Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
09/1978
09/12/1978US4113978 Beryllium oxide crucible, molybdenum or tungsten layer
09/12/1978US4113815 Method for manufacturing composition including fine particles dispersed therein
09/12/1978US4113599 Adjusting flow rates of oxygen and inert gas
09/12/1978US4113082 Apparatus and method for storing and transporting substrates in a batch-type vacuum process
09/05/1978US4112290 Evaporation vessel for use in vacuum evaporation
09/05/1978US4112190 Metallized plastic molding
09/05/1978US4112137 Process for coating insulating substrates by reactive ion plating
09/05/1978US4112134 Vacuum deposition method for frequency adjustment of piezoelectric resonators
09/05/1978US4111783 Triode sputtering system
09/05/1978US4110893 Fabrication of co-cr-al-y feed stock
09/05/1978CA1037901A1 Method and apparatus for cathodic sputtering including suppressing temperature rise
08/1978
08/29/1978US4110489 Preparation of low absorption transparent thallium iodide films on potassium chloride
08/22/1978US4109061 Method for altering the composition and structure of aluminum bearing overlay alloy coatings during deposition from metallic vapor
08/22/1978US4109052 Electroconductive transparency
08/22/1978US4108751 Ion beam implantation-sputtering
08/22/1978US4108107 Rotatable substrate holder for use in vacuum
08/15/1978US4107350 Method for depositing film on a substrate
08/15/1978CA1036470A1 Deposition of solid semiconductor compositions and novel semiconductor materials
08/08/1978US4105924 Apparatus for making a rastered photoconductive layer
08/08/1978US4105821 Protective transparent coating, vapor deposition, organosilicon compounds
08/08/1978US4105512 Method for the manufacture of a superconductive Nb3 Sn layer on a niobium surface for high frequency applications
08/08/1978US4105443 Metal-forming dies
08/01/1978US4104418 Glass layer fabrication
07/1978
07/25/1978US4102768 Metal oxide coatings
07/18/1978US4101715 High temperature oxidation and corrosion resistance
07/18/1978US4101402 Sputtering thin copper film
07/18/1978US4101200 Coating composition for a light transmitting absorbing coating on substrates
07/11/1978US4100317 Metal leaf
07/11/1978US4100313 Process for forming an optical waveguide
07/11/1978US4100055 Target profile for sputtering apparatus
07/04/1978US4098919 Process for producing a thin fluorescent film for electroluminescence
06/1978
06/27/1978US4097636 Metallized device
06/27/1978US4096821 System for fabricating thin-film electronic components
06/20/1978US4096087 Electrochromic and photochromic material and a method of fabrication of said material
06/20/1978US4096055 Electron microscopy coating apparatus and methods
06/20/1978US4096026 Method of manufacturing a chromium oxide film
06/13/1978US4094764 Device for cathodic sputtering at a high deposition rate
06/13/1978US4094763 Sputter coating of glass with an oxide of a metal having an atomic number between 48 and 51 and mixtures thereof
06/13/1978US4094762 Glow discharge ionization of material, implanting ions in container wall
06/13/1978US4094761 Magnetion sputtering of ferromagnetic material
06/13/1978US4094269 Vapor deposition apparatus for coating continuously moving substrates with layers of volatizable solid substances
06/06/1978US4093503 Method for fabricating ultra-narrow metallic lines
06/06/1978US4093453 Method of making an ordered alloy
05/1978
05/30/1978US4092263 Metal vapor generator
05/23/1978US4091138 Insulating film, sheet, or plate material with metallic coating and method for manufacturing same
05/23/1978US4090941 Cathode sputtering apparatus
05/16/1978US4089643 Self-resistance-heated evaporation boat
04/1978
04/25/1978US4086127 Photoresist delineation and etching, radiation beam used to cut metal layer
04/25/1978US4086108 Radiation
04/25/1978US4085699 Mounting for arms of a thin-film apparatus
