Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
04/1985
04/24/1985EP0138473A2 System for integrated circuit processing
04/24/1985EP0138325A2 Chip carrier connector
04/24/1985EP0138254A1 Electrostatic chuck and loading method
04/24/1985EP0138162A2 CMOS structure
04/24/1985EP0138023A2 Semiconductor vibration detection device with lever structure
04/24/1985EP0137988A2 Infrared imager
04/24/1985EP0137980A2 Method for making electrical connections to a semiconductor substrate
04/24/1985EP0137947A1 Spin dryer
04/24/1985EP0137927A2 Process for the controlled etching of tapered vias in borosilicate glass dielectrics
04/24/1985EP0137918A1 Method for eliminating edge lift up during thermal oxidation of a polycrystalline silicon member
04/24/1985EP0137914A2 Silicon wafers for integrated circuit chip fabrication
04/24/1985EP0137906A1 Method for fabricating vertical NPN and lateral PNP transistors in the same semiconductor body
04/24/1985EP0137905A1 Method for making lateral bipolar transistors
04/24/1985EP0137790A1 Self-compensating hydrostatic flattening of semiconductor substrates.
04/23/1985US4513431 Charge coupled device output circuit structure
04/23/1985US4513430 Missing or broken wafer sensor
04/23/1985US4513384 Thin film thickness measurements and depth profiling utilizing a thermal wave detection system
04/23/1985US4513304 Semiconductor memory device and process for producing the same
04/23/1985US4513303 Self-aligned metal field effect transistor integrated circuit
04/23/1985US4513203 Mask and system for mutually aligning objects in ray exposure systems
04/23/1985US4513190 Protection of semiconductor wire bonding capillary from spark erosion
04/23/1985US4513077 Electron beam or X-ray reactive image-formable resinous composition
04/23/1985US4513057 Process for forming sulfide layers
04/23/1985US4513026 Vapor deposition using reaction mixture or silicon compound phosphorus compound, and oxidizing gas
04/23/1985US4512954 Crystal growing apparatus
04/23/1985US4512950 High adhesive strength and wettability
04/23/1985US4512868 High speed dry etching of semiconductors
04/23/1985US4512847 Method of measuring the thickness of the removed layer in subtractive workpiece processing
04/23/1985US4512843 Manufacturing a carrier tape or tapes
04/23/1985US4512841 RF Coupling techniques
04/23/1985US4512816 High-density IC isolation technique capacitors
04/23/1985US4512812 Method for reducing phosphorous contamination in a vacuum processing chamber
04/23/1985US4512659 Apparatus for calibrating a surface scanner
04/23/1985US4512657 Exposure control system
04/23/1985US4512391 Apparatus for thermal treatment of semiconductor wafers by gas conduction incorporating peripheral gas inlet
04/23/1985US4512113 Workpiece holder for polishing operation
04/23/1985US4512076 Semiconductor device fabrication process
04/23/1985US4512075 Method of making an integrated injection logic cell having self-aligned collector and base reduced resistance utilizing selective diffusion from polycrystalline regions
04/23/1985US4512074 Method for manufacturing a semiconductor device utilizing selective oxidation and diffusion from a polycrystalline source
04/23/1985US4512073 Method of forming self-aligned contact openings
04/23/1985CA1186071A1 Power semiconductor device
04/23/1985CA1186070A1 Laser activated polysilicon connections for redundancy
04/23/1985CA1186067A1 Electron beam array lithography system employing multiple parallel array optics channels and method of operation
04/23/1985CA1185920A1 Electrolytic water elimination in electronic device using hygroscopic insulator
04/17/1985EP0137702A2 Chemical Vapor deposition apparatus
04/17/1985EP0137701A1 Process for fabricating a semiconductor device including a barrier film
04/17/1985EP0137649A1 Apparatus and method for ion implantation
04/17/1985EP0137645A2 Method of forming a shallow N-type region
04/17/1985EP0137641A2 Rapid LPE crystal growth
04/17/1985EP0137573A2 Laser device and method for a self-aligned multilayer epitaxy structure device
04/17/1985EP0137564A2 Integrated circuit comprising complementary field effect transistors
