Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
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07/21/1981 | CA1105333A1 Multi-layer vacuum evaporation deposition method |
07/15/1981 | EP0031918A2 Method and apparatus for manufacturing a device by evaporation |
07/14/1981 | US4278710 Apparatus and method for submicron pattern generation |
07/14/1981 | US4278528 Rectilinear sputtering apparatus and method |
07/14/1981 | CA1105093A1 Laser deposition of metal upon transparent materials |
07/08/1981 | EP0031731A2 Control of the hydrogen bonding in reactively sputtered amorphous silicon |
07/07/1981 | US4277516 Plurality of glow polymerization layers and intervening metal layers; for electrical capacitors |
07/07/1981 | US4276855 Coating apparatus |
06/30/1981 | US4276275 Process for preparing ultrafine carbide powder |
06/30/1981 | CA1104093A1 Method for fabricating multi-layer optical films |
06/24/1981 | EP0030732A2 Transparent electrically conductive film and process for production thereof |
06/23/1981 | US4275282 Centering support for a rotatable wafer support susceptor |
06/23/1981 | US4275126 Fuel cell electrode on solid electrolyte substrate |
06/23/1981 | US4274936 Vacuum deposition system and method |
06/16/1981 | US4274004 Ion implanter |
06/16/1981 | US4273812 Method of producing material patterns by evaporating material through a perforated mask having a reinforcing bridge |
06/09/1981 | US4272355 Process of bonding sputtering targets to target electrodes |
06/03/1981 | EP0029787A1 Process for producing artificial parts to be used in vivo, and artificial parts realized by this process |
06/03/1981 | EP0029747A1 An apparatus for vacuum deposition and a method for forming a thin film by the use thereof |
06/02/1981 | US4271232 Amorphous magnetic film |
06/02/1981 | US4271005 Workpiece support apparatus for use with cathode sputtering devices |
06/02/1981 | US4270999 Method and apparatus for gas feed control in a dry etching process |
06/02/1981 | CA1102183A1 Method of producing magnetic thin film |
05/26/1981 | US4269137 Pretreatment of substrates prior to thin film deposition |
05/19/1981 | US4268711 Method and apparatus for forming films from vapors using a contained plasma source |
05/19/1981 | US4268570 Metal-coated plastic product |
05/19/1981 | US4268314 High density refractory composites and method of making |
05/13/1981 | EP0028514A1 Process of vapor depositing photoconductive material |
05/12/1981 | CA1101076A1 Multiple electron-beam vapor source assembly |
05/05/1981 | US4265991 Electrophotographic photosensitive member and process for production thereof |
04/28/1981 | US4264803 Resistance-heated pyrolytic boron nitride coated graphite boat for metal vaporization |
04/28/1981 | US4264642 Forming polymeric coatings |
04/28/1981 | US4264027 Thin layer of boride, nitride, carbide or oxycarbide on shaft, increases friction resistance |
04/21/1981 | US4262630 Method of applying layers of source substance over recipient and device for realizing same |
04/14/1981 | US4262160 Evaporator feed |
04/14/1981 | US4262056 Ion bombardment of heated radiation transparent substrate |
04/14/1981 | US4261808 Vacuum coating apparatus with continuous or intermittent transport means |
04/14/1981 | US4261762 Method for conducting heat to or from an article being treated under vacuum |
04/14/1981 | US4261650 Method for producing uniform parallel alignment in liquid crystal cells |
04/08/1981 | EP0026337A2 Method of etching workpieces in a vacuum chamber |
04/07/1981 | US4260466 Simultaneous vapor deposition of a ferromagnetic material and a polymer or monomer |
04/02/1981 | WO1981000862A1 Methods and apparatus for generating plasmas |
03/31/1981 | US4259370 Process for providing high speed multi-faceted injection molded polygonal scanners employing an adhesion promoting overcoating for substantially applied thin film coatings |
03/31/1981 | US4258645 Coupling for stationary and movable vacuum chambers |
03/27/1981 | EP0020633A4 Method of coating a polycarbonate substrate with glass. |
03/27/1981 | EP0020615A4 Glass coated polycarbonate articles. |
03/25/1981 | EP0025670A1 Method and apparatus for conducting heat to or from an article being treated under vacuum |
03/18/1981 | EP0025263A1 Nickel and/or cobalt base alloys for gas turbine engine components |
03/17/1981 | US4256780 Metallization process |
03/17/1981 | US4256052 Temperature gradient means in reactor tube of vapor deposition apparatus |
