Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
03/2014
03/06/2014US20140061041 Target center positional constraint for physical vapor deposition (pvd) processing systems
03/06/2014US20140061040 Adjustable process spacing, centering, and improved gas conductance
03/06/2014US20140061039 Target cooling for physical vapor deposition (pvd) processing systems
03/06/2014US20140061034 Method for pretreating substrates for pvd methods
03/06/2014US20140061030 High-power sputtering source
03/06/2014US20140061029 Sputtering apparatus
03/06/2014US20140061028 Hydrophilic coatings, methods for depositing hydrophilic coatings and improved deposition technology for thin films
03/06/2014DE102013216475A1 Anorganischer festkörper-werkstoff und schneidenwerkzeug Inorganic solids-material and cutting tool
03/06/2014DE102013206534A1 Mehrlagige Beschichtung und Verfahren zum Bilden derselben Multi-layer coating and process for forming same
03/06/2014DE102012215359A1 Method for coating substrate of optical element, involves variably adjusting arrival rate of coating material on to-be coated surface of sheet element relative to spin axis for different rotation angles of substrate
03/06/2014DE102012022619B3 Verdampferzelle, Beschichtungsvorrichtung und Verfahren zur Verdampfung eines Verdampfungsmaterials The evaporator cell, coating apparatus and method for evaporating an evaporation material
03/06/2014DE102012017453A1 Plasmabehandlungseinrichtung und Verfahren zur Behandlung zumindest eines Substrats Plasma treatment device and method for treating at least one substrate
03/06/2014DE102010040044B4 Beschichtungsanlage und Verfahren für eine physikalische Gasphasenabscheidung Coating system and method for a physical vapor deposition
03/06/2014DE102010006267B4 Haftfestes mehrlagiges Schichtsystem und Verfahren zu dessen Herstellung Adhesion-resistant multi-layer coating system and process for its preparation
03/06/2014DE102010002688C5 Schraubendruckfeder für einen Ölabstreifring eines Kolbens in einem Verbrennungsmotor und Verfahren zur Beschichtung einer Schraubendruckfeder Helical compression spring for an oil scraper ring of a piston in an internal combustion engine and method for coating a helical compression spring
03/05/2014EP2704533A1 Method and device for producing organic el element
03/05/2014EP2703519A1 Sputtering target and method for producing same
03/05/2014EP2703518A1 Mask assembly for testing a deposition process
03/05/2014EP2702187A1 Devices and methods for passivating a flexible substrate in a coating process
03/05/2014EP2702186A1 Method of forming a cylindrical sputter target assembly
03/05/2014EP2702185A1 Method for modifying and alloying surfaces of wc based hard metal structures
03/05/2014EP2702184A1 Gas system for reactive deposition process
03/05/2014EP2701830A1 Nanosieve composite membrane
03/05/2014DE202014100692U1 Vakuumbeschichtungsanlage und Anodenanordnung Vacuum coating system and anode assembly
03/05/2014CN203462126U Continuous film coating device for vehicle headlight glass
03/05/2014CN203462125U Magnetic guiding device for vacuum coating
03/05/2014CN203462124U Substrate frame
03/05/2014CN203462123U Substrate frame and glass fixing device thereof
03/05/2014CN203462122U Improved substrate frame
03/05/2014CN203462121U Magnetic boot for vacuum magnetron sputtering equipment
03/05/2014CN203462120U Rectangular planar magnetron sputtering cathode
03/05/2014CN203462119U Magnetron sputtering device
03/05/2014CN203462118U Cylindrical rotating silver target
03/05/2014CN203462117U Special production equipment of far infrared energy heating plate
03/05/2014CN103620746A Method for producing semiconductor device and semiconductor device
03/05/2014CN103620731A High-power sputtering source
03/05/2014CN103620274A Piston ring
03/05/2014CN103620273A Piston ring
03/05/2014CN103620084A Sputtering target
03/05/2014CN103620083A Co-cr-pt-b alloy sputtering target and method for producing same
03/05/2014CN103620082A Method of forming a cylindrical sputter target assembly
03/05/2014CN103619771A Temperable and non-temperable transparent nanocomposite layers
03/05/2014CN103619525A Covered rotary tool and manufacturing method therefor
03/05/2014CN103619454A Nanosieve composite membrane
03/05/2014CN103617831A High-mobility ratio aluminum-doped zinc oxide transparent conductive thin film and preparation method thereof
03/05/2014CN103614701A Germanium nanotube top raised array modified by silver nano-particles as well as preparation method and application thereof
03/05/2014CN103614700A Optical fiber end face coating carrier and using method thereof
03/05/2014CN103614699A Method for modifying surface of polyetheretherketone by injecting tantalum ion and modified polyetheretherketone material
03/05/2014CN103614698A High-temperature antioxidant niobium alloy composite coating and preparation method thereof
03/05/2014CN103614697A Growth method of coated conductor DyBCO superconductive layer and DyBCO-coated conductor
