Patents for B23H 5 - Combined machining (1,281)
04/2007
04/11/2007EP1772536A1 Electrolytic processing apparatus and method
04/11/2007EP1397828A4 Electrolytic processing device and substrate processing apparatus
04/10/2007US7201850 Using a surface-texturing device comprising an embossing form and transferring a concavo-convex pattern of the embossing form to at least one surface of the aluminum sheet
03/2007
03/22/2007US20070066200 Perforation and grooving for polishing articles
03/22/2007US20070062913 Probe Array and Method of Its Manufacture
03/21/2007CN1931496A Wire electrode cutting process of steam turbine blade
03/21/2007CN1306572C Apparatus for electropolishing metal interconnections on semiconductor devices
03/08/2007US20070051639 Work piece wetted with a low-conductivity fluid is contacted with a first side of a charge-selective ion-conducting membrane,the second side of which contacts a conductive electrolyte solution in electrical contact with a cathode; can be used for both pure metals and alloys
03/08/2007US20070051638 Electropolishing liquid, electropolishing method, and method for fabricating semiconductor device
03/08/2007US20070051632 Polishing method, polishing apparatus, plating method, and plating apparatus
03/08/2007US20070051619 Apparatus adapted for membrane-mediated electropolishing
03/06/2007US7186322 Methods of producing and polishing semiconductor device and polishing apparatus
02/2007
02/28/2007EP1757395A1 Machining head for spark erosion machining assisted with chemical etching.
02/28/2007CN1919514A Spraying liquid bunch electrolysis-laser composite processing method and apparatus thereof
02/15/2007WO2007019279A2 Method and composition for polishing a substrate
02/15/2007US20070037490 Methods and apparatus for selectively removing conductive material from a microelectronic substrate
02/15/2007US20070034601 Surface treating method and surface-treating apparatus
02/15/2007US20070034506 Pad assembly for electrochemical mechanical processing
02/08/2007WO2006121600B1 Process and composition for conductive material removal by electrochemical mechanical polishing
02/08/2007DE102005036779A1 Flat glass substrates treatment comprises removing material on at least one side by polishing
01/2007
01/25/2007US20070020918 Substrate processing method and substrate processing apparatus
01/25/2007US20070017818 Solution for electrochemical mechanical polishing
01/25/2007US20070017817 Method for manufacturing components of a gas turbine and a component of a gas turbine
01/25/2007DE102005034940A1 Burr-free hole formation, e.g. in tube wall, by electrochemical machining method using hollow electrode through which electrolyte flows
01/11/2007WO2006033758A3 Electrochemical machining tool and method for machining a product using the same
01/09/2007US7160432 Method and composition for polishing a substrate
01/09/2007US7160176 Methods and apparatus for electrically and/or chemically-mechanically removing conductive material from a microelectronic substrate
01/04/2007WO2006121600A3 Process and composition for conductive material removal by electrochemical mechanical polishing
01/04/2007WO2005105356A3 Electrochemical mechanical planarization process and apparatus
01/02/2007US7156975 Polishing method and electropolishing apparatus
12/2006
12/26/2006US7153777 Methods and apparatuses for electrochemical-mechanical polishing
12/26/2006US7153410 Alternating current, direct current power sources; switches
12/26/2006US7153195 Methods and apparatus for selectively removing conductive material from a microelectronic substrate
12/21/2006US20060283717 Method for the aftertreatment of a through hole of a component
12/20/2006EP1732732A1 Methods and apparatuses for electrochemical-mechanical polishing
12/06/2006CN1874874A Pad assembly for electrochemical mechanical processing
12/05/2006US7144298 Method for manufacturing semiconductor device and apparatus for manufacturing thereof
11/2006
11/29/2006CN1286605C High speed high quality electric spark processing liquid storage tank system
11/28/2006US7141501 Polishing method, polishing apparatus, and method of manufacturing semiconductor device
11/28/2006US7141155 Polishing article for electro-chemical mechanical polishing
11/28/2006US7141146 Means to improve center to edge uniformity of electrochemical mechanical processing of workpiece surface
11/21/2006US7137868 Pad assembly for electrochemical mechanical processing
11/16/2006WO2006121998A2 Electrolytic microfinishing of metallic workpieces
11/16/2006WO2006121600A2 Process and composition for conductive material removal by electrochemical mechanical polishing
11/14/2006US7134934 Methods and apparatus for electrically detecting characteristics of a microelectronic substrate and/or polishing medium
11/09/2006US20060249398 Electrolytic microfinishing of metallic workpieces
11/09/2006US20060249397 Position microelectronic substrate between electrodes; polishing; removing electroconducive materials by moving between electrodes; detecting signal
11/08/2006EP1718787A2 Apparatus adapted for membrane mediated electropolishing
11/08/2006CN1857840A Internal core for injection mold tool
