Patents for B23H 5 - Combined machining (1,281)
03/2008
03/05/2008EP1894656A2 Electrolytic liquid for electrolytic polishing and electrolytic polishing method
02/2008
02/28/2008US20080051009 Endpoint for electroprocessing
02/21/2008WO2008019683A1 Spindle with draw rod and current conductor
02/21/2008US20080045009 Method and apparatus for simultaneously removing multiple conductive materials from microelectronic substrates
02/14/2008US20080038999 Retaining ring with conductive portion
02/12/2008US7329335 Device providing electrical contact to the surface of a semiconductor workpiece during processing
02/06/2008CN101116921A Wheel tooth surface electrolyzing precision-processing method and wheel tooth surface precision-processing device
01/2008
01/31/2008US20080026681 Conductive polishing article for electrochemical mechanical polishing
01/24/2008US20080017521 Process control in electro-chemical mechanical polishing
01/17/2008WO2007103446A3 Method and apparatus for electropolishing metallic stents
01/16/2008EP1877216A2 Electrolytic microfinishing of metallic workpieces
01/16/2008CN101107090A Electroprocessing profile control
01/09/2008EP1875987A2 Method and apparatus for electromechanically and/or electrochemically-mechanically removing conductive material from a microelectronic substrate
01/08/2008US7316602 Constant low force wafer carrier for electrochemical mechanical processing and chemical mechanical polishing
01/03/2008WO2008002812A2 Electrolyte retaining on a rotating platen by directional air flow
01/03/2008WO2008000072A1 Abrasion assisted wire electrical discharge machining process
01/03/2008CA2653730A1 Abrasion assisted wire electrical discharge machining process
12/2007
12/27/2007US20070295610 Electrolyte retaining on a rotating platen by directional air flow
12/26/2007CN101094748A Methods and apparatuses for electrochemical-mechanical polishing
12/25/2007US7311811 Device providing electrical contact to the surface of a semiconductor workpiece during processing
12/21/2007WO2007146518A2 Dual cutting element tool for debulking bone
12/19/2007EP1867431A1 Spindle with a conductive positive lock drawbar
12/18/2007US7309413 Providing electrical contact to the surface of a semiconductor workpiece during processing
12/13/2007DE102006026967A1 Verfahren zur Herstellung eines Zerspanwerkzeugs A process for the preparation of a machining tool
12/12/2007CN101085483A Combinational processing method for micro-array axle hole
12/06/2007DE102006025750A1 Object non-mechanical processing method for motor vehicle, involves forming object from conductive material with structural constituents, and utilizing electro-chemical removal procedure for non-mechanical processing of object
12/05/2007EP1453991A4 Electrolytic processing apparatus and method
12/04/2007US7303662 Contacts for electrochemical processing
12/04/2007US7303462 Edge bead removal by an electro polishing process
11/2007
11/28/2007CN101080331A Gear surface treatment procedure
11/22/2007WO2006039627A3 Active matrix electrochemical machining apparatus and method
11/20/2007US7297239 Method and apparatus for the electrochemical deposition and planarization of a material on a workpiece surface
11/14/2007CN100348352C Machining process of plane sliding pair structure for hydraulic control valve
11/13/2007US7294038 Process control in electrochemically assisted planarization
11/07/2007CN200970715Y Polishing parts used for electrochemical mechinery polishing
11/07/2007CN101066569A Numerically controlled machine tool with increased spark machining device
11/07/2007CN100346916C Composite processing technology of fine injection type hole
11/01/2007WO2007121999A2 Electrolytic solution for the electrochemical polishing of metal articles
10/2007
10/31/2007DE112005002977T5 Verzahnungselementoberflächenbehandlungsprozedur Toothed element surface treatment procedure
10/24/2007EP1536919B1 Method and apparatus for electromechanically and/or electrochemically-mechanically removing conductive material from a microelectronic substrate
10/23/2007US7285145 Slurry of high viscosity solvent admixed with an abrasive polishing agent; viscosity of the slurry is high enough to generate mechanical force between the slurry and the surface
10/23/2007US7285036 Pad assembly for electrochemical mechanical polishing
10/16/2007US7282124 Device providing electrical contact to the surface of a semiconductor workpiece during processing
10/11/2007US20070235345 Polishing method that suppresses hillock formation
10/11/2007US20070235344 Process for high copper removal rate with good planarization and surface finish
10/10/2007EP1841558A2 Method and composition for electro-chemical-mechanical polishing
10/10/2007CN101052751A Electrochemical machining tool and method for machining a product using the same
10/09/2007US7278911 Conductive polishing article for electrochemical mechanical polishing
10/04/2007US20070228017 Electromachining process and apparatus