03/05/2014CN103614696A Preparation method of corrosion-resistant thin film
03/05/2014CN103614695A Method for plating sapphire physical vapor deposition (PVD) film without oxygen and bias voltage
03/05/2014CN103614694A Preparation method of template auxiliary matrix-type micro-columnar CsI(Tl) scintillation conversion screen and application of scintillation conversion screen
03/05/2014CN103614693A Pore blocking method for surface modified layer of fuel cell polar plate
03/05/2014CN103613288A Preparation method of selective absorbing film for heat absorbing element of flat plate solar water heater
03/05/2014CN103613286A Preparation method of golden thin film
03/05/2014CN103612430A Preparation method of dielectric-metal interference type selective absorption film
03/05/2014CN102877029B Nano film evaporation external member for solar cell
03/05/2014CN102839356B Loading frame for non-blocking coating of annular product
03/05/2014CN102776474B Nano composite coating layer for surface treatment of substrate, and preparation method and device of nano composite coating layer
03/05/2014CN102560378B Method for improving critical current for continuously preparing YBCO (Yttrium Barium Copper Oxide) strip
03/05/2014CN102560352B Tungsten sulfide and tungsten nitride composite film material and preparation method thereof
03/05/2014CN102534533B Method for preparing silicon-based germanium quantum dots by magnetron sputtering technology
03/05/2014CN102534492B SiCN/TiCN multi-layer film tool coating layer and preparation method thereof
03/05/2014CN102471872B Divided annular rib-shaped plasma processing device
03/05/2014CN102378831B Coated cutting tool for metal cutting applications generating high temperatures
03/05/2014CN102272347B Tube target
03/05/2014CN102165094B 镍合金溅射靶及镍硅化物膜 Nickel and nickel alloy sputtering target silicide film
03/05/2014CN102144043B Microwave-assisted rotatable PVD
03/05/2014CN101268332B Real-time monitoring and controlling sputter target erosion
03/04/2014US8663876 Photomask blank, method of manufacturing the same, photomask, and method of manufacturing the same
03/04/2014US8663789 Thin film getter devices
03/04/2014US8663754 Pulsed laser micro-deposition pattern formation
03/04/2014US8663441 Vacuum coating apparatus with mutiple anodes and film coating method using the same
03/04/2014US8663440 Titanium target for sputtering
03/04/2014US8663439 Sputtering target for producing metallic glass membrane and manufacturing method thereof
03/04/2014US8663438 Target arrangement
03/04/2014US8663437 Deposition apparatus and electronic device manufacturing method
03/04/2014US8663433 Coated article with low-E coating including zirconium silicon oxynitride and methods of making same
03/04/2014US8663432 Magnetron sputtering apparatus and magnetron sputtering method
03/04/2014US8663431 Sputtering system for depositing thin film and method for depositing thin film
03/04/2014US8663430 Magnetron sputtering apparatus and method for manufacturing thin film
03/04/2014US8663402 Sputtering target with few surface defects, and surface processing method thereof
02/2014
02/27/2014WO2014031156A1 Apparatus for cylindrical magnetron sputtering
02/27/2014WO2014030725A1 Plasma processing apparatus
02/27/2014WO2014030382A1 Film formation method
02/27/2014WO2014030362A1 Cylindrical indium sputtering target and process for producing same
02/27/2014WO2014030324A1 Transparent metal film, and method for producing same
02/27/2014WO2014029845A1 Method for coating a substrate with multiple material layers, and multi-material dispensing device for said method
02/27/2014WO2014029063A1 Method for optimizing the surface properties of zno-based transparent electroconductive film and products therefrom
02/27/2014WO2014008484A3 Method to produce highly transparent hydrogenated carbon protective coating for transparent substrates
02/27/2014WO2013185197A3 Bearing bushing for internal combustion engines
02/27/2014US20140057054 Co-evaporation alloy material and evaporation coating method using the same
02/27/2014US20140054168 Apparatus for cylindrical magnetron sputtering
02/27/2014US20140054167 Film-forming apparatus
02/27/2014US20140054164 Deposition apparatus and electronic device manufacturing method
02/27/2014DE102012215059A1 Protective layer, useful in infra red reflective layer system arranged on substrate, where protective layer is made of titanium oxynitride as main component and has amorphous structure and abrasion resistance to increase transmission
02/27/2014DE102012107816A1 Short-term annealing of first layer, which is applied on a substrate, comprises exposing first layer on one side, which is facing away from substrate, to light radiation by flash lamp through lightning pulse in short time
02/26/2014EP2701466A1 Method and device for producing organic el element
02/26/2014EP2701465A1 Method and device for producing organic el element
1 ... 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 ... 674