| Patents for B23H 5 - Combined machining (1,281) |
|---|
| 03/05/2008 | EP1894656A2 Electrolytic liquid for electrolytic polishing and electrolytic polishing method |
| 02/28/2008 | US20080051009 Endpoint for electroprocessing |
| 02/21/2008 | WO2008019683A1 Spindle with draw rod and current conductor |
| 02/21/2008 | US20080045009 Method and apparatus for simultaneously removing multiple conductive materials from microelectronic substrates |
| 02/14/2008 | US20080038999 Retaining ring with conductive portion |
| 02/12/2008 | US7329335 Device providing electrical contact to the surface of a semiconductor workpiece during processing |
| 02/06/2008 | CN101116921A Wheel tooth surface electrolyzing precision-processing method and wheel tooth surface precision-processing device |
| 01/31/2008 | US20080026681 Conductive polishing article for electrochemical mechanical polishing |
| 01/24/2008 | US20080017521 Process control in electro-chemical mechanical polishing |
| 01/17/2008 | WO2007103446A3 Method and apparatus for electropolishing metallic stents |
| 01/16/2008 | EP1877216A2 Electrolytic microfinishing of metallic workpieces |
| 01/16/2008 | CN101107090A Electroprocessing profile control |
| 01/09/2008 | EP1875987A2 Method and apparatus for electromechanically and/or electrochemically-mechanically removing conductive material from a microelectronic substrate |
| 01/08/2008 | US7316602 Constant low force wafer carrier for electrochemical mechanical processing and chemical mechanical polishing |
| 01/03/2008 | WO2008002812A2 Electrolyte retaining on a rotating platen by directional air flow |
| 01/03/2008 | WO2008000072A1 Abrasion assisted wire electrical discharge machining process |
| 01/03/2008 | CA2653730A1 Abrasion assisted wire electrical discharge machining process |
| 12/27/2007 | US20070295610 Electrolyte retaining on a rotating platen by directional air flow |
| 12/26/2007 | CN101094748A Methods and apparatuses for electrochemical-mechanical polishing |
| 12/25/2007 | US7311811 Device providing electrical contact to the surface of a semiconductor workpiece during processing |
| 12/21/2007 | WO2007146518A2 Dual cutting element tool for debulking bone |
| 12/19/2007 | EP1867431A1 Spindle with a conductive positive lock drawbar |
| 12/18/2007 | US7309413 Providing electrical contact to the surface of a semiconductor workpiece during processing |
| 12/13/2007 | DE102006026967A1 Verfahren zur Herstellung eines Zerspanwerkzeugs A process for the preparation of a machining tool |
| 12/12/2007 | CN101085483A Combinational processing method for micro-array axle hole |
| 12/06/2007 | DE102006025750A1 Object non-mechanical processing method for motor vehicle, involves forming object from conductive material with structural constituents, and utilizing electro-chemical removal procedure for non-mechanical processing of object |
| 12/05/2007 | EP1453991A4 Electrolytic processing apparatus and method |
| 12/04/2007 | US7303662 Contacts for electrochemical processing |
| 12/04/2007 | US7303462 Edge bead removal by an electro polishing process |
| 11/28/2007 | CN101080331A Gear surface treatment procedure |
| 11/22/2007 | WO2006039627A3 Active matrix electrochemical machining apparatus and method |
| 11/20/2007 | US7297239 Method and apparatus for the electrochemical deposition and planarization of a material on a workpiece surface |
| 11/14/2007 | CN100348352C Machining process of plane sliding pair structure for hydraulic control valve |
| 11/13/2007 | US7294038 Process control in electrochemically assisted planarization |
| 11/07/2007 | CN200970715Y Polishing parts used for electrochemical mechinery polishing |
| 11/07/2007 | CN101066569A Numerically controlled machine tool with increased spark machining device |
| 11/07/2007 | CN100346916C Composite processing technology of fine injection type hole |
| 11/01/2007 | WO2007121999A2 Electrolytic solution for the electrochemical polishing of metal articles |
| 10/31/2007 | DE112005002977T5 Verzahnungselementoberflächenbehandlungsprozedur Toothed element surface treatment procedure |
| 10/24/2007 | EP1536919B1 Method and apparatus for electromechanically and/or electrochemically-mechanically removing conductive material from a microelectronic substrate |
| 10/23/2007 | US7285145 Slurry of high viscosity solvent admixed with an abrasive polishing agent; viscosity of the slurry is high enough to generate mechanical force between the slurry and the surface |
| 10/23/2007 | US7285036 Pad assembly for electrochemical mechanical polishing |
| 10/16/2007 | US7282124 Device providing electrical contact to the surface of a semiconductor workpiece during processing |
| 10/11/2007 | US20070235345 Polishing method that suppresses hillock formation |
| 10/11/2007 | US20070235344 Process for high copper removal rate with good planarization and surface finish |
| 10/10/2007 | EP1841558A2 Method and composition for electro-chemical-mechanical polishing |
| 10/10/2007 | CN101052751A Electrochemical machining tool and method for machining a product using the same |
| 10/09/2007 | US7278911 Conductive polishing article for electrochemical mechanical polishing |
