| Patents for B23H 5 - Combined machining (1,281) |
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| 10/24/2002 | US20020153097 Electroetching process and system |
| 10/17/2002 | US20020148732 Method and apparatus for electrochemically depositing a material onto a workpiece surface |
| 10/15/2002 | US6464855 Method and apparatus for electrochemical planarization of a workpiece |
| 09/26/2002 | WO2002075804A2 Planarization of substrates using electrochemical mechanical polishing |
| 09/24/2002 | US6454916 Selective electroplating with direct contact chemical polishing |
| 09/19/2002 | US20020130049 Forming a passivation layer on a substrate surface; polishing substrate in an electrolyte solution; applying an anodic bias to substrate surface; removing material from portion of substrate surface |
| 09/19/2002 | US20020130034 Pad designs and structures for a versatile materials processing apparatus |
| 09/03/2002 | US6444994 Apparatus and method for processing the components of a neutron lens |
| 08/29/2002 | US20020119286 Conductive polishing article for electrochemical mechanical polishing |
| 08/27/2002 | US6440295 Method for electropolishing metal on semiconductor devices |
| 08/22/2002 | WO2002064314A1 Method and apparatus for electrochemical planarization of a workpiece |
| 08/15/2002 | US20020111121 Method and apparatus for electrochemical-mechanical planarization |
| 08/15/2002 | US20020110502 Method and device for electro-chemical discharge processing with self-acting bubble layer |
| 08/15/2002 | US20020108864 Processing nonconductive materials; bubbles are created by electrolysis to form insulating bubble layers; applying high voltage across the electrodes causes air molecules ionic breakdown in the bubble layers, generating arc discharge |
| 08/15/2002 | US20020108861 Platen of conductive material is disposed proximate to the polishing pad and is configured to have a negative charge during planarization process; demetallization of a workpiece surface such as semiconductor |
| 08/08/2002 | US20020104764 Applying a voltage across a polishing pad and the substrate, while an electropolishing electrolyte is dispensed at an interface of the substrate and the polishing pad, and while pooling the electrolyte about the substrate |
| 08/01/2002 | US20020102853 Articles for polishing semiconductor substrates |
| 07/25/2002 | US20020098698 Method for polishing semiconductor device |
| 07/16/2002 | US6420265 Method for polishing semiconductor device |
| 07/11/2002 | US20020090884 Electrolytic polishing apparatus, electrolytic polishing method and wafer subject to polishing |
| 07/04/2002 | US20020086538 Method for polishing semiconductor device |
| 07/02/2002 | US6413403 Controlling electrolyte flow and distribution of electric, magnetic or electromagnetic field; depositing, removing, polishing, and/or modifying conductive material; uniformity; chemical mechanical polishing |
| 07/02/2002 | US6413388 Pad designs and structures for a versatile materials processing apparatus |
| 06/20/2002 | US20020074238 For planarizing metal surfaces having low aspect ratio recesses or trenches as well as raised regions; fluid exchange rate changes with elevation |
| 06/13/2002 | US20020072309 Polishing method and polishing apparatus |
| 06/13/2002 | US20020070126 Polishing method, polishing apparatus, plating method, and plating apparatus |
| 06/11/2002 | US6402925 Prevent accumulation by polishing |
| 06/05/2002 | CN1351916A Electrochemical mechanical and optical finishing process for rolling bearing rollway nest |
| 05/28/2002 | US6395152 Methods and apparatus for electropolishing metal interconnections on semiconductor devices |
| 05/23/2002 | WO2002041369A2 Electropolishing and chemical mechanical planarization |
| 05/02/2002 | US20020052126 Electro-mechanical polishing of platinum container structure |
| 04/30/2002 | US6379223 Method and apparatus for electrochemical-mechanical planarization |
| 04/23/2002 | US6376793 Method and device for electric discharge surface treatment using a wire electrode |
| 04/11/2002 | WO2002029859A2 Method and apparatus for electrochemical planarization of a workpiece |
| 04/11/2002 | WO2002028597A1 Method and apparatus for electrochemical planarization of a workpiece |
| 02/28/2002 | US20020025763 Methods and apparatus for electrical, mechanical and/or chemical removal of conductive material from a microelectronic substrate |
| 02/28/2002 | US20020025760 Methods and apparatus for electrically and/or chemically-mechanically removing conductive material from a microelectronic substrate |
| 02/28/2002 | US20020025759 Microelectronic substrate having conductive material with blunt cornered apertures, and associated methods for removing conductive material |
| 02/21/2002 | US20020022437 Working method for curved surface of a work and an apparatus thereof |
| 02/19/2002 | US6348668 Method and apparatus for treating surface of tool |
| 02/13/2002 | CN2476377Y Mirror bearing electrolytic grinding processing equipment |
| 02/06/2002 | CN1078832C Method and apparatus for electrolytic dressing |
| 01/24/2002 | WO2002006008A1 Contact-discharge truing/dressing method and device therefor |
| 01/08/2002 | US6336855 Grindstone for ELID grinding and apparatus for ELID surface grinding |
| 01/02/2002 | CN1329681A Method and apparatus for electrochemical mechanical deposition |
| 11/27/2001 | US6322426 Method for mirror process of external surface of long sized metal |
| 11/27/2001 | US6322424 Electrolytic integrated polishing method for metal workpieces using special abrasive materials |
| 11/22/2001 | US20010042690 Method and apparatus for electroplating and electropolishing |
