Patents for C25F 3 - Electrolytic etching or polishing (4,256) |
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02/19/2004 | DE10206687B4 Vorrichtung und Verfahren zur lichtinduzierten chemischen Behandlung eines Werkstücks Apparatus and method for light-induced chemical treatment of a workpiece |
02/17/2004 | US6693365 Local electrochemical deplating of alignment mark regions of semiconductor wafers |
02/12/2004 | DE10235020A1 Device for etching large surface semiconductor wafers in a trough-shaped receiver containing a liquid electrolyte used in semiconductor manufacture comprises a testing head provided with a device for holding at least one wafer |
02/12/2004 | DE10234547A1 Process for forming a recess in a workpiece used in the production of molds in plastic deformation technology comprises influencing the current density during electrochemical removal by the distribution of openings in a mask layer |
02/11/2004 | CN1473965A Method and its device for connection electric continuous electrolytic corrosion between metal belts |
02/10/2004 | US6690600 Ferroelectric memory device and programming method thereof |
02/10/2004 | US6689269 Method for electrochemically processing material |
02/05/2004 | DE10234136A1 Process for the electrochemical micro-processing of a workpiece comprises changing the current field formed by electrodes in an electrolytic liquid by changing the current |
02/04/2004 | EP1386985A1 Process for electrolytic polishing of dental instruments made of nickel-titanium alloys |
02/04/2004 | EP1220729B1 Method and tool for electrochemical machining |
01/29/2004 | WO2004010477A2 Adaptive electropolishing using thickness measurements and removal of barrier and sacrificial layers |
01/29/2004 | WO2004009880A1 Method and apparatus for real time monitoring of industrial electrolytes |
01/29/2004 | CA2491951A1 Adaptive electropolishing using thickness measurements and removal of barrier and sacrificial layers |
01/28/2004 | EP1383943A1 Method of plating and pretreating aluminium workpieces |
01/22/2004 | WO2004007812A1 Method for electrolytic polishing of dental instruments made of nickel-titanium alloy |
01/22/2004 | US20040011666 Positioning the counterelectrodes opposite the metal layer and spaced from metal layer and spaced from each other; passing an electric current for selectively removing a layer of electrolytically dissoluble metal from a substrate |
01/21/2004 | EP1382065A1 Electropolishing metal layers on wafers having trenches or vias with dummy structures |
01/21/2004 | CN1469941A Method of etching as well as frame element, mask and prefabricated substrate element for use in such etching |
01/21/2004 | CN1469939A A method for wet etching |
01/20/2004 | US6679980 Apparatus for electropolishing a stent |
01/15/2004 | WO2004006419A2 Monitoring apparatus and method for improving the accuracy and repeatability of electrochemical capacitance voltage (ecv) measurements |
01/15/2004 | US20040009668 Process for planarizing upper surface of damascene wiring structure for integrated circuit structures |
01/15/2004 | US20040007478 Electroetching system and process |
01/14/2004 | EP1379357A2 Method and apparatus for avoiding particle accumulation during an electrochemical mechanical process |
01/13/2004 | US6678148 Method for producing electrodes as well as electrodes produced by the method |
01/08/2004 | WO2002041369A3 Electropolishing and chemical mechanical planarization |
01/08/2004 | US20040004006 Selectively removing a layer of electrolytically dissoluble metal such as copper overplate from a substrate such as a low-k dielectric interconnect |
12/25/2003 | US20030234184 Method and composition for polishing a substrate |
12/24/2003 | WO2003106090A1 Electrolytic etching of metal layers |
12/24/2003 | CN1131758C 具有一层辅助层的切削件及其制造方法 Having a cutting device and manufacturing method of the auxiliary layer |
12/23/2003 | US6666449 Star wheel surface enhancement and process of manufacture |
12/18/2003 | US20030230493 Which uses only ultrapure water as an electrolytic solution and increases its ion product markedly, thus being capable of removal processing a workpiece or forming an oxide film thereon by the action of hydroxide ions; no impurities left |
12/16/2003 | US6664128 Bump fabrication process |
12/11/2003 | US20030226764 Methods and apparatus for electrochemical-mechanical processing of microelectronic workpieces |
12/10/2003 | EP1368827A2 Electrochemical methods for polishing copper films on semiconductor substrates |
12/10/2003 | EP0958412B1 Treating aluminium workpieces |
12/09/2003 | US6660654 Fabrication method and apparatus for fabricating a spatial structure in a semiconductor substrate |
12/09/2003 | US6660156 Pipe electropolishing apparatus using an electrolyte heater and cooler |
12/09/2003 | US6660138 Electropolishing process means for an inner surface of a long tube |
12/04/2003 | WO2002084748A3 Method for producing optically transparent regions in a silicon substrate |
12/04/2003 | US20030221974 Electrolytic solution formulation for electropolishing process |
12/03/2003 | EP1366220A1 Method for etching layers deposited on transparent substrates such as a glass substrate |
12/02/2003 | US6656341 Method of etching, as well as frame element, mask and prefabricated substrate element for use in such etching |
12/02/2003 | US6655282 Process for manufacturing a strip of aluminium alloy for lithographic printing plates |
12/02/2003 | CA2210588C Process for manufacturing a strip of aluminium alloy for lithographic printing plates |
11/27/2003 | WO2003098676A1 Substrate processing apparatus and substrate processing method |
11/27/2003 | WO2003098673A1 Polishing method and polishing system, and method for fabricating semiconductor device |
