Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
09/2012
09/05/2012CN102074471B Method for preparing silicon oxide nitride oxide semiconductor (SONOS) flash memory by using aluminum oxide as tunneling dielectric film
09/05/2012CN102070120B Preparation method for high-density interposer for microelectronic system-in-package
09/05/2012CN102067347B Method for fabricating InGaN-based multi-quantum well layers
09/05/2012CN102064092B Carrier separation method for semiconductor technology
09/05/2012CN102049734B Method for dynamically adjusting polishing parameters in chemical mechanical polishing process
09/05/2012CN102044486B Method for etching silicon contact hole by taking oxide film as barrier layer
09/05/2012CN102044442B Method for improving interface feature of gate medium having high dielectric constant
09/05/2012CN102044436B Method for preparing semiconductor device
09/05/2012CN102034826B Semiconductor element and manufacturing method thereof
09/05/2012CN102034768B Embedded-dice-inside type substrate structure with redistribution layer covered on both side and method thereof
09/05/2012CN102030301B Micro suspension structure compatible with semiconductor element and manufacturing method thereof
09/05/2012CN102024675B System for discharging and recovering multiple chemicals according to classification
09/05/2012CN102017084B Heating device, film forming apparatus, film forming method, and device
09/05/2012CN102017079B Process for producing SiCAlN base material, process for producing epitaxial wafer, SiCAlN base material, and epitaxial wafer
09/05/2012CN102016721B Laser exposure method, photoresist layer working method, and pattern molding manufacturing method
09/05/2012CN102013418B Novel PCB (Printed Circuit Board) carrier tape for SIM card package
09/05/2012CN102007559B Tunable capacitor and switch using mems with phase change material
09/05/2012CN102005468B Terminal of power semiconductor and manufacturing method of terminal
09/05/2012CN101989553B Method for manufacturing lengthwise region of supernode MOS
09/05/2012CN101989543B Device for reducing polymers at back side of substrate
09/05/2012CN101981663B Method for forming a priming layer for depositing a metal on a substrate and liquid pretreatment agent applied on the substrate to be deposited by metal
09/05/2012CN101981653B Methods and apparatus for conserving electronic device manufacturing resources
09/05/2012CN101976655B Thin film transistor substrate of liquid crystal display panel and manufacturing method thereof
09/05/2012CN101964323B Manufacturing method of flexible display panel
09/05/2012CN101964321B Substrate processing equipment and ejector pin lifting device
09/05/2012CN101960565B Semiconductor substrate contact via
09/05/2012CN101958303B Double-side graph chip forward single package structure and package method thereof
09/05/2012CN101958261B Semiconductor process and stackable semiconductor device packages
09/05/2012CN101952938B Apparatus and method for processing substrate
09/05/2012CN101950740B 半导体装置及其制造方法 Semiconductor device and manufacturing method
09/05/2012CN101950720B Excessive round-hole shielded gate trench (SGT) MOSFET devices and manufacturing processes
09/05/2012CN101944498B Substrate processing equipment and thimble lifting device thereof
09/05/2012CN101937907B Chip stacking package structure and manufacture method thereof
09/05/2012CN101937905B Semiconductor encapsulating part and manufacture method thereof
09/05/2012CN101937854B Substrate holder module and a substrate assembling device containing the same
09/05/2012CN101937169B Method for manufacturing photo mask blank, method for manufacturing photo mask, and coating apparatus
09/05/2012CN101933121B Substrate supporting unit, substrate processing apparatus, and method of manufacturing substrate supporting unit
09/05/2012CN101930996B Semiconductor structure and forming method thereof
09/05/2012CN101925986B Semiconductor device and method for production thereof
09/05/2012CN101924134B Semiconductor device and manufacturing method thereof
09/05/2012CN101924120B Organic electroluminescent display device and method of fabricating the same
09/05/2012CN101924020B Methods of making semiconductor devices
09/05/2012CN101924016B Heating method, device and substrate processing equipment
09/05/2012CN101919027B Combinatorial process system
09/05/2012CN101894744B Laser crystallizing method for polycrystalline silicon film by adopting technology of back insulating layer
09/05/2012CN101889339B Vacuum processing apparatus
09/05/2012CN101888747B Method for manufacturing printed-circuit board
09/05/2012CN101884112B Manufacturing method of thin film transistor and manufacturing method of display device
09/05/2012CN101878519B Method of forming backside point contact structures for silicon solar cells
09/05/2012CN101872717B Coating and developing apparatus, coating and developing method
09/05/2012CN101871096B Methods and apparatuses for transferring articles through a load lock chamber under vacuum
