| Patents for B08B 6 - Cleaning by electrostatic means (1,400) |
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| 11/27/2008 | US20080289651 Method and apparatus for wafer edge cleaning |
| 11/26/2008 | EP1993745A2 Plasma processing reactor with multiple capacitive and inductive power sources |
| 11/26/2008 | CN201154362Y Electrostatic dust collection machine |
| 11/26/2008 | CN201153710Y Electrostatic precipitation table |
| 11/25/2008 | US7455067 Portable food tray pre-wash and water recycling apparatus |
| 11/20/2008 | WO2007149237A3 Handheld gaming machine sanitizing system |
| 11/20/2008 | US20080283088 Plasma processing apparatus, plasma processing method and cleaning time prediction program |
| 11/20/2008 | US20080283086 Substrate processing apparatus and cleaning method therefor |
| 11/19/2008 | EP1991373A2 Enhancement of remote plasma source clean for dielectric films |
| 11/18/2008 | US7452411 Electrostatic ionic air emission device |
| 11/18/2008 | US7451941 Dense fluid spray cleaning process and apparatus |
| 11/18/2008 | US7451770 Cleaning device for an electrical hair removing apparatus |
| 11/11/2008 | US7448396 Apparatus and method of removing particles |
| 11/11/2008 | US7448395 Process method to facilitate silicidation |
| 11/06/2008 | US20080271748 Method of and Arrangement for Removing Contaminants from a Substrate Surface Using an Atmospheric Pressure Glow Plasma |
| 11/05/2008 | CN201143506Y Electrostatic dust collection equipment |
| 10/30/2008 | WO2007081605A3 Method for converting electrical components |
| 10/29/2008 | EP1985432A2 A dust collector |
| 10/29/2008 | EP1455947B1 Electrostatic device for ionic air emission |
| 10/23/2008 | US20080257379 Method and equipment for the treatment of a surface of a work piece |
| 10/22/2008 | EP1982776A1 Method for protecting base |
| 10/15/2008 | CN201132164Y Novel high-frequency and high voltage electrostatic dust-removing electrical source |
| 10/09/2008 | WO2007111837A3 Plasma dielectric etch process including in-situ backside polymer removal for low-dielectric constant material |
| 10/09/2008 | US20080248215 cleaning a surface of the plastic substrate with a non-reactive low energy plasma; and activating the surface of the plastic substrate with a reactive high energy ion radiation |
| 10/09/2008 | US20080245389 Method for cleaning elements in vacuum chamber and apparatus for processing substrates |
| 10/09/2008 | US20080245388 Method for cleaning elements in vacuum chamber and apparatus for processing substrates |
| 10/09/2008 | US20080245387 Method for cleaning elements in vacuum chamber and apparatus for processing substrates |
| 10/02/2008 | US20080241517 Aluminum-plated components of semiconductor material processing apparatuses and methods of manufacturing the components |
| 09/11/2008 | US20080216865 Plasma Processing Method |
| 09/11/2008 | US20080216864 Method and system for distributing gas for a bevel edge etcher |
| 09/10/2008 | EP1967285A1 Method for protecting base |
| 09/10/2008 | EP1667850A4 Methods for cleaning a set of structures comprising yttrium oxide in a plasma processing system |
| 09/09/2008 | US7423275 Erosion mitigation for collector optics using electric and magnetic fields |
| 09/09/2008 | US7422024 Ultrasonic shower cleaning apparatus of double-side cleaning type |
| 09/09/2008 | US7422020 Aluminum tri -sec-butoxide (ATSB) gas is exposed to porous dielectric layer, forming silanol groups in the porous dielectric layer |
| 09/04/2008 | US20080210273 Batch photoresist dry strip and ash system and process |
| 08/19/2008 | US7412982 Cleaning probe and megasonic cleaning apparatus having the same |
| 08/14/2008 | US20080190449 Method and Device for Descaling Metal Strip |
| 08/14/2008 | US20080190448 Bevel clean device |
| 08/14/2008 | US20080190446 Control of dry clean process in wafer processing |
| 08/13/2008 | CN201098690Y Conductive wheel device for removing metal film |
| 08/13/2008 | CN201098689Y Cleaning device for single strip aluminum foil |
| 08/07/2008 | US20080185017 Film removal method and apparatus |
| 08/05/2008 | US7406973 Stethoscope cleaning assembly |
| 07/23/2008 | CN101226157A Apparatus and method for detecting filters lustration degree |
| 07/16/2008 | CN201086079Y Bottle cap cleaning machine |
| 07/16/2008 | CN101223637A Apparatus for removing foreign material from substrate and method for removing foreign material from substrate |
| 07/15/2008 | US7398786 Cleaning device for the shaving head of a dry shaving apparatus |
| 07/02/2008 | EP1843863A4 Method and apparatus for cleaning and surface conditioning objects with plasma |
| 07/02/2008 | EP1567066A4 Apparatus and method for steam reprocessing flexible endoscopes |
