C23F 1 - Etching metallic material by chemical means

Patents for C23F 1 - Etching metallic material by chemical means (16,062)
12/2013
12/18/2013	CN103451657A Chemical milling method for monocrystalline high temperature alloy precision casting
12/18/2013	CN103451656A Chemical milling method of K423A cast superalloy without intergranular corrosion
12/18/2013	CN103451655A Membrane etching process, applications of process, and metal sheet part manufactured by using membrane etching process
12/18/2013	CN103451654A Method for preparing vertical silicon-based three-dimensional structure
12/17/2013	US8608974 Substrate processing method
12/17/2013	US8608973 Layer-layer etch of non volatile materials using plasma
12/17/2013	US8608901 Process chamber cleaning method in substrate processing apparatus, substrate processing apparatus, and substrate processing method
12/17/2013	US8608854 CVD device
12/17/2013	US8607732 In-liquid plasma film-forming apparatus, electrode for in-liquid plasma, and film-forming method using in-liquid plasma
12/17/2013	US8607731 Cathode with inner and outer electrodes at different heights
12/17/2013	US8607730 Method of replacing liquid of circulation line in substrate liquid processing apparatus of single-wafer type
12/12/2013	WO2013182277A2 Method for removing selenium precipitate from cold traps during the production of solar cells
12/12/2013	US20130327636 Pattern Transfer With Self-assembled Nanoparticle Assemblies
12/12/2013	US20130327480 Showerhead insulator and etch chamber liner
12/11/2013	EP2670877A1 Separating device and method for producing a crucible for said separating device
12/11/2013	CN203340439U Etching protection tool
12/11/2013	CN203333768U High-accuracy extracting system for copper in waste etching liquid
12/11/2013	CN203333767U Device for scribing geometric line through chemical milling
12/11/2013	CN103436885A Method for recycling tin removal waste liquor
12/11/2013	CN103436884A Copper-plated indium tin oxide film etching technology
12/11/2013	CN102199773B Novel method for corroding polycrystalline silicon core
12/10/2013	US8604697 Apparatus for generating plasma
12/10/2013	US8603837 High productivity combinatorial workflow for post gate etch clean development
12/10/2013	US8603352 Chrome-free methods of etching organic polymers
12/10/2013	US8603349 Method of manufacturing nanoimprint stamp
12/10/2013	US8603348 Method of reducing main pole corrosion during aluminum oxide etch
12/10/2013	US8603316 Method for electrochemical fabrication
12/10/2013	US8603293 Plasma processing apparatus and method
12/10/2013	US8603292 Quartz window for a degas chamber
12/10/2013	US8603249 Lift pin driving device and manufacturing apparatus having same
12/10/2013	US8601976 Gas supply system for semiconductor manufacturing facilities
12/05/2013	US20130323066 Maskant for fluoride ion cleaning
12/05/2013	US20130322035 Etched multi-layer sheets
12/05/2013	DE102006004826B4 Metall- und Cyanid-Ionen-freie Ätzlösung zur nasschemischen Strukturierung von Metallschichten in der Halbleiterindustrie und deren Verwendung in einem Ätzverfahren Metal and cyanide ion-free etching solution for wet-chemical structuring of metal layers in the semiconductor industry, and their use in an etching method
12/04/2013	EP2668312A1 Vapour etch of silicon dioxide with improved selectivity
12/04/2013	CN103429789A Process for etching recessed structure filled with tin or tin alloy
12/04/2013	CN103422135A Manufacturing method of metal workpiece having anti-slip leather-textured surface
12/04/2013	CN102345171B Novel jig used for silicon wafer alkali corrosion processing
12/03/2013	US8597769 Etching mask, base material having etching mask, finely processed article, and method for production of finely processed article
12/03/2013	US8597530 Method of forming semiconductor device
12/03/2013	US8597462 Movable chamber liner plasma confinement screen combination for plasma processing apparatuses
12/03/2013	US8597461 Reduced isotropic etchant material consumption and waste generation
11/2013
11/28/2013	WO2013176155A1 Method for producing patterned conductive base, patterned conductive base produced by same, and touch panel
11/28/2013	US20130313225 Cmp composition containing zirconia particles and method of use
11/28/2013	US20130313224 Method for forming antenna and compression head
11/28/2013	US20130312912 Surface Treat and Survey Metallurgy Substrates Renewable Substances Food Starch, Sodium and Electrolyte Precision Media Systems
11/27/2013	CN203313530U Copper clad plate corrosion equipment
11/27/2013	CN203307434U Regeneration treatment system of acidic etching waste liquid
