Patents for H05H 1 - Generating plasma; Handling plasma (22,647)
05/2012
05/08/2012US8175209 Method and apparatus for pulsed power generation
05/08/2012US8173228 Particle reduction on surfaces of chemical vapor deposition processing apparatus
05/03/2012WO2012058184A2 Plasma processing apparatus with reduced effects of process chamber asymmetry
05/03/2012WO2012057963A2 High purity aluminum coating hard anodization
05/03/2012WO2012057271A1 Ion wind generator and ion wind generating device
05/03/2012WO2012055816A1 Hemostasis instrument
05/03/2012WO2012055533A1 Energy harvesting cold atmospheric plasma generator
05/03/2012US20120107525 CO2 Recycling Method and CO2 Reduction Method and Device
05/03/2012US20120104290 Extreme ultraviolet light generation system
05/03/2012DE102010050258A1 Vorrichtung zum Behandeln von Substraten Apparatus for processing substrates
05/02/2012CN102439701A 蚀刻装置 Etching apparatus
05/02/2012CN102438391A Adjustable electrodes and coils for plasma density distribution control
05/02/2012CN102438390A Antenna unit and inductively coupled plasma processing apparatus
05/02/2012CN102438389A Simplex matching network, and construction method and radio-frequency power source system thereof
05/02/2012CN102438388A Plasma arc rotational conveying device
05/02/2012CN102438387A Cyclone type low-temperature plasma generator
05/02/2012CN102438386A Anode device of low-temperature plasma generator
05/02/2012CN102433535A Plasma equipment with function of treating coiled circuit board material
05/02/2012CN101784155B Plasma bipolar exciting electrode
05/02/2012CN101235941B Cooling water flow dispenser for accelerators
05/01/2012US8168269 Plasma, UV and ion/neutral assisted ALD or CVD in a batch tool
05/01/2012US8168268 Thin film deposition via a spatially-coordinated and time-synchronized process
05/01/2012US8168130 Plasma generation system and plasma generation method
04/2012
04/26/2012WO2012054690A2 Apparatus for forming a magnetic field and methods of use thereof
04/26/2012WO2012053083A1 Plasma sterilization appartus, plasma sterilization system and plasma sterilization method
04/26/2012WO2012024116A3 Symmetric vhf source for a plasma reactor
04/26/2012WO2012018557A3 Symmetric vhf plasma power coupler with active uniformity steering
04/26/2012US20120100310 Coating device and coating method
04/26/2012US20120100308 Ternary metal alloys with tunable stoichiometries
04/26/2012US20120100301 Nucleation of Ultrathin, Continuous, Conformal Metal Films Using Atomic Layer Deposition And Application As Fuel Cell Catalysts
04/26/2012US20120100299 Thermal spray coating process for compressor shafts
04/26/2012US20120098405 Method and system for introducing process fluid through a chamber component
04/26/2012US20120097870 Apparatus for forming a magnetic field and methods of use thereof
04/26/2012US20120097648 Inductively Coupled Plasma Arc Device
04/26/2012US20120097289 Alumina forming bimetallic tube and method of making and using
04/26/2012DE102011007596B3 Method for observing status of plasma chamber to control process of coating e.g. glass substrate, during semiconductor manufacturing process, involves supplying measurement signal into plasma chamber with measurement signal frequency
04/26/2012DE102010048810A1 System zur Bedienung mehrerer Plasma- und/oder Induktionserwärmungsprozesse System for operation of multiple plasma and / or induction heating processes
04/26/2012DE102010048809A1 Leistungsversorgungssystem für eine Plasmaanwendung und/oder eine Induktionserwärmungsanwendung Power supply system for a plasma treatment and / or an induction heating application
04/25/2012EP2445320A1 Energy harvesting cold atmospheric plasma generator
04/25/2012EP2189047B1 Applicator of microwave plasma generator and microwave plasma generator including this applicator
04/25/2012CN202206642U 电晕放电低温等离子体处理装置 Corona Discharge Plasma processing apparatus
04/25/2012CN1988752B 等离子弧焊炬及组装和拆卸等离子弧焊炬的方法 The plasma arc torch and assembly and disassembly of the plasma arc torch method
04/25/2012CN102428762A 等离子体处理装置 The plasma processing apparatus
04/25/2012CN102427831A 改进的空气净化装置和方法 Improved air purification apparatus and method
04/25/2012CN102427654A 多腔室等离子发生器阳极 Multi-chamber plasma generator anode
04/25/2012CN102427653A 一种引入微辉光放电模式的大气压非平衡等离子体源 One kind of introducing micro-atmospheric pressure glow discharge mode nonequilibrium plasma source
04/25/2012CN101754570B 一种射频传输中实现阻抗匹配的方法和一种阻抗匹配装置 A method of impedance matching of the transmission apparatus and a RF impedance matching
04/25/2012CN101465283B 等离子体处理装置以及等离子体处理方法 The plasma processing apparatus and plasma processing method
