Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
03/2014
03/14/2014CA2826917A1 Remote arc discharge plasma assisted processes
03/13/2014WO2014039426A1 Sputtering apparatus
03/13/2014WO2014039252A1 Target center positional constraint for physical vapor deposition (pvd) processing systems
03/13/2014WO2014039251A1 Target cooling for physical vapor deposition (pvd) processing systems
03/13/2014WO2014038560A1 Organic el element, production method for reflective electrode in organic el element, and al alloy sputtering target for forming reflective electrode in organic el element
03/13/2014WO2014038204A1 Sputtering target
03/13/2014WO2014038090A1 Measuring apparatus and film-forming apparatus
03/13/2014WO2014038060A1 Dc power supply device, and control method for dc power supply device
03/13/2014WO2014037380A1 Method and apparatus for the fabrication of nanostructures, network of interconnected nanostructures and nanostructure
03/13/2014WO2014037104A1 Ti-al-ta-based coating exhibiting enhanced thermal stability
03/13/2014WO2014037072A1 Coatings containing mo on tools used for direct hot forming
03/13/2014WO2014037058A1 Substrate transfer device and method of moving substrates
03/13/2014WO2014036894A1 Mask plate assembly for evaporating large-size oled
03/13/2014WO2014036893A1 Composite mask plate assembly
03/13/2014WO2014036881A1 Mask frame and corresponding evaporation mask component of mask frame
03/13/2014WO2014036880A1 Mask frame and corresponding mask component of mask frame
03/13/2014US20140072721 Method for Modifying a Surface of a Substrate using Ion Bombardment
03/13/2014US20140070119 Optical barriers, waveguides, and methods for fabricating barriers and waveguides for use in harsh environments
03/13/2014US20140069802 Apparatus and methods for physical vapor deposition
03/13/2014DE102012214284B4 Gleitelement, insbesondere Kolbenring, mit einer widerstandsfähigen Beschichtung Sliding element, in particular piston ring, with a durable coating
03/13/2014DE102012108463A1 Film coating system comprises a vacuum chamber, an unwinding roller, a coating roller, a winding roller, an evaporator, and a guide roller, which is provided with a coating on its outer surface
03/13/2014DE102012108441A1 Film coating plant for packaging e.g. chips, has heated shells which are arranged between electrodes to receive clamping metal, and clamping device that is arranged within vacuum chamber to bias first electrode towards second electrode
03/13/2014DE102012108440A1 Film coating system comprises vacuum chamber in which film of reel-out roller is passed to coating roller via deflecting rollers, coating window, and unit for mechanically fixing coating window in horizontal operating position
03/13/2014DE102012108439A1 Film coating system comprises a vacuum chamber, a monitoring device, guide rollers, a coating roller, a winding roller, and an actuating device for varying the distance of a controllable actuator speed
03/13/2014DE102012017809A1 Verfahren zur Herstellung einer Metallborocarbidschicht auf einem Substrat A process for preparing on a substrate a Metallborocarbidschicht
03/12/2014EP2706129A1 Fine grained, non banded, refractory metal sputtering targets with a uniformly random crystallographic orientation, method for making such film, and thin film based devices and products made there from
03/12/2014EP2705892A1 Gas recovering system for recovering Dihydrogen Selenide from an exhaust gas of a process for obtaining CIGS thin film layers
03/12/2014CN203478884U Evaporative drying device of vacuum aluminized film machine
03/12/2014CN203474889U Automatic control device for vacuum cathode arc metal surface coating
03/12/2014CN203474888U Vacuum coating chamber
03/12/2014CN203474887U Target material assembly
03/12/2014CN203474886U Target material assembly
03/12/2014CN203474885U Aluminum-evaporation film plating equipment for inner wall of lamp bulb
03/12/2014CN203474884U Side cylindrical surface coating device for cylindrical body and vacuum coating equipment
03/12/2014CN203474883U Coating apparatus
03/12/2014CN103635974A Method for producing a reflective optical element for EUV lithography
03/12/2014CN103635604A Film-forming device
03/12/2014CN103635603A Film-forming apparatus
03/12/2014CN103635602A Sliding component coated with metal-comprising carbon layer for improving wear and friction behavior by tribological applications under lubricated conditions
03/12/2014CN103632911A Ion source devices and methods
03/12/2014CN103632754A Ultrathin aluminum-doped ZnO transparent conductive film and preparing method thereof
03/12/2014CN103628079A Cleaning method for tantalum focus rings
03/12/2014CN103628060A Novel electrode material with surface subjected to molybdenum infiltration and titanium nitride deposition and preparation method thereof
03/12/2014CN103628035A Wafer carrying platform structure for batch production of small-sized wafers
03/12/2014CN103628034A Preparation method of porous titanium dioxide thin film
