Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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04/24/1985 | EP0138473A2 System for integrated circuit processing |
04/24/1985 | EP0138325A2 Chip carrier connector |
04/24/1985 | EP0138254A1 Electrostatic chuck and loading method |
04/24/1985 | EP0138162A2 CMOS structure |
04/24/1985 | EP0138023A2 Semiconductor vibration detection device with lever structure |
04/24/1985 | EP0137988A2 Infrared imager |
04/24/1985 | EP0137980A2 Method for making electrical connections to a semiconductor substrate |
04/24/1985 | EP0137947A1 Spin dryer |
04/24/1985 | EP0137927A2 Process for the controlled etching of tapered vias in borosilicate glass dielectrics |
04/24/1985 | EP0137918A1 Method for eliminating edge lift up during thermal oxidation of a polycrystalline silicon member |
04/24/1985 | EP0137914A2 Silicon wafers for integrated circuit chip fabrication |
04/24/1985 | EP0137906A1 Method for fabricating vertical NPN and lateral PNP transistors in the same semiconductor body |
04/24/1985 | EP0137905A1 Method for making lateral bipolar transistors |
04/24/1985 | EP0137790A1 Self-compensating hydrostatic flattening of semiconductor substrates. |
04/23/1985 | US4513431 Charge coupled device output circuit structure |
04/23/1985 | US4513430 Missing or broken wafer sensor |
04/23/1985 | US4513384 Thin film thickness measurements and depth profiling utilizing a thermal wave detection system |
04/23/1985 | US4513304 Semiconductor memory device and process for producing the same |
04/23/1985 | US4513303 Self-aligned metal field effect transistor integrated circuit |
04/23/1985 | US4513203 Mask and system for mutually aligning objects in ray exposure systems |
04/23/1985 | US4513190 Protection of semiconductor wire bonding capillary from spark erosion |
04/23/1985 | US4513077 Electron beam or X-ray reactive image-formable resinous composition |
04/23/1985 | US4513057 Process for forming sulfide layers |
04/23/1985 | US4513026 Vapor deposition using reaction mixture or silicon compound phosphorus compound, and oxidizing gas |
04/23/1985 | US4512954 Crystal growing apparatus |
04/23/1985 | US4512950 High adhesive strength and wettability |
04/23/1985 | US4512868 High speed dry etching of semiconductors |
04/23/1985 | US4512847 Method of measuring the thickness of the removed layer in subtractive workpiece processing |
04/23/1985 | US4512843 Manufacturing a carrier tape or tapes |
04/23/1985 | US4512841 RF Coupling techniques |
04/23/1985 | US4512816 High-density IC isolation technique capacitors |
04/23/1985 | US4512812 Method for reducing phosphorous contamination in a vacuum processing chamber |
04/23/1985 | US4512659 Apparatus for calibrating a surface scanner |
04/23/1985 | US4512657 Exposure control system |
04/23/1985 | US4512391 Apparatus for thermal treatment of semiconductor wafers by gas conduction incorporating peripheral gas inlet |
04/23/1985 | US4512113 Workpiece holder for polishing operation |
04/23/1985 | US4512076 Semiconductor device fabrication process |
04/23/1985 | US4512075 Method of making an integrated injection logic cell having self-aligned collector and base reduced resistance utilizing selective diffusion from polycrystalline regions |
04/23/1985 | US4512074 Method for manufacturing a semiconductor device utilizing selective oxidation and diffusion from a polycrystalline source |
04/23/1985 | US4512073 Method of forming self-aligned contact openings |
04/23/1985 | CA1186071A1 Power semiconductor device |
04/23/1985 | CA1186070A1 Laser activated polysilicon connections for redundancy |
04/23/1985 | CA1186067A1 Electron beam array lithography system employing multiple parallel array optics channels and method of operation |
04/23/1985 | CA1185920A1 Electrolytic water elimination in electronic device using hygroscopic insulator |
04/17/1985 | EP0137702A2 Chemical Vapor deposition apparatus |
04/17/1985 | EP0137701A1 Process for fabricating a semiconductor device including a barrier film |
04/17/1985 | EP0137649A1 Apparatus and method for ion implantation |
04/17/1985 | EP0137645A2 Method of forming a shallow N-type region |
04/17/1985 | EP0137641A2 Rapid LPE crystal growth |
04/17/1985 | EP0137573A2 Laser device and method for a self-aligned multilayer epitaxy structure device |
