Patents for B23H 5 - Combined machining (1,281) |
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04/11/2007 | EP1772536A1 Electrolytic processing apparatus and method |
04/11/2007 | EP1397828A4 Electrolytic processing device and substrate processing apparatus |
04/10/2007 | US7201850 Using a surface-texturing device comprising an embossing form and transferring a concavo-convex pattern of the embossing form to at least one surface of the aluminum sheet |
03/22/2007 | US20070066200 Perforation and grooving for polishing articles |
03/22/2007 | US20070062913 Probe Array and Method of Its Manufacture |
03/21/2007 | CN1931496A Wire electrode cutting process of steam turbine blade |
03/21/2007 | CN1306572C Apparatus for electropolishing metal interconnections on semiconductor devices |
03/08/2007 | US20070051639 Work piece wetted with a low-conductivity fluid is contacted with a first side of a charge-selective ion-conducting membrane,the second side of which contacts a conductive electrolyte solution in electrical contact with a cathode; can be used for both pure metals and alloys |
03/08/2007 | US20070051638 Electropolishing liquid, electropolishing method, and method for fabricating semiconductor device |
03/08/2007 | US20070051632 Polishing method, polishing apparatus, plating method, and plating apparatus |
03/08/2007 | US20070051619 Apparatus adapted for membrane-mediated electropolishing |
03/06/2007 | US7186322 Methods of producing and polishing semiconductor device and polishing apparatus |
02/28/2007 | EP1757395A1 Machining head for spark erosion machining assisted with chemical etching. |
02/28/2007 | CN1919514A Spraying liquid bunch electrolysis-laser composite processing method and apparatus thereof |
02/15/2007 | WO2007019279A2 Method and composition for polishing a substrate |
02/15/2007 | US20070037490 Methods and apparatus for selectively removing conductive material from a microelectronic substrate |
02/15/2007 | US20070034601 Surface treating method and surface-treating apparatus |
02/15/2007 | US20070034506 Pad assembly for electrochemical mechanical processing |
02/08/2007 | WO2006121600B1 Process and composition for conductive material removal by electrochemical mechanical polishing |
02/08/2007 | DE102005036779A1 Flat glass substrates treatment comprises removing material on at least one side by polishing |
01/25/2007 | US20070020918 Substrate processing method and substrate processing apparatus |
01/25/2007 | US20070017818 Solution for electrochemical mechanical polishing |
01/25/2007 | US20070017817 Method for manufacturing components of a gas turbine and a component of a gas turbine |
01/25/2007 | DE102005034940A1 Burr-free hole formation, e.g. in tube wall, by electrochemical machining method using hollow electrode through which electrolyte flows |
01/11/2007 | WO2006033758A3 Electrochemical machining tool and method for machining a product using the same |
01/09/2007 | US7160432 Method and composition for polishing a substrate |
01/09/2007 | US7160176 Methods and apparatus for electrically and/or chemically-mechanically removing conductive material from a microelectronic substrate |
01/04/2007 | WO2006121600A3 Process and composition for conductive material removal by electrochemical mechanical polishing |
01/04/2007 | WO2005105356A3 Electrochemical mechanical planarization process and apparatus |
01/02/2007 | US7156975 Polishing method and electropolishing apparatus |
12/26/2006 | US7153777 Methods and apparatuses for electrochemical-mechanical polishing |
12/26/2006 | US7153410 Alternating current, direct current power sources; switches |
12/26/2006 | US7153195 Methods and apparatus for selectively removing conductive material from a microelectronic substrate |
12/21/2006 | US20060283717 Method for the aftertreatment of a through hole of a component |
12/20/2006 | EP1732732A1 Methods and apparatuses for electrochemical-mechanical polishing |
12/06/2006 | CN1874874A Pad assembly for electrochemical mechanical processing |
12/05/2006 | US7144298 Method for manufacturing semiconductor device and apparatus for manufacturing thereof |
11/29/2006 | CN1286605C High speed high quality electric spark processing liquid storage tank system |
11/28/2006 | US7141501 Polishing method, polishing apparatus, and method of manufacturing semiconductor device |
11/28/2006 | US7141155 Polishing article for electro-chemical mechanical polishing |
11/28/2006 | US7141146 Means to improve center to edge uniformity of electrochemical mechanical processing of workpiece surface |
11/21/2006 | US7137868 Pad assembly for electrochemical mechanical processing |
11/16/2006 | WO2006121998A2 Electrolytic microfinishing of metallic workpieces |
11/16/2006 | WO2006121600A2 Process and composition for conductive material removal by electrochemical mechanical polishing |
11/14/2006 | US7134934 Methods and apparatus for electrically detecting characteristics of a microelectronic substrate and/or polishing medium |
11/09/2006 | US20060249398 Electrolytic microfinishing of metallic workpieces |
11/09/2006 | US20060249397 Position microelectronic substrate between electrodes; polishing; removing electroconducive materials by moving between electrodes; detecting signal |
11/08/2006 | EP1718787A2 Apparatus adapted for membrane mediated electropolishing |
