Patents for H05H 1 - Generating plasma; Handling plasma (22,647)
02/2013
02/07/2013CA2843645A1 Plasma arc furnace and applications
02/06/2013EP2554028A1 Liquid-gas interface plasma device
02/06/2013CN202721890U Module of plasma feeding device and plasma feeding device
02/06/2013CN202721889U Plasma generator
02/06/2013CN102918932A Microwave introduction mechanism, microwave plasma source and microwave plasma treatment device
02/06/2013CN102917528A Electrode for a contact start plasma arc torch and contact start plasma arc torch employing such electrodes
02/06/2013CN102915902A Capacitive coupling type plasma processing device and substrate processing method thereof
02/06/2013CN102333410B Atmospheric pressure cold plasma jet device for etching photoresist materials
02/06/2013CN101794990B System and method for compensating direct current self-bias voltage
02/06/2013CN101548364B Top panel and plasma processing apparatus
02/05/2013US8368032 Radiation source, lithographic apparatus, and device manufacturing method
02/05/2013US8367005 Gas processing apparatus, gas processing system, and gas processing method, and exhaust gas processing system and internal combustion engine using the same
02/05/2013CA2603999C Apparatus and method for purification and disinfection of liquid, solid or gaseous substances
01/2013
01/31/2013WO2013016619A1 Ion energy control system for advanced plasma energy processing systems
01/31/2013WO2013016497A2 Microplasma generating array
01/31/2013US20130029492 Plasma processing method and plasma processing apparatus
01/31/2013US20130026920 Iodine Fueled Plasma Generator System
01/31/2013US20130026919 Pulsed Plasma Generator
01/31/2013US20130026141 Apparatus and Method for a Liquid Cooled Shield for Improved Piercing Performance
01/31/2013US20130026137 Device and method for generating a pulsed anisothermal atmospheric pressure plasma
01/31/2013US20130025790 Plasma processing apparatus and plasma processing method
01/31/2013US20130025788 Distributed, Non-Concentric Multi-Zone Plasma Source Systems, Methods and Apparatus
01/31/2013DE112006001797B4 Plasmagasverteiler mit integrierten Dosier- und Strömungsdurchgängen Plasma gas distributor with integrated metering and flow passages
01/31/2013DE102011080035A1 Verfahren und Vorrichtung zum Schutz von an einen Hochfrequenzgenerator angeschlossenen passiven Komponenten Method and apparatus for the protection of devices connected to a high frequency generator passive components
01/30/2013EP2550379A2 Dielectric deposition using a remote plasma source
01/30/2013CN202713770U Low-power integrated microwave microplasma source
01/30/2013CN202713769U Internal arc plasma gun
01/30/2013CN202713768U 等离子体混合装置 Plasma mixing device
01/30/2013CN102907181A Component temperature control by coolant flow control and heater duty cycle control
01/30/2013CN102907180A Temperature control in plasma processing apparatus using pulsed heat transfer fluid flow
01/30/2013CN102905456A Atmospheric plasma equipment and waveguide thereof
01/30/2013CN102905455A Atmospheric pressure plasma system for continuous polymeric modification of fabrics or polymeric films
01/30/2013CN102903886A Method for removing battery electrode sheet burr by corroding with dry method
01/30/2013CN102896115A Novel normal-pressure medium barrier type active free radical cleaning equipment
01/30/2013CN102896114A Novel flat-mouth type equipment for cleaning by atmospheric-pressure double-dielectric barrier active radicals
01/30/2013CN102896113A Novel spray gun for cleaning by double-dielectric barrier atmospheric-pressure plasma free radicals
01/30/2013CN102225791B Low temperature plasma wastewater treatment device by radial-flow dielectric barrier discharge
01/30/2013CN102170958B Jet-type radical ionizing device for treating flue gas by corona discharging
01/30/2013CN101835334B Method for controlling crossed field discharge resonant coupling
01/30/2013CN101312799B Apparatus and method for clean, rapidly solidified alloys
01/29/2013US8362388 Multi-gas mixer and device for supplying gas mixture to plasma torch
01/29/2013US8362386 Power delivery unit, plasma spray system, and method of using plasma spray system
01/29/2013US8361565 Method for plasma treatment and painting of a surface
01/29/2013US8361549 Power loading substrates to reduce particle contamination
01/29/2013US8361401 Vortex reactor and method of using it
01/24/2013WO2013013020A1 Improved method of starting and stopping a plasma arc torch
01/24/2013WO2013012693A1 Dual phase cleaning chambers and assemblies comprising the same
01/24/2013WO2013012591A1 Negative ion control for dielectric etch
01/24/2013WO2013012562A2 Methods and apparatus for controlling power distribution in substrate processing systems
01/24/2013WO2013011968A1 Plasma generating device, and internal combustion engine
01/24/2013WO2013011967A1 Internal combustion engine
01/24/2013WO2013011966A1 Internal combustion engine
01/24/2013WO2013011965A1 Internal combustion engine, and plasma generating device
