Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
01/1986
01/02/1986EP0166121A2 Integrated circuit isolation structure and method of making it
01/02/1986EP0166120A1 A method of gas plasma depositing a film of insulating material
01/02/1986EP0166119A1 Method for depositing material with nanometer dimensions
01/02/1986EP0166032A2 Carrier rack of quartz glass for substrate wafers
01/02/1986EP0166004A1 Proximity effect correction method for E-beam lithography
01/02/1986EP0166003A1 Semiconductor integrated circuit
01/02/1986EP0165971A1 Method of making a bipolar junction transistor.
12/1985
12/31/1985US4562513 Process for forming a high density metallurgy system on a substrate and structure thereof
12/31/1985US4562455 Semiconductor element
12/31/1985US4562453 Complementary metal-oxide semiconductor integrated circuit device of master slice type
12/31/1985US4562452 Charge coupled device having meandering channels
12/31/1985US4562451 Semiconductor device having a resistor region with an enhanced breakdown voltage
12/31/1985US4562100 Polyimide coating compositions from diesterified anhydride and aromatic diamine
12/31/1985US4561960 Treating several pairs of substrates at same time
12/31/1985US4561932 Method of producing integrated silicon structures on isolated islets of the substrate
12/31/1985US4561916 Method of growth of compound semiconductor
12/31/1985US4561915 Process for epitaxial growth on a corrugated wafer
12/31/1985US4561907 Process for forming low sheet resistance polysilicon having anisotropic etch characteristics
12/31/1985US4561906 Doping polysilicon applying absorption mask, applying laser to diffuse dopant, forming additional connectors
12/31/1985US4561773 Projection exposure apparatus
12/31/1985US4561688 Method of and apparatus for adsorbingly fixing a body
12/31/1985US4561219 Process and apparatus for finishing electronic device
12/31/1985US4561173 Method of manufacturing a wiring system
12/31/1985US4561172 Integrated circuit fabrication method utilizing selective etching and oxidation to form isolation regions
12/31/1985US4561171 Process of gettering semiconductor devices
12/31/1985US4561170 Method of making field-plate isolated CMOS devices
12/31/1985US4561169 Method of manufacturing semiconductor device utilizing multilayer mask
12/31/1985US4561168 Method of making shadow isolated metal DMOS FET device
12/31/1985CA1198833A1 Tape-automated-bonding of integrated circuits
12/31/1985CA1198832A1 Polycrystalline silicon diode with metal silicide contact
12/31/1985CA1198831A1 Nondestructive dimensional detection system
12/31/1985CA1198797A1 X-y addressable workpiece positioner having an improved x-y address indicia sensor
12/31/1985CA1198620A1 Process for fabricating semiconductor devices
12/27/1985EP0165871A1 Process and appliance for the handling of circular plates, for their registration by a laser beam
12/27/1985EP0165863A1 Method of manufacturing at least one thin film field-effect transistor, and transistor produced by this method
12/27/1985EP0165826A1 Photoelectrochemical etching of a semiconductor body
12/27/1985EP0165798A1 Semiconductor device comprising N-channel and P-channel transistors and production method
12/27/1985EP0165772A2 Charged particle sources
12/27/1985EP0165766A1 Integrated circuit filter
12/27/1985EP0165686A2 Method for repairing a photomask by laser-induced polymer degradation
12/27/1985EP0165685A2 Laser-based system for the total repair of photomasks
12/27/1985EP0165626A1 Method of manufacturing an electronic microcircuit provided with contact elevations
12/27/1985EP0165618A2 Glow-discharge decomposition apparatus
12/27/1985EP0165575A2 Method for forming vias in a planar structure
12/27/1985EP0165547A2 A method of forming a shallow doped region in a semiconductor substrate
12/27/1985EP0165538A2 A resistor for a group III-V intermetallic compound semiconductor integrated circuit
12/27/1985EP0165513A2 Semiconductor contact metal protection
12/27/1985EP0165507A2 Phosphoric triamides and polymers thereof as dopants
12/27/1985EP0165493A2 Liquid replenishing apparatus
12/27/1985EP0165449A1 Process for making semi-conductor films
12/27/1985EP0165433A2 High-speed field-effect transistor
