Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
08/1985
08/06/1985US4532697 Silicon gigabit metal-oxide-semiconductor device processing
08/06/1985US4532696 Method of manufacturing a semiconductor device for forming a deep field region in a semiconductor substrate
08/06/1985US4532695 Method of making self-aligned IGFET
08/06/1985CA1191638A1 Light sensitive screen
08/06/1985CA1191558A1 On chip monitor
08/06/1985CA1191479A1 Two step plasma etching
08/06/1985CA1191477A1 X-ray mask substrate and method of fabrication thereof
08/01/1985WO1985003402A1 Infrared panel emitter and method of producing the same
08/01/1985WO1985003357A1 Improvements relating to growth factors
08/01/1985WO1985003353A1 Inspection system utilizing dark-field illumination
07/1985
07/31/1985EP0150129A2 Method and apparatus for lithographic rotate and repeat processing
07/31/1985EP0150089A1 Charged-particle optical systems
07/31/1985EP0150088A2 A semiconductor device comprising a dielectric layer
07/31/1985EP0150074A2 Method and apparatus for grinding the surface of a semiconductor wafer
07/31/1985EP0149961A1 Method and apparatus for discharging high voltage nodes in integrated circuits
07/31/1985EP0149923A2 Microcircuit substrate and method of making same
07/31/1985EP0149898A2 An LEC method and apparatus for growing a single crystal of compound semiconductors
07/31/1985EP0149867A2 Radiation hardenable coating and electronic components coated therewith
07/31/1985EP0149799A2 Semiconductor memory device
07/31/1985EP0149779A2 Laser induced chemical etching of metals with excimer lasers
07/31/1985EP0149685A1 Method for automatically counting etched pits
07/31/1985EP0149683A1 Method of manufacturing semiconductor devices
07/30/1985US4532598 Electron beam exposure system
07/30/1985US4532538 Semiconductor arrangement with connector conductors cut out of sheetmetal
07/30/1985US4532535 Electrically reprogrammable non volatile memory cell floating gate EEPROM with tunneling to substrate region
07/30/1985US4532533 Ballistic conduction semiconductor device
07/30/1985US4532532 Submicron conductor manufacturing
07/30/1985US4532427 Method and apparatus for performing deep UV photolithography
07/30/1985US4532426 Wafer height correction system for focused beam system
07/30/1985US4532423 IC Tester using an electron beam capable of easily setting a probe card unit for wafers & packaged IC's to be tested
07/30/1985US4532402 Method and apparatus for positioning a focused beam on an integrated circuit
07/30/1985US4532401 Apparatus and method for cutting a wiring pattern
07/30/1985US4532332 N-(hydroxypolyoxaalkylene)phthalimides and succinimides and acrylate esters thereof
07/30/1985US4532199 Method of forming amorphous silicon film
07/30/1985US4532188 Having at least one layer of electrically conductive polyalkyne
07/30/1985US4532150 Method for providing a coating layer of silicon carbide on the surface of a substrate
07/30/1985US4532022 Process of producing a semiconductor device
07/30/1985US4532004 Forming dummy gate electrode to use as mask for forming source and drain regions, etching to form openings for metal gate electrode
07/30/1985US4532003 Method of fabrication bipolar transistor with improved base collector breakdown voltage and collector series resistance
07/30/1985US4532002 Multilayer planarizing structure for lift-off technique
07/30/1985US4532001 Process for the liquid phase epitaxial deposition of a monocrystalline ternary compound
07/30/1985US4531909 Handling system for IC device
07/30/1985US4531285 Method for interconnecting close lead center integrated circuit packages to boards
07/30/1985US4531282 Bipolar transistors having vertically arrayed collector-base-emitter with novel polycrystalline base electrode surrounding island emitter and method of making same
07/30/1985US4531277 Assembling components having mating faces
07/30/1985EP0051669A4 Semiconductor fabrication utilizing laser radiation.
