Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
10/1985
10/01/1985US4544847 Multi-gap magnetic imaging lens for charged particle beams
10/01/1985US4544846 Variable axis immersion lens electron beam projection system
10/01/1985US4544627 Negative image forming process in o-quinone diazide layer utilizing laser beam
10/01/1985US4544576 Deep dielectric isolation by fused glass
10/01/1985US4544446 VLSI chemical reactor
10/01/1985US4544445 Process for positioning an interconnection line on an electric contact hole of an integrated circuit
10/01/1985US4544442 Forming patterns by the radiation vaporization of the cured coating on substrate bonded filaments
10/01/1985US4544423 Amorphous silicon semiconductor and process for same
10/01/1985US4544418 Process for high temperature surface reactions in semiconductor material
10/01/1985US4544417 Evaporation inhibition by using atmosphere of hydrogen, arsenic an
10/01/1985US4544416 Passivation of silicon oxide during photoresist burnoff
10/01/1985US4544318 Manufacturing system
10/01/1985US4544317 Vacuum-to-vacuum entry system apparatus
10/01/1985US4543707 Method of forming through holes by differential etching of stacked silicon oxynitride layers
10/01/1985EP0099878A4 Method for reducing oxygen precipitation in silicon wafers.
10/01/1985CA1194616A1 Process for forming a shallow, high-concentration impurity layer in a semiconductor body
10/01/1985CA1194615A1 Bilevel ultraviolet resist system for patterning substrates of high reflectivity
10/01/1985CA1194614A1 Process of ion implant masking in cmos manufacture and resultant structure
10/01/1985CA1194613A1 Microelectronic shadow masking process for reducing punchthrough
10/01/1985CA1194612A1 Process for forming complementary integrated circuit devices
10/01/1985CA1194385A1 Device fabrication using gas-solid processes
10/01/1985CA1194314A1 Method for producing multilayered glass-ceramic structure with copper-based conductors therein
09/1985
09/26/1985WO1985004284A1 Method of fabricating vlsi cmos devices
09/26/1985WO1985004266A1 Dissimilar superimposed grating precision alignment and gap measurement systems
09/26/1985WO1985004250A1 Method and apparatus for precision sem measurements
09/26/1985WO1985004134A1 Process for forming and locating buried layers
09/26/1985EP0145749A4 Universal flat orienter for semiconductor wafers.
09/26/1985EP0087426A4 Lateral epitaxial growth by seeded solidification.
09/25/1985EP0155875A1 Device for producing ions of a specified kind, using energy selection for separating them from other ions; application to ion implantation
09/25/1985EP0155823A2 Improvements in or relating to the covering of substrates with synthetic resin films
09/25/1985EP0155744A2 Optical absorption spectroscopy for semiconductors
09/25/1985EP0155726A1 Chemically sensitive field-effect transistor component
09/25/1985EP0155699A2 Semiconductor device having improved multi-layer structure of insulating film and conductive film
09/25/1985EP0155698A2 A method for manufacturing a semiconductor integrated circuit device provided with an improved isolation structure
09/25/1985EP0155687A2 Method of forming inspection patterns
09/25/1985EP0155668A2 Plasma sculpturing with a non-planar sacrificial layer
09/25/1985EP0155652A2 Photopolymerizable mixture and recording material produced from it
09/25/1985EP0155576A1 Radiation-resistant semiconductor device
09/25/1985EP0155473A1 Power semiconductor module and method of manufacture
09/25/1985EP0155283A1 Focused ion beam column.