12/27/1985EP0165427A2 Semiconductor package substrate and manufacturing process
12/27/1985EP0165400A1 Apparatus for plasma etching
12/27/1985EP0165364A1 Method of standardization and stabilization of semiconductor wafers
12/27/1985EP0165314A1 Method for making a conductive silicon substrate and a semiconductor device formed therein
12/27/1985EP0165309A1 High-bandwidth, high radiance, surface emitting led, and method therefor
12/24/1985US4561009 Semiconductor device
12/24/1985US4561004 High density, electrically erasable, floating gate memory cell
12/24/1985US4561003 Field effect transistor
12/24/1985US4560880 Apparatus for positioning a workpiece in a localized vacuum processing system
12/24/1985US4560642 Method of manufacturing a semiconductor device
12/24/1985US4560640 Glycidol methacrylate and methacryloyloxybenzalacetophenones; for integrated circuits
12/24/1985US4560636 Novolaks and naphthoquinone diazides; rough surface
12/24/1985US4560590 Floating substrate on gaseous medium in confined passageways;
12/24/1985US4560583 Doping, calibration resistance, forming metal contactors with precise positioning
12/24/1985US4560582 Single crystal silicon substrate; double doping with arsenic or boron and phosphorous
12/24/1985US4560436 Process for etching tapered polyimide vias
12/24/1985US4560435 Placing stencil over critical areas beford back-etching
12/24/1985US4560422 Method for forming integrated circuits bearing polysilicon of reduced resistance
12/24/1985US4560421 Forming insulative film on substrate, masking, removal of mask pattern, and selectively etching to give isolation regions
12/24/1985US4560420 Reflecting and absorbing radiant energy
12/24/1985US4560419 Doping different regions with two different types of impurities and heat treating
12/24/1985US4560278 Fixed-slit type photoelectric microscope
12/24/1985US4560217 Chip carrier connector
12/24/1985US4560084 Heater preform for sealing a closure
12/24/1985US4559696 Doping silicon with carbon and nitrogen
12/24/1985US4559693 Process for fabricating field effect transistors
12/20/1985CN85100896A Method for passivating the surface of semiconductors
12/19/1985WO1985005758A1 Gaseous lock for entrance and exit of tunnel, in which transport and processing of wafers take place under double floating condition
12/19/1985WO1985005757A1 Apparatus for double floating wafer transport and processing
12/19/1985WO1985005736A1 Tri-well cmos technology
12/19/1985WO1985005735A1 Integrated circuit package
12/19/1985WO1985005734A1 Film for machining wafers
12/18/1985EP0165148A1 Assembly process for at least two ceramic pieces each having at least one plane surface
12/18/1985EP0165085A1 Method of manufacturing aluminium contacts through a thick insulating layer in a circuit
12/18/1985EP0165055A2 Method and apparatus for exposing photoresist by using an electron beam and controlling its voltage and charge
12/18/1985EP0165027A2 Thin film field effect transistors utilizing a polypnictide semiconductor
12/18/1985EP0164976A2 Method of producing a contact for a semiconductor device
12/18/1985EP0164928A2 Vertical hot wall CVD reactor
12/18/1985EP0164924A2 Step coverage method for dielectrics in VLSI circuits
12/18/1985EP0164892A1 Horizontal furnace apparatus
12/18/1985EP0164841A1 Ceramic composition for dielectrics
12/18/1985EP0164829A1 Semiconductor memory device and method of manufacturing the same
12/18/1985EP0164820A2 Mask structure for x-ray lithography and method for making same
12/18/1985EP0164781A2 A self-aligned split gate EPROM and a method of manufacturing the same
12/18/1985EP0164750A2 Antireflective coatings for use in the manufacture of semiconductor devices, methods and solutions for making such coatings, and the method for using such coatings to absorb light in ultraviolet photolithography processes
12/18/1985EP0164737A2 A method of fabricating self-aligned regions in a substrate
12/18/1985EP0164729A2 Control system for an engine
12/18/1985EP0164720A2 An ohmic contact for an intermetallic compound semiconductor and a method of providing such a contact
12/18/1985EP0164715A2 Microwave ion source
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