Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
06/1992
06/09/1992US5121177 Silicon thin film transistor
06/09/1992US5121176 MOSFET structure having reduced gate capacitance
06/09/1992US5121175 Semiconductor device having a side wall film
06/09/1992US5121118 Method and apparatus for achieving controlled supplemental signal processing during analog-to-digital signal conversion
06/09/1992US5121089 Micro-machined switch and method of fabrication
06/09/1992US5121052 Automated handler for semiconductor devices
06/09/1992US5121036 Semiconductor integrated circuit with pads and power supply lines
06/09/1992US5121000 Edge-rate feedback CMOS output buffer circuits
06/09/1992US5120974 Position detecting method and device using image pickup of a mark
06/09/1992US5120971 Method for reflection-type two-dimensional pattern-reducing-copying using single convergence mirror and equipment thereof
06/09/1992US5120925 Methods for device transplantation
06/09/1992US5120680 Method for depositing dielectric layers
06/09/1992US5120679 Form insulating layer on substrate surface, form opening, deposit anti-fuse material in opening, forming spacer on sidewalls
06/09/1992US5120678 Infiltrating gap between component and substrate with polymer-precursor liquid, curing to solidy and protect
06/09/1992US5120675 Method for forming a trench within a semiconductor layer of material
06/09/1992US5120674 Dynamic random access memory
06/09/1992US5120673 Process of fabricating field effect transistor with ldd structure
06/09/1992US5120672 Forming oxide and nitride layers on a semicondcutor substrate to form an erasable, electrically programmable read only memory cell
06/09/1992US5120671 Reduced memory cell size and improved device density
06/09/1992US5120670 Thermal process for implementing the planarization inherent to stacked etch in virtual ground EPROM memories
06/09/1992US5120669 Sufficient separation between channel barrier and source and drain for attaining high source/drain breakdwon voltage
06/09/1992US5120668 Confomral layers of polysilicon, metal and sielectric, preferential etching
06/09/1992US5120667 Process for fabricating a thin film transistor
06/09/1992US5120666 Manufacturing method for semiconductor device
06/09/1992US5120665 Method of using an anisotropically electroconductive adhesive having pressure-deformable electroconductive particles to electrically connect circuits
06/09/1992US5120577 Method of performing metal coating on metallized surfaces of electronic component chips with an electronic component chip holder
06/09/1992US5120573 Coating polyamic acid alkyl ester on metallic film and curing it by heating
06/09/1992US5120569 Method of forming a polymer on a substrate
06/09/1992US5120485 Method of forming glazed enclosure
06/09/1992US5120418 Multiple anodes
06/09/1992US5120394 Epitaxial growth process and growing apparatus
06/09/1992US5120393 Method for molecular-beam epitaxial growth
06/09/1992US5120391 Tape bonding apparatus
06/09/1992US5120134 Exposure system including a device for analyzing an affect of a wafer resist upon a mark signal
06/09/1992US5120034 Two-step positioning device using lorentz forces and a static gas bearing
06/09/1992US5119761 Substrate heating apparatus for forming thin films on substrate surface
06/09/1992US5119760 Methods and apparatus for material deposition
06/09/1992US5119541 Wafer succeptor apparatus
06/09/1992CA1303281C Patterned thin film and process for preparing the same
06/09/1992CA1303254C Platen assembly for a vacuum processing system
06/09/1992CA1303253C Processes depending on plasma generation
06/09/1992CA1303250C Integrated circuit comprising load resistors, arranged as thin-film elements on the field oxide zones which separate the active transistor zones, and processes for the production thereof
06/09/1992CA1303194C Photovoltaic element with a semiconductor layer comprising non-single crystal material containing at least zn, se and h in an amount of 1 to40 atomic %
06/09/1992CA1302947C Copper-chromium-polyimide composite
06/09/1992CA1302675C Thin film and device having the same
06/08/1992CA2050649A1 Devices based on si/ge
06/07/1992CA2056910A1 Process for treatment of metals by material deposition and furnace using said process
06/05/1992WO1992010875A1 High frequency oscillator comprising cointegrated thin film resonator and active device
