| Patents for C23F 1 - Etching metallic material by chemical means (16,062) |
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| 10/07/2014 | US8851133 Method and apparatus of holding a device |
| 10/02/2014 | WO2014159888A1 Methods of etching films comprising transition metals |
| 10/02/2014 | WO2014156414A1 Copper etching solution |
| 10/02/2014 | US20140295626 Etchant composition, and method of manufacturing a display substrate using the same |
| 10/02/2014 | US20140291288 Method for etching film having transition metal |
| 09/30/2014 | US8846539 Apparatus including showerhead electrode and heater for plasma processing |
| 09/30/2014 | US8846163 Method for removing oxides |
| 09/30/2014 | US8845910 Aluminum alloy composite and method for joining thereof |
| 09/30/2014 | US8845857 Substrate processing apparatus |
| 09/30/2014 | US8845854 Laser, plasma etch, and backside grind process for wafer dicing |
| 09/30/2014 | US8845853 Substrate processing apparatus and substrate processing method |
| 09/30/2014 | US8845852 Polishing pad and method of producing semiconductor device |
| 09/30/2014 | US8845848 Magnesium alloy member |
| 09/30/2014 | US8845810 Substrate damage prevention system and method |
| 09/30/2014 | US8845806 Shower plate having different aperture dimensions and/or distributions |
| 09/25/2014 | WO2014152435A1 High aspect ratio dense pattern-programmable nanostructures utilizing metal assisted chemical etching |
| 09/25/2014 | WO2014151895A2 Method and apparatus for generating highly repetitive pulsed plasmas |
| 09/25/2014 | US20140284306 Method for manufacturing porous structure and method for forming pattern |
| 09/25/2014 | DE102013204830A1 Verfahren und Vorrichtung zur Behandlung einer Halbleiterscheibe mit einem Ätzmedium Method and apparatus for treating a semiconductor wafer with an etching medium |
| 09/24/2014 | EP2782176A1 Titanium material for solid polymer fuel cell separators, method for producing same, and solid polymer fuel cell using same |
| 09/23/2014 | US8840726 Apparatus for thin-film deposition |
| 09/23/2014 | US8840725 Chamber with uniform flow and plasma distribution |
| 09/23/2014 | CA2618915C Methods and compositions for acid treatment of a metal surface |
| 09/18/2014 | US20140263185 Etching Solutions |
| 09/18/2014 | US20140263183 Support fixture for acid etching pcd cutting inserts |
| 09/18/2014 | US20140263181 Method and apparatus for generating highly repetitive pulsed plasmas |
| 09/18/2014 | US20140262805 Aqueous composition for etching of copper and copper alloys |
| 09/18/2014 | US20140262026 Process kit for deposition and etching |
| 09/16/2014 | US8834730 Nanoporous membrane and manufacturing method thereof |
| 09/16/2014 | US8834674 Plasma etching apparatus |
| 09/16/2014 | US8834673 Process chamber having gate slit opening and closing apparatus |
| 09/16/2014 | US8833299 Divided annular rib type plasma processing apparatus |
| 09/12/2014 | WO2014134708A1 Method of recovering nickel or cobalt while mitigating corrosion |
| 09/11/2014 | US20140251945 Method of etching metal layer |
| 09/11/2014 | DE102013203995A1 Verfahren und Vorrichtung zum Schützen eines Substrats während einer Bearbeitung mit einem Teilchenstrahl Method and apparatus for protecting a substrate during a particle beam processing with a |
| 09/09/2014 | US8828876 Dual mandrel sidewall image transfer processes |
| 09/09/2014 | US8828258 Stainless steel separator for fuel cell and the manufacturing method thereof |
| 09/09/2014 | US8828257 Plasma processing apparatus and operation method thereof |
| 09/09/2014 | US8828256 Method for fabricating carbon nanotube film |
| 09/09/2014 | US8828255 Method for etching a material in the presence of a gas |
| 09/09/2014 | US8828244 Method for building a substrate holder |
| 09/09/2014 | US8828213 Stainless substrate having a gold-plating layer, and process of forming a partial gold-plating pattern on a stainless substrate |
| 09/09/2014 | US8828185 Dry non-plasma treatment system and method of using |
| 09/09/2014 | US8828182 Process chamber gas flow improvements |
| 09/09/2014 | US8828141 Substrate processing apparatus and method for manufacturing semiconductor device |
| 09/09/2014 | US8826857 Plasma processing assemblies including hinge assemblies |
| 09/09/2014 | US8826855 C-shaped confinement ring for a plasma processing chamber |
| 09/04/2014 | WO2014133792A1 A system and method for performing a wet etching process |
| 09/04/2014 | DE10162576B4 Ätzmittel und Verfahren zum Bilden eines Matrixsubstrats für Flüssigkristallanzeigevorrichtungen Etchant and method for forming a matrix substrate for liquid crystal display devices |
| 09/02/2014 | US8822345 Apparatus including gas distribution member supplying process gas and radio frequency (RF) power for plasma processing |