11/27/2003 | US20030220052 Electrochemical planarization of metal feature surfaces |
11/27/2003 | US20030218735 Stent manufacturing apparatus |
11/26/2003 | CN1458671A Conductive polishing article for electrochemical mechanical polishing |
11/25/2003 | US6653226 Method for electrochemical planarization of metal surfaces |
11/25/2003 | US6652658 Method for machining/cleaning by hydroxide ion in ultrapure water |
11/25/2003 | CA2280239C Alloy pipes and methods of making same |
11/20/2003 | US20030216045 Hydrogen bubble reduction on the cathode using double-cell designs |
11/13/2003 | WO2003092945A1 Electrolytic polishing liquid, electrolytic polishing method and method for fabricating semiconductor device |
11/13/2003 | WO2003092944A1 Polishing method and polishing system, and method for fabricating semiconductor device |
11/13/2003 | WO2003036693A3 Method and system to provide electrical contacts for electrotreating processes |
11/13/2003 | US20030209448 Forming grooves; fluid flow; polishing surfaces |
11/12/2003 | EP1361023A2 Polishing articles for electrochemical mechanical polishing of substrates |
11/12/2003 | CN1127587C Technology for electrolytically polishing net of stainless steel wire and its precial equipment |
11/06/2003 | WO2003091482A1 Process for producing aluminum material for electrolytic capacitor electrode, aluminum material for electrolytic capacitor electrode and process for producing electrode material for electrolytic capacitor |
11/06/2003 | WO2003090965A1 Polishing method, polishing device, and method of manufacturing semiconductor equipment |
11/06/2003 | WO2003090964A1 Polishing system and polishing method |
11/06/2003 | WO2003041126A3 Electrochemical mechanical processing with advancible sweeper |
11/06/2003 | US20030205483 Method for fabricating trench capacitors for large scale integrated semiconductor memories |
11/05/2003 | CN1454266A Anode assembly for plating and planarizing a conductive layer |
11/05/2003 | CN1126830C Medium and high-pressure anode aluminium foil face-expanding erosion method |
10/30/2003 | WO2003001582A3 Microelectronic substrate having conductive material with blunt cornered apertures, and associated methods for removing conductive material |
10/30/2003 | WO2003001581A3 Methods and apparatus for electrical, mechanical and/or chemical removal of conductive material from a microelectronic substrate |
10/29/2003 | CN1452590A Metal bearing membranes |
10/28/2003 | US6638863 Electropolishing metal layers on wafers having trenches or vias with dummy structures |
10/23/2003 | WO2003088352A1 Electrochemical planarization of metal feature surfaces |
10/23/2003 | WO2003087436A1 Electropolishing and/or electroplating apparatus and methods |
10/23/2003 | CA2479794A1 Electropolishing and/or electroplating apparatus and methods |
10/22/2003 | EP1354986A2 Process and apparatus for electropolishing titanium surfaces |
10/22/2003 | CN1125197C Plated aluminum alloy cylinder, planting pretreatment and planting method |
10/16/2003 | WO2003060962A3 Electrolyte composition and treatment for electrolytic chemical mechanical polishing |
10/15/2003 | CN2579914Y Plasma etching progress rate monitor structure for metal coating plate |
10/14/2003 | US6632348 To manufacture it into a tip for a scanning probe microscope; can manufacture the tip while controlling its curvature radius and aspect ratio and reducing the amount of oxide on its surface |
10/09/2003 | WO2003041462A3 Method for the treatment of electrically conductive substrates and printed circuit boards and the like |
10/08/2003 | EP1349693A2 Fluted electrochemical machining |
10/08/2003 | EP0885452B1 Electrochemical removal of material, particularly excess emitter material in electron-emitting device |
10/02/2003 | WO2003080898A1 Electrochemical machine and electrochemical machining method |
10/01/2003 | EP1177333B1 Method of producing a filter |
10/01/2003 | EP1058592B1 Method of manufacturing a cutting member having an auxiliary layer |
10/01/2003 | CN1446383A Stainless steel substrate treatment |
09/25/2003 | US20030180631 For use in short-wavelength exposure light source/excimer laser |
09/25/2003 | US20030178571 Semiconductor ultraviolet detector |
09/25/2003 | US20030178320 Comprises acid (phosphoric, sulfuric, perchloric, and/or acetic) based electrolytes, chelate agent (ethylenediamine), and corrosion inhibitor (benzotriazole) |
09/25/2003 | US20030178319 For removing conductors of the top conductive surfaces of workpieces (copper) by applying etching solution in presence of current, forming easily removable intermediate (copper chloride) |
09/24/2003 | CN1122176C Process for preparing nano probe of scanning electrochemical microscope |
09/18/2003 | WO2003076134A1 Methods and apparatus for electrochemical-mechanical processing of microelectronic workpieces |
09/17/2003 | CN1442498A Method of crude gold purification |
09/16/2003 | US6620306 Method of manufacturing electrode foil for aluminum electrolytic capacitor and AC power supply unit |
09/11/2003 | US20030170526 Substrate treatment |
09/11/2003 | US20030170162 As a source of stimulated emissions; may be suspended in liquids, and solids; formed into crystals, colloids and films; uniform particle sizes |
09/11/2003 | US20030168351 Method and apparatus for planar material removal technique using multi-phase process environment |
09/10/2003 | EP1342818A2 Method and apparatus for indirect-electrification-type continuous electrolytic etching of metal strip |
09/04/2003 | WO2003072287A1 Methods for making implantable medical devices having microstructures |
09/04/2003 | WO2003053847A3 Family of discretely sized silicon nanoparticles and method for producing the same |