Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
10/2012
10/03/2012CN101779085B Processing apparatus and clean system including processing apparatus
10/03/2012CN101770988B Semicondcutor device having vertical gate and method for fabricating the same
10/03/2012CN101764159B Metallic oxide semiconductor field effect tube with reduced breakdown voltage
10/03/2012CN101752314B Surface channel PMOS device with self-aligned contact hole and manufacturing method
10/03/2012CN101752313B Surface P-channel metal oxide semiconductor (PMOS) device with self-aligned contact hole and method for producing same
10/03/2012CN101740334B Photoetching pretreating method and photoetching method
10/03/2012CN101707190B Method for making metal gate stacks and ic having metal gate stacks
10/03/2012CN101697340B Catch for etching process and method for preventing catch from jumping
10/03/2012CN101692455B SOI-based capacitor
10/03/2012CN101663734B Apparatus and method for atomic layer deposition
10/03/2012CN101663629B Optimized power supply for an electronic system
10/03/2012CN101617241B Device for pressing electronic component and device for testing electronic component
10/03/2012CN101604102B Array substrate for liquid crystal display device and method of manufacturing the same
10/03/2012CN101584031B Methods and apparatus for wafer edge processing
10/03/2012CN101581884B Intaglio printing plate, production method for intaglio printing plate, production method for electronic substrate, and production method for display device
10/03/2012CN101571714B Method for controlling result parameter of integrated circuit manufacturing procedure
10/03/2012CN101568990B Methods, apparatuses, and systems for fabricating three dimensional integrated circuits
10/03/2012CN101556929B Method for measuring thickness of grid oxide layer
10/03/2012CN101548362B Ultralow dielectric constant layer with controlled biaxial stress
10/03/2012CN101542759B Semiconductor wafer and semiconductor device and manufacture methods thereof
10/03/2012CN101533769B Method for manufacturing soi substrate
10/03/2012CN101528991B Sapphire substrate, nitride semiconductor luminescent element using the sapphire substrate, and method for manufacturing the nitride semiconductor luminescent element
10/03/2012CN101523576B Plasma oxidizing method
10/03/2012CN101517710B Cutting method and epitaxial wafer manufacturing method
10/03/2012CN101496145B Method to increase silicon nitride tensile stress using nitrogen plasma in-situ treatment and ex-situ uv cure
10/03/2012CN101479611B Methods and apparatus for sensing unconfinement in a plasma processing chamber
10/03/2012CN101469420B Electroless gold-plating method and electronic component
10/03/2012CN101466866B Thin film production apparatus and inner block for thin film production apparatus
10/03/2012CN101466807B Bonding method with flowable adhesive composition
10/03/2012CN101445919B Semiconductor manufacturing apparatus and manufacturing method of semiconductor device
10/03/2012CN101444897B 抛光设备和方法 Polishing apparatus and method
10/03/2012CN101402226B Cutting device
10/03/2012CN101399262B Power semiconductor arrangement and assembling method thereof
10/03/2012CN101392159B Adhesive sheet, dicing tape integrated type adhesive sheet, and method of producing semiconductor device
10/03/2012CN101391397B grinding system
10/03/2012CN101355028B Method for repairing grid pole oxide layer
10/03/2012CN101346207B Laser material processing system
10/03/2012CN101313246B Radiation-sensitive resin composition
10/03/2012CN101303965B Method and apparatus for eliminating migration of etching pattern
10/03/2012CN101283121B Methods and apparatus for epitaxial film formation
10/03/2012CN101276111B Liquid crystal display panel, manufacturing method thereof, and liquid crystal display device
10/03/2012CN101202305B Semiconductor device with improved source and drain and method of manufacturing the same
10/03/2012CN101137269B Plasma processing apparatus of substrate and plasma processing method thereof
10/03/2012CN101090025B Helix induction element with multilayer structure
10/03/2012CN101053063B Apparatus and plasma ashing process for increasing photoresist removal rate
10/03/2012CN101022107B Versatile semiconductor test structure array
10/03/2012CN101015053B 半导体装置 Semiconductor device
10/02/2012US8280664 XY-coordinate compensation apparatus and method in sample pattern inspection apparatus