10/04/2007US20070227902 Removal profile tuning by adjusting conditioning sweep profile on a conductive pad
10/02/2007US7276743 Retaining ring with conductive portion
09/2007
09/27/2007WO2007109432A2 Methods and apparatus for electroprocessing with recessed bias contact
09/27/2007WO2006121998A3 Electrolytic microfinishing of metallic workpieces
09/20/2007US20070215488 Methods and apparatus for electroprocessing with recessed bias contact
09/20/2007US20070215463 Pre-conditioning a sputtering target prior to sputtering
09/13/2007WO2007103446A2 Method and apparatus for electropolishing metallic stents
09/13/2007US20070209947 Method and apparatus for electropolishing metallic stents
09/13/2007US20070209946 Method and apparatus for evaluating polishing pad conditioning
09/12/2007EP1594656B1 Polishing article for electro-chemical mechanical polishing
09/05/2007CN101028661A Method for machining bright and fog faces of formed mould
08/2007
08/29/2007CN100334691C Substrate processing apparatus and substrate processing method
08/22/2007CN2936578Y Processing pad and substrate processing equipment including said processing pad
08/22/2007CN101022920A Retaining ring with conductive portion
08/22/2007CN101022910A 全序列金属和阻挡层电化学机械处理 Sequence metal and barrier layer electrochemical mechanical treatment
08/22/2007CN101020269A Process and fixture for machining profile hole in cascade guide berm of steam turbine
08/22/2007CN101020267A Machining process of wearable sealing part of nickel-base sintered material
08/16/2007US20070187259 Substrate processing apparatus and method
08/16/2007US20070187258 Method for electrochemically polishing a conductive material on a substrate
08/16/2007US20070187257 Electrolytic processing apparatus and electrolytic processing method
08/14/2007US7255784 Polishing method and electropolishing apparatus
08/09/2007US20070181432 Electrolytic processing apparatus and substrate processing apparatus and method
08/01/2007CN101007379A Method for improving rolling surface of nut screw for ball screw
07/2007
07/31/2007US7250103 Method and apparatus for eliminating defects and improving uniformity in electrochemically processed conductive layers
07/11/2007EP1467840B1 Process control in electro-chemical mechanical polishing
07/05/2007WO2007074012A1 Workpiece machining device
07/05/2007US20070151866 Substrate polishing with surface pretreatment
07/04/2007EP1803528A1 Method of processing electrically conductive workpiece and combined processing apparatus
07/03/2007US7238092 Low-force electrochemical mechanical processing method and apparatus
06/2007
06/27/2007CN2915345Y Supersonic electrolysis composite fine machining device
06/27/2007CN1988982A Method of processing electrically conductive workpiece and combined processing apparatus
06/26/2007US7236849 Safety system for power equipment
06/26/2007CA2304436C Austenitic stainless steel article having a passivated surface layer
06/21/2007US20070138023 Combined electrochemical machining and electropolishing micro-machining apparatus and method
06/19/2007US7232514 Minimizing damage to the surface to remove conductive materials by an electrochemical polishing technique using an acid-based electrolyte, chelating agent, corrosion inhibitor, acid salt; buffer, oxidizer and solvents; semiconductors
06/14/2007US20070131561 Controlling removal rate uniformity of an electropolishing process in integrated circuit fabrication
06/13/2007EP1793958A2 Active matrix electrochemical machining apparatus and method
06/12/2007US7229535 Hydrogen bubble reduction on the cathode using double-cell designs
05/2007
05/22/2007US7220166 Methods and apparatus for electromechanically and/or electrochemically-mechanically removing conductive material from a microelectronic substrate
05/18/2007WO2007054125A1 A system and method for removing particles from a polishing pad
05/17/2007US20070111641 Methods and apparatus for electromechanically and/or electrochemically-mechanically removing conductive material from a microelectronic substrate
05/17/2007US20070111638 Pad assembly for electrochemical mechanical polishing
05/17/2007US20070108067 Polishing apparatus and method of polishing work
05/16/2007CN1962145A Method for processing blade form work piece and fittings dedicated therefor
05/16/2007CN1316570C Planar metal electroprocessing
05/10/2007WO2007019279A3 Method and composition for polishing a substrate
04/2007
04/25/2007EP1777736A1 Electrolytic processing device and substrate processing apparatus
04/24/2007US7207878 Conductive polishing article for electrochemical mechanical polishing
04/17/2007US7204924 Method and apparatus to deposit layers with uniform properties
04/17/2007US7204917 Workpiece surface influencing device designs for electrochemical mechanical processing and method of using the same
04/17/2007US7204743 Integrated circuit interconnect fabrication systems
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