| Patents for B08B 6 - Cleaning by electrostatic means (1,400) |
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| 11/04/2004 | US20040218157 Method for cleaning a surface of a component of a lithographic projection apparatus, lithographic projection apparatus, device manufacturing method and cleaning system |
| 10/07/2004 | US20040198066 Using supercritical fluids and/or dense fluids in semiconductor applications |
| 10/06/2004 | EP1463434A1 Method of charging and distributing particles |
| 10/06/2004 | CN1534381A Cleaning method of photoetching projection device component element surface photo etching projection device, device manufacturing method and cleaning system |
| 09/15/2004 | EP1455947A1 Electrostatic device for ionic air emission |
| 09/15/2004 | CN1529636A Electrostatic ionic air emittor |
| 08/26/2004 | WO2004050936A3 Method for cleaning a process chamber |
| 08/20/2004 | CA2458166A1 Magnet sweep |
| 07/22/2004 | WO2004045739A3 Substrate processing apparatus for processing substrates using dense phase gas and sonic waves |
| 07/13/2004 | US6761773 Method for controlling and removing dust and other particles from a material |
| 07/01/2004 | DE10261875A1 Cleaning system for removing contamination from surface of component in lithographic projection apparatus that is used in manufacture of integrated circuits, comprises cleaning particle provider with electric field generator |
| 06/24/2004 | US20040118428 Portable; using compressed gas; ionizers; high voltage; cleaning surfaces |
| 06/23/2004 | EP1431828A1 Method for cleaning a surface of a component of a lithographic projection apparatus, lithographic projection apparatus, device manufacturing method and cleaning system |
| 06/23/2004 | CN1154430C Method and apparatus for controlling and removing dust and other particles from material or distributing or transferring charged particle to one surface |
| 06/17/2004 | WO2004050936A2 Method for cleaning a process chamber |
| 06/17/2004 | DE10255988A1 Verfahren zum Reinigen einer Prozesskammer A method of cleaning a process chamber |
| 06/03/2004 | WO2004045739A2 Substrate processing apparatus for processing substrates using dense phase gas and sonic waves |
| 05/27/2004 | US20040099281 Method for cleaning plasma enhanced chemical vapor deposition chamber using very high frequency energy |
| 05/20/2004 | US20040094183 Dense phase gases such as supercritical fluids can be used in combination with sonic energy (e.g., megasonic acoustic waves) to process substrates such as semiconductor wafers |
| 03/18/2004 | US20040053518 Device for electric contact for textile material and use thereof for joule heating |
| 02/19/2004 | DE10236071A1 Verfahren und Vorrichtung zur Reinigung von Oberflächen bewegter Materialbahnen Method and apparatus for cleaning surfaces of moving material webs |
| 02/18/2004 | EP1100630B1 Process and apparatus for treating a workpiece such as a semiconductor wafer |
| 02/12/2004 | US20040029392 Methods using a peroxide-generating compound to remove group VIII metal-containing residue |
| 02/12/2004 | US20040025902 Electroconductive means in contact with segments of cleaning target; grounding means |
| 02/12/2004 | DE10140906B4 Verfahren und Vorrichtung zum Ausblasen von Vorformlingen aus Kunststoff Method and apparatus for blowing plastic preforms |
| 02/11/2004 | EP1388375A2 Method and device for cleaning the surfaces of moving material webs |
| 02/04/2004 | CN1472774A Micro-powder remover |
| 01/29/2004 | US20040016443 Effectively eliminates particles in the vacuum container unit without degrading the rate of operation of the processing device |
| 01/21/2004 | EP1382714A2 Apparatus for removing particles |
| 01/08/2004 | US20040003475 Sheet and web cleaner on suction hood |
| 12/09/2003 | US6659849 Platen with debris control for chemical mechanical planarization |
| 12/04/2003 | WO2003090792A3 Method and apparatus for treating a substrate with an ozone-solvent solution iii |
| 11/13/2003 | US20030209315 Process for adhering a component on a counter surface and apparatus therefor |
| 11/12/2003 | CN1127428C Packaging machine, in particular for cigarettes |
| 11/06/2003 | WO2003090792A2 Method and apparatus for treating a substrate with an ozone-solvent solution iii |
| 11/06/2003 | US20030207655 Dense fluid spray cleaning process and apparatus |
| 11/05/2003 | CN1126609C Process and apparatus for treating workpiece of semiconductor wafer |
| 10/21/2003 | US6636411 Gas-purged ionizers and methods of achieving static neutralization thereof |
| 10/15/2003 | EP1352449A1 Device for electric contact for textile material and use thereof for joule heating |
| 10/08/2003 | EP1349479A1 Storage device for a feather duster |
| 09/03/2003 | EP0942680B1 Method for controlling and removing dust and other particles from a material |
| 08/13/2003 | CN1117639C Device for cleaning electrode unit of electroslatically oily dust collecting apparatus |
| 07/02/2003 | CN1426817A Container cleaner |
| 06/26/2003 | US20030115710 Apparatus for cleaning bottles |
| 06/18/2003 | CN2556848Y High-frequency inverter for electric removing dust |
| 06/05/2003 | WO2003045217A1 Method of charging and distributing particles |