11/27/2013	CN103413641A Ice coating prevention power transmission aluminum wire and preparation method for surface super-hydrophobic state structural layer
11/27/2013	CN103411814A Method for fast displaying original austenite grains of maraging steel containing Cr
11/27/2013	CN103409808A Texturization additive for polycrystalline silicon slices and use method of texturization additive
11/27/2013	CN103409755A High-efficiency environment-friendly nickel stripper and preparation method thereof
11/27/2013	CN103409754A Etching-based surface super-hydrophobicity treatment technology for aluminium material
11/27/2013	CN103409753A Metal etchant and preparation method thereof
11/27/2013	CN103409752A Wet etching apparatus and wet etching method
11/27/2013	CN102517586B Corrosive agent for displaying 9% Cr steel original austenite grain boundary and application thereof
11/27/2013	CN102443769B Method for recovering physical vapor deposition (PVD) false sheets
11/26/2013	US8592946 Lithography for printing constant line width features
11/26/2013	US8592315 Chemical mechanical polishing method
11/26/2013	US8591763 Halide anions for metal removal rate control
11/26/2013	US8591756 Method of manufacturing a metallized ceramic substrate
11/26/2013	US8591755 Methods for controlling plasma constituent flux and deposition during semiconductor fabrication and apparatus for implementing the same
11/26/2013	US8591699 Method and system for supplying a cleaning gas into a process chamber
11/26/2013	US8591697 Transmission electron microscopy sample etching fixture
11/26/2013	US8591655 Apparatus for the preparation of film
11/26/2013	US8590485 Small form factor plasma source for high density wide ribbon ion beam generation
11/26/2013	US8590484 Semiconductor device manufacturing method and substrate processing apparatus
11/21/2013	US20130306597 Processing apparatus and method for processing metal film
11/20/2013	EP2664691A1 Etching agent for aluminium and aluminium alloys
11/20/2013	CN203295607U Spraying system and a wet etching device
11/20/2013	CN103397329A Production technology for stainless steel dot matrix friction plate
11/20/2013	CN102434580B Elastic support device for foil dynamic bearing and manufacturing method thereof
11/19/2013	US8585913 Printhead and method of forming same
11/19/2013	CA2634297C Article having patterned decorative coating
11/14/2013	WO2013170130A1 Formulations for wet etching nipt during silicide fabrication
11/14/2013	WO2012161430A9 Method of machining metal plate for manufacturing scaled model, method of manufacturing scaled model, and scaled model
11/14/2013	US20130301028 Substrate Table, Lithographic Apparatus and Device Manufacturing Method
11/14/2013	US20130299456 Method of removing work-affected layer
11/14/2013	US20130299448 Fabricate self-formed nanometer pore array at wafer scale for dna sequencing
11/13/2013	EP2662475A1 Method of removing work-affected layer formed on the surface of a TiAl -based alloy by machining work
11/13/2013	EP2661517A1 Method for surface-treating a protectively coated substrate
11/13/2013	DE202013008929U1 Behandlungsvorrichtung für Objekte Treatment device for objects
11/13/2013	CN103388121A Hybrid preparation process of high-precision metal mask plate
11/13/2013	CN102691063B Inorganic salt etching solution used for electrochemically etching highly fine lines
11/13/2013	CN102634801B Low-acidity acidic etching regenerant and acidic etching mother liquor thereof
11/13/2013	CN102534621B Method for treating acidic etching solution
11/13/2013	CN102234845B Preparation method of single crystal silicon texture surface structure
11/12/2013	US8580693 Temperature enhanced electrostatic chucking in plasma processing apparatus
11/12/2013	US8580136 Etching solution composition for metal thin film consisting primarily of copper
11/12/2013	US8580132 Method for making strip shaped graphene layer
11/12/2013	US8580131 Plasma etching method
11/12/2013	US8580129 Method for processing a surface
11/12/2013	US8580126 Piezoelectric vibrating pieces comprising edge mesa steps, and methods for manufacturing same
11/12/2013	US8580078 Bevel etcher with vacuum chuck
11/12/2013	US8580075 Method and system for introduction of an active material to a chemical process
11/12/2013	US8580037 Method of depositing materials on a non-planar surface
11/12/2013	US8578879 Apparatus for VHF impedance match tuning
11/12/2013	CA2714788C Merged-mask micro-machining process
11/09/2013	CA2809079A1 Method of removing work-affected layer
11/07/2013	WO2013163796A1 Metal hardmask all in one integrated etch

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