Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
10/2012
10/02/2012US8276537 Method for manufacturing semiconductor device and semiconductor manufacturing apparatus
10/02/2012US8276432 Transport pod interface
10/02/2012CA2712174C Method and apparatus for a radiation detector
10/02/2012CA2555665C Microelectronic cleaning composition containing halogen oxygen acids, salts and derivatives thereof
10/02/2012CA2368950C Robust interconnect structure
10/01/2012CA2772892A1 System and method for improved epitaxial lift off
09/2012
09/27/2012WO2012129554A2 Conductive paste composition and semiconductor devices made therewith
09/27/2012WO2012129459A1 Self cleaning solutions for carbon implantation
09/27/2012WO2012129454A2 Cluster ion implantation of arsenic and phosphorus
09/27/2012WO2012129422A2 Aromatic polyamide films for transparent flexible substrates
09/27/2012WO2012129283A1 On-substrate fabrication of high-surface area polymer morphology for photoactive applications
09/27/2012WO2012129235A1 High efficiency cadmium telluride solar cell and method of fabrication
09/27/2012WO2012129209A2 Etch process for controlling pattern cd and integrity in multi-layer masks
09/27/2012WO2012129162A2 Methods of making patterned structures of materials, patterned structures of materials, and methods of using same
09/27/2012WO2012129153A2 Solder in cavity interconnection structures
09/27/2012WO2012129122A1 Method for controlling dangling bonds in fluorocarbon films
09/27/2012WO2012129051A2 Integrated metrology for wafer screening
09/27/2012WO2012129032A1 P-/metal floating gate non-volatile storage element
09/27/2012WO2012129005A1 Method for patterning a full metal gate structure
09/27/2012WO2012128960A1 Electrode treatments for enhanced dram performance
09/27/2012WO2012128956A1 Nitride gate dielectric for graphene mosfet
09/27/2012WO2012128934A1 Semiconductor devices including schottky diodes having overlapping doped regions and methods of fabricating same
09/27/2012WO2012128843A2 Improved sidewall image transfer process
09/27/2012WO2012128789A1 Multiple level showerhead design
09/27/2012WO2012128783A1 Liner assembly for chemical vapor deposition chamber
09/27/2012WO2012128761A1 Fluid filled template for use in chemical mechanical planarization
09/27/2012WO2012128760A1 System and method for electronic testing of partially processed devices
09/27/2012WO2012128593A2 Sensor having an embedded electrode, and method for manufacturing same
09/27/2012WO2012128556A2 Apparatus for measuring impurities on wafer and method of measuring impurities on wafer
09/27/2012WO2012128467A2 Apparatus and method for manufacturing a cylindrical stamp using a cylindrical pattern mask
09/27/2012WO2012128459A2 Solar wafer cassette
09/27/2012WO2012128420A1 Apparatus and method for manufacturing a light-emitting device using a neutral particle beam
09/27/2012WO2012128351A1 Light irradiation device
09/27/2012WO2012128348A1 Electrostatic chuck device
09/27/2012WO2012128323A1 Optical element, illuminating apparatus, measuring apparatus, photomask, exposure method, and device manufacturing method
09/27/2012WO2012128322A1 Lithography rinsing fluid and pattern formation method using same
09/27/2012WO2012128317A1 Adhesive tape for processing semiconductor wafer and the like
09/27/2012WO2012128312A1 Base film and pressure-sensitive adhesive sheet provided therewith
09/27/2012WO2012128311A1 Base film and pressure-sensitive adhesive sheet provided therewith
09/27/2012WO2012128251A1 Polymer-containing developer
09/27/2012WO2012128189A1 Signal processing circuit
09/27/2012WO2012128140A1 Method for forming copper wiring, method for manufacturing wiring substrate, and wiring substrate
09/27/2012WO2012128139A1 Method for forming copper wiring, method for manufacturing wiring substrate, and wiring substrate
09/27/2012WO2012128044A1 Semiconductor device manufacturing method, substrate processing method, and substrate processing device
09/27/2012WO2012128030A1 Oxide semiconductor film, semiconductor device, and manufacturing method of semiconductor device
09/27/2012WO2012128029A1 Gate valve unit, substrate processing device and substrate processing method thereof
09/27/2012WO2012128017A1 Resistive memory device and method for writing to same
09/27/2012WO2012127966A1 Lamp position adjusting method, lamp position adjusting tool, and illuminating device
09/27/2012WO2012127963A1 Enclosure and method for handling electron gun or ion gun
09/27/2012WO2012127960A1 Semiconductor device and method for manufacturing same
09/27/2012WO2012127922A1 Field-effect transistor