| 11/13/2001 | US6315883 Providing partially fabricated integrated circuit having dielectric layer with trenches; forming conformal layer of conductive material over dielectric layer, selectively applying diffusion barrier film to recesses; electropolishing |
| 11/01/2001 | US20010036746 Methods of producing and polishing semiconductor device and polishing apparatus |
| 10/17/2001 | CN1318207A Methods and appts. for electropolishing metal intennections on semiconductor devices |
| 10/11/2001 | US20010029098 Process for fabricating semiconductor device and apparatus for fabricating semiconductor device |
| 10/03/2001 | CN1315235A Magnetically grinding method for machining micro hole or micro part |
| 09/27/2001 | WO2001071066A1 Device providing electrical contact to the surface of a semiconductor workpiece during metal plating |
| 09/27/2001 | US20010024934 Method of grinding an axially asymmetric aspherical mirror |
| 09/27/2001 | US20010024878 Flat soft magnetic powder with strain removed and binder which includes chlorinated polyethylene and a vinyl chloride resin; electromagnetic interference supression; reducing permeability of radiation noise |
| 09/19/2001 | EP1134056A1 Removable electrode |
| 09/13/2001 | US20010021629 Apparatus and method for processing micro-V grooves |
| 09/13/2001 | US20010020585 Removable electrode |
| 09/11/2001 | US6287449 Method of electrolytic texturing and electrolytic liquid slurry |
| 09/05/2001 | EP1129817A2 Apparatus and method for processing micro-v grooves |
| 09/05/2001 | EP1129237A2 Method and apparatus for electrochemical mechanical deposition |
| 09/05/2001 | CN1311079A Method for grinding non-axial-symmetry and non-ball-surface mirror |
| 08/30/2001 | WO2001063019A1 Pad designs and structures with improved fluid distribution |
| 08/30/2001 | WO2001063018A1 Pad designs and structures for a versatile materials processing apparatus |
| 07/04/2001 | CN1301609A Electric spark wire-electrode cutting device with attached supersonic vibration |
| 06/05/2001 | US6242343 Process for fabricating semiconductor device and apparatus for fabricating semiconductor device |
| 05/31/2001 | US20010002001 Part fabricating method and part fabricating apparatus |
| 05/30/2001 | EP1103346A2 Method and apparatus for electrochemical-mechanical planarization |
| 05/25/2001 | WO2001036138A1 Combined electrolytic polishing and abrasive super-finishing process |
| 05/22/2001 | US6234870 Serial intelligent electro-chemical-mechanical wafer processor |
| 05/09/2001 | EP1097474A1 Methods and apparatus for electropolishing metal interconnections on semiconductor devices |
| 05/08/2001 | US6228445 Austenitic stainless steel article having a passivated surface layer |
| 05/03/2001 | DE10042613A1 Electrolysis dressing for honing grindstone, involves impressing preset voltage between grinding stone, separated from grindstone processing surface and electrode with simultaneously supply of electroconductive fluid |
| 05/01/2001 | US6224972 Method of making a PVD-coated HSS drill |
| 04/26/2001 | DE10042612A1 Internal grinding method for fuel injection nozzle, involves simultaneous grinding and pressing of non-conductive film provided on bonded surface of grinding wheel during contact with workpiece |
| 04/24/2001 | US6221228 Maching and molding, electrodeposition of metal and removal |
| 04/10/2001 | US6213843 Method for grinding surfaces of workpieces |
| 03/07/2001 | EP1080836A2 Apparatus and method for processing the components of a neutron lens |
| 02/28/2001 | EP1078714A2 Method and apparatus for grinding curved surfaces |
| 02/14/2001 | CN2418988Y High performance cutting machine |
| 01/23/2001 | US6176992 Method and apparatus for electro-chemical mechanical deposition |
| 01/17/2001 | CN1060710C Composite discharging-mechanical grinding method for external circle of sheet workpiece |
| 01/10/2001 | CN1060423C Repairing method for tools and dies and repairing machine |
| 01/09/2001 | US6171467 Silicon wafers in electrolytic baths, applying voltage and planarizing |
| 12/05/2000 | US6156188 Using the main shaft of an electrodischarge machining machine to mount thereon a probe for effecting the drilling operation of a pcb board; upon completion of the drilling operation, the probe is severed and then fastened with the pcb board |
| 12/05/2000 | US6156187 Positively charging and rotating a metallic tube about the axis thereof and supporting both ends of the tube, pressing more than one grindstone with a constant pressure against the external surface of the metallic tube from opposite directions |
| 11/09/2000 | DE19917963A1 Creating micro bores by spark discharge, using electrolyte flow to remove eroded material |
| 10/31/2000 | CA2088686C Orbital electrochemical machining |
| 10/18/2000 | EP1044767A2 Electrolytic in-process dressing apparatus |
| 10/14/2000 | CA2305832A1 Table-top elid processing apparatus |
| 10/12/2000 | WO2000026443A3 Method and apparatus for electrochemical mechanical deposition |
| 10/11/2000 | EP1043421A2 Austenitic stainless steel article having a passivated surface layer |
| 09/19/2000 | US6121152 Method and apparatus for planarization of metallized semiconductor wafers using a bipolar electrode assembly |
| 08/02/2000 | CN1261833A Method and device for treating tool surface |
| 06/13/2000 | US6074284 Combination electrolytic polishing and abrasive super-finishing method |
| 05/17/2000 | EP1000694A2 Electrolytic integrated polishing method for metal workpieces using special abrasive materials |
| 05/11/2000 | WO2000026443A2 Method and apparatus for electrochemical mechanical deposition |
| 05/09/2000 | CA2286990A1 Electrolytic integrated polishing method for metal workpieces using special abrasive materials |
| 04/19/2000 | EP0993905A2 Method for mirror process of external surface of long sized metal |