11/08/2006 | CN1857840A Internal core for injection mold tool |
11/02/2006 | US20060243601 Method and device for the production of components having a three-dimensionally formed surface |
10/31/2006 | US7129160 Method for simultaneously removing multiple conductive materials from microelectronic substrates |
10/31/2006 | US7128825 Method and composition for polishing a substrate |
10/26/2006 | US20060237330 Algorithm for real-time process control of electro-polishing |
10/25/2006 | CN1850487A Injection mould for multi-camber combined rear lamp reflective body and its manufacturing method |
10/24/2006 | US7125477 Contacts for electrochemical processing |
10/19/2006 | US20060234604 Methods and apparatus for electrical, mechanical and/or chemical removal of conductive material from a microelectronic substrate |
10/19/2006 | US20060234508 Substrate processing apparatus and substrate processing method |
10/19/2006 | US20060231414 Electropolishing by having a conductive rotating contact element extending from a polishing surface of a pad body which rotates while in contact with the substrate and is in a fluid channel formed in the pad through which an electrolyte is flowing to activate the conductive rotating contact element |
10/19/2006 | US20060231413 Method of manufacturing a support for a lithographic printing plate |
10/12/2006 | WO2006065436A3 Gear surface treatment procedure |
10/12/2006 | US20060228992 Process control in electrochemically assisted planarization |
10/05/2006 | US20060219572 For thinning a layer on semiconductor substrate without contamination via force from brush or spray while applying voltage potential |
10/04/2006 | CN1842577A Polishing composition and method for polishing a conductive material |
10/03/2006 | US7115510 Method for electrochemically processing a workpiece |
09/29/2006 | CA2502593A1 Method and apparatus for producing a turbine root by edm and electropolishing |
09/28/2006 | US20060217049 Perforation and grooving for polishing articles |
09/28/2006 | US20060217040 Methods and apparatus for removing conductive material from a microelectronic substrate |
09/26/2006 | US7112270 Algorithm for real-time process control of electro-polishing |
09/26/2006 | US7112122 Methods and apparatus for removing conductive material from a microelectronic substrate |
09/26/2006 | US7112121 Methods and apparatus for electrical, mechanical and/or chemical removal of conductive material from a microelectronic substrate |
09/20/2006 | CN1276483C Planarization of substrates using electrochemical mechanical polishing |
09/14/2006 | WO2006081285A3 Electroprocessing profile control |
09/08/2006 | WO2006093625A1 Conductive pad with high abrasion |
09/08/2006 | WO2006093605A1 Electrode tool and method for electrochemical machining |
09/06/2006 | EP1306164B1 Contact-discharge truing/dressing method and device therefor |
09/05/2006 | US7101471 Method for planar material removal technique using multi-phase process environment |
09/05/2006 | US7101465 Electrolytic processing device and substrate processing apparatus |
08/31/2006 | US20060191800 Positioning microelectronic between electrodes; polishing; removal electrochemical material by moving between electrodes; detecting signals |
08/30/2006 | CN1826430A Metal product and manufacture method thereof, metal component joint method and joint structure body |
08/30/2006 | CN1824444A Ultrasonic electrolysis compounding micro processing method and device |
08/24/2006 | US20060189139 Methods and apparatuses for electrochemical-mechanical polishing |
08/24/2006 | US20060185986 Method to improve the control of electro-polishing by use of a plating electrode in an electrolyte bath |
08/22/2006 | US7094131 Microelectronic substrate having conductive material with blunt cornered apertures, and associated methods for removing conductive material |
08/16/2006 | EP1268881A4 Device providing electrical contact to the surface of a semiconductor workpiece during metal plating |
08/03/2006 | WO2006081470A1 Method and composition for polishing a substrate |
08/03/2006 | WO2006081285A2 Electroprocessing profile control |
08/02/2006 | EP1685281A2 Membrane -mediated electropolishing |
08/02/2006 | CN1810426A Machining process of plane sliding pair structure for hydraulic control valve |
07/27/2006 | US20060163074 Biasing via electrodes; electro-chemical mechanical polishing; for semiconductor wafers/integrated circuits |
07/26/2006 | CN1809445A Polishing pad for electrochemical-mechanical polishing |
07/20/2006 | US20060157355 Electrolytic process using anion permeable barrier |
07/19/2006 | CN2796944Y Polishing parts used for electrochemical machinery polishing |
07/18/2006 | US7077721 Pad assembly for electrochemical mechanical processing |
07/13/2006 | US20060151336 Pad for electrochemical processing |
07/12/2006 | CN1799746A Combined cutting device of ultra-thick metal material |
07/11/2006 | US7074113 Methods and apparatus for removing conductive material from a microelectronic substrate |
07/06/2006 | US20060148381 Pad assembly for electrochemical mechanical processing |
07/06/2006 | US20060144711 Electrochemical machining device and electrochemical machining method |
07/04/2006 | US7070475 Process control in electrochemically assisted planarization |
06/29/2006 | WO2006031366A3 Full sequence metal and barrier layer electrochemical mechanical processing |