| Patents for B08B 6 - Cleaning by electrostatic means (1,400) |
|---|
| 12/13/2007 | WO2007095388A3 Plasma processing reactor with multiple capacitive and inductive power sources |
| 12/13/2007 | US20070285631 Lithographic apparatus and lithographic apparatus cleaning method |
| 12/11/2007 | US7306681 Method of cleaning a semiconductor substrate |
| 12/06/2007 | WO2006080977A3 Method and apparatus for cleaning and surface conditioning objects with plasma |
| 12/05/2007 | CN200984577Y Decontaminating apparatus |
| 12/05/2007 | CN200984576Y Fibre dust-cleaning equipment |
| 12/05/2007 | CN101084586A Ultrasonic processing method and apparatus with multiple frequency transducers |
| 12/05/2007 | CN101081394A Dust-blowing device |
| 12/04/2007 | US7303636 Method of laser cleaning surfaces on a head suspension |
| 11/29/2007 | US20070272270 Single-wafer cleaning procedure |
| 11/22/2007 | WO2006078894A3 Method and apparatus for cleaning and surface conditioning objects using non-equilibrium atmospheric pressure plasma |
| 11/15/2007 | US20070261718 Method and apparatus for ozone-enhanced cleaning of flat objects with pulsed liquid jet |
| 11/08/2007 | WO2007126469A2 Method for conditioning a process chamber |
| 11/08/2007 | US20070256704 Method and apparatus for improved operation of an abatement system |
| 11/08/2007 | US20070256703 Method for removing contaminant from surface of glass substrate |
| 11/08/2007 | US20070256563 Electrostatic ionic air emission device |
| 11/07/2007 | EP1852192A2 Dust remover |
| 11/07/2007 | CN101068630A Method, apparatus, and system for bi-solvent based cleaning of precision components |
| 11/01/2007 | US20070254112 Apparatus and method for high utilization of process chambers of a cluster system through staggered plasma cleaning |
| 11/01/2007 | US20070251543 Methods to clean a surface, a device manufacturing method, a cleaning assembly, cleaning apparatus, and lithographic apparatus |
| 10/30/2007 | US7288491 Plasma immersion ion implantation process |
| 10/30/2007 | US7287535 Work washing apparatus |
| 10/25/2007 | WO2007120276A2 An apparatus and a method for cleaning a dielectric film |
| 10/25/2007 | US20070248767 Method of self-cleaning of carbon-based film |
| 10/25/2007 | US20070246063 Method of performing a pressure calibration during waferless autoclean process |
| 10/25/2007 | US20070246062 Method of cleaning deposition chamber |
| 10/23/2007 | US7284558 Enhanced megasonic based clean using an alternative cleaning chemistry |
| 10/17/2007 | EP1843863A2 Method and apparatus for cleaning and surface conditioning objects with plasma |
| 10/11/2007 | US20070238321 Method of manufacturing semiconductor device |
| 10/11/2007 | US20070238199 Method for conditioning a process chamber |
| 10/11/2007 | US20070235060 Ignition control of remote plasma unit |
| 10/11/2007 | US20070235059 Method of recovering valuable material from exhaust gas stream of a reaction chamber |
| 10/10/2007 | CN200957422Y Manual electrostatic dust-collecting cabinet |
| 10/09/2007 | US7278272 Marine air conditioner decontamination system |
| 10/04/2007 | US20070227555 Method to manipulate post metal etch/side wall residue |
| 10/03/2007 | CN200956546Y High-frequency high-voltage power supply for electric dust extraction |
| 09/20/2007 | US20070215173 Heated single wafer megasonic processing plate |
| 09/19/2007 | CN200948461Y 静电清扫器 Electrostatic Cleaner |
| 09/19/2007 | CN101036913A Method and device of eliminating dust |
| 09/11/2007 | US7267842 Method for removing titanium dioxide deposits from a reactor |
| 09/11/2007 | US7267127 Method for manufacturing electronic device |
| 08/30/2007 | US20070199658 Integrated capacitive and inductive power sources for a plasma etching chamber |
| 08/30/2007 | US20070199577 Method And Device For Removing Liquids From The Surface Of A Strip |
| 08/28/2007 | US7261110 Shaving apparatus cleaning device |
| 08/23/2007 | US20070197037 Surface preparation for gate oxide formation that avoids chemical oxide formation |
| 08/23/2007 | US20070193602 Systems and Methods for Photoresist Strip and Residue Treatment in Integrated Circuit Manufacturing |
| 08/22/2007 | CN2936462Y Self-cleaning type static dust removing roller |
| 08/16/2007 | US20070190266 Water vapor passivation of a wall facing a plasma |
| 08/16/2007 | US20070186953 Systems and Methods for Photoresist Strip and Residue Treatment in Integrated Circuit Manufacturing |
| 08/16/2007 | US20070186952 Method of cleaning substrate processing chamber, storage medium, and substrate processing chamber |
