Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
05/1985
05/21/1985US4518848 Apparatus for baking resist on semiconductor wafers
05/21/1985US4518846 Heater assembly for molecular beam epitaxy furnace
05/21/1985US4518678 Photoresist layer dissolved from periphery abnd exposed to light for development
05/21/1985US4518675 Of poly(fluoroalkyl a-haloacrylate); alkali metal hydroxide or alkoxide or tetraalkylammonium hydroxide in nonaqueous polar dmso
05/21/1985US4518630 Method for forming silicon oxide films
05/21/1985US4518629 Process for positioning an electrical contact hole between two interconnection lines of an integrated circuit
05/21/1985US4518456 Light induced etching of InP by aqueous solutions of H3 PO4
05/21/1985US4518112 Process for controlled braze joining of electronic packaging elements
05/21/1985US4518078 Wafer transport system
05/21/1985US4517769 Method and apparatus for forming oblique groove in semiconductor device
05/21/1985US4517752 Splash retarder
05/21/1985US4517738 Method for packaging electronic parts
05/21/1985US4517734 Immersion in hot deionized water
05/21/1985US4517732 Method for fabricating an EEPROM
05/21/1985US4517731 Double polysilicon process for fabricating CMOS integrated circuits
05/21/1985US4517730 Method of providing a small-sized opening, use of this method for the manufacture of field effect transistors having an aligned gate in the submicron range and transistors thus obtained
05/21/1985US4517729 Method for fabricating MOS device with self-aligned contacts
05/21/1985US4517728 Manufacturing method for MIS-type semiconductor device
05/21/1985CA1187626A1 Wire bonding technique for integrated circuit chips
05/21/1985CA1187625A1 Tape automated bonding for integrated circuits
05/21/1985CA1187624A1 Basic cell for integrated circuit gate arrays
05/21/1985CA1187623A1 Process for self-healing dielectric
05/21/1985CA1187622A1 Semiconductor device having a body of amorphous silicon
05/21/1985CA1187612A1 Charge coupled device
05/21/1985CA1187351A1 Method for lpcvd co-deposition of metal and silicon to form metal silicide
05/15/1985EP0141649A1 An apparatus for pulling a single crystal
05/15/1985EP0141571A2 High performance two layer metal cmos process using a reduced number of masks
05/15/1985EP0141561A2 A process for producing devices having semi-insulating indium phosphide based compositions
05/15/1985EP0141548A2 Photomask pattern inspection
05/15/1985EP0141526A1 Ceramic with anisotropic heat conduction
05/15/1985EP0141506A2 Method for producing a semiconductor structure
05/15/1985EP0141496A1 Process for deposition silicon dioxide containing dopant onto a substrate
05/15/1985EP0141495A1 A method for pulling a single crystal
05/15/1985EP0141434A2 Process for the correction of photo masks
05/15/1985EP0141425A1 Small area thin film transistor
05/15/1985EP0141335A1 Process for the production of an X-ray mask with a metallic support foil
05/15/1985EP0141311A2 Negative working electron beam resist system to be dry-developed
05/15/1985EP0141274A2 I2L circuit
05/15/1985EP0141207A2 Integrable NPN transistor
05/15/1985EP0141098A2 Impurity band conduction semiconductor devices
05/15/1985EP0141075A1 Power transistor
05/15/1985EP0140975A1 Reactive ion etching apparatus
05/15/1985EP0140965A1 Method of making a nonvolatile semiconductor memory device.