09/25/1985EP0064506B1 Improvements in or relating to methods of producing devices comprising metallised regions on dielectric substrates
09/24/1985US4543659 Method for recognizing a pellet pattern
09/24/1985US4543597 Dynamic semiconductor memory and manufacturing method thereof
09/24/1985US4543596 Insulated-gate field-effect transistor (IGFET) with injector zone
09/24/1985US4543595 Bipolar memory cell
09/24/1985US4543593 Semiconductor protective device
09/24/1985US4543592 Semiconductor integrated circuits and manufacturing process thereof
09/24/1985US4543576 System for measuring electrical resistance and temperature during manufacture of thin, conductive films deposited on substrates by means of evaporation or sputter deposition
09/24/1985US4543499 I2 L circuitry having operating current supplied by higher-voltage circuitry fabricated on same chip
09/24/1985US4543494 MOS type output driver circuit having a protective circuit
09/24/1985US4543465 Microwave plasma source having improved switching operation from plasma ignition phase to normal ion extraction phase
09/24/1985US4543464 Apparatus for scribing semiconductor wafer with laser beam
09/24/1985US4543320 Method of making a high performance, small area thin film transistor
09/24/1985US4543271 Homogeneously chemically bonded, containing minimum amorphous silicon
09/24/1985US4543270 Nucleation
09/24/1985US4543267 Method of making a non-single-crystalline semi-conductor layer on a substrate
09/24/1985US4543133 Process for producing single crystalline semiconductor island on insulator
09/24/1985US4543130 Megasonic cleaning apparatus and method
09/24/1985US4543059 Slotted cantilever diffusion tube system and method and apparatus for loading
09/24/1985US4542712 Apparatus for molecular beam epitaxy
09/24/1985US4542710 Solution-dropping nozzle device
09/24/1985US4542580 Vapor deposition of amorphous silicon doped with arsenic and phosphorus onto silicon substrate
09/24/1985US4542579 Method for forming aluminum oxide dielectric isolation in integrated circuits
09/24/1985US4542577 Submicron conductor manufacturing
09/24/1985CA1194242A1 Lateral bidirectional notch fet
09/24/1985CA1194235A1 Compensation of 1st order transfer-inefficiency effect in a c.t.d.
09/24/1985CA1194196A1 Masking techniques in chemical vapor deposition
09/24/1985CA1194193A1 Semiconductor device and method of manufacturing same
09/24/1985CA1194146A1 Voltage translator
09/24/1985CA1194051A1 Method of and device for feeding electric and/or electronic elements to given positions
09/24/1985CA1193896A1 Method of replenishing a developer for photosensitive plate
09/18/1985EP0155231A2 Image-producing process
09/18/1985EP0155215A2 High electron mobility semiconductor device employing selectively doped heterojunction
09/18/1985EP0155138A2 A reticle used in semiconductor device fabrication and a method for inspecting a reticle pattern thereon
09/18/1985EP0155125A2 Level substrate for semiconducting devices and method for fabricating same
09/18/1985EP0155117A2 Voltage detecting device
09/18/1985EP0155044A2 Plastic pin grid array chip carrier
09/18/1985EP0154998A2 Improved structure of power supply wirings in semiconductor integrated circuit
09/18/1985EP0154979A2 Single development step, dual layer photoresist photolithographic process
09/18/1985EP0154871A2 One-transistor dynamic random-access memory
09/18/1985EP0154859A1 Apparatus for vacuum deposition
09/18/1985EP0154757A1 Cap for semiconductor device
09/18/1985EP0154720A1 Polyamic acid copolymer solutions for improved semiconductor manufacturing
09/18/1985EP0154696A1 Control and regulating process for the composition and thickness of metallic conducting alloy layers during production
09/18/1985EP0154682A1 Epitaxially isolated semiconductor device means and method
09/18/1985EP0154675A2 A process for reactive ion etching a polymer film
09/18/1985EP0154670A2 Process for producing a semiconductor device having insulating film
09/18/1985EP0154629A1 Dustfree packaging container and method.
09/17/1985US4542481 Semiconductor memory cell
09/17/1985US4542438 Hybrid integrated circuit device
09/17/1985US4542401 Copper, nickel, tin and silver; lightweight, excellent electrical and thermal conductivity
09/17/1985US4542400 Semiconductor device with multi-layered structure
09/17/1985US4542398 Semiconductor devices of multi-emitter type
09/17/1985US4542397 Self aligning small scale integrated circuit semiconductor chips to form large area arrays
09/17/1985US4542340 Testing method and structure for leakage current characterization in the manufacture of dynamic RAM cells
09/17/1985US4542298 Methods and apparatus for gas-assisted thermal transfer with a semiconductor wafer
09/17/1985US4542105 Glass composition for covering semiconductor element
09/17/1985US4542074 Surface metallized semiconductors
09/17/1985US4542037 Rounding off edges, integrated circuit manufacture
09/17/1985US4541893 Process for fabricating pedestal interconnections between conductive layers in an integrated circuit
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