| 06/25/2008 | CN101206934A Direct current high voltage cable special for dust filter |
| 06/19/2008 | WO2008005001A9 Apparatus and method for cleaning barrels |
| 06/19/2008 | US20080142057 Cleaning device using atmospheric gas discharge plasma |
| 06/17/2008 | US7387131 Processing apparatus and substrate processing method |
| 06/11/2008 | CN100393431C Dust collector |
| 06/10/2008 | US7383845 Portable vehicle underbody washing system |
| 06/05/2008 | WO2008067078A1 Filter regeneration using plasma |
| 05/22/2008 | US20080115801 Semiconductor device fabrication equipment for performing peox process and method including cleaning the equipment with remotely produced plasma |
| 05/14/2008 | EP1919662A1 Apparatus and method for cleaning barrels |
| 05/06/2008 | US7367343 Method of cleaning a surface of a cobalt-containing material, method of forming an opening to a cobalt-containing material, semiconductor processing method of forming an integrated circuit comprising a copper-containing conductive line, and a cobalt-containing film cleaning solution |
| 05/01/2008 | US20080099039 Method and apparatus for manufacturing cleaned substrates or clean substrates which are further processed |
| 04/30/2008 | CN201052510Y Automatic electrostatic dust removing equipment |
| 04/24/2008 | US20080092918 Method for removing foreign matter from substrate surface |
| 04/17/2008 | US20080087297 Portble Dusting Tool |
| 04/15/2008 | US7357138 Method for etching high dielectric constant materials and for cleaning deposition chambers for high dielectric constant materials |
| 04/09/2008 | EP1908531A1 Apparatus for removing foreign material from substrate and method for removing foreign material from substrate |
| 04/09/2008 | EP1890828A4 Portable dusting tool |
| 04/03/2008 | US20080081115 Depositing an organic compound material over the substrate from a deposition source, heating to decrease a gas in the film |
| 04/02/2008 | CN101155648A Low temperature etchant for treatment of silicon-containing surfaces |
| 03/27/2008 | US20080072925 Wafer cleaning apparatus |
| 03/27/2008 | US20080072924 Fouling removing method |
| 03/26/2008 | EP1421609B1 Process and apparatus for treating a workpiece such as a semiconductor wafer |
| 03/26/2008 | CN101147910A Ion ultrasonic cleaning method and device thereof |
| 03/12/2008 | CN201033324Y Electrostatic dust collecting box |
| 03/11/2008 | US7341065 Single wafer cleaning method to reduce particle defects on a wafer surface |
| 03/05/2008 | EP1893357A1 Dry cleaning apparatus and method capable of cleaning the cleaning agent |
| 02/28/2008 | US20080047582 Method and apparatus for wafer cleaning |
| 02/28/2008 | US20080047581 Vapor phase growth and apparatus and its cleaning method |
| 02/28/2008 | US20080047579 Detecting the endpoint of a cleaning process |
| 02/27/2008 | EP1890828A1 Portable dusting tool |
| 02/21/2008 | US20080041415 Clean Process for an Electron Beam Source |
| 02/21/2008 | US20080041414 Pump Cleaning |
| 02/14/2008 | US20080035170 Cleaning apparatus for cleaning a chamber used in manufacturing a semiconductor device and method of cleaning a chamber by using the same |
| 02/14/2008 | US20080035169 Cleaning means for large area pecvd devices using a remote plasma source |
| 02/07/2008 | WO2007097822A3 Enhancement of remote plasma source clean for dielectric films |
| 02/07/2008 | US20080029124 Electric switch cleaning apparatus and method |
| 01/31/2008 | US20080023029 Silicon carbide components of semiconductor substrate processing apparatuses treated to remove free-carbon |
| 01/29/2008 | US7322368 Plasma cleaning gas and plasma cleaning method |
| 01/29/2008 | US7322217 Drum type washing machine |
| 01/17/2008 | US20080011321 Cleaning solution for cleaning substrate for semiconductor devices and cleaning method using the same |
| 01/16/2008 | CN101104173A Dust remover |
| 01/15/2008 | US7318442 Automatic car wash system |
| 01/10/2008 | WO2008005773A2 Cluster tool for advanced front-end processing |
| 01/10/2008 | WO2008005001A1 Apparatus and method for cleaning barrels |
| 01/10/2008 | US20080006296 Cleaning Device of Board and Cleaning Method, Flat Display Panel, Mounting Equipment of Electronic Parts and Mounting Method |
| 01/03/2008 | US20080003436 Method of treating substrates for bonding |
| 01/03/2008 | US20080000497 Removal of organic-containing layers from large surface areas |
| 12/27/2007 | US20070295356 In-situ method to reduce particle contamination in a vacuum plasma processing tool |
| 12/26/2007 | CN101094733A Wet cleaning of electrostatic chucks |
| 12/18/2007 | US7308900 Flat surface washing apparatus |