Patents for H05H 1 - Generating plasma; Handling plasma (22,647)
05/2012
05/30/2012CN202262019U Microwave generation antenna
05/30/2012CN202238033U Device for modifying surface of material by low temperature plasmas
05/30/2012CN102484940A 局部等离子体约束和压强控制装置及其方法 Local plasma constraints and pressure control device and method
05/30/2012CN102484939A 等离子体处理装置和基板处理方法 The substrate processing apparatus and plasma processing method
05/30/2012CN102484065A 基板处理装置的运行方法 Method of operating a substrate processing apparatus
05/30/2012CN102484043A 控制限制环位置的直接驱动装置及其方法 Ring position of the control limits direct drive apparatus and method
05/30/2012CN102483959A Systems And Methods For Plasma Compression With Recycling Of Projectiles
05/30/2012CN102481657A 等离子焊炬和等离子弧焊接方法 Plasma torch and plasma arc welding method
05/30/2012CN102481536A 用于纳米粉体的合成和材料加工的等离子体反应器 Plasma reactor for nanopowder synthesis and materials processing
05/30/2012CN102480831A 下电极装置及半导体设备 The lower electrode device and semiconductor device
05/30/2012CN102479657A 一种多段式匹配器 A multi-stage matcher
05/30/2012CN102477921A Fuel economizer of combustion engine
05/30/2012CN102121448B Microwave plasma igniter for engine of automobile
05/30/2012CN102032103B Method for enhancing wind energy utilization of vertical axis wind turbine by using plasma technology
05/30/2012CN101954324B Plasma spray gun used for low-pressure plasma spraying
05/30/2012CN101637069B Plasma energy converter and an electromagnetic reactor used for producing said converter
05/30/2012CN101276996B Plasma jet spark plug and manufacturing method thereof
05/30/2012CN101198207B Plasma processing apparatus
05/30/2012CN101090598B Plasma processing apparatus and plasma processing method
05/29/2012US8187679 Radical-enhanced atomic layer deposition system and method
05/29/2012US8187678 Ultra-thin microporous/hybrid materials
05/29/2012CA2679033C A plasma electric power generation system in a field reversed configuration and direct energy conversion
05/24/2012WO2012065980A1 Microwave icp resonator
05/24/2012US20120128893 Method for closing holes
05/24/2012US20120128578 System and Method for Extracting and Collecting Substances From a Molecular Combination
05/24/2012US20120125891 Plasma processing apparatus and plasma processing method
05/24/2012DE112010000850T5 Verfahren und Vorrichtung zum Aufrechterhalten und Erzeugen eines Plasmas Method and apparatus for maintaining and generating a plasma
05/24/2012DE102010060762A1 Plasmabearbeitungsvorrichtung The plasma processing apparatus
05/23/2012EP1636833B1 Method of joining silicon parts with plasma spraying ; corresponding structure
05/23/2012EP1547452B1 Plasma spraying device
05/23/2012EP1081749B1 Protective member for inner surface of chamber and plasma processing apparatus
05/23/2012EP1039990B1 Fluorine-doped diamond-like coatings
05/23/2012CN202231940U Plasma reactor capable of improving uniformity of plasma reaction
05/23/2012CN202231939U 等离子体反应器 Plasma reactor
05/23/2012CN102474974A Electromagnetic-radiation power-supply mechanism and microwave introduction mechanism
05/23/2012CN102474973A 用于vhf阻抗匹配调节的设备 Adjustable impedance matching device for vhf
05/23/2012CN102474972A 用于等离子体电弧检测、隔离和预防的系统和方法 System and method for a plasma arc detection, isolation and prevention
05/23/2012CN102474971A Pulse modulated RF power control method and pulse modulated RF power supply device
05/23/2012CN102474970A 喷嘴保护罩和喷嘴保护罩保持架以及具有喷嘴保护罩和/或喷嘴保护罩保持架的电弧等离子燃烧器 The nozzle guard and the nozzle protection cover has a nozzle holder and the protective cover and / or the nozzle protection cover of the holder arc plasma burner
05/23/2012CN102474969A 用于液体冷却的等离子枪的喷嘴和具有该喷嘴的等离子枪头 A nozzle for a liquid-cooled plasma gun having a nozzle of the plasma tip
05/23/2012CN102474968A 预测刻蚀率均匀性以评测校正等离子体腔的方法和装置 Etch rate uniformity to predict the evaluation of the correction method and apparatus for plasma chamber
05/23/2012CN102473609A 成膜装置 Film forming apparatus
05/23/2012CN102473585A 照射装置 Irradiation device
05/23/2012CN102472240A 混合器、匹配器、点火单元、及等离子体发生器 Mixers, matching, ignition unit, and a plasma generator
05/23/2012CN102471879A Film-forming apparatus
05/23/2012CN102471872A 分割环状肋型等离子处理装置 Segmented annular rib type plasma processing apparatus
05/23/2012CN102471869A 阳极壁多分割型等离子发生装置及等离子处理装置 Device and the wall of the plasma processing apparatus of the segmented type anode plasma generating
05/23/2012CN102469676A 等离子体生成装置 Plasma generating means
