| Patents for H05H 1 - Generating plasma; Handling plasma (22,647) |
|---|
| 01/16/2013 | CN102881551A Plasma processing system with airflow limiting mechanism and method using same |
| 01/16/2013 | CN102076878B Power source device |
| 01/16/2013 | CN101242702B Plasma reactor with ion distribution uniformity controller employing plural VHF sources |
| 01/15/2013 | CA2549626C Plasma torch with interchangeable electrode systems |
| 01/10/2013 | WO2013005943A1 Impedance matching device, linear motion module, and radio frequency power supply device |
| 01/10/2013 | US20130009545 Synchronized and shortened master-slave rf pulsing in a plasma processing chamber |
| 01/10/2013 | US20130008608 Plasma processing apparatus |
| 01/10/2013 | US20130008603 Coaxial cable and substrate processing apparatus |
| 01/10/2013 | DE102007015302B4 Konverter, insbesondere für ein Ionentriebwerk Converter, particularly for an ion engine |
| 01/09/2013 | EP2544223A1 Thin film forming apparatus |
| 01/09/2013 | EP2543881A1 Hall thruster, cosmonautic vehicle, and propulsion method |
| 01/09/2013 | CN202663641U Upper electrode structure of dry-etching machine |
| 01/09/2013 | CN202663640U Atmosphere plasma generating device for sterilizing and disinfecting |
| 01/09/2013 | CN102870503A Temperature controlled plasma processing chamber component with zone dependent thermal efficiencies |
| 01/09/2013 | CN102870502A Method and apparatus for applying plasma particles to a liquid and use for disinfecting water |
| 01/09/2013 | CN102869183A Method for obtaining ionized metal vapor |
| 01/09/2013 | CN102869182A Large-volume microwave plasma generating device based on coupling window radiation |
| 01/09/2013 | CN102869181A Electrode structure and electrode fixing structure for plasma thruster |
| 01/09/2013 | CN102869180A Barrier discharge plasma surface treatment system for large-breath medium |
| 01/09/2013 | CN102867725A Antenna, dielectric window, plasma processing apparatus and plasma processing method |
| 01/09/2013 | CN101631416B Device for processing air plasma jet large area surface |
| 01/09/2013 | CN101488372B Hardware compensating apparatus for plasma current |
| 01/08/2013 | US8349412 Deposition of amorphous silicon films by electron cyclotron resonance |
| 01/08/2013 | US8349309 Polymeric coupling agents and pharmaceutically-active polymers made therefrom |
| 01/03/2013 | WO2013003274A1 Optically pumping to sustain plasma |
| 01/03/2013 | WO2013003205A1 Method and apparatus for measuring the power of a power generator while operating in variable frequency mode and/or while operating in pulsing mode |
| 01/03/2013 | WO2013003203A1 Projected plasma source |
| 01/03/2013 | WO2012134199A3 Plasma-generating apparatus and substrate-treating apparatus |
| 01/03/2013 | WO2012128561A3 Plasma advanced water treatment apparatus |
| 01/03/2013 | US20130002137 Gas conversion system |
| 01/03/2013 | US20130001196 Projected Plasma Source |
| 01/03/2013 | DE102011056555B3 Hollow cathode with emission pipe is obtained from lanthanum hexaboride, and contains specified amount of ceramic material and element of specific group |
| 01/02/2013 | EP2540398A1 Spark management device and method |
| 01/02/2013 | EP2539916A2 High-frequency supply of a load without impedance matching |
| 01/02/2013 | CN202652678U Antenna adjustment device of inductive coupled plasma source equipment |
| 01/02/2013 | CN202651677U Device for circuit protection |
| 01/02/2013 | CN102860139A Plasma processing apparatus |
| 01/02/2013 | CN102860138A Plasma processing apparatus and liner assembly for tuning electrical skews |
| 01/02/2013 | CN102859638A Electrode for a DBD plasma process |
| 01/02/2013 | CN102859280A Tilting furnace |
| 01/02/2013 | CN102859033A A coating method for gas delivery system |
| 01/02/2013 | CN102858078A Plasma processing apparatus |
| 01/02/2013 | CN102858077A Plasma cleaning equipment in two-sided turnover door structure |
| 01/02/2013 | CN102852595A Oxygen plasma purification device of automobile exhaust PM2.5 particles and purification method thereof |
| 01/02/2013 | CN102333409B Atmospheric plasma device and manufacturing method thereof |
| 01/02/2013 | CN102036460B Tabulate plasma generating device |
| 01/02/2013 | CN101609788B Etching system and method of manufacturing semiconductor device |
| 01/02/2013 | CN101596436B Low-ozone high-efficiency dielectric discharge reactor |
| 01/02/2013 | CN101553074B 顶板 Roof |
| 01/02/2013 | CN101547549B Plasma process apparatus, plasma process method, and object processed by the plasma process method |
| 01/02/2013 | CN101277580B Plasma processing apparatus of substrate and plasma processing method thereof |
| 01/01/2013 | US8344482 Etching apparatus and etching method for substrate bevel |
| 01/01/2013 | US8343594 Film formation method and apparatus for semiconductor process |
| 01/01/2013 | US8343592 Asymmetrical RF drive for electrode of plasma chamber |