09/05/2012CN101859705B High density trench mosfet with single mask pre-defined gate and contact trenches
09/05/2012CN101859690B Packaging structure, sealing compound module and sealing compound mold for packaging same
09/05/2012CN101855947B Plasma treatment device
09/05/2012CN101853791B Manufacturing method and structure of flip chip package as well as structure of wafer coating
09/05/2012CN101826514B Compact type electric inductance power electronic device encapsulation
09/05/2012CN101809724B Plasma processing apparatus
09/05/2012CN101809503B Positive-type photosensitive resin composition, and method for formation of cured film using the same
09/05/2012CN101794716B 半导体装置及其制造方法 Semiconductor device and manufacturing method
09/05/2012CN101783311B Substrate holder unit and subtrate assembling appartus having the same
09/05/2012CN101781797B Method and system for low temperature ion implantation
09/05/2012CN101779274B Compositions and methods for modifying a surface suited for semiconductor fabrication
09/05/2012CN101778919B Adhesive composition for semiconductor and semiconductor device manufactured using the same
09/05/2012CN101777580B Tunneling field-effect transistor and manufacturing method thereof
09/05/2012CN101777568B CMOS (Complementary Metal-Oxide-Semiconductor Transistor)-process compatible grid-control p-n junction forward-direction injection type silicon light-emitting device and production method thereof
09/05/2012CN101777565B Self-powered low power consumption integrated circuit chip and preparation method thereof
09/05/2012CN101771028B White-light LED chip and manufacturing method thereof
09/05/2012CN101770960B Perfusion device of protection glue
09/05/2012CN101767718B Method of transferring one or more substrates between process modules or between loading/unloading stations
09/05/2012CN101751592B Method and circuit for setting and reading unique identification code of chip on silicon wafer in batch
09/05/2012CN101740493B Transfer method of functional region, LED array, LED printer head, and LED printer
09/05/2012CN101740492B Transfer method of functional region, led array, led printer head, and led printer
09/05/2012CN101728311B SOI substrate and method for producing same, solid-state image pickup device and method for producing same, and image pickup apparatus
09/05/2012CN101728237B Jetspray nozzle and method for cleaning photo masks and semiconductor wafers
09/05/2012CN101726988B Design and layout of phase shifting photolithographic masks
09/05/2012CN101681009B Optical element holding device, lens barrel, exposure device, and device manufacturing method
09/05/2012CN101679811B 粘结剂组合物 Binder composition
09/05/2012CN101677110B Method for improving transistor performance through reducing the salicide interface resistance
09/05/2012CN101667544B Semiconductor device and method of manufacturing a semiconductor device
09/05/2012CN101667529B Mask for thin film deposition and method of manufacturing OLED using the same
09/05/2012CN101656238B Advanced quad flat non-leaded package structure and manufacturing method thereof
09/05/2012CN101636823B Multicrystalline P type wafer, Phosphorus diffusion, phosphorus gettering method, and solar panel including same
09/05/2012CN101633152B Tool setter of sharpening grinding wheel of semiconductor wafer
09/05/2012CN101630649B Inspecting method and inspecting equipment
09/05/2012CN101626012B Long-term annealed integrated circuit arrangements and method for producing the same
09/05/2012CN101617010B Silicone coating composition
09/05/2012CN101611480B Method for manufacturing Ex-situ doped semiconductor transport layer
09/05/2012CN101611473B Methods of fabricating semiconductor devices including implanted regions for providing low-resistance contact to buried layers and related devices
09/05/2012CN101606230B Method and apparatus for contained chemical surface treatment
09/05/2012CN101604704B HEMT device and manufacturing method thereof
09/05/2012CN101595392B Venturi vacuum generator on an electronic component handler
09/05/2012CN101587911B Semiconductor device and method of manufacturing the same
09/05/2012CN101572233B Method for manufacturing a semiconductor substrate including laser annealing
09/05/2012CN101567518B Nitride semi-conductor laser and its manufacturing method, and method for manufacturing extended wafer
09/05/2012CN101562049B Nanotube-based switching elements with multiple controls and circuits made thereof
09/05/2012CN101556915B Co-doping for fermi level control in semi-insulating group III nitrides
09/05/2012CN101542743B Method for manufacturing semiconductor device
09/05/2012CN101533828B Semiconductor device and method for fabricating the same
09/05/2012CN101530988B Polishing pad, polishing pad manufacture method and semiconductor device manufacture method
09/05/2012CN101527260B Method for forming crystalline semiconductor film, transistor, and method for manufacturing display device