2012CN101800178B Preparation method of hafnium silicon aluminum oxygen nitrogen high-dielectric constant gate dielectric
05/30/2012CN101772587B Method for masking cooling holes and device for using in a masking process for masking cooling holes
05/30/2012CN101758234B Target pressing hydraulic machine
05/30/2012CN101737982B Solar selectively absorbing coating and preparation method thereof
05/30/2012CN101719457B Superconducting coil-based high-intensity magnetic field magnetic control sputtering cathode
05/30/2012CN101684543B Method for manufacturing target
05/30/2012CN101681712B R-fe-b sintered magnet provided on its surface with vapor deposition coating of aluminum or its alloy and process for producing the same
05/30/2012CN101680078B Chromium nitride coating film by ion plating, process for producing the same, and piston ring for internal combustion engine
05/30/2012CN101678466B Surface-coated cutting tool
05/30/2012CN101660119B Compound phase-change material target and preparation method thereof
05/30/2012CN101652505B Polycrystalline thin film and method for producing the same and oxide superconductor
05/30/2012CN101649448B Continuous surface vacuum coater of metal sheet strip
05/30/2012CN101646798B Method for assembling at least two plates and use of said method for making an ionic sputtering assembly
05/30/2012CN101597752B Sputtering composite target, method for manufacuturing transparent conductive film and base material thereof
05/30/2012CN101586231B Film deposition device
05/30/2012CN101542713B Substrate processing apparatus, substrate processing method
05/30/2012CN101532124B Sputtering cathode, sputtering apparatus provided with sputtering cathode, and control device
05/30/2012CN101511493B Deposition of perovskite and other compound ceramic films for dielectric applications
05/30/2012CN101473406B Method for controlling a reactive high-power pulsed magnetron sputter process and corresponding device
05/30/2012CN101435070B TiAlN/TiN for tool and mould material surface and preparation thereof
05/30/2012CN101417517B Transparent conductive film, method for production thereof and touch panel therewith
05/30/2012CN101348894B Method of forming inorganic insulating layer and method of fabricating array substrate for display device using the same
05/30/2012CN101265569B Method and control system for depositing a layer
05/30/2012CN101039801B Gas barrier laminated film and manufacture method thereof