Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
09/2012
09/11/2012US8263421 Manufacturing method of semiconductor device
09/11/2012US8263420 Optimized electrodes for Re-RAM
09/11/2012US8263419 Semiconductor device and method for manufacturing the same
09/11/2012US8263294 Lithographic mask and manufacturing method thereof
09/11/2012US8263129 Methods for fabricating isolated micro-and nano-structures using soft or imprint lithography
09/11/2012US8262970 Semiconductor device and method of manufacturing thereof
09/11/2012US8262922 Plasma confinement rings having reduced polymer deposition characteristics
09/11/2012US8262898 Nanotube position controlling method, nanotube position controlling flow path pattern and electronic element using nanotube
09/11/2012US8262848 Plasma processing apparatus and method
09/11/2012US8262847 Plasma-enhanced substrate processing method and apparatus
09/11/2012US8262846 Plasma processing apparatus and method thereof
09/11/2012US8262845 Processing systems and methods for semiconductor devices
09/11/2012US8262844 Plasma processing apparatus, plasma processing method and storage medium
09/11/2012US8262816 Hafnium alloy target
09/11/2012US8262799 Substrate processing apparatus and substrate transferring method
09/11/2012US8262798 Shower head, device and method for manufacturing thin films
09/11/2012US8262435 Chemical mechanical polishing aqueous dispersion, chemical mechanical polishing method, and chemical mechanical polishing aqueous dispersion preparation kit
09/11/2012US8262146 Handling tools for components, in particular eletronic components
09/11/2012US8262070 Clamping device with a linking member
09/11/2012US8261762 Processing gas supplying system and processing gas supplying method
09/11/2012US8261757 Device and method for wet treating disc-like substrates
09/11/2012US8261692 Substrate processing apparatus and reaction container
09/11/2012US8261691 Plasma processing apparatus
09/11/2012US8261690 In-situ flux measurement devices, methods, and systems
09/11/2012US8261662 Active pen nanolithography
09/11/2012US8261562 Helium management control system
09/07/2012WO2012119125A2 High performance graphene transistors and fabrication processes thereof
09/07/2012WO2012119105A2 Hybrid pitch-split pattern-split litrography process
09/07/2012WO2012119098A2 Pattern-split decomposition strategy for double-patterned lithography process
09/07/2012WO2012119084A1 Top down aluminum induced crystallization for high efficiency photovoltaics
09/07/2012WO2012118955A2 Apparatus and process for atomic layer deposition
09/07/2012WO2012118953A2 Atomic layer deposition carousel with continuous rotation and methods of use
09/07/2012WO2012118952A2 Apparatus and process for atomic layer deposition
09/07/2012WO2012118951A2 Silicon germanium mask for deep silicon etching
09/07/2012WO2012118947A2 Apparatus and process for atomic layer deposition
09/07/2012WO2012118946A2 Apparatus and process for atomic layer deposition
09/07/2012WO2012118899A2 Offset electrode tft structure
09/07/2012WO2012118898A2 Isolating segmented radiation detectors using alumina
09/07/2012WO2012118897A2 Abatement and strip process chamber in a dual loadlock configuration
09/07/2012WO2012118896A2 Apparatus and methods related to wire bond pads and reducing impact of high rf loss plating
09/07/2012WO2012118887A2 Apparatus and process for atomic layer deposition
09/07/2012WO2012118886A2 Vacuum chambers with shared pump
09/07/2012WO2012118873A1 Semiconductor structure with improved channel stack and method for fabrication thereof
09/07/2012WO2012118847A2 Solution processible hardmarks for high resolusion lithography
09/07/2012WO2012118719A2 Multilayer-interconnection first integration scheme for graphene and carbon nanotube transistor based integration
09/07/2012WO2012118700A1 Wafer bonding system and method for bonding and debonding thereof
09/07/2012WO2012118621A2 Method and system for design of enhanced patterns for charged particle beam lithography
09/07/2012WO2012118616A2 Method and system for forming patterns using charged particle beam lithography
09/07/2012WO2012118615A2 Method and system for design of a surface to be manufactured using charged particle beam lithography
09/07/2012WO2012118606A2 Thin heated substrate support
09/07/2012WO2012118568A2 Silicon nanotube mosfet
09/07/2012WO2012118520A1 Dual plasma source, lamp heated plasma chamber
09/07/2012WO2012118447A1 Improved system for substrate processing
09/07/2012WO2012118364A1 A sensor system and a method for fabricating thereof
09/07/2012WO2012118350A2 Method for n-doping graphene
