Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
09/2012
09/18/2012US8268666 Field-effect transistor and method for fabricating field-effect transistor
09/18/2012US8268665 Antimony and germanium complexes useful for CVD/ALD of metal thin films
09/18/2012US8268664 Methods of manufacturing a semiconductor device; method of manufacturing a memory cell; semiconductor device; semiconductor processing device; integrated circuit having a memory cell
09/18/2012US8268663 Annealing of semi-insulating CdZnTe crystals
09/18/2012US8268661 Sealing laminated sheet for electronic device and electronic device production method using same
09/18/2012US8268660 Process for fabricating micromachine
09/18/2012US8268659 Edge-emitting semiconductor laser chip
09/18/2012US8268658 Light emitting diode and method for making same
09/18/2012US8268657 Laser induced thermal imaging apparatus
09/18/2012US8268656 Optical device wafer processing method
09/18/2012US8268655 Method for fabricating flexible display device
09/18/2012US8268654 Method for manufacturing LCD with reduced mask count
09/18/2012US8268653 Light-emitting element capable of increasing amount of light emitted, light-emitting device including the same, and method of manufacturing light-emitting element and light-emitting device
09/18/2012US8268652 Method for distributing fluorescence onto LED chip
09/18/2012US8268651 Manufacturing method of light emitting diode package
09/18/2012US8268649 Disk laser including an amplified spontaneous emission (ASE) suppression feature
09/18/2012US8268648 Silicon based solid state lighting
09/18/2012US8268647 Method of manufacturing an ink jet print head
09/18/2012US8268646 Group III-nitrides on SI substrates using a nanostructured interlayer
09/18/2012US8268645 Method and apparatus for forming a thin lamina
09/18/2012US8268643 Substrate, epitaxial layer provided substrate, method for producing substrate, and method for producing epitaxial layer provided substrate
09/18/2012US8268642 Method for removing electricity and method for manufacturing semiconductor device
09/18/2012US8268640 Method for making microstructures by converting porous silicon into porous metal or ceramics
09/18/2012US8268518 Method and lithography device with a mask reflecting light
09/18/2012US8268448 Assembly of silicon parts bonded together with a silicon and silica composite
09/18/2012US8268403 Method for forming organic silica film, organic silica film, wiring structure, semiconductor device, and composition for film formation
09/18/2012US8268394 Fabrication of metamaterials
09/18/2012US8268384 Substrate processing apparatus and substrate processing method
09/18/2012US8268181 Plasma ashing apparatus and endpoint detection process
09/18/2012US8268135 Method and apparatus for electrochemical planarization of a workpiece
09/18/2012US8268118 Critical dimension reduction and roughness control
09/18/2012US8268117 Showerhead electrodes
09/18/2012US8268116 Methods of and apparatus for protecting a region of process exclusion adjacent to a region of process performance in a process chamber
09/18/2012US8268115 Differential pressure application apparatus for use in polishing layers of semiconductor device structures and methods
09/18/2012US8268114 Workpiece holder for polishing, workpiece polishing apparatus and polishing method
09/18/2012US8268113 Apparatus and method for fabricating bonded substrate
09/18/2012US8268086 Method for processing a photomask for semiconductor devices
09/18/2012US8267746 Substrate holding apparatus, polishing apparatus, and polishing method
09/18/2012US8267633 FOUP opening/closing device and probe apparatus
09/18/2012US8267632 Semiconductor manufacturing process modules
09/18/2012US8267388 Alignment assembly
09/18/2012US8267239 Conveyor belt cleaner scraper blade with sensor and control system therefor
09/18/2012US8267042 Plasma processing apparatus and plasma processing method
09/18/2012US8267040 Plasma processing apparatus and plasma processing method
09/18/2012US8266962 Acceleration sensor
09/13/2012WO2012122392A2 Post-planarization densification
09/13/2012WO2012122365A2 Mocvd fabrication of group iii-nitride materials using in-situ generated hydrazine or fragments there from
09/13/2012WO2012122331A2 Plasma-assisted mocvd fabrication of p-type group iii-nitride materials
09/13/2012WO2012122283A2 Surface scanning inspection system with independently adjustable scan pitch
09/13/2012WO2012122253A2 Substrate carrier with multiple emissivity coefficients for thin film processing
09/13/2012WO2012122188A1 Non-volatile storage element comprising a floating gate with a pn junction and method of forming the same
09/13/2012WO2012122186A2 Chemical mechanical planarization pad conditioner
09/13/2012WO2012122131A2 Measurement of insulation resistance of configurable photovoltaic panels in a photovoltaic array