| 10/04/2007 | US20070228017 Electromachining process and apparatus |
| 10/04/2007 | US20070227902 Removal profile tuning by adjusting conditioning sweep profile on a conductive pad |
| 10/02/2007 | US7276743 Retaining ring with conductive portion |
| 09/27/2007 | WO2007109432A2 Methods and apparatus for electroprocessing with recessed bias contact |
| 09/27/2007 | WO2006121998A3 Electrolytic microfinishing of metallic workpieces |
| 09/20/2007 | US20070215488 Methods and apparatus for electroprocessing with recessed bias contact |
| 09/20/2007 | US20070215463 Pre-conditioning a sputtering target prior to sputtering |
| 09/13/2007 | WO2007103446A2 Method and apparatus for electropolishing metallic stents |
| 09/13/2007 | US20070209947 Method and apparatus for electropolishing metallic stents |
| 09/13/2007 | US20070209946 Method and apparatus for evaluating polishing pad conditioning |
| 09/12/2007 | EP1594656B1 Polishing article for electro-chemical mechanical polishing |
| 09/05/2007 | CN101028661A Method for machining bright and fog faces of formed mould |
| 08/29/2007 | CN100334691C Substrate processing apparatus and substrate processing method |
| 08/22/2007 | CN2936578Y Processing pad and substrate processing equipment including said processing pad |
| 08/22/2007 | CN101022920A Retaining ring with conductive portion |
| 08/22/2007 | CN101022910A 全序列金属和阻挡层电化学机械处理 Sequence metal and barrier layer electrochemical mechanical treatment |
| 08/22/2007 | CN101020269A Process and fixture for machining profile hole in cascade guide berm of steam turbine |
| 08/22/2007 | CN101020267A Machining process of wearable sealing part of nickel-base sintered material |
| 08/16/2007 | US20070187259 Substrate processing apparatus and method |
| 08/16/2007 | US20070187258 Method for electrochemically polishing a conductive material on a substrate |
| 08/16/2007 | US20070187257 Electrolytic processing apparatus and electrolytic processing method |
| 08/14/2007 | US7255784 Polishing method and electropolishing apparatus |
| 08/09/2007 | US20070181432 Electrolytic processing apparatus and substrate processing apparatus and method |
| 08/01/2007 | CN101007379A Method for improving rolling surface of nut screw for ball screw |
| 07/31/2007 | US7250103 Method and apparatus for eliminating defects and improving uniformity in electrochemically processed conductive layers |
| 07/11/2007 | EP1467840B1 Process control in electro-chemical mechanical polishing |
| 07/05/2007 | WO2007074012A1 Workpiece machining device |
| 07/05/2007 | US20070151866 Substrate polishing with surface pretreatment |
| 07/04/2007 | EP1803528A1 Method of processing electrically conductive workpiece and combined processing apparatus |
| 07/03/2007 | US7238092 Low-force electrochemical mechanical processing method and apparatus |
| 06/27/2007 | CN2915345Y Supersonic electrolysis composite fine machining device |
| 06/27/2007 | CN1988982A Method of processing electrically conductive workpiece and combined processing apparatus |
| 06/26/2007 | US7236849 Safety system for power equipment |
| 06/26/2007 | CA2304436C Austenitic stainless steel article having a passivated surface layer |
| 06/21/2007 | US20070138023 Combined electrochemical machining and electropolishing micro-machining apparatus and method |
| 06/19/2007 | US7232514 Minimizing damage to the surface to remove conductive materials by an electrochemical polishing technique using an acid-based electrolyte, chelating agent, corrosion inhibitor, acid salt; buffer, oxidizer and solvents; semiconductors |
| 06/14/2007 | US20070131561 Controlling removal rate uniformity of an electropolishing process in integrated circuit fabrication |
| 06/13/2007 | EP1793958A2 Active matrix electrochemical machining apparatus and method |
| 06/12/2007 | US7229535 Hydrogen bubble reduction on the cathode using double-cell designs |
| 05/22/2007 | US7220166 Methods and apparatus for electromechanically and/or electrochemically-mechanically removing conductive material from a microelectronic substrate |
| 05/18/2007 | WO2007054125A1 A system and method for removing particles from a polishing pad |
| 05/17/2007 | US20070111641 Methods and apparatus for electromechanically and/or electrochemically-mechanically removing conductive material from a microelectronic substrate |
| 05/17/2007 | US20070111638 Pad assembly for electrochemical mechanical polishing |
| 05/17/2007 | US20070108067 Polishing apparatus and method of polishing work |
| 05/16/2007 | CN1962145A Method for processing blade form work piece and fittings dedicated therefor |
| 05/16/2007 | CN1316570C Planar metal electroprocessing |
| 05/10/2007 | WO2007019279A3 Method and composition for polishing a substrate |
| 04/25/2007 | EP1777736A1 Electrolytic processing device and substrate processing apparatus |
| 04/24/2007 | US7207878 Conductive polishing article for electrochemical mechanical polishing |
| 04/17/2007 | US7204924 Method and apparatus to deposit layers with uniform properties |
| 04/17/2007 | US7204917 Workpiece surface influencing device designs for electrochemical mechanical processing and method of using the same |
| 04/17/2007 | US7204743 Integrated circuit interconnect fabrication systems |