04/17/1985 | EP0137564A2 Integrated circuit comprising complementary field effect transistors |
04/17/1985 | EP0137554A2 Method of manufacturing a semiconductor device and semiconductor device manufactured by the use of such a method |
04/17/1985 | EP0137409A2 Resolution device for semiconductor thin films |
04/17/1985 | EP0137319A2 Semiconductor device and a method of manufacturing the same |
04/17/1985 | EP0137257A2 Resistive gate field effect transistor logic family |
04/17/1985 | EP0137209A2 Silicon wafer and its application in producing integrated circuit devices |
04/17/1985 | EP0137207A2 Stacked double dense read only memory |
04/17/1985 | EP0137196A2 Process for making high dielectric constant nitride based materials and devices using the same |
04/17/1985 | EP0137195A1 Dielectric isolated circuit and method of making |
04/17/1985 | EP0137192A2 Prevention of the diffusion of oxidation means during the manufacturing of semiconductor devices |
04/17/1985 | EP0137190A2 Method of patterning thin film |
04/17/1985 | EP0137166A2 High-purity molybdenum target and high-purity molybdenum silicide target for LSI electrodes and process for producing the same |
04/17/1985 | EP0137043A1 Method of manufacturing hydrogenated amorphous silicon thin film and solar cell |
04/17/1985 | EP0137008A1 Module for high vacuum processing |
04/16/1985 | US4511996 Memory cell having a double gate field effect transistor and a method for its operation |
04/16/1985 | US4511980 Electron beam exposure apparatus |
04/16/1985 | US4511914 Power bus routing for providing noise isolation in gate arrays |
04/16/1985 | US4511912 Integrated power transistor arrangement |
04/16/1985 | US4511911 Dense dynamic memory cell structure and process |
04/16/1985 | US4511783 Method for making electrical contacts to diamond by means of a laser, and diamond provided with contacts according to this optical method |
04/16/1985 | US4511604 Process and apparatus for producing alternate monomolecular layers |
04/16/1985 | US4511451 Magnetron |
04/16/1985 | US4511445 Process of enhancing conductivity of material |
04/16/1985 | US4511430 Control of etch rate ratio of SiO2 /photoresist for quartz planarization etch back process |
04/16/1985 | US4511429 Process for dry etching of aluminum and its alloy |
04/16/1985 | US4511428 Method of controlling oxygen content and distribution in grown silicon crystals |
04/16/1985 | US4511413 Process for forming an IC wafer with buried Zener diodes |
04/16/1985 | US4511408 Semiconductor device fabrication with disordering elements introduced into active region |
04/16/1985 | US4511317 Apparatus for enclosing semiconductors with resin by molding |
04/16/1985 | US4511038 Container for masks and pellicles |
04/16/1985 | US4510806 Gauging method and apparatus for components having leads |
04/16/1985 | US4510683 Force assembler apparatus for robots |
04/16/1985 | US4510678 Method for manufacturing a monolithically integrable circuit with a multilayer wiring structure |
04/16/1985 | US4510676 Method of fabricating a lateral PNP transistor |
04/16/1985 | US4510673 Method of producing a semiconductor device |
04/16/1985 | US4510671 Dielectrically isolated transducer employing single crystal strain gages |
04/16/1985 | US4510670 Method for the manufacture of integrated MOS-field effect transistor circuits silicon gate technology having diffusion zones coated with silicide as low-impedance printed conductors |
04/16/1985 | CA1185698A1 Method and means for diagnostic testing of ccd memories |
04/11/1985 | WO1985001613A1 High density mosfet with field oxide aligned channel stops and method of fabricating the same |
04/10/1985 | EP0136952A2 A gate array |
04/10/1985 | EP0136888A1 Large scale integration circuitry |
04/10/1985 | EP0136880A1 Gate array type semiconductor integrated circuit device |
04/10/1985 | EP0136869A2 A resistance ladder network |
04/10/1985 | EP0136868A2 Semiconductor device with protective elements |
04/10/1985 | EP0136819A2 Semiconductor memory |
04/10/1985 | EP0136771A2 A nonvolatile semiconductor memory device |
04/10/1985 | EP0136752A2 Electron image projector |
04/10/1985 | EP0136695A2 Press with several injection plungers |
04/10/1985 | EP0136672A2 Method and apparatus for X-ray exposure |
04/10/1985 | EP0136632A2 A single mask process for implanting self-aligned source and drain electrodes to form a cmos structure |