Patents for C25F 3 - Electrolytic etching or polishing (4,256)
02/2004
02/19/2004DE10206687B4 Vorrichtung und Verfahren zur lichtinduzierten chemischen Behandlung eines Werkstücks Apparatus and method for light-induced chemical treatment of a workpiece
02/17/2004US6693365 Local electrochemical deplating of alignment mark regions of semiconductor wafers
02/12/2004DE10235020A1 Device for etching large surface semiconductor wafers in a trough-shaped receiver containing a liquid electrolyte used in semiconductor manufacture comprises a testing head provided with a device for holding at least one wafer
02/12/2004DE10234547A1 Process for forming a recess in a workpiece used in the production of molds in plastic deformation technology comprises influencing the current density during electrochemical removal by the distribution of openings in a mask layer
02/11/2004CN1473965A Method and its device for connection electric continuous electrolytic corrosion between metal belts
02/10/2004US6690600 Ferroelectric memory device and programming method thereof
02/10/2004US6689269 Method for electrochemically processing material
02/05/2004DE10234136A1 Process for the electrochemical micro-processing of a workpiece comprises changing the current field formed by electrodes in an electrolytic liquid by changing the current
02/04/2004EP1386985A1 Process for electrolytic polishing of dental instruments made of nickel-titanium alloys
02/04/2004EP1220729B1 Method and tool for electrochemical machining
01/2004
01/29/2004WO2004010477A2 Adaptive electropolishing using thickness measurements and removal of barrier and sacrificial layers
01/29/2004WO2004009880A1 Method and apparatus for real time monitoring of industrial electrolytes
01/29/2004CA2491951A1 Adaptive electropolishing using thickness measurements and removal of barrier and sacrificial layers
01/28/2004EP1383943A1 Method of plating and pretreating aluminium workpieces
01/22/2004WO2004007812A1 Method for electrolytic polishing of dental instruments made of nickel-titanium alloy
01/22/2004US20040011666 Positioning the counterelectrodes opposite the metal layer and spaced from metal layer and spaced from each other; passing an electric current for selectively removing a layer of electrolytically dissoluble metal from a substrate
01/21/2004EP1382065A1 Electropolishing metal layers on wafers having trenches or vias with dummy structures
01/21/2004CN1469941A Method of etching as well as frame element, mask and prefabricated substrate element for use in such etching
01/21/2004CN1469939A A method for wet etching
01/20/2004US6679980 Apparatus for electropolishing a stent
01/15/2004WO2004006419A2 Monitoring apparatus and method for improving the accuracy and repeatability of electrochemical capacitance voltage (ecv) measurements
01/15/2004US20040009668 Process for planarizing upper surface of damascene wiring structure for integrated circuit structures
01/15/2004US20040007478 Electroetching system and process
01/14/2004EP1379357A2 Method and apparatus for avoiding particle accumulation during an electrochemical mechanical process
01/13/2004US6678148 Method for producing electrodes as well as electrodes produced by the method
01/08/2004WO2002041369A3 Electropolishing and chemical mechanical planarization
01/08/2004US20040004006 Selectively removing a layer of electrolytically dissoluble metal such as copper overplate from a substrate such as a low-k dielectric interconnect
12/2003
12/25/2003US20030234184 Method and composition for polishing a substrate
12/24/2003WO2003106090A1 Electrolytic etching of metal layers
12/24/2003CN1131758C 具有一层辅助层的切削件及其制造方法 Having a cutting device and manufacturing method of the auxiliary layer
12/23/2003US6666449 Star wheel surface enhancement and process of manufacture
12/18/2003US20030230493 Which uses only ultrapure water as an electrolytic solution and increases its ion product markedly, thus being capable of removal processing a workpiece or forming an oxide film thereon by the action of hydroxide ions; no impurities left
12/16/2003US6664128 Bump fabrication process
12/11/2003US20030226764 Methods and apparatus for electrochemical-mechanical processing of microelectronic workpieces
12/10/2003EP1368827A2 Electrochemical methods for polishing copper films on semiconductor substrates
12/10/2003EP0958412B1 Treating aluminium workpieces
12/09/2003US6660654 Fabrication method and apparatus for fabricating a spatial structure in a semiconductor substrate
12/09/2003US6660156 Pipe electropolishing apparatus using an electrolyte heater and cooler
12/09/2003US6660138 Electropolishing process means for an inner surface of a long tube
12/04/2003WO2002084748A3 Method for producing optically transparent regions in a silicon substrate
12/04/2003US20030221974 Electrolytic solution formulation for electropolishing process
12/03/2003EP1366220A1 Method for etching layers deposited on transparent substrates such as a glass substrate
12/02/2003US6656341 Method of etching, as well as frame element, mask and prefabricated substrate element for use in such etching
12/02/2003US6655282 Process for manufacturing a strip of aluminium alloy for lithographic printing plates
12/02/2003CA2210588C Process for manufacturing a strip of aluminium alloy for lithographic printing plates
11/2003
11/27/2003WO2003098676A1 Substrate processing apparatus and substrate processing method
11/27/2003WO2003098673A1 Polishing method and polishing system, and method for fabricating semiconductor device