09/07/2012WO2012118200A1 Method for forming metal thin film, metal thin film, and device for forming metal thin film
09/07/2012WO2012118175A1 Heat treatment apparatus for ceramic materials for optical use, heat treatment method for ceramic materials for optical use, heat treatment method for synthetic quartz glass, method for producing optical system, and method for manufacturing exposure apparatus
09/07/2012WO2012118156A1 Sintered oxide and sputtering target
09/07/2012WO2012118152A1 Heat-peelable adhesive sheet
09/07/2012WO2012118150A1 Oxide sintered compact and sputtering target
09/07/2012WO2012118119A1 Annealing method and annealing equipment
09/07/2012WO2012118061A1 Electrically conductive composition
09/07/2012WO2012118039A1 Al alloy film for display devices or semiconductor devices, display device or semiconductor device equipped with al alloy film, and sputtering target
09/07/2012WO2012118019A1 Vaporizer, center rod used therein, and method for vaporizing material carried by carrier gas
09/07/2012WO2012117972A1 Thin-film transistor, method for manufacturing same, and display device
09/07/2012WO2012117960A1 Semiconductor element and display panel
09/07/2012WO2012117959A1 Semiconductor element and display panel
09/07/2012WO2012117949A1 Membrane-forming composition containing silicon for multilayered resist process and pattern formation method
09/07/2012WO2012117948A1 Composition for formation of resist underlayer film, method of forming pattern and resist underlayer film
09/07/2012WO2012117943A1 Halogen elimination device for processing substrate to be processed, device for processing substrate to be processed, and method for processing substrate to be processed.
09/07/2012WO2012117936A1 Thin-film transistor and method for manufacturing same, and display device
09/07/2012WO2012117930A1 Imprinting apparatus
09/07/2012WO2012117927A1 Sulfuric acid electrolysis method and sulfuric acid electrolysis device
09/07/2012WO2012117926A1 Sputtering target and method for producing same, and method for producing thin film transistor
09/07/2012WO2012117899A1 Transmission control device and electronic circuit device
09/07/2012WO2012117892A1 Resin stamper for imprinting, and production method thereof
09/07/2012WO2012117888A1 Catalytic chemical vapor deposition device, and deposition method and catalyst body surface treatment method using same
09/07/2012WO2012117853A1 Copper-titanium alloy sputtering target, semiconductor wiring line formed using the sputtering target, and semiconductor element and device each equipped with the semiconductor wiring line
09/07/2012WO2012117834A1 Method for storing metallic lanthanum target, vacuum-sealed metallic lanthanum target, and thin film formed by sputtering using metallic lanthanum target
09/07/2012WO2012117802A1 Exposure device and microlens array structure
09/07/2012WO2012117801A1 Exposure device
09/07/2012WO2012117800A1 Exposure device using micro-lens array
09/07/2012WO2012117789A1 Polishing pad
09/07/2012WO2012117787A1 Method of manufacturing semiconductor device
09/07/2012WO2012117778A1 Method of manufacturing semiconductor device, and semiconductor device
09/07/2012WO2012117758A1 Dry cleaning method
09/07/2012WO2012117745A1 Semiconductor substrate and method of producing same
09/07/2012WO2012117696A1 Semiconductor substrate surface etching device, and method of manufacturing semiconductor substrate whereon uneven shapes are formed upon surface thereof using said device
09/07/2012WO2012117695A1 Semiconductor device and process of producing same, and display device
09/07/2012WO2012117692A1 Electrode substrate and display device and touch panel comprising same
09/07/2012WO2012117675A1 Boost pfc control device
09/07/2012WO2012117636A1 Bonding wire and manufacturing method thereof
09/07/2012WO2012117602A1 Crystallization-index acquisition device and crystallization-index acquisition method
09/07/2012WO2012117590A1 Gas phase growth device and gas phase growth method
09/07/2012WO2012117512A1 BONDING WIRE OF GOLD (Au) ALLOY
09/07/2012WO2012117509A1 Thin plate-shaped workpiece adhesion and retention method, thin plate-shaped workpiece adhesion and retention device, and manufacturing system
09/07/2012WO2012117478A1 Metal junction structure and metal junction method
09/07/2012WO2012117327A1 On-line testing for mechanical stability of sheet material
09/07/2012WO2012117315A1 System and methods for picking and transporting photovoltaic components
09/07/2012WO2012117247A1 Semiconductor devices and fabrication methods
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