| 05/20/2003 | US6565669 Vibrating wafer particle cleaner |
| 04/16/2003 | CN1410165A Electrokinetic air delivering-treater with non-equidistance collector |
| 04/10/2003 | WO2003029830A1 Cleaning method |
| 04/08/2003 | US6543078 Apparatus and method for cleaning object having generally irregular surface features |
| 03/04/2003 | US6526997 Dry cleaning method for the manufacture of integrated circuits |
| 02/27/2003 | DE20023082U1 Dust extraction device has corona charging electrode and counter electrode on either side of material, discharge electrode and suction device close to discharge electrode, preferably after it |
| 12/31/2002 | US6500268 Dry cleaning method |
| 12/10/2002 | US6490746 Apparatus and method for cleaning objects having generally irregular, undulating surface features |
| 12/03/2002 | US6489394 Charged ion cleaning devices and cleaning system |
| 11/20/2002 | EP1142455B1 Gas-purged ionizers and methods of achieving static neutralization thereof |
| 10/30/2002 | CN1093435C Wet electric dust-removing process and its special-purpose equipment |
| 10/24/2002 | US20020152636 Apparatus and method for cleaning charged particles from objects |
| 09/19/2002 | WO2000040778A3 Solvent removal |
| 09/18/2002 | CN1369743A Film cleaner |
| 07/25/2002 | WO2002058194A1 Device for electric contact for textile material and use thereof for joule heating |
| 07/18/2002 | WO2002054930A1 Storage device for a feather duster |
| 07/17/2002 | CN1358580A Washing method and equipment, object being washed and material feeding bucket |
| 07/02/2002 | US6412498 For semiconductors; process control |
| 06/27/2002 | WO2002049767A1 Electrostatic device for ionic air emission |
| 06/27/2002 | US20020082179 Pneumatically feeding a carrier gas to the blast nozzle which blasts a target with dry ice pellets charging the gas (air) to destaticize and prevent fusion of the dry ice; cleaning appliances, televisions, copiers, printers, and computers |
| 06/19/2002 | EP0996510B1 Can cleaning and delivery apparatus |
| 06/12/2002 | CN2495061Y High-voltage electric power for electrostatic fumes purifier |
| 05/21/2002 | US6391118 Method for removing particles from surface of article |
| 04/23/2002 | US6374832 Performing a dry cleaning process in the etching chamber with oxygen/hydrogen bromide plasma to restore an etching environment in the etching chamber, wherein the etching chamber is free of wafers |
| 04/17/2002 | CN1082849C Method and apparatus for removing dust particles from relatively moving material web |
| 04/16/2002 | US6371135 Using a charged particle beam directed at the particle to be removed. |
| 03/28/2002 | US20020036060 Method for adhering a component to a counter- surface and an apparatus therefor |
| 03/19/2002 | US6357201 Packaging machine, in particular for cigarettes |
| 03/13/2002 | CN2482270Y High-voltage ac power supply for electrostatic dust-collector |
| 03/06/2002 | CN2481055Y High-voltage pulse type power source for dust cleaner |
| 02/21/2002 | DE10038516A1 Verfahren zum Aufkleben eines Bauteils auf eine Gegenfläche und Vorrichtung zu seiner Durchführung A method for bonding a component to a mating surface and device for its implementation |
| 02/13/2002 | EP1179576A1 Process for the adhesion of a component to a surface and apparatus for such a process |
| 12/04/2001 | US6325862 Method for removing stains from structural surfaces |
| 11/29/2001 | US20010046769 Waferless seasoning process |
| 11/21/2001 | CN2460230Y Power device of multifunctional self-regualtion high-voltage electrostatic dust remover |
| 11/13/2001 | US6315501 Air stream particulate collecting transfer apparatus |
| 10/25/2001 | DE10018010A1 Dust extraction device has corona charging electrode and counter electrode on either side of material, discharge electrode and suction device close to discharge electrode, preferably after it |
| 10/18/2001 | US20010029964 Method and apparatus for removing particles from surface of article |
| 10/10/2001 | EP1142455A1 Gas-purged ionizers and methods of achieving static neutralization thereof |
| 10/03/2001 | CN1315778A Public power unit and device for mounting same |
| 08/02/2001 | DE10003227A1 Verfahren zum Reinigung und Lackieren von Separatteilen von Kraftfahrzeugen und Vorrichtung zur Durchführung des Verfahrens A method of cleaning and painting of separate parts of motor vehicles and apparatus for performing the method |
| 07/17/2001 | US6260224 Material collector having electrical power supplies and electrical conductors |
| 07/10/2001 | US6256825 Removal of particulate contamination in loadlocks |
| 07/04/2001 | EP1100630A4 Process and apparatus for treating a workpiece such as a semiconductor wafer |
| 06/21/2001 | US20010003852 Cathode ray tube screen cleaner |
| 06/05/2001 | US6240931 Method for removing particles from a surface of an article |
| 05/30/2001 | CN2431980Y Cleaning device for electrostatic oil-dust collector |
| 05/30/2001 | CN1297385A Process and apparatus for treating workpiece such as semiconductor wafer |
| 05/30/2001 | CN1297269A Ion producer and static charge removing apparatus |
| 05/23/2001 | EP1100630A1 