Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
07/1981
07/21/1981CA1105333A1 Multi-layer vacuum evaporation deposition method
07/15/1981EP0031918A2 Method and apparatus for manufacturing a device by evaporation
07/14/1981US4278710 Apparatus and method for submicron pattern generation
07/14/1981US4278528 Rectilinear sputtering apparatus and method
07/14/1981CA1105093A1 Laser deposition of metal upon transparent materials
07/08/1981EP0031731A2 Control of the hydrogen bonding in reactively sputtered amorphous silicon
07/07/1981US4277516 Plurality of glow polymerization layers and intervening metal layers; for electrical capacitors
07/07/1981US4276855 Coating apparatus
06/1981
06/30/1981US4276275 Process for preparing ultrafine carbide powder
06/30/1981CA1104093A1 Method for fabricating multi-layer optical films
06/24/1981EP0030732A2 Transparent electrically conductive film and process for production thereof
06/23/1981US4275282 Centering support for a rotatable wafer support susceptor
06/23/1981US4275126 Fuel cell electrode on solid electrolyte substrate
06/23/1981US4274936 Vacuum deposition system and method
06/16/1981US4274004 Ion implanter
06/16/1981US4273812 Method of producing material patterns by evaporating material through a perforated mask having a reinforcing bridge
06/09/1981US4272355 Process of bonding sputtering targets to target electrodes
06/03/1981EP0029787A1 Process for producing artificial parts to be used in vivo, and artificial parts realized by this process
06/03/1981EP0029747A1 An apparatus for vacuum deposition and a method for forming a thin film by the use thereof
06/02/1981US4271232 Amorphous magnetic film
06/02/1981US4271005 Workpiece support apparatus for use with cathode sputtering devices
06/02/1981US4270999 Method and apparatus for gas feed control in a dry etching process
06/02/1981CA1102183A1 Method of producing magnetic thin film
05/1981
05/26/1981US4269137 Pretreatment of substrates prior to thin film deposition
05/19/1981US4268711 Method and apparatus for forming films from vapors using a contained plasma source
05/19/1981US4268570 Metal-coated plastic product
05/19/1981US4268314 High density refractory composites and method of making
05/13/1981EP0028514A1 Process of vapor depositing photoconductive material
05/12/1981CA1101076A1 Multiple electron-beam vapor source assembly
05/05/1981US4265991 Electrophotographic photosensitive member and process for production thereof
04/1981
04/28/1981US4264803 Resistance-heated pyrolytic boron nitride coated graphite boat for metal vaporization
04/28/1981US4264642 Forming polymeric coatings
04/28/1981US4264027 Thin layer of boride, nitride, carbide or oxycarbide on shaft, increases friction resistance
04/21/1981US4262630 Method of applying layers of source substance over recipient and device for realizing same
04/14/1981US4262160 Evaporator feed
04/14/1981US4262056 Ion bombardment of heated radiation transparent substrate
04/14/1981US4261808 Vacuum coating apparatus with continuous or intermittent transport means
04/14/1981US4261762 Method for conducting heat to or from an article being treated under vacuum
04/14/1981US4261650 Method for producing uniform parallel alignment in liquid crystal cells
04/08/1981EP0026337A2 Method of etching workpieces in a vacuum chamber
04/07/1981US4260466 Simultaneous vapor deposition of a ferromagnetic material and a polymer or monomer
04/02/1981WO1981000862A1 Methods and apparatus for generating plasmas
03/1981
03/31/1981US4259370 Process for providing high speed multi-faceted injection molded polygonal scanners employing an adhesion promoting overcoating for substantially applied thin film coatings
03/31/1981US4258645 Coupling for stationary and movable vacuum chambers
03/27/1981EP0020633A4 Method of coating a polycarbonate substrate with glass.
03/27/1981EP0020615A4 Glass coated polycarbonate articles.
03/25/1981EP0025670A1 Method and apparatus for conducting heat to or from an article being treated under vacuum
03/18/1981EP0025263A1 Nickel and/or cobalt base alloys for gas turbine engine components
03/17/1981US4256780 Metallization process
03/17/1981US4256052 Temperature gradient means in reactor tube of vapor deposition apparatus
03/11/1981EP0024604A1 Method and apparatus for high vacuum deposition of electrically conductive materials (metals)
03/10/1981CA1097433A1 Method for manufacturing a layer of amorphous silicon usable in an electronic device
03/09/1981EP0020456A4 Transparent heat mirrors formed on polymeric substrates.