01/24/2013WO2013011964A1 Plasma generating device, and internal combustion engine
01/24/2013WO2013011810A1 Plasma generating apparatus, internal combustion engine and analysis device
01/24/2013WO2013011762A1 Plasma generating apparatus, and cleaning/purifying apparatus using same
01/24/2013WO2013011727A1 Plasma generator and cleaning/purification apparatus using same
01/24/2013WO2012157861A3 Electromagnetic continuous casting apparatus for producing a silicon ingot
01/24/2013US20130022760 Plasma nitriding method
01/24/2013US20130020939 C atmospheric plasma equipment and waveguide for the same
01/24/2013US20130020027 Etching equipment
01/24/2013DE19936199B4 Magnetronreaktor zum Bereitstellen einer hochdichten, induktiv gekoppelten Plasmaquelle zum Sputtern von Metallfilmen und Dielektrischen Filmen Magnetronreaktor for providing a high-density, inductively coupled plasma source for sputtering of metal films and Dielectric films
01/24/2013DE112010003598T5 Verfahren zum Betreiben einer Substratbearbeitungsvorrichtung A method of operating a substrate processing apparatus
01/23/2013EP2549840A1 Plasma processing device, plasma processing method, and method for manufacturing a semiconductor element
01/23/2013EP2549839A2 Plasma spray nozzle with internal injection
01/23/2013CN202697018U Anode base for direct current arc discharge high-density plasma generator
01/23/2013CN202697017U Discharge cavity used for direct current arc discharge high-density plasma generation device
01/23/2013CN102893705A Inductive plasma source with metallic shower head using b-field concentrator
01/23/2013CN102892248A A surface dielectric barrier discharge plasma unit and a method of generating a surface plasma
01/23/2013CN102891071A Novel atmospheric pressure plasma free-radical cleaning spray gun
01/23/2013CN102186303B Microwave power confocal synthesis device
01/23/2013CN102098864B 等离子体产生装置 Plasma generating means
01/23/2013CN102077320B Plasma processing device, plasma processing method, and mechanism for regulating temperature of dielectric window
01/23/2013CN101622912B Plasma processing apparatus and method for using plasma processing apparatus
01/22/2013US8357435 Flowable dielectric equipment and processes
01/22/2013US8357434 Apparatus for the deposition of a conformal film on a substrate and methods therefor
01/22/2013CA2522058C High-frequency plasma beam source and method for the irradiation of a surface
01/17/2013WO2013009242A1 Substrate integrated plasma source
01/17/2013WO2013008563A1 Axial feed plasma spraying device
01/17/2013WO2013008344A1 Plasma processing apparatus
01/17/2013WO2012112753A3 System, method and apparatus for thin film manufacturing
01/17/2013US20130017686 Plasma processing apparatus and plasma processing method
01/17/2013US20130017343 Vapor deposition apparatus, vapor deposition method, and method of manufacturing organic light-emitting display apparatus
01/17/2013US20130017338 Process for forming a ceramic abrasive air seal with increased strain tolerance
01/17/2013US20130017315 Methods and apparatus for controlling power distribution in substrate processing systems
01/17/2013US20130015766 Apparatus for generating mini and micro plasmas and methods of use
01/17/2013US20130015765 Methods and Structures for Rapid Switching Between Different Process Gases in an Inductively-Coupled Plasma (ICP) Ion Source
01/17/2013US20130015159 Apparatus and a method and a system for treating a surface with at least one gliding arc source
01/17/2013US20130015053 Inductively coupled rf plasma source with magnetic confinement and faraday shielding
01/17/2013DE112007003640B4 Vorrichtung zur Erzeugung eines Plasmas mittels einer dielektrischen Barrierenentladung An apparatus for generating a plasma by means of a dielectric barrier discharge
01/17/2013DE102011107431A1 Apparatus for plasma treatment of glass grain and granular electronic waste, has fixed vacuum tube that is extended into rotating tube in which granular material supplied is processed with ionized gas due to flow of countercurrent
01/17/2013DE102009017888B4 Verfahren und Vorrichtung zum Steuern einer Plasmadichteverteilung in einem Vakuumprozess Method and device for controlling a plasma density distribution in a vacuum process
01/17/2013CA2830431A1 Axial feed plasma spraying device
01/16/2013EP2547179A2 Plasma spray nozzle with internal injection
01/16/2013EP2547178A2 Plasma spray nozzle with internal injection
01/16/2013EP2545752A1 Method and arrangement for treating an object with a low-temperature plasma
01/16/2013EP2544564A1 Appliance, particularly kitchen appliance or laboratory table and deodorant device
01/16/2013CN102883517A Visual radio frequency impedance matcher
01/16/2013CN102883516A Novel needle-ring type plasma jet device
01/16/2013CN102883515A Array device of atmospheric pressure flat dielectric barrier plasma jet discharge
1 ... 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 ... 227