03/11/1981 | EP0024604A1 Method and apparatus for high vacuum deposition of electrically conductive materials (metals) |
03/10/1981 | CA1097433A1 Method for manufacturing a layer of amorphous silicon usable in an electronic device |
03/09/1981 | EP0020456A4 Transparent heat mirrors formed on polymeric substrates. |
03/04/1981 | EP0024355A1 Process for securing disc or plate like target materials to cooled backing members for cathodic sputtering devices |
03/03/1981 | US4254159 Method of producing gold-color coatings |
03/03/1981 | US4253934 Aging treatment for exhaust gas oxygen sensor |
03/03/1981 | US4253931 Sputtering platinum in an atmosphere of nitrogen, oxygen or an inert gas |
03/03/1981 | CA1096968A1 Method and apparatus for fabrication of magnetic recording media |
03/03/1981 | CA1096715A1 Heat-reflecting glass pane and a process for the production thereof |
02/24/1981 | US4252843 Oxidation of aluminum, magnesium |
02/24/1981 | US4252839 Vapor deposition metal electrodes |
02/24/1981 | US4252838 Oxidation of organometallic compound |
02/24/1981 | US4252626 Cathode sputtering with multiple targets |
02/17/1981 | CA1095782A1 Method of manufacturing a data carrier which can be optically read and a data carrier obtained by said method |
02/11/1981 | EP0023573A1 Sputtering system to process a batch of wafers |
02/10/1981 | US4250009 Energetic particle beam deposition system |
02/10/1981 | US4249846 Rotary vacuum seal for a wafer transport system |
02/03/1981 | US4248909 Chaoite coating process |
02/03/1981 | US4248687 While maintaining partial pressure of oxygen during deposition |
01/28/1981 | EP0023149A1 Method of producing a coating of non uniform thickness or density by vacuum deposition and apparatus therefor |
01/27/1981 | US4247781 Cooled target disc for high current ion implantation method and apparatus |
01/27/1981 | US4247600 Metallized plastic camera housing and method |
01/27/1981 | US4247383 Cathodic system with target, for vacuum sputtering apparatus for the application of dielectric or nonmagnetic coatings to substrates |
01/27/1981 | CA1094431A1 Deposition mask and methods of making same |
01/20/1981 | US4245823 Apparatus for producing mechanically-worked vapor-deposited bulk alloys |
01/20/1981 | CA1094228A1 Method for covering a first layer or layer sequence situated on a substrate with an additional second layer by a sputtering-on process |
01/20/1981 | CA1093910A1 Reactive deposit of oxides |
01/20/1981 | CA1093811A1 Planetary evaporator |
01/13/1981 | US4244798 Exhaust electrode process for exhaust gas oxygen sensor |
01/07/1981 | EP0021672A1 Oriented polypropylene film substrate and method of manufacture |
01/07/1981 | EP0021087A1 Method of preparing macrocrystalline or monocrystalline films of metals or alloys and application of the method to the manufacture of semiconductor circuits and contact electrodes |
01/07/1981 | EP0020986A1 Process for manufacturing slot-nozzle elements for separating gaseous or vaporous mixtures, especially isotope mixtures |
01/07/1981 | EP0020873A1 Target disc for ion implantation into semiconductors and method for cooling such a disc |
01/07/1981 | EP0020633A1 Method of coating a polycarbonate substrate with glass. |
01/07/1981 | EP0020615A1 Glass coated polycarbonate articles. |
01/07/1981 | EP0020456A1 Transparent heat mirrors formed on polymeric substrates. |
01/07/1981 | EP0020395A1 Method for producing semi-conductor devices |
01/06/1981 | US4243746 Dispersion imaging material and method of producing image thereon |
01/06/1981 | US4243708 Metallized textured surface polypropylene film |
01/06/1981 | US4242982 Apparatus for metal coating of powders |
01/06/1981 | CA1093216A1 Silicon device with uniformly thick polysilicon |
12/30/1980 | US4242413 Vapor plating method for plastics |
12/30/1980 | US4242378 Method of making a decorated film with a metal layer in the form of a given pattern |
12/30/1980 | US4242373 Method for vapor depositing a cerium oxide film |
12/30/1980 | US4241698 Vacuum evaporation system for the deposition of a thin evaporated layer having a high degree of uniformity |
12/30/1980 | CA1092727A1 Method for fabricating ultra-narrow metallic lines |
12/23/1980 | US4241158 Inorganic amorpous layer on photoconductive substrate, by gradual heating |
12/23/1980 | US4241109 By oblique shadow deposition techniques |
12/23/1980 | CA1092057A1 Cathodes for sputter-coating glass sheets or other substrates |
12/16/1980 | US4239788 Method for the production of semiconductor devices using electron beam delineation |