03/04/1981EP0024355A1 Process for securing disc or plate like target materials to cooled backing members for cathodic sputtering devices
03/03/1981US4254159 Method of producing gold-color coatings
03/03/1981US4253934 Aging treatment for exhaust gas oxygen sensor
03/03/1981US4253931 Sputtering platinum in an atmosphere of nitrogen, oxygen or an inert gas
03/03/1981CA1096968A1 Method and apparatus for fabrication of magnetic recording media
03/03/1981CA1096715A1 Heat-reflecting glass pane and a process for the production thereof
02/1981
02/24/1981US4252843 Oxidation of aluminum, magnesium
02/24/1981US4252839 Vapor deposition metal electrodes
02/24/1981US4252838 Oxidation of organometallic compound
02/24/1981US4252626 Cathode sputtering with multiple targets
02/17/1981CA1095782A1 Method of manufacturing a data carrier which can be optically read and a data carrier obtained by said method
02/11/1981EP0023573A1 Sputtering system to process a batch of wafers
02/10/1981US4250009 Energetic particle beam deposition system
02/10/1981US4249846 Rotary vacuum seal for a wafer transport system
02/03/1981US4248909 Chaoite coating process
02/03/1981US4248687 While maintaining partial pressure of oxygen during deposition
01/1981
01/28/1981EP0023149A1 Method of producing a coating of non uniform thickness or density by vacuum deposition and apparatus therefor
01/27/1981US4247781 Cooled target disc for high current ion implantation method and apparatus
01/27/1981US4247600 Metallized plastic camera housing and method
01/27/1981US4247383 Cathodic system with target, for vacuum sputtering apparatus for the application of dielectric or nonmagnetic coatings to substrates
01/27/1981CA1094431A1 Deposition mask and methods of making same
01/20/1981US4245823 Apparatus for producing mechanically-worked vapor-deposited bulk alloys
01/20/1981CA1094228A1 Method for covering a first layer or layer sequence situated on a substrate with an additional second layer by a sputtering-on process
01/20/1981CA1093910A1 Reactive deposit of oxides
01/20/1981CA1093811A1 Planetary evaporator
01/13/1981US4244798 Exhaust electrode process for exhaust gas oxygen sensor
01/07/1981EP0021672A1 Oriented polypropylene film substrate and method of manufacture
01/07/1981EP0021087A1 Method of preparing macrocrystalline or monocrystalline films of metals or alloys and application of the method to the manufacture of semiconductor circuits and contact electrodes
01/07/1981EP0020986A1 Process for manufacturing slot-nozzle elements for separating gaseous or vaporous mixtures, especially isotope mixtures
01/07/1981EP0020873A1 Target disc for ion implantation into semiconductors and method for cooling such a disc
01/07/1981EP0020633A1 Method of coating a polycarbonate substrate with glass.
01/07/1981EP0020615A1 Glass coated polycarbonate articles.
01/07/1981EP0020456A1 Transparent heat mirrors formed on polymeric substrates.
01/07/1981EP0020395A1 Method for producing semi-conductor devices
01/06/1981US4243746 Dispersion imaging material and method of producing image thereon
01/06/1981US4243708 Metallized textured surface polypropylene film
01/06/1981US4242982 Apparatus for metal coating of powders
01/06/1981CA1093216A1 Silicon device with uniformly thick polysilicon
12/1980
12/30/1980US4242413 Vapor plating method for plastics
12/30/1980US4242378 Method of making a decorated film with a metal layer in the form of a given pattern
12/30/1980US4242373 Method for vapor depositing a cerium oxide film
12/30/1980US4241698 Vacuum evaporation system for the deposition of a thin evaporated layer having a high degree of uniformity
12/30/1980CA1092727A1 Method for fabricating ultra-narrow metallic lines
12/23/1980US4241158 Inorganic amorpous layer on photoconductive substrate, by gradual heating
12/23/1980US4241109 By oblique shadow deposition techniques
12/23/1980CA1092057A1 Cathodes for sputter-coating glass sheets or other substrates
12/16/1980US4239788 Method for the production of semiconductor devices using electron beam delineation