04/17/1985EP0137554A2 Method of manufacturing a semiconductor device and semiconductor device manufactured by the use of such a method
04/17/1985EP0137409A2 Resolution device for semiconductor thin films
04/17/1985EP0137319A2 Semiconductor device and a method of manufacturing the same
04/17/1985EP0137257A2 Resistive gate field effect transistor logic family
04/17/1985EP0137209A2 Silicon wafer and its application in producing integrated circuit devices
04/17/1985EP0137207A2 Stacked double dense read only memory
04/17/1985EP0137196A2 Process for making high dielectric constant nitride based materials and devices using the same
04/17/1985EP0137195A1 Dielectric isolated circuit and method of making
04/17/1985EP0137192A2 Prevention of the diffusion of oxidation means during the manufacturing of semiconductor devices
04/17/1985EP0137190A2 Method of patterning thin film
04/17/1985EP0137166A2 High-purity molybdenum target and high-purity molybdenum silicide target for LSI electrodes and process for producing the same
04/17/1985EP0137043A1 Method of manufacturing hydrogenated amorphous silicon thin film and solar cell
04/17/1985EP0137008A1 Module for high vacuum processing
04/16/1985US4511996 Memory cell having a double gate field effect transistor and a method for its operation
04/16/1985US4511980 Electron beam exposure apparatus
04/16/1985US4511914 Power bus routing for providing noise isolation in gate arrays
04/16/1985US4511912 Integrated power transistor arrangement
04/16/1985US4511911 Dense dynamic memory cell structure and process
04/16/1985US4511783 Method for making electrical contacts to diamond by means of a laser, and diamond provided with contacts according to this optical method
04/16/1985US4511604 Process and apparatus for producing alternate monomolecular layers
04/16/1985US4511451 Magnetron
04/16/1985US4511445 Process of enhancing conductivity of material
04/16/1985US4511430 Control of etch rate ratio of SiO2 /photoresist for quartz planarization etch back process
04/16/1985US4511429 Process for dry etching of aluminum and its alloy
04/16/1985US4511428 Method of controlling oxygen content and distribution in grown silicon crystals
04/16/1985US4511413 Process for forming an IC wafer with buried Zener diodes
04/16/1985US4511408 Semiconductor device fabrication with disordering elements introduced into active region
04/16/1985US4511317 Apparatus for enclosing semiconductors with resin by molding
04/16/1985US4511038 Container for masks and pellicles
04/16/1985US4510806 Gauging method and apparatus for components having leads
04/16/1985US4510683 Force assembler apparatus for robots
04/16/1985US4510678 Method for manufacturing a monolithically integrable circuit with a multilayer wiring structure
04/16/1985US4510676 Method of fabricating a lateral PNP transistor
04/16/1985US4510673 Method of producing a semiconductor device
04/16/1985US4510671 Dielectrically isolated transducer employing single crystal strain gages
04/16/1985US4510670 Method for the manufacture of integrated MOS-field effect transistor circuits silicon gate technology having diffusion zones coated with silicide as low-impedance printed conductors
04/16/1985CA1185698A1 Method and means for diagnostic testing of ccd memories
04/11/1985WO1985001613A1 High density mosfet with field oxide aligned channel stops and method of fabricating the same
04/10/1985EP0136952A2 A gate array
04/10/1985EP0136888A1 Large scale integration circuitry
04/10/1985EP0136880A1 Gate array type semiconductor integrated circuit device
04/10/1985EP0136869A2 A resistance ladder network
04/10/1985EP0136868A2 Semiconductor device with protective elements
04/10/1985EP0136819A2 Semiconductor memory
04/10/1985EP0136771A2 A nonvolatile semiconductor memory device
04/10/1985EP0136752A2 Electron image projector
04/10/1985EP0136695A2 Press with several injection plungers
04/10/1985EP0136672A2 Method and apparatus for X-ray exposure
04/10/1985EP0136632A2 A single mask process for implanting self-aligned source and drain electrodes to form a cmos structure