06/05/1992CA2097717A1 High frequency oscillator comprising cointegrated thin film resonator and active device
06/05/1992CA2055896A1 Structure and method for programming antifuses in an integrated circuit array
06/05/1992CA2054883A1 Structure and method for testing antifuse resistance and circuit speed
06/04/1992DE4138999A1 Semiconductor component mfg. - depositing carbon layer on light reflecting layer and forming photosensitive resin layer on carbon layer
06/04/1992DE4133219A1 Integrated switch for BICMOS or bipolar elements - comprising switches arranged in semiconductor substrate and one switch is surrounded by trench filled with silicon oxide insulating material
06/03/1992EP0488804A1 Non-volatile semiconductor memory device
06/03/1992EP0488798A2 Position detecting method
06/03/1992EP0488788A1 Pellicle structure and process for preparation thereof
06/03/1992EP0488785A1 An automatic device for cutting the neck of a pulled single crystal ingot
06/03/1992EP0488748A1 Resist compositions
06/03/1992EP0488722A1 Vacuum attraction type substrate holding device
06/03/1992EP0488713A1 Positive photoresist composition
06/03/1992EP0488712A1 Positive photoresist composition
06/03/1992EP0488707A2 Charged particle beam deflector
06/03/1992EP0488681A1 N, N-dialkylaminoalkyl-N', N'-dialkylaminodimethylsilane
06/03/1992EP0488647A2 A solid-state imaging device
06/03/1992EP0488642A2 Method for controlling thickness of single crystal thin-film layer on soi substrate
06/03/1992EP0488632A2 A method for growing a compound semiconductor and a method for producing a semiconductor laser
06/03/1992EP0488628A2 Method of producing an aluminum stacked contact/via for multilayer interconnections
06/03/1992EP0488625A2 Structure and method for use in a semiconductor field oxidation process
06/03/1992EP0488620A1 Vacuum processing system
06/03/1992EP0488576A1 Method of forming an integrated circuit contact
06/03/1992EP0488554A2 Tab tape, tab tape package and method of bonding same
06/03/1992EP0488546A1 Contact for integrated circuits
06/03/1992EP0488540A1 Method for etching a pattern in a layer of gold
06/03/1992EP0488525A1 Alkoxyalkyl ester solubility inhibitors for phenolic resins
06/03/1992EP0488440A2 Process of introduction and diffusion of platinum ions in a slice of silicon
06/03/1992EP0488393A2 Method for treating substrates
06/03/1992EP0488372A1 Fine pattern forming process
06/03/1992EP0488364A2 Method and apparatus for securing integrated circuits from unauthorized use
06/03/1992EP0488344A2 SOI wafer fabrication by selective epitaxial growth
06/03/1992EP0488339A1 Flame-resistant photo-curable resin composition
06/03/1992EP0488319A1 Multichip module
06/03/1992EP0488307A2 Plasma etching apparatus
06/03/1992EP0488303A2 Pattern layout of power source lines in semiconductor memory device
06/03/1992EP0488283A2 Method of fabricating memory cell for semiconductor integrated circuit
06/03/1992EP0488267A2 Wafer binding method and apparatus
06/03/1992EP0488264A2 Method of manufacturing a semiconductor device with improved electromigration resistance
06/03/1992EP0488245A1 Phase-shifting mask and process for its production
06/03/1992EP0488230A2 Method of manufacturing a semiconductor substrate having a dielectric isolation structure
06/03/1992EP0488198A1 Gaseous process for selectively removing silicon nitride film
06/03/1992EP0488186A1 Shape of bonding pad of semiconductor device bonded by wire bonding method
06/03/1992EP0488154A2 Contact for semiconductor device and method of manufacturing the same
06/03/1992EP0488149A2 Method of analyzing metal impurities in surface oxide film of semiconductor substrate
06/03/1992EP0488148A2 Method of manufacturing a MOS-type field-effect transistor
06/03/1992EP0488133A1 Method of making a cantilever stylus for use in an atomic force microscope
06/03/1992EP0488091A2 Plastic-packaged semiconductor device and method of forming the same
06/03/1992EP0488053A1 Method for manufacturing a semiconductor chip
06/03/1992EP0487951A1 Method of fabricating a stacked capacitator DRAM cell
06/03/1992EP0487937A1 A semiconductor device having punch-through protected buried contacts and method for making the same
06/03/1992EP0487857A2 Enhancement of polyimide adhesion on reactive metals
06/03/1992EP0487848A1 A loading apparatus having a suction-hold mechanism