11/02/2006US20060243601 Method and device for the production of components having a three-dimensionally formed surface
10/2006
10/31/2006US7129160 Method for simultaneously removing multiple conductive materials from microelectronic substrates
10/31/2006US7128825 Method and composition for polishing a substrate
10/26/2006US20060237330 Algorithm for real-time process control of electro-polishing
10/25/2006CN1850487A Injection mould for multi-camber combined rear lamp reflective body and its manufacturing method
10/24/2006US7125477 Contacts for electrochemical processing
10/19/2006US20060234604 Methods and apparatus for electrical, mechanical and/or chemical removal of conductive material from a microelectronic substrate
10/19/2006US20060234508 Substrate processing apparatus and substrate processing method
10/19/2006US20060231414 Electropolishing by having a conductive rotating contact element extending from a polishing surface of a pad body which rotates while in contact with the substrate and is in a fluid channel formed in the pad through which an electrolyte is flowing to activate the conductive rotating contact element
10/19/2006US20060231413 Method of manufacturing a support for a lithographic printing plate
10/12/2006WO2006065436A3 Gear surface treatment procedure
10/12/2006US20060228992 Process control in electrochemically assisted planarization
10/05/2006US20060219572 For thinning a layer on semiconductor substrate without contamination via force from brush or spray while applying voltage potential
10/04/2006CN1842577A Polishing composition and method for polishing a conductive material
10/03/2006US7115510 Method for electrochemically processing a workpiece
09/2006
09/29/2006CA2502593A1 Method and apparatus for producing a turbine root by edm and electropolishing
09/28/2006US20060217049 Perforation and grooving for polishing articles
09/28/2006US20060217040 Methods and apparatus for removing conductive material from a microelectronic substrate
09/26/2006US7112270 Algorithm for real-time process control of electro-polishing
09/26/2006US7112122 Methods and apparatus for removing conductive material from a microelectronic substrate
09/26/2006US7112121 Methods and apparatus for electrical, mechanical and/or chemical removal of conductive material from a microelectronic substrate
09/20/2006CN1276483C Planarization of substrates using electrochemical mechanical polishing
09/14/2006WO2006081285A3 Electroprocessing profile control
09/08/2006WO2006093625A1 Conductive pad with high abrasion
09/08/2006WO2006093605A1 Electrode tool and method for electrochemical machining
09/06/2006EP1306164B1 Contact-discharge truing/dressing method and device therefor
09/05/2006US7101471 Method for planar material removal technique using multi-phase process environment
09/05/2006US7101465 Electrolytic processing device and substrate processing apparatus
08/2006
08/31/2006US20060191800 Positioning microelectronic between electrodes; polishing; removal electrochemical material by moving between electrodes; detecting signals
08/30/2006CN1826430A Metal product and manufacture method thereof, metal component joint method and joint structure body
08/30/2006CN1824444A Ultrasonic electrolysis compounding micro processing method and device
08/24/2006US20060189139 Methods and apparatuses for electrochemical-mechanical polishing
08/24/2006US20060185986 Method to improve the control of electro-polishing by use of a plating electrode in an electrolyte bath
08/22/2006US7094131 Microelectronic substrate having conductive material with blunt cornered apertures, and associated methods for removing conductive material
08/16/2006EP1268881A4 Device providing electrical contact to the surface of a semiconductor workpiece during metal plating
08/03/2006WO2006081470A1 Method and composition for polishing a substrate
08/03/2006WO2006081285A2 Electroprocessing profile control
08/02/2006EP1685281A2 Membrane -mediated electropolishing
08/02/2006CN1810426A Machining process of plane sliding pair structure for hydraulic control valve
07/2006
07/27/2006US20060163074 Biasing via electrodes; electro-chemical mechanical polishing; for semiconductor wafers/integrated circuits
07/26/2006CN1809445A Polishing pad for electrochemical-mechanical polishing
07/20/2006US20060157355 Electrolytic process using anion permeable barrier
07/19/2006CN2796944Y Polishing parts used for electrochemical machinery polishing
07/18/2006US7077721 Pad assembly for electrochemical mechanical processing
07/13/2006US20060151336 Pad for electrochemical processing
07/12/2006CN1799746A Combined cutting device of ultra-thick metal material
07/11/2006US7074113 Methods and apparatus for removing conductive material from a microelectronic substrate
07/06/2006US20060148381 Pad assembly for electrochemical mechanical processing
07/06/2006US20060144711 Electrochemical machining device and electrochemical machining method
07/04/2006US7070475 Process control in electrochemically assisted planarization
06/2006
06/29/2006WO2006031366A3 Full sequence metal and barrier layer electrochemical mechanical processing
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