10/02/2012US8280632 Apparatus and method for inspecting overlapping figure, and charged particle beam writing apparatus
10/02/2012US8280531 Method and computer program for controlling the heat treatment of metal workpieces
10/02/2012US8280147 Pattern verification method, pattern verification apparatus, and pattern verification program
10/02/2012US8279703 Sub-word line driver circuit and semiconductor memory device having the same
10/02/2012US8279576 Electrostatic chuck
10/02/2012US8279384 Substrate for display panel, liquid crystal display panel having the substrate, and method of manufacturing the same
10/02/2012US8278802 Planarized sacrificial layer for MEMS fabrication
10/02/2012US8278760 Semiconductor integrated circuit and method for manufacturing same, and mask
10/02/2012US8278755 Heat dissipation structure for electronic device and fabrication method thereof
10/02/2012US8278751 Methods of adhering microfeature workpieces, including a chip, to a support member
10/02/2012US8278749 Integrated antennas in wafer level package
10/02/2012US8278746 Semiconductor device packages including connecting elements
10/02/2012US8278737 Structure for improving die saw quality
10/02/2012US8278735 Yttrium and titanium high-k dielectric films
10/02/2012US8278731 Semiconductor device having SOI substrate and method for manufacturing the same
10/02/2012US8278730 High voltage resistance coupling structure
10/02/2012US8278726 Controlling electromechanical behavior of structures within a microelectromechanical systems device
10/02/2012US8278725 Micromechanical structure and a method of fabricating a micromechanical structure
10/02/2012US8278722 Flat panel display device
10/02/2012US8278721 Contact hole, semiconductor device and method for forming the same
10/02/2012US8278718 Stressed barrier plug slot contact structure for transistor performance enhancement
10/02/2012US8278717 Semiconductor memory device and method of manufacturing the same
10/02/2012US8278716 Method of fabricating polysilicon, thin film transistor, method of fabricating the thin film transistor, and organic light emitting diode display device including the thin film transistor
10/02/2012US8278714 Semiconductor device
10/02/2012US8278713 Display device and manufacturing method thereof
10/02/2012US8278708 Insulated gate type semiconductor device and method for fabricating the same
10/02/2012US8278707 Field effect transistors having a double gate structure
10/02/2012US8278700 Semiconductor device
10/02/2012US8278686 Structure and method for forming planar gate field effect transistor with low resistance channel region
10/02/2012US8278683 Lateral insulated gate bipolar transistor
10/02/2012US8278660 Semiconductor device and method for manufacturing the same
10/02/2012US8278659 Uniform large-grained and grain boundary location manipulated polycrystalline thin film semiconductors formed using sequential lateral solidification and devices formed thereon
10/02/2012US8278592 Laser processing method
10/02/2012US8278225 Hafnium tantalum oxide dielectrics
10/02/2012US8278224 Flowable oxide deposition using rapid delivery of process gases
10/02/2012US8278223 Method for forming hole pattern
10/02/2012US8278222 Selective etching and formation of xenon difluoride
10/02/2012US8278221 Method of forming a hard mask and method of forming a fine pattern of semiconductor device using the same
10/02/2012US8278220 Method to direct pattern metals on a substrate
10/02/2012US8278219 Method for purifying chemical added with chelating agent
10/02/2012US8278218 Electrical conductor line having a multilayer diffusion barrier for use in a semiconductor device and method for forming the same
10/02/2012US8278217 Semiconductor device and method of producing the same
10/02/2012US8278216 Selective capping of copper
10/02/2012US8278215 Noble metal activation layer
10/02/2012US8278214 Through mold via polymer block package
10/02/2012US8278213 Semiconductor device and manufacturing method of the same
10/02/2012US8278212 Method for manufacturing semiconductor memory element and sputtering apparatus
10/02/2012US8278211 Thin film forming method
10/02/2012US8278210 Manufacturing method of semiconductor device
10/02/2012US8278209 Method for manufacturing a semiconductor device using a hardmask layer
10/02/2012US8278208 Semiconductor device having decreased contact resistance and method for manufacturing the same
10/02/2012US8278207 Methods of manufacturing semiconductor devices
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