| 08/16/2007 | US20070186857 Plasma processing apparatus and method of using the same |
| 08/16/2007 | US20070186855 Plasma processing reactor with multiple capacitive and inductive power sources |
| 08/16/2007 | US20070186854 Apparatus and method for plasma processing |
| 08/15/2007 | CN101018620A Flat surface washing apparatus |
| 08/15/2007 | CN101015830A Self-cleaning electrostatic dust collection roller |
| 08/09/2007 | US20070184659 Method for Cleaning a Semiconductor Wafer |
| 08/09/2007 | US20070181170 Apparatus including an improved nozzle unit |
| 08/09/2007 | US20070181147 Processing-fluid flow measuring method |
| 08/09/2007 | US20070181146 Plasma cvd apparatus and dry cleaning method of the same |
| 08/09/2007 | US20070181145 Method for cleaning process chamber of substrate processing apparatus, substrate processing apparatus, and method for processing substrate |
| 08/08/2007 | CN101011698A Self-cleaning electrostatic dedusting roller |
| 08/07/2007 | US7253901 Laser-based cleaning device for film analysis tool |
| 08/02/2007 | US20070175495 Apparatus for Treating Plasma and Method for Cleaning the Same |
| 08/01/2007 | EP1812190A2 Electrode array device having an adsorbed porous reaction layer |
| 07/26/2007 | WO2006017164A3 Filter back-flushing and rinsing device |
| 07/26/2007 | US20070169798 Automatic Paint Roller Cover Washer |
| 07/19/2007 | US20070163618 Cleaning solution for silicon surface and methods of fabricating semiconductor device using the same |
| 07/19/2007 | US20070163617 Method for cleaning treatment chamber iIn substrate treating apparatus and method for detecting endpoint of cleaning |
| 07/18/2007 | CN2923038Y Integrated electric duster high-frequency power supply |
| 07/18/2007 | CN100998983A Cleaning method and device |
| 07/17/2007 | US7244313 Plasma etch and photoresist strip process with intervening chamber de-fluorination and wafer de-fluorination steps |
| 07/11/2007 | CN1325177C A cleaning device and cleaning method |
| 07/05/2007 | US20070151946 Method for monitoring edge bead removal process of copper metal interconnection |
| 06/28/2007 | US20070144557 Cleaning method of apparatus for depositing AI-containing metal film and AI-containing metal nitride film |
| 06/28/2007 | US20070144555 Supercritical CO2 cleaning system and method |
| 06/26/2007 | US7234185 Apparatus for removing particles |
| 06/21/2007 | US20070137671 Fluorine based cleaning of an ion source |
| 06/20/2007 | CN2912843Y High reliable control of constant flow high-voltage direct current power supply |
| 06/19/2007 | US7232492 Method of forming thin film for improved productivity |
| 06/14/2007 | US20070134821 Cluster tool for advanced front-end processing |
| 06/14/2007 | US20070131249 Probe washing method of scanning probe microscope |
| 06/14/2007 | US20070131246 Substrate processing method and substrate processing apparatus |
| 06/14/2007 | US20070131245 Method of cleaning plasma etching apparatus, and thus-cleanable plasma etching apparatus |
| 06/14/2007 | US20070131244 Method and apparatus for removing minute particles from a surface |
| 06/12/2007 | US7228865 FRAM capacitor stack clean |
| 06/07/2007 | US20070128375 Method and device for continuously treating the surface of an elongate object |
| 06/07/2007 | US20070125749 Apparatus and method for removing protective film on article |
| 05/31/2007 | US20070123052 Process sequence for photoresist stripping and cleaning of photomasks for integrated circuit manufacturing |
| 05/31/2007 | US20070119477 Method and Apparatus for Semiconductor Wafer Cleaning Using High-Frequency Acoustic Energy with Supercritical Fluid |
| 05/31/2007 | US20070119476 Substrate processing apparatus and substrate processing method |
| 05/30/2007 | CN2906414Y Intelligent dust-removing sterilizing sound-insulating ventilation device for room |
| 05/30/2007 | CN1972763A Static charge and dust removing device |
| 05/30/2007 | CN1319131C Process and apparatus for treating a workpiece such as a semiconductor wafer |
| 05/24/2007 | US20070113868 Apparatus and a method for cleaning a dielectric film |
| 05/24/2007 | US20070113867 Polymer treatment using a plasma brush |
| 05/17/2007 | US20070107750 Method of using NF3 for removing surface deposits from the interior of chemical vapor deposition chambers |
| 05/17/2007 | US20070107749 Process chamber cleaning method |
| 05/10/2007 | WO2005044440A3 Ultrasonic apparatus with multiple frequency transducers |
| 05/09/2007 | CN2897464Y Electrostatic bottle washing system |
| 05/03/2007 | US20070095476 Plasma discharger |