11/27/2003US20030220052 Electrochemical planarization of metal feature surfaces
11/27/2003US20030218735 Stent manufacturing apparatus
11/26/2003CN1458671A Conductive polishing article for electrochemical mechanical polishing
11/25/2003US6653226 Method for electrochemical planarization of metal surfaces
11/25/2003US6652658 Method for machining/cleaning by hydroxide ion in ultrapure water
11/25/2003CA2280239C Alloy pipes and methods of making same
11/20/2003US20030216045 Hydrogen bubble reduction on the cathode using double-cell designs
11/13/2003WO2003092945A1 Electrolytic polishing liquid, electrolytic polishing method and method for fabricating semiconductor device
11/13/2003WO2003092944A1 Polishing method and polishing system, and method for fabricating semiconductor device
11/13/2003WO2003036693A3 Method and system to provide electrical contacts for electrotreating processes
11/13/2003US20030209448 Forming grooves; fluid flow; polishing surfaces
11/12/2003EP1361023A2 Polishing articles for electrochemical mechanical polishing of substrates
11/12/2003CN1127587C Technology for electrolytically polishing net of stainless steel wire and its precial equipment
11/06/2003WO2003091482A1 Process for producing aluminum material for electrolytic capacitor electrode, aluminum material for electrolytic capacitor electrode and process for producing electrode material for electrolytic capacitor
11/06/2003WO2003090965A1 Polishing method, polishing device, and method of manufacturing semiconductor equipment
11/06/2003WO2003090964A1 Polishing system and polishing method
11/06/2003WO2003041126A3 Electrochemical mechanical processing with advancible sweeper
11/06/2003US20030205483 Method for fabricating trench capacitors for large scale integrated semiconductor memories
11/05/2003CN1454266A Anode assembly for plating and planarizing a conductive layer
11/05/2003CN1126830C Medium and high-pressure anode aluminium foil face-expanding erosion method
10/2003
10/30/2003WO2003001582A3 Microelectronic substrate having conductive material with blunt cornered apertures, and associated methods for removing conductive material
10/30/2003WO2003001581A3 Methods and apparatus for electrical, mechanical and/or chemical removal of conductive material from a microelectronic substrate
10/29/2003CN1452590A Metal bearing membranes
10/28/2003US6638863 Electropolishing metal layers on wafers having trenches or vias with dummy structures
10/23/2003WO2003088352A1 Electrochemical planarization of metal feature surfaces
10/23/2003WO2003087436A1 Electropolishing and/or electroplating apparatus and methods
10/23/2003CA2479794A1 Electropolishing and/or electroplating apparatus and methods
10/22/2003EP1354986A2 Process and apparatus for electropolishing titanium surfaces
10/22/2003CN1125197C Plated aluminum alloy cylinder, planting pretreatment and planting method
10/16/2003WO2003060962A3 Electrolyte composition and treatment for electrolytic chemical mechanical polishing
10/15/2003CN2579914Y Plasma etching progress rate monitor structure for metal coating plate
10/14/2003US6632348 To manufacture it into a tip for a scanning probe microscope; can manufacture the tip while controlling its curvature radius and aspect ratio and reducing the amount of oxide on its surface
10/09/2003WO2003041462A3 Method for the treatment of electrically conductive substrates and printed circuit boards and the like
10/08/2003EP1349693A2 Fluted electrochemical machining
10/08/2003EP0885452B1 Electrochemical removal of material, particularly excess emitter material in electron-emitting device
10/02/2003WO2003080898A1 Electrochemical machine and electrochemical machining method
10/01/2003EP1177333B1 Method of producing a filter
10/01/2003EP1058592B1 Method of manufacturing a cutting member having an auxiliary layer
10/01/2003CN1446383A Stainless steel substrate treatment
09/2003
09/25/2003US20030180631 For use in short-wavelength exposure light source/excimer laser
09/25/2003US20030178571 Semiconductor ultraviolet detector
09/25/2003US20030178320 Comprises acid (phosphoric, sulfuric, perchloric, and/or acetic) based electrolytes, chelate agent (ethylenediamine), and corrosion inhibitor (benzotriazole)
09/25/2003US20030178319 For removing conductors of the top conductive surfaces of workpieces (copper) by applying etching solution in presence of current, forming easily removable intermediate (copper chloride)
09/24/2003CN1122176C Process for preparing nano probe of scanning electrochemical microscope
09/18/2003WO2003076134A1 Methods and apparatus for electrochemical-mechanical processing of microelectronic workpieces
09/17/2003CN1442498A Method of crude gold purification
09/16/2003US6620306 Method of manufacturing electrode foil for aluminum electrolytic capacitor and AC power supply unit
09/11/2003US20030170526 Substrate treatment
09/11/2003US20030170162 As a source of stimulated emissions; may be suspended in liquids, and solids; formed into crystals, colloids and films; uniform particle sizes
09/11/2003US20030168351 Method and apparatus for planar material removal technique using multi-phase process environment
09/10/2003EP1342818A2 Method and apparatus for indirect-electrification-type continuous electrolytic etching of metal strip
09/04/2003WO2003072287A1 Methods for making implantable medical devices having microstructures
09/04/2003WO2003053847A3 Family of discretely sized silicon nanoparticles and method for producing the same
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