Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
10/2012
10/10/2012CN102717185A Full-automatic semiconductor wafer laser processing device and processing method thereof
10/10/2012CN102299220B Swing arm mechanism of direct-driving solid crystal machine
10/10/2012CN102254948B Tunneling field effect transistor with double-gate structure and preparing method thereof
10/10/2012CN102222615B Production process for Schottky chip
10/10/2012CN102221416B Polishing solution physical parameter measuring apparatus, measuring method and chemically mechanical polishing equipment
10/10/2012CN102214684B Semiconductor structure with suspended sources and drains as well as formation method thereof
10/10/2012CN102214611B Preparation method for gate-all-round silicon nanowire transistor by using air as side wall
10/10/2012CN102214595B Manufacturing method of fence silicon nanowire transistor with air as side wall
10/10/2012CN102214518B Structure of array type tandem solar battery module and manufacturing method thereof
10/10/2012CN102208351B Preparation method of fence silicon nanowire transistor of air side wall
10/10/2012CN102201450B Tunneling field effect transistor and preparation method thereof
10/10/2012CN102201329B Quartz heating groove
10/10/2012CN102184923B Preparation method of silicon nanowire transistor device programmable array
10/10/2012CN102184873B Method for quickly preparing diamond-silicon carbide electronic packaging material
10/10/2012CN102169901B Tunneling field effect transistor having heterogeneous grid work function and formation method thereof
10/10/2012CN102163572B Six-degree-of-freedom locating device
10/10/2012CN102163568B Method for extracting charge distribution of metal oxide semiconductor (MOS) tube along channel
10/10/2012CN102157412B Optical emission spectrum signal-based method for detecting fault of plasma etching process
10/10/2012CN102148154B Multilayer ohmic contact system of gallium nitride device with composite metal barrier layer
10/10/2012CN102142362B Method for photoetching by using electrophoretic deposition pattern of metallic compound
10/10/2012CN102136440B Accurate pointing and sorting unit
10/10/2012CN102130184B High-robustness back biased diode applied to high-voltage static protection
10/10/2012CN102117801B Manufacturing method of high-power light-emitting diode module structure
10/10/2012CN102104009B Method for making three-dimensional silicon-based capacitor
10/10/2012CN102097296B Preparation method of semiconductor nano circular ring
10/10/2012CN102088030B Laterally double-diffused metal oxide semiconductor field effect transistor and manufacturing method thereof
10/10/2012CN102088013B Substrate structure with die embedded inside and dual build-up layers over both side surfaces and method of the same
10/10/2012CN102086519B Corrosive solution composition, corrosion method and generated silicon wafer
10/10/2012CN102082073B Production device, production method, test apparatus and integrated circuit package
10/10/2012CN102080230B Etching control method
10/10/2012CN102077322B Laser annealing device
10/10/2012CN102064119B Method of fabricating a semiconductor device
10/10/2012CN102054709B Manufacturing method of packed base plate
10/10/2012CN102047407B Processing chamber
10/10/2012CN102047385B Thin film formation device and semiconductor film manufacturing method
10/10/2012CN102044446B Manufacturing method for blind hole windowing contraposition target of packaging baseplate
10/10/2012CN102037551B Vacuum processing system, buffer module used therein and tray transferring method of the vacuum processing system
10/10/2012CN102024763B Method for manufacturing NOR flash memory with phosphorus and arsenic ion injection
10/10/2012CN102024730B Placing mechanism, transport method of wafer having dicing frame
10/10/2012CN102017086B Method for depositing polysilicon thin film with ultra-fine crystal grains
10/10/2012CN102016717B Reflective mask blank for EUV lithography, and reflective mask for EUV lithography
10/10/2012CN102005452B Integrated schottky diode in high voltage semiconductor device
10/10/2012CN101999172B Apparatus for manufacturing thin film solar cell
10/10/2012CN101999159B Thin film solar cell manufacturing equipment
10/10/2012CN101996865B Polymer removing apparatus and removing method thereof
10/10/2012CN101989557B Manufacturing method of semiconductor device and semiconductor device
10/10/2012CN101982884B Semiconductor device and method of manufacturing the same
10/10/2012CN101971350B Thin film transistor and method for producing thin film transistor