| 09/02/2014 | US8821750 Metal polishing slurry and polishing method |
| 09/02/2014 | US8821740 Nanowire manufacturing method |
| 09/02/2014 | US8821684 Substrate plasma processing apparatus and plasma processing method |
| 09/02/2014 | US8821682 Electron induced chemical etching and deposition for local circuit repair |
| 09/02/2014 | US8821681 Apparatus and method for wet treatment of disc-like articles |
| 09/02/2014 | US8821642 Apparatus for manufacturing flat-panel display |
| 09/02/2014 | US8821099 Load port module |
| 08/28/2014 | US20140238953 Etching agent for copper or copper alloy |
| 08/26/2014 | US8815746 Apparatus and method for producing microcomponents and use of |
| 08/26/2014 | US8815112 Liquid processing method, recording medium having recorded program for executing liquid processing method therein and liquid processing apparatus |
| 08/26/2014 | US8815060 Method for minimizing magnetically dead interfacial layer during COC process |
| 08/26/2014 | US8815047 Plasma chemical reactor |
| 08/26/2014 | US8815014 Method and system for performing different deposition processes within a single chamber |
| 08/20/2014 | EP2766509A1 Resistor |
| 08/19/2014 | US8808972 Optical films and methods of making the same |
| 08/19/2014 | US8808564 Method and apparatus for selective nitridation process |
| 08/19/2014 | US8808496 Plasma tuning rods in microwave processing systems |
| 08/19/2014 | US8808454 Gas injection unit for chemical vapor desposition apparatus |
| 08/19/2014 | US8808453 System for abating the simultaneous flow of silane and arsine |
| 08/19/2014 | US8807978 Template manufacturing method, template inspecting method and inspecting apparatus, nanoimprint apparatus, nanoimprint system, and device manufacturing method |
| 08/19/2014 | US8807914 Seal device and method for operating the same and substrate processing apparatus comprising a vacuum chamber |
| 08/19/2014 | US8807075 Shutter disk having a tuned coefficient of thermal expansion |
| 08/19/2014 | CA2780092C Methods and apparatus for manufacturing an intravascular stent |
| 08/14/2014 | US20140224767 Automated algorithm for tuning of feedforward control parameters in plasma processing system |
| 08/13/2014 | EP2764138A1 Etching device for the electrolytic etching of copper |
| 08/13/2014 | EP2763808A1 Method of processing a composite body |
| 08/13/2014 | CN103985806A 一种led芯片p面电极、制备p面电极用刻蚀液及p面电极制备方法 One kind of led chip p-plane electrodes were prepared by etching liquid p-plane electrodes and electrode surface preparation method p |
| 08/13/2014 | CN103985805A 一种led芯片p面厚铝电极、制备厚铝电极用刻蚀液及厚铝电极制备方法 One kind of led chip p thick aluminum electrode surface, thick aluminum electrode was prepared by etching liquid and thick aluminum electrode preparation method |
| 08/13/2014 | CN103981523A 一种超亲水性Ti6Ai7Ni表面喷砂酸蚀处理方法 A super-hydrophilic surface blasting etching treatment Ti6Ai7Ni |
| 08/13/2014 | CN103981522A 一种陶瓷插芯钢线蚀刻机 A ceramic ferrule wire etcher |
| 08/13/2014 | CN103981486A 金属遮罩制造方法以及金属遮罩 Metal mask manufacturing method, and a metal mask |
| 08/13/2014 | CN102282645B 衬底处理系统中的静电吸盘 A substrate processing system with an electrostatic chuck |
| 08/13/2014 | CN101812724B 硅成膜装置及其使用方法 A silicon film forming apparatus and method of use |
| 08/12/2014 | US8802569 Method of fabricating a semiconductor device |
| 08/12/2014 | US8801952 Conformal oxide dry etch |
| 08/12/2014 | US8801950 Reduction of a process volume of a processing chamber using a nested dynamic inert volume |
| 08/12/2014 | US8801949 Method of forming open-network polishing pads |
| 08/12/2014 | US8801948 TFT mask reduction |
| 08/12/2014 | US8801896 Method and apparatus for stable plasma processing |
| 08/12/2014 | US8801895 Semiconductor manufacturing equipment and manufacturing method of the same |
| 08/12/2014 | US8801894 Sub-10 NM line features via rapid graphoepitaxial self-assembly of amphiphilic monolayers |
| 08/12/2014 | US8801893 Method of cooling a wafer support at a uniform temperature in a capacitively coupled plasma reactor |
| 08/12/2014 | US8800484 Plasma processing apparatus |
| 08/12/2014 | US8800483 Methods and systems for plasma deposition and treatment |
| 08/07/2014 | US20140220303 Door skin, a method of etching a plate for forming a wood grain pattern in the door skin, and an etched plate formed therefrom |
| 08/07/2014 | US20140217065 Multi-step method and apparatus for etching compounds containing a metal |
| 08/07/2014 | US20140217063 Metal structural body-containing polymer film, method for manufacturing metal structural body-containing polymer film, and method for manufacturing patterned structural body |
| 08/07/2014 | US20140217062 Porous Metal Etching |
| 08/06/2014 | EP2761059A1 Methods of continuously wet etching a patterned substrate |
| 08/06/2014 | CN203754810U 一种新型的蚀刻机 A new etching machine |