09/13/2012WO2012122064A1 Method of etching silicon nitride films
09/13/2012WO2012122054A2 Hybrid ceramic showerhead
09/13/2012WO2012122052A2 Methods for contact clean
09/13/2012WO2012121952A2 Electrode configurations for semiconductor devices
09/13/2012WO2012121941A2 Reduction of a process volume of a processing chamber using a nested dynamic inert volume
09/13/2012WO2012121938A2 Wafer alignment system with optical coherence tomography
09/13/2012WO2012121880A1 Calibrating device performance within an integrated circuit
09/13/2012WO2012121852A1 Large-grain, low-resistivity tungsten on a conductive compound
09/13/2012WO2012121845A2 Thyristors, methods of programming thyristors, and methods of forming thyristors
09/13/2012WO2012121835A1 Self- aligned process and method for fabrication of high efficiency solar cells
09/13/2012WO2012121766A1 Semiconductor structure having a capacitor and metal wiring integrated in a same dielectric layer
09/13/2012WO2012121706A1 Efficient black silicon photovoltaic devices with enhanced blue response
09/13/2012WO2012121563A2 Method for recycling spent cmp pad conditioner and cmp pad recycled thereby
09/13/2012WO2012121548A2 Conditioner for fragile pad and method for manufacturing same
09/13/2012WO2012121547A2 Adhesive composition for a wafer processing film
09/13/2012WO2012121449A1 Probe card and manufacturing method
09/13/2012WO2012121415A1 Electrode for oxide semiconductor and method for producing same, and oxide semiconductor device equipped with electrode
09/13/2012WO2012121378A1 Production efficiency improving apparatus, production efficiency improving method, and computer program
09/13/2012WO2012121377A1 Semiconductor device, and process for manufacturing semiconductor device
09/13/2012WO2012121355A1 Electronic part and method of manufacturing electronic part
09/13/2012WO2012121336A1 Adhesive for electronic components, and manufacturing method for semiconductor chip mount
09/13/2012WO2012121332A1 Oxide for semiconductor layer for thin film transistor, semiconductor layer for thin film transistor which comprises said oxide, and thin film transistor
09/13/2012WO2012121307A1 Wafer dicing method, mounting method, method for manufacturing adhesive layer, and mounted body
09/13/2012WO2012121289A1 Surface wave plasma processing device, microwave plasma source, and microwave introduction mechanism used in same
09/13/2012WO2012121279A1 Method of manufacturing organic semiconductor layer, method of manufacturing organic transistor, organic transistor, and display device
09/13/2012WO2012121278A1 Resist pattern formation method and resist composition for negative-working image development
09/13/2012WO2012121267A1 Vacuum feedthrough
09/13/2012WO2012121265A1 Memory device and method for manufacturing the same
09/13/2012WO2012121263A1 A method of forming a capacitor structure, and a silicon etching liquid used in this method
09/13/2012WO2012121255A1 Semiconductor device
09/13/2012WO2012121233A1 Chemical compound and thin film comprising said chemical compound
09/13/2012WO2012121159A1 Multilayer substrate, manufacturing method for multilayer substrate, and quality control method for multilayer substrate
09/13/2012WO2012121143A1 Method for manufacturing photocured product
09/13/2012WO2012121138A1 Method for forming resist pattern, method for forming wiring pattern, and method for manufacturing active matrix substrate
09/13/2012WO2012121136A1 Wet etching method, method for forming wiring pattern, and method for manufacturing active matrix substrate
09/13/2012WO2012121132A1 Plasma generating apparatus, plasma processing apparatus, and plasma processing method
09/13/2012WO2012121113A1 Electronic circuit substrate, display device, and wiring substrate
09/13/2012WO2012121081A1 Device for estimating and simulating shape worked by plasma process, and simulation method and program
09/13/2012WO2012121067A1 Method for fabricating electrode structure having nanogap length, electrode structure having nanogap length obtained thereby, and nanodevice
09/13/2012WO2012121049A1 Jig for measurement, wire saw, and workpiece mounting method
09/13/2012WO2012121046A1 Bonding device, bonding system and bonding method
09/13/2012WO2012121045A1 Joining method, joining device, and joining system
09/13/2012WO2012121044A1 Joining method, joining device, and joining system
09/13/2012WO2012121028A1 Sputtering target, method for manufacturing same, and method for manufacturing thin film transistor
09/13/2012WO2012121021A1 Light-reflective anisotropic conductive adhesive and light-emitting device
09/13/2012WO2012120991A1 Substrate processing apparatus and method for manufacturing substrate
09/13/2012WO2012120984A1 Treatment liquid flow rate meter
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