04/18/1978US4085248 Method to apply a protective layer to the surface of optical reflectors, and so-made reflectors, particularly automotive vehicle head lamps
04/18/1978US4085022 Method and apparatus for controlling the removal, by means of ion etching, of a thin layer from a substrate
04/11/1978US4084025 Process of applying protective aluminum coatings for non-super-strength nickel-chromium alloys
04/04/1978US4082636 Ion plating method
04/04/1978US4082040 Aluminum nitride layer
03/1978
03/28/1978US4080926 Apparatus for growing films by flash vaporization
03/21/1978US4080486 Coating system for superalloys
03/21/1978US4080281 Apparatus for making metal films
03/14/1978US4079169 Cobalt base alloy as protective layer for magnetic recording media
02/1978
02/28/1978US4077045 Metallization system for semiconductive devices, devices utilizing such metallization system and method for making devices and metallization system
02/28/1978US4076888 Process for the preparation of metallic and/or metal-ceramic and/or ceramic sponges
02/28/1978US4076866 Method of growing films by flash vaporization
02/07/1978US4072518 Method of making trigonal selenium interlayers by glow discharge
01/1978
01/31/1978US4071426 Method of making high resistance cermet film
01/31/1978US4071383 Process for fabrication of dielectric optical waveguide devices
01/10/1978US4068025 Roughening surface of eutectic or near eutectic alloy
01/10/1978US4068016 Method for regulating evaporating rate and layer build up in the production of thin layers
01/10/1978US4067099 Semiconductors, silicon dioxide, silicon, aluminum
12/1977
12/27/1977US4065600 Sputtering
12/27/1977US4065370 Method of ion plating a thin metallic strip for flashlamp starting
12/20/1977US4064030 Process for surface treating molded articles of fluorine resins
12/13/1977US4063211 Method for manufacturing stable metal thin film resistors comprising sputtered alloy of tantalum and silicon and product resulting therefrom
12/13/1977US4062749 Method of forming a thin film capacitor with a manganese dioxide layer
12/13/1977US4062319 Vacuum treating apparatus
12/06/1977US4061871 Electron gun for heating, melting and vaporizing purposes, with deflection systems
12/06/1977US4061800 Vapor desposition method
11/1977
11/29/1977US4060471 Composite sputtering method
11/22/1977US4059069 Coating apparatus
11/22/1977US4059067 Apparatus for determining the rate of flow of particles in a vacuum deposition device
11/15/1977US4058638 Arsine, volatile gallium compound, vacuum deposition, exposure on
11/15/1977US4058579 Process for producing an improved boron nitride crucible
11/15/1977US4058430 Method for producing compound thin films
11/08/1977US4057661 Method of manufacturing a thin-film electrode
11/01/1977US4056457 Method of depositing low stress hafnium thin films
10/1977
10/18/1977US4054500 Flame spraying wire coil with alumina
10/18/1977US4054044 Seals for the passage of wire between regions of different pressure
10/04/1977US4052738 Stylus for capacitive videodisc
10/04/1977US4052520 Diallyl glycol polycarbonate
10/04/1977US4051695 Rotating shaft coupling for use in vacuum
09/1977
09/27/1977US4051297 Transparent article and method of making the same
09/27/1977US4051270 Method of measuring vapor deposited coating thickness
09/27/1977US4051010 Sputtering apparatus
09/27/1977US4050408 Apparatus for depositing thin layers of materials by reactive spraying in a high-frequency inductive plasma
09/20/1977US4049857 Deposition mask and methods of making same
09/20/1977US4049533 Vacuum discharge chamber, cathodes
09/20/1977US4049523 Method of and device for providing thin layers by cathode sputtering
09/20/1977US4049522 Low coercivity iron-silicon material, shields, and process
09/20/1977US4049521 Cathode sputtering method for the manufacture of etched structures
09/20/1977US4049352 Method and apparatus for determining the rate of flow of particles in a vacuum deposition device
09/13/1977US4048462 Compact rotary evaporation source