05/15/1985EP0045181B1 High electron mobility heterojunction semiconductor device and method of manufacturing
05/14/1985US4517661 Programmable chip tester having plural pin unit buffers which each store sufficient test data for independent operations by each pin unit
05/14/1985US4517659 Constant-distance structure polycellular very large scale integrated circuit
05/14/1985US4517583 Semiconductor integrated circuit including a fuse element
05/14/1985US4517448 Infrared furnace with atmosphere control capability
05/14/1985US4517275 Light-sensitive mixture based on O-naphthoquinone-diazides, and light-sensitive copying material prepared therefrom
05/14/1985US4517238 Method of making integral molded silicone products with different phases and the molded products prepared therefrom
05/14/1985US4517227 Reduction of metal oxide
05/14/1985US4517226 Gold, aluminum, silicon multilayer, migration
05/14/1985US4517225 Method for manufacturing an electrical interconnection by selective tungsten deposition
05/14/1985US4517223 Method of making amorphous semiconductor alloys and devices using microwave energy
05/14/1985US4517220 Deposition and diffusion source control means and method
05/14/1985US4517106 Soluble surfactant additives for ammonium fluoride/hydrofluoric acid oxide etchant solutions
05/14/1985US4517070 Magnetron sputtering cathode assembly and magnet assembly therefor
05/14/1985US4517051 Multi-layer flexible film module
05/14/1985US4517047 Gallium arsenide molecular beam epitaxial semiconductors
05/14/1985US4517026 Method of backside heating a semiconductor substrate in an evacuated chamber by directed microwaves for vacuum treating and heating a semiconductor substrate
05/14/1985US4516673 Apparatus for conveying a lead frame mounting semiconductor pellets
05/14/1985US4516527 Photochemical vapor deposition apparatus
05/14/1985US4516525 Electron gun equipment for vacuum deposition
05/14/1985US4516316 Method of making improved twin wells for CMOS devices by controlling spatial separation
05/14/1985US4516315 Method of making a self-protected thyristor
05/14/1985US4516313 Unified CMOS/SNOS semiconductor fabrication process
05/14/1985CA1187211A1 Lift-off shadow mask
05/14/1985CA1187210A1 Method for producing vlsi complementary mos field effect transistor circuits
05/14/1985CA1187209A1 Method for manufacturing vlsi complementary mos field effect transistor circuits in silicon gate technology
05/14/1985CA1187206A1 Schottky-barrier gate field effect transistor and a process for the production of the same
05/14/1985CA1187203A1 Integrated circuit photomask
05/14/1985CA1187201A1 Inspection of multilayer ceramic circuit modules by electrical inspection of unfired green sheets
05/14/1985CA1187177A1 Serial-parallel-serial charge coupled device and method of transferring charge therein
05/09/1985WO1985002088A1 Process and unit for positioning component parts on a work-piece
05/09/1985WO1985002060A1 Method for substituting an electronic component connected to the conductor tracks of a carrier substrate
05/09/1985WO1985002059A2 Lpe growth on group iii-v compound semiconductor substrates containing phosphorus
05/09/1985WO1985002030A1 GRAFT POLYMERIZED SiO2 LITHOGRAPHIC MASKS
05/09/1985WO1985001906A1 Data handling system for a pattern generator
05/08/1985EP0140817A2 Recessed metallization
05/08/1985EP0140755A2 A plasma processor for IC fabrication
05/08/1985EP0140749A1 Method for producing a complementary semiconductor device with a dielectric isolation structure
05/08/1985EP0140746A2 Method for the heat treatment of electrical conducting coatings on dielectric substrates by microwaves
05/08/1985EP0140744A2 Integrated circuit device
05/08/1985EP0140660A2 Method of forming amorphous polymeric halosilane films and products produced therefrom
05/08/1985EP0140584A1 Master-slice-type semiconductor integrated circuit device
05/08/1985EP0140509A1 An lec method and apparatus for growing single crystal
05/08/1985EP0140455A2 Process for the production of masks for the exposure of resits with X-ray litography
05/08/1985EP0140369A1 Semiconductor integrated circuit including series connected transistors
05/08/1985EP0140294A2 Plasma processing method and apparatus for carrying out the same
05/08/1985EP0140276A1 Power MOS FET and method of manufacturing the same
05/08/1985EP0140273A2 Positive photoresist compositions having deep UV response, photosensitive elements and thermally stable photochemically imaged systems containing same
05/08/1985EP0140206A1 Method and circuit for oscillation prevention during testing of integrated circuit logic chips
05/08/1985EP0140201A2 Dry-etching process
05/08/1985EP0140130A2 Process and apparatus for preparing semiconductor layer
05/08/1985EP0140126A1 Method of tape-automated bonding
05/08/1985EP0140119A2 Method of making a chip cooling device
05/08/1985EP0140095A1 Semiconductor diode
05/08/1985EP0139998A1 Power semiconductor device with main current section and emulation current section
05/08/1985EP0139990A2 Reduced pressure epitaxial deposition process
05/08/1985EP0139884A1 Method of forming ohmic contacts
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