Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
08/2012
08/28/2012US8252633 Subassembly that includes a power semiconductor die and a heat sink having an exposed surface portion thereof
08/28/2012US8252632 Semiconductor device and manufacturing method of the same
08/28/2012US8252631 Method and apparatus for integrated circuit packages using materials with low melting point
08/28/2012US8252630 Semiconductor device, method of manufacturing the semiconductor device, flip chip package having the semiconductor device and method of manufacturing the flip chip package
08/28/2012US8252629 Method for making a stackable package
08/28/2012US8252628 Semiconductor device and method of manufacturing the same
08/28/2012US8252624 Method of manufacturing thin film solar cells having a high conversion efficiency
08/28/2012US8252623 Phase change memory device with alternating adjacent conduction contacts and fabrication method thereof
08/28/2012US8252622 Phase change current density control structure
08/28/2012US8252621 Method for forming copper indium gallium chalcogenide layer with optimized gallium content at its surface
08/28/2012US8252620 Process for impregnating photosensitizing dye onto conductive substrate of photoanode of a solar cell
08/28/2012US8252619 Treatment of thin film layers photovoltaic module manufacture
08/28/2012US8252618 Methods of manufacturing cadmium telluride thin film photovoltaic devices
08/28/2012US8252617 Continuous large area imaging and display arrays using readout arrays fabricated in silicon-on-glass substrates
08/28/2012US8252616 Package structure of photodiode and forming method thereof
08/28/2012US8252614 Solid-state image sensor and imaging system
08/28/2012US8252613 Color stable manganese-doped phosphors
08/28/2012US8252611 Buffer layer and manufacturing method thereof, reaction solution, photoelectric conversion device, and solar cell
08/28/2012US8252610 Method of manufacturing light emitting diode
08/28/2012US8252609 Curvature reduction for semiconductor wafers
08/28/2012US8252608 Measurement of a sample using multiple models
08/28/2012US8252518 Chemically amplified positive resist composition and resist patterning process
08/28/2012US8252488 Mask blank substrate manufacturing method, and reflective mask blank manufacturing method
08/28/2012US8252487 Use in lithography; a transparent substrate, a patterned absorber layer to impart projection beam with a pattern in its cross-section
08/28/2012US8252419 Adhesive for bonding circuit members, circuit board and process for its production
08/28/2012US8252404 High resistivity silicon wafers
08/28/2012US8252194 Methods of removing silicon oxide
08/28/2012US8252193 Plasma processing apparatus of substrate and plasma processing method thereof
08/28/2012US8252189 Nano structure fabrication
08/28/2012US8252167 Plating apparatus
08/28/2012US8252157 Electrolytic copper plating method, phosphorous copper anode for electrolytic copper plating, and semiconductor wafer having low particle adhesion plated with said method and anode
08/28/2012US8252140 Plasma chamber for wafer bevel edge processing
08/28/2012US8252118 Substrate support device and plasma processing apparatus
08/28/2012US8252116 Perimeter partition-valve with protected seals and associated small size process chambers and multiple chamber systems
08/28/2012US8252114 Gas distribution system and method for distributing process gas in a processing system
08/28/2012US8251775 Mechanism and method for detecting the motion of a shaft
08/28/2012US8251422 Apparatus for transferring electronic components in stages
08/28/2012US8251012 Substrate processing apparatus and semiconductor device producing method
08/28/2012US8251011 Plasma processing apparatus
08/28/2012CA2662424C Method for forming stacks of wafers to be doped one-sided, in particular solar wafers, and handling system for loading a process boat with wafer batches
08/23/2012WO2012112959A1 Etch process control using optical metrology and sensor devices
08/23/2012WO2012112912A2 Side-mounted controller and methods for making the same
08/23/2012WO2012112880A1 In situ optical diagnostic for monitoring or control of sodium diffusion in photovoltaics manufacturing
08/23/2012WO2012112746A1 Biocompatible graphene sensor
08/23/2012WO2012112725A1 Defect-controlling structure for epitaxial growth, light emitting device containing defect-controlling structure, and method of forming the same
08/23/2012WO2012112630A1 Semiconductor device with low-conducting field-controlling element
08/23/2012WO2012112629A2 Controlling a non-volatile memory