07/30/1985CA1191280A1 Method of forming plunar isolation regions having field inversion regions
07/30/1985CA1191194A1 Device for protecting electronic circuits such as integrated circuits against electrostatic charges
07/30/1985CA1191109A1 Electrode treatment for plasma patterning of polymers
07/30/1985CA1191107A1 Isolation valve
07/30/1985CA1191040A1 Machine reticle inspection device
07/24/1985EP0149553A2 Negative photoresist systems
07/24/1985EP0149415A2 Reactive plasma process for etching chromium films with high chromium oxide and glass impurity content
07/24/1985EP0149401A2 Semiconductor memory device
07/24/1985EP0149390A2 Field effect transistor with a vertical sub-micronic structure and process for its production
07/24/1985EP0149330A1 ISFET Sensor and method of manufacture
07/24/1985EP0149317A2 Circuit packaging
07/24/1985EP0149232A2 Semiconductor component having a metalic base
07/24/1985EP0149178A2 Infrared detector system based on III-V epitaxial material
07/24/1985EP0149089A2 Single electrode, multiple frequency plasma apparatus
07/24/1985EP0149065A2 A protection clamp circuit for use in a monolithic circuit which inhibits current transients
07/24/1985EP0149060A2 Lift-off process for forming metal patterns
07/24/1985EP0149048A1 Method and apparatus for testing semiconductor devices
07/24/1985EP0149033A2 Field-effect transistor with insulated gate electrode
07/24/1985EP0148927A1 A semiconductor die having undedicated input/output cells
07/24/1985EP0148898A1 Apparatus for plasma treatment of plate-shaped substrats.
07/24/1985EP0148820A1 Electronic circuit chip connection assembly and method.
07/23/1985US4531191 Electron beam pattern generation system
07/23/1985US4531060 Positioning method
07/23/1985US4530891 Photo-mask blank for use in lithography including a modified chromium compound
07/23/1985US4530818 Wall welded to flange; maintaining gas flow through bell
07/23/1985US4530739 Method of fabricating an electroplated substrate
07/23/1985US4530734 Low energy ion etching
07/23/1985US4530635 Wafer transferring chuck assembly
07/23/1985US4530604 Method of aligning a mask and a wafer for manufacturing semiconductor circuit elements
07/23/1985US4530587 Exposure apparatus
07/23/1985US4530152 Method for encapsulating semiconductor components using temporary substrates
07/23/1985US4530150 Method of forming conductive channel extensions to active device regions in CMOS device
07/23/1985US4530149 Method for fabricating a self-aligned vertical IGFET
07/18/1985WO1985003165A1 Method of undercut anisotropic etching of semiconductor material
07/18/1985WO1985003162A1 An e2prom memory cell
07/18/1985WO1985003088A1 Material vapor deposition technique
07/18/1985WO1985003041A1 Process for forming slots having near vertical sidewalls at their upper extremities
07/18/1985WO1985003016A1 Novel pillared interlayered clays, processes for their production and uses thereof
07/18/1985WO1985003015A1 Novel layered clays, a process for their production and uses thereof
07/17/1985EP0148784A2 Calibration of electron beam apparatus
07/17/1985EP0148595A2 Method of fabricating mesa mosfet using overhang mask and resulting structure
07/17/1985EP0148555A1 A method for the pretreatment of a substrate for ion implantation
07/17/1985EP0148504A2 Method and apparatus for sputtering
07/17/1985EP0148477A2 Exposure apparatus and method of aligning exposure mask with workpiece
07/17/1985EP0148448A2 Etching method
07/17/1985EP0148357A1 A metal organic chemical vapour deposition process for depositing silicon doped intermetallic semiconductor compounds
07/17/1985EP0148342A1 Process for the simultaneous production of rapid short-channel and voltage-resistant MOS transistors in VLSI circuits
07/17/1985EP0148340A1 Ion etching process for deep trench etching multi-layer semiconductor substrates
07/17/1985EP0148317A1 Cleaning agent for mechanically worked semiconductor materials
07/17/1985EP0148240A1 Semiconductor memory cell
07/16/1985US4530108 Counter for non-volatile storage
07/16/1985US4530064 Exposure method utilizing an energy beam
07/16/1985US4530001 High voltage integrated semiconductor devices using a thermoplastic resin layer
07/16/1985US4530000 Bipolar transistor with protective diode in collector