05/23/2012CN102469675A Power matching apparatus and semiconductor equipment
05/23/2012CN102080619B Engine ignition device on basis of microwave plasma
05/23/2012CN101998747B Low-temperature plasma device
05/23/2012CN101835339B Panel electrode radio-frequency capacitance coupling argon-oxygen/argon-nitrogen plasma generator under constant pressure
05/23/2012CN101533764B Shower head and substrate processing apparatus
05/23/2012CN101507370B Plasma torch head, plasma torch shaft and plasma torch
05/23/2012CN101443970B Discharge device and air purifying device
05/23/2012CN101277578B Plasma processing apparatus, high frequency power source correction method, high frequency power source
05/23/2012CN101276997B Plasma jet spark plug
05/23/2012CN101188901B High frequency power supply device and high frequency power supplying method
05/23/2012CN101076504B Lining for carbothermic reduction furnace
05/22/2012US8183495 Cascade source and a method for controlling the cascade source
05/22/2012US8182870 Method for generating small and ultra small apertures, slits, nozzles and orifices
05/18/2012WO2012064773A1 Inertial confinement fusion power plant which decouples life-limited component from plant availability
05/18/2012WO2012064746A1 Fusion target injection and tracking
05/18/2012WO2012064738A2 Ion-mode plasma containment
05/18/2012WO2012064311A1 Method and device for transporting vacuum arc plasma
05/18/2012WO2012063857A1 Plasma generator, and plasma generating method
05/18/2012WO2012063856A1 Plasma generating device, plasma generating method, and method for suppressing ozone generation
05/18/2012WO2012063742A1 Plasma device and method for manufacturing same
05/18/2012WO2012063474A1 Plasma treatment device and plasma treatment method
05/18/2012CA2815828A1 Fusion target injection and tracking
05/18/2012CA2813965A1 Inertial confinement fusion power plant which decouples life-limited components from plant availability
05/17/2012US20120121927 Steel sheet provided with a corrosion protection system and method for coating steel sheet with such a corrosion protection system
05/17/2012US20120119649 Plasma generating apparatus
05/17/2012US20120117930 Plasma treated filter
05/16/2012EP2453466A1 Vacuum processing apparatus
05/16/2012EP2451991A2 Apparatus and method for plasma processing
05/16/2012DE102011055125A1 Plasmaerzeugungsvorrichtung Plasma-generating device
05/16/2012DE102010043940A1 Mikrowellen-ICP-Resonator Microwave ICP-resonator
05/16/2012CN102460649A 经阳极处理的喷头 Sprinklers anodized
05/16/2012CN102458032A 微波等离子体源和等离子体处理装置 Microwave plasma source and a plasma processing apparatus
05/16/2012CN102458031A 用于等离子体应用和/或感应加热应用的功率供给系统 For plasma application and / or application of induction heating power supply system
05/15/2012US8178170 applying coatings to plastic substrates by plasma enhanced chemical vapor deposition; coatings having hardness and flexibility
05/15/2012US8177992 Plasma etching apparatus
05/15/2012US8177948 Device for carbon deposition
05/10/2012WO2012061070A1 System and method for supplying fluids to a plasma arc torch
05/10/2012US20120114877 Radical Reactor with Multiple Plasma Chambers
05/10/2012US20120111834 Plasma processing apparatus
05/09/2012EP2449862A1 Nozzle for a liquid-cooled plasma torch and plasma torch head having the same
05/09/2012EP2449861A1 Device for emitting a plasma jet from the atmospheric air at ambient temperature and pressure, and use of said device
05/09/2012CN1905135B Plasma etching apparatus
05/09/2012CN102450108A In-situ plasma/laser hybrid scheme
05/09/2012CN102449739A Conjugated icp and ecr plasma sources for wide ribbon ion beam generation and control
05/09/2012CN102448240A Needle-type array normal temperature and pressure plasma generation device and use method thereof
05/09/2012CN102448239A Dielectric barrier discharge enhanced-type low-temperature plasma brush generation device
05/09/2012CN101925246B Method for producing low-temperature plasma capable of being touched by human bodies directly
05/09/2012CN101854770B Water inflowing and returning device for plasma generator
05/09/2012CN101754562B Atmospheric plasma generating device with function of electric arc control
05/09/2012CN101730374B Plasma system
05/09/2012CN101702865B Plasma needle device
05/09/2012CN101128964B Silent discharge type plasma device
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