09/27/2012WO2012127883A1 Sintered material, and process for producing same
09/27/2012WO2012127821A1 Semiconductor device and method for producing same
09/27/2012WO2012127784A1 Power supply wiring layout method for semiconductor integrated circuit and power supply wiring layout device
09/27/2012WO2012127781A1 Semiconductor device and method for manufacturing semiconductor device
09/27/2012WO2012127780A1 Flexible semiconductor device and method for producing same
09/27/2012WO2012127779A1 Flexible semiconductor device and method for producing same
09/27/2012WO2012127769A1 Method for forming semiconductor thin film, semiconductor device, method for producing semiconductor device, substrate, and thin film substrate
09/27/2012WO2012127748A1 Silicon carbide substrate
09/27/2012WO2012127738A1 COMPOUND GaN SUBSTRATE AND METHOD FOR PRODUCING SAME, AND GROUP III NITRIDE SEMICONDUCTOR DEVICE AND METHOD FOR PRODUCING SAME
09/27/2012WO2012127722A1 Magnetic memory
09/27/2012WO2012127715A1 Substrate processing apparatus and substrate processing method
09/27/2012WO2012127696A1 Power semiconductor module and power unit device
09/27/2012WO2012127614A1 Semiconductor device
09/27/2012WO2012127567A1 Compound semiconductor device and method for manufacturing same
09/27/2012WO2012127536A1 Method and device for detaching soldered component
09/27/2012WO2012127123A1 Holder for silicon wafers, and method for treating said wafers
09/27/2012WO2012127006A1 Manufacturing method for a semiconductor on insulator type substrate for radiofrequency applications
09/27/2012WO2012126752A1 Apparatus and a method for direct wafer bonding, minimizing local deformation
09/27/2012WO2012126725A1 Integrated circuit comprising an electrical through-plating and method for producing an electrical through-plating
09/27/2012WO2012126672A1 Process for etching a recessed structure filled with tin or a tin alloy
09/27/2012WO2012126379A1 Three-dimensional system-level packaging methods and structures
09/27/2012WO2012126377A1 System-level packaging methods and structures
09/27/2012WO2012126375A1 Fan-out high-density packaging methods and structures
09/27/2012WO2012126364A1 Method for measuring distortion of projection objective
09/27/2012WO2012126334A1 Process for inner absorption of impurities in czochralski silicon wafer
09/27/2012WO2012126268A1 Thin film filling method
09/27/2012WO2012126222A1 Metal oxide resistor memory and method for preparing the same
09/27/2012WO2012126217A1 Chemical mechanical polishing liquids
09/27/2012WO2012126188A1 Semiconductor structure and manufacturing method thereof
09/27/2012WO2012126155A1 Semiconductor device and method for manufacturing the same
09/27/2012WO2012126062A1 Catalysts and methods of use
09/27/2012WO2012103868A3 Method and device for the electrical bonding of connection areas of two substrates by laser soldering using a gaseous flux medium
09/27/2012WO2012094490A3 Apparatus and method for forming an aperture in a substrate
09/27/2012WO2012091338A3 Oxide cmp slurry composition, method for manufacturing same, and polishing method using same
09/27/2012WO2012087987A3 Multi-gate transistors
09/27/2012WO2012087978A3 Edge rounded field effect transistors and methods of manufacturing
09/27/2012WO2012087637A3 Improving transistor channel mobility using alternate gate dielectric materials
09/27/2012WO2012087580A3 Trap rich layer for semiconductor devices
09/27/2012WO2012077951A3 Flash memory using fringing effects and electrostatic shielding
09/27/2012WO2012074570A3 Stacked microelectronic assembly with tsvs formed in stages and carrier above chip
09/27/2012WO2012071296A3 An -nh- terminated silicon surface and a method for its preparation
09/27/2012WO2012061593A3 Apparatus and methods for deposition of silicon carbide and silicon carbonitride films
09/27/2012WO2012047812A3 Atomic layer deposition of silicon nitride using dual-source precursor and interleaved plasma
09/27/2012WO2012047449A3 Processes and compositions for removing substances from substrates
09/27/2012US20120246603 Semiconductor device, method for manufacturing the same, method for generating mask data, mask and computer readable recording medium
09/27/2012US20120246419 Concurrent memory bank access and refresh request queuing
09/27/2012US20120244725 Heat treatment method and heat treatment apparatus for heating substrate by irradiating substrate with light
09/27/2012US20120244724 Ion implantation method
09/27/2012US20120244723 Laser drilling of vias in back contact solar cells
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