04/25/2012CN101419904B 等离子体约束装置及等离子体处理装置 The plasma processing apparatus and plasma confinement apparatus
04/25/2012CN101057379B 射频等离子火花塞 RF plasma spark plug
04/24/2012US8163358 Surface modification of contact lenses
04/24/2012US8163264 Expanded graphite and process for producing the expanded graphite
04/24/2012CA2478876C Air/fuel injection system with cold-plasma generation capability
04/19/2012WO2012051022A2 Method and apparatus for reducing particle defects in plasma etch chambers
04/19/2012WO2012050869A1 Atmospheric-pressure plasma-enhanced chemical vapor deposition
04/19/2012WO2012049248A1 Device and method for the plasma-assisted production of nanoscale particles and/or for coating surfaces
04/19/2012WO2011156534A3 Multiple frequency power for plasma chamber electrode
04/19/2012WO2011156413A3 Dielectric barrier discharge wind tunnel
04/19/2012US20120094081 Variable gloss fuser coating material comprised of a polymer matrix with the addition of alumina nano fibers
04/19/2012US20120094034 Combinatorial plasma enhanced deposition techniques
04/19/2012US20120093684 UV sterilization system
04/19/2012US20120091893 Extreme ultraviolet light source apparatus
04/19/2012US20120091451 Zinc Oxide Nanostructures and Sensors Using Zinc Oxide Nanostructures
04/19/2012US20120090984 Method and apparatus for purifying a silicon feedstock
04/19/2012DE102010060966B3 Plasmaerzeuger Plasma generator
04/18/2012EP2442626A2 Electrode for a Contact Start Plasma Arc Torch and Contact Start Plasma Arc Torch Employing Such Electrodes
04/18/2012EP2442625A2 Electrode for a Contact Start Plasma Arc Torch and Contact Start Plasma Arc Torch Employing Such Electrodes
04/18/2012EP2082622B1 Method and apparatus for alignment of components of a plasma arc torch
04/18/2012EP1608479B1 Vented shield system for a plasma arc torch ; corresponding plasma arc torch ; method of operating such vented shield system
04/18/2012EP1369000B1 Method of manufacturing a composite electrode for a plasma arc torch
04/18/2012CN1822745B Plasma generation apparatus
04/18/2012CN102422722A 等离子体处理装置 The plasma processing apparatus
04/18/2012CN102422394A Reactor lid assembly for vapor deposition
04/18/2012CN102422393A Showerhead for vapor deposition
04/18/2012CN102422390A Vapor deposition reactor system and methods thereof
04/18/2012CN102421388A 用于生成气态物种的装置 Means for generating a gaseous species
04/18/2012CN102421239A 等离子体处理装置 The plasma processing apparatus
04/18/2012CN102421238A Plasma processing apparatus
04/18/2012CN102421237A Plasma generating apparatus, plasma processing apparatus and plasma processing method
04/18/2012CN102420090A Plasma processing apparatus and plasma processing method
04/18/2012CN101636520B 使等离子管外围为电中性的等离子体生成装置 The plasma is electrically neutral tube peripheral plasma generating means
04/18/2012CN101542749B 太阳能电池的制造方法及太阳能电池的制造装置 The method of manufacturing apparatus for manufacturing a solar cell and solar cell
04/17/2012US8159118 Electron gun
04/17/2012US8158521 Two step post-deposition treatment of ILD layer for a lower dielectric constant and improved mechanical properties
04/17/2012US8158217 CNT-infused fiber and method therefor
04/17/2012US8158216 Spinulose titanium nanoparticulate surfaces
04/17/2012US8158211 Anti-reflection plate and method for manufacturing anti-reflection structure thereof
04/12/2012WO2012047034A2 Substrate processing device equipped with semicircle shaped antenna
04/12/2012WO2012045301A2 Device and use of the device for measuring the density and/or the electron temperature and/or the collision frequency of a plasma
04/12/2012US20120088880 Formed Article, Method for Producing Same, Electronic Device Member, and Electronic Device
04/12/2012US20120086339 Gas delivery devices and methods
04/12/2012US20120085366 Plasma processing method and plasma processing apparatus
04/12/2012DE102006057529B4 Kontrollvorrichtung, Energieversorgungssystem und Verfahren Control device, power supply system and method
04/11/2012EP2438801A1 Plasma generation device with electron cyclotron resonance
04/11/2012EP2438109A2 Non-fouling receptor labeled multi-functional surfaces
04/11/2012EP1922908B1 Method for operation of a steam plasma burner and steam cutting device
04/11/2012EP1875785B1 Interchangeable plasma nozzle interface
04/11/2012EP1623064B1 Plasma treatment apparatus and method
04/11/2012CN102415221A 用于检测用于电流的柔性连接中断的配置及其方法 Detecting a current configuration of the flexible connection is interrupted and a method for
04/11/2012CN102414782A Preparation unit for lithogrpahy machine
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