| 01/01/2013 | US8343372 Substrate is electrostatically attracted to the mounting stage when the substrate is to be thermally expanded, the substrate can strongly rub against the mounting surface, and hence the smoothing of the mounting surface can be reliably promoted |
| 12/27/2012 | WO2012178177A2 Microplasma jet devices, arrays, medical devices and methods |
| 12/27/2012 | WO2012178147A2 Solid state heating source and plasma actuators including extreme materials |
| 12/27/2012 | WO2012177876A2 Encapsulation of electrodes in solid media for use in conjunction with fluid high voltage isolation |
| 12/27/2012 | WO2012177561A2 Method for generating electron beams in a hybrid laser-plasma accelerator |
| 12/27/2012 | WO2012177293A2 Transmission line rf applicator for plasma chamber |
| 12/27/2012 | WO2012176242A1 Plasma processing device |
| 12/27/2012 | WO2012175066A1 Electrode arrangement for a dielectrically limited gas discharge |
| 12/27/2012 | US20120328902 Method of fabricating a component and a manufactured component |
| 12/27/2012 | US20120327568 Thin Film Coatings for Glass Members |
| 12/27/2012 | US20120326592 Transmission Line RF Applicator for Plasma Chamber |
| 12/27/2012 | US20120325406 Lower liner with integrated flow equalizer and improved conductance |
| 12/27/2012 | DE102011105713A1 Elektrodenanordnung für eine dielektrisch behinderte Gasentladung Electrode assembly for a dielectric barrier discharge gas |
| 12/27/2012 | DE10122598B4 Verfahren für die Ionisierung eines Arbeitsgases zur Oberflächenbehandlung eines Werkstückes A process for the ionization of a working gas for the surface treatment of a workpiece |
| 12/26/2012 | EP2537399A1 Improved alignment features for a plasma torch connector assembly |
| 12/26/2012 | EP2537398A1 Device and method for generating a plasma discharge for patterning the surface of a substrate |
| 12/26/2012 | CN1787881B Ultra low k (ulk) SiCOH film and manufacture method thereof |
| 12/26/2012 | CN102845137A Methods and apparatus for induction coil arrangement in plasma processing system |
| 12/26/2012 | CN102843851A Plasma generating device and method |
| 12/26/2012 | CN102837002A Plasma device for manufacturing metal powder and manufacture method of metal powder |
| 12/26/2012 | CN101303963B Method and apparatus for eliminating migration of etching pattern |
| 12/26/2012 | CN101288347B Method for operation of a steam plasma burner and steam cutting device |
| 12/25/2012 | US8337959 Mold is disposed in an evacuable chamber, cleaned to remove surface organic contamination and coated with the surface release layer in a chamber, all without relocation or undesired time delay; imprint lithography |
| 12/25/2012 | US8337957 Gas flow near the substrate surface; plasma polymerization |
| 12/25/2012 | US8336337 Method and device for producing a blank mold from synthetic quartz glass by using a plasma-assisted deposition method |
| 12/20/2012 | WO2012173611A1 Coarse hard-metal particle internal injection torch and associated compositions, systems, and methods |
| 12/20/2012 | WO2012173229A1 Plasma generator and plasma generation device |
| 12/20/2012 | WO2012172630A1 Surface processing device and surface processing method |
| 12/20/2012 | WO2012172285A1 Device for providing a flow of plasma |
| 12/20/2012 | WO2012171235A1 Atmospheric pressure plasma device and process for manufacturing same |
| 12/20/2012 | US20120321527 Cyclonic reactor with non-equilibrium gliding discharge and plasma process for reforming of solid hydrocarbons |
| 12/20/2012 | US20120319584 Method of controlling the switched mode ion energy distribution system |
| 12/20/2012 | US20120318456 Method of controlling the switched mode ion energy distribution system |
| 12/20/2012 | CA2837996A1 Coarse hard-metal particle internal injection torch and associated compositions, systems, and methods |
| 12/19/2012 | EP2534931A2 Method and apparatus for applying plasma particles to a liquid and use for disinfecting water |
| 12/19/2012 | EP2534051A1 A micro-nozzle thruster |
| 12/19/2012 | CN202617491U Guided wave radiator possessing non-gaseous dielectric medium and used for plasma chamber |
| 12/19/2012 | CN202615803U Vacuum feed port using conical gradient insulation ceramic connection seal |
| 12/19/2012 | CN102833937A Plasma treatment apparatus |
| 12/19/2012 | CN102833936A Atmosphere DC (direct current) arc discharge plasma generator |
| 12/19/2012 | CN102832095A Plasma processing apparatus |
| 12/19/2012 | CN102169145B Detection and suppression circuit and method of electrical arcing |
| 12/19/2012 | CN102065626B Atmospheric pressure non-thermal plasma brush generator and array combination thereof |
| 12/19/2012 | CN101720163B Medium barrier glow discharge reactor at atmospheric pressure |
| 12/19/2012 | CN101174096B Mask etch plasma reactor with cathode providing a uniform distribution of etch rate |
| 12/18/2012 | US8334028 Method of forming a protective film |