10/10/2012CN101971317B Method for measuring dopant concentration during plasma ion implantation
10/10/2012CN101971304B Structure and method for forming shielded gate trench fet with multiple channels
10/10/2012CN101966698B Manufacturing method of polishing pad
10/10/2012CN101950758B Grid structure of high-K material based on silicon-on-insulator (SOI) substrate and preparation method thereof
10/10/2012CN101946328B Photodetector circuit including thin-film transistor and display device
10/10/2012CN101939136B Work duplex-head grinding apparatus, and work duplex-head grinding method
10/10/2012CN101937931B High performance field effect transistor and manufacturing method thereof
10/10/2012CN101918615B Electrolytic method
10/10/2012CN101916726B Method for manufacturing signal operation instruction (SOI) metal oxide semiconductor (MOS) apparatus structure for restraining floating body effect
10/10/2012CN101908541B Semiconductor device, and method of manufacturing the same
10/10/2012CN101905856B Method for preparing plane hollow microneedle for transdermal administration
10/10/2012CN101904010B Reverse-conducting semiconductor device and method for manufacturing such a reverse-conducting semiconductor device
10/10/2012CN101903980B Stage structure and heat treatment apparatus
10/10/2012CN101877959B Electronic component recognition device and chip mounter therewith
10/10/2012CN101859727B Interconnect structure
10/10/2012CN101859724B Table for transmission illumination
10/10/2012CN101859714B Manufacturing method of display device and display device
10/10/2012CN101855720B Alignment device to align plates for electronic circuits
10/10/2012CN101855708B Heat treatment apparatus
10/10/2012CN101850538B Support jig of wafer and method for grinding, transferring and cutting wafer
10/10/2012CN101847612B Semiconductor device and manufacturing method thereof
10/10/2012CN101842887B Method for contacting of electronic components, apparatus manufactured therefor and related equipments
10/10/2012CN101834206B Semiconductor device structure and forming method thereof
10/10/2012CN101826476B Vision inspection apparatus
10/10/2012CN101819377B Method for evaluating multi-gray scale photomas
10/10/2012CN101814516B Solid-state imaging device, manufacturing method thereof, and imaging apparatus
10/10/2012CN101814449B Method for identifying an incorrect position of a semiconductor wafer during a thermal treatment
10/10/2012CN101809717B Temperature control modules for showerhead electrode assemblies for plasma processing apparatuses
10/10/2012CN101809499B Mask blank, and method for production of imprint mold
10/10/2012CN101803004B Capacitance element and semiconductor device
10/10/2012CN101794738B 半导体装置及其制造方法 Semiconductor device and manufacturing method
10/10/2012CN101779273B Semiconductor device, semiconductor device manufacturing method, high carrier mobility transistor and light emitting device
10/10/2012CN101771024B Light-emitting diode (LED) and packaging method thereof
10/10/2012CN101771022B Circuit structure using graphene and manufacture method thereof
10/10/2012CN101755216B Probe card
10/10/2012CN101740682B Light-emitting diode device and method for fabricating the same
10/10/2012CN101738851B Method of manufacturing photomask, lithography apparatus, method and apparatus for inspecting photomask
10/10/2012CN101728391B Semiconductor element and manufacture method thereof
10/10/2012CN101714512B Method of fabricating semiconductor device having three-dimensional stacked structure
10/10/2012CN101689478B SOI wafer manufacturing method
10/10/2012CN101671538B Method for preparing silica/ceria composite abrasive grains
10/10/2012CN101667538B Semiconductor device and its manufacturing method
10/10/2012CN101652302B Substrate conveyance system
10/10/2012CN101648649B Vacuum basal plate transmitting system
10/10/2012CN101641782B Semiconductor device and process for producing the semiconductor device
10/10/2012CN101640175B Method for manufacturing semiconductor structure
10/10/2012CN101622702B Tray transferring device
10/10/2012CN101622699B Interlayer insulation film, interconnect structure, and methods for production thereof
10/10/2012CN101620996B Method for preparing gate oxidation layer
10/10/2012CN101599477B Semiconductor device and method of manufacturing the same
10/10/2012CN101593776B A self-protection structure of a power device within an expanded voltage range and method
10/10/2012CN101593682B Ion implantation method and manufacturing method of semiconductor device