03/12/2014CN103628033A Preparation method of wear-resistant milling cutter
03/12/2014CN103628032A Method of preparing nano titanium nitride layer on conductive base body material
03/12/2014CN103628031A Cooling water process apparatus and processing method and the substrate processing apparatus applying the same
03/12/2014CN103628030A Evaporation apparatus
03/12/2014CN103628029A Selective linear evaporating apparatus
03/12/2014CN103628028A Preparation method for transparent conductive metal network
03/12/2014CN103628027A Preparation method of composite coating milling cutter
03/12/2014CN103628026A Chrome-doped crystalline tungsten film and preparation method thereof
03/12/2014CN103628025A Alloy coevaporation material and evaporation coating method employing alloy coevaporation material
03/12/2014CN103628024A Technology for depositing titanium nitride film on surface of 4Cr13 stainless steel vernier caliper
03/12/2014CN103628023A Process for depositing CrN film on surface of vernier caliper
03/12/2014CN103628004A Method for preparing amorphous NiW alloy film by means of low-temperature annealing
03/12/2014CN103625030A Production method for laser paper made of nanoscale thin-film material
03/12/2014CN102766875B Surface treatment process for PVD wire drawing product
03/12/2014CN102747334B Zinc-oxide-based transparent conductive film and preparation method thereof
03/12/2014CN102650035B Method for producing silicon doping zinc oxide film, produced film and application thereof
03/12/2014CN102639746B Film forming device for organic thin films, and method for forming film using organic materials
03/12/2014CN102586734B TiAlN/Ta multi-layer film cutter coating and preparation method thereof
03/12/2014CN102514533B Manufacturing method for automobile sign capable of realizing radar active cruise function
03/12/2014CN102482768B Copper material for use as sputtering target and process for producing same
03/12/2014CN102373436B Substrate holder stocker device, substrate processing apparatus, and substrate holder moving method
03/12/2014CN102373409B Film formation mask
03/12/2014CN102345097B Magnetic field for plating on inner wall of long pipe and field-enhanced arc ion plating device
03/12/2014CN102328476B High-temperature solar energy selective absorption coating comprising TiO2 and Al2O3 double ceramic structures and preparation method thereof
03/12/2014CN102265323B Display device
03/12/2014CN102216489B Multilayer film sputtering device and multilayer film formation method
03/12/2014CN102146553B Method of depositing metal film on substrate with patterned features
03/12/2014CN102104088B Method for depositing amorphous silicon film in solar battery production
03/12/2014CN101815806B Film forming apparatus and film forming method
03/12/2014CN101619444B Copper sputtering target material and sputtering method
03/11/2014US8668956 Vapor deposition particle emitting device, vapor deposition apparatus, vapor deposition method
03/11/2014US8668816 Self-ionized and inductively-coupled plasma for sputtering and resputtering
03/11/2014US8668815 Process kit for RF physical vapor deposition
03/11/2014US8668787 Silver alloy, sputtering target material thereof, and thin film thereof
03/11/2014US8668785 High purity ytterbium, sputtering target made thereof, thin film containing the same, and method of producing the same
03/06/2014WO2014035899A1 A method of controlling the switched mode ion energy distribution system
03/06/2014WO2014035196A1 Metal structure and method for manufacturing same
03/06/2014WO2014034923A1 Coated cutting tool
03/06/2014WO2014034758A1 Current collector for battery and battery using same
03/06/2014WO2014034575A1 Method for producing substrate with transparent electrode, and substrate with transparent electrode
03/06/2014WO2014034499A1 Vapor deposition device, vapor deposition method, organic el display, and organic el lighting device
03/06/2014WO2014034497A1 Drum sputtering device
03/06/2014WO2014034496A1 Method for manufacturing catalyst for carbon nanotube synthesis
03/06/2014WO2014034410A1 Evaporation source
03/06/2014WO2014034390A1 Fe-BASED MAGNETIC MATERIAL SINTERED BODY
03/06/2014WO2014034122A1 Sputtering target
03/06/2014WO2014034013A1 Glass film transfer apparatus
03/06/2014WO2014032753A1 Arc pvd coating with enhanced reducing friction and reducing wear properties
03/06/2014WO2014002747A3 Target assembly
03/06/2014US20140065737 Ion implantation method and ion implantation apparatus
03/06/2014US20140065730 Implant-induced damage control in ion implantation
03/06/2014US20140065394 Multi-layer coating and method for forming the same
03/06/2014US20140065368 Superhydrophobic films and methods for making superhydrophobic films
03/06/2014US20140065365 Method for reforming a surface of a plastic injection-molded article and an injection-molded article produced by the method
03/06/2014US20140061549 Manufacturing and Applications of Metal Powders and Alloys
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