08/23/2012WO2012112552A1 Method of improving the passivation effect of films on a substrate
08/23/2012WO2012112516A1 Systems and methods for rapid liquid phase deposition of films
08/23/2012WO2012112373A1 Combined injection module for sequentially injecting source precursor and reactant precursor
08/23/2012WO2012112342A2 Method and apparatus for improved laser scribing of opto-electric devices
08/23/2012WO2012112290A2 Optical imaging system with laser droplet plasma illuminator
08/23/2012WO2012112187A1 Method and apparatus for multizone plasma generation
08/23/2012WO2012112025A1 Single and dual stage wafer cushion and wafer separator
08/23/2012WO2012112023A1 Single and dual stage wafer cushion
08/23/2012WO2012111963A2 Substrate film and method for manufacturing same
08/23/2012WO2012111884A1 Laminate substrate and method of fabricating the same
08/23/2012WO2012111869A1 Substrate-processing method
08/23/2012WO2012111868A1 Substrate-processing system
08/23/2012WO2012111809A1 Series of nozzles, and substrate treatment apparatus provided with series of nozzles
08/23/2012WO2012111789A1 Method for forming insulating film
08/23/2012WO2012111729A1 Method for producing silicon dioxide film
08/23/2012WO2012111722A1 Semiconductor chip and semiconductor device
08/23/2012WO2012111694A1 Method for producing substrate having surface nanostructure
08/23/2012WO2012111682A1 Photocurable film-forming composition and manufacturing method for cured film
08/23/2012WO2012111669A1 Method for conveying object to be processed, and device for processing object to be processed
08/23/2012WO2012111661A1 Tab carrier tape and tab tape
08/23/2012WO2012111656A1 Curable composition for nanoimprinting, nanoimprinting compact, and pattern forming method
08/23/2012WO2012111652A1 Liquid sealing resin composition and semiconductor device obtained using liquid sealing resin composition
08/23/2012WO2012111618A1 Substrate drying apparatus
08/23/2012WO2012111616A1 Composite substrate with protection film and method of manufacturing semiconductor device
08/23/2012WO2012111602A1 Wet etching apparatus and wet etching method
08/23/2012WO2012111590A1 Imprinting apparatus
08/23/2012WO2012111575A1 COMPOSITION FOR FORMING n-TYPE DIFFUSION LAYER, PROCESS FOR PRODUCING n-TYPE DIFFUSION LAYER, AND PROCESS FOR PRODUCING SOLAR CELL
08/23/2012WO2012111540A1 Heat-resistant adhesive tape for semiconductor device manufacturing, and method for manufacturing semiconductor chips using tape
08/23/2012WO2012111502A1 Polishing pad
08/23/2012WO2012111459A1 Gap embedding composition, method of embedding gap and method of producing semiconductor device by using the composition
08/23/2012WO2012111450A1 Photoresist composition and resist pattern formation method
08/23/2012WO2012111439A1 Mounting method and mounting device
08/23/2012WO2012111393A1 Semiconductor device
08/23/2012WO2012111379A1 Semiconductor device and manufacturing method thereof
08/23/2012WO2012111365A1 Anisotropic electroconductive film
08/23/2012WO2012111363A1 Lateral-type semiconductor device
08/23/2012WO2012111359A1 Template processing method, computer storage medium, template processing apparatus, and imprinting system
08/23/2012WO2012111356A1 Two-liquid mixing first and second liquids and method for producing printed circuit board
08/23/2012WO2012111314A1 Insulating material forming composition for electronic elements, insulating material for electronic elements, electronic element, and thin film transistor
08/23/2012WO2012111285A1 Insulated gate semiconductor device
08/23/2012WO2012111154A1 Probe inspection method and cured resin composition
08/23/2012WO2012111139A1 Method for cleaning filter, and method for washing or drying body to be treated
08/23/2012WO2012111093A1 Method and device for measuring carrier lifetime
08/23/2012WO2012111055A1 Member mounting method
08/23/2012WO2012110647A1 Silicon-based hetero-bipolar transistor comprising a collector layer made of an iii-v semiconductor
08/23/2012WO2012110591A1 Method for producing a substrate holder
08/23/2012WO2012110458A1 Method for producing a thin film made of lead zirconate titanate
08/23/2012WO2012110365A1 Carrier substrate and method for producing semiconductor chips
08/23/2012WO2012110144A1 Lithographic apparatus and device manufacturing method.
08/23/2012WO2012091406A3 Apparatus for processing exhaust fluid
08/23/2012WO2012087974A3 Process margin engineering in charge trapping field effect transistors
08/23/2012WO2012087477A3 Use of patterned uv source for photolithography
08/23/2012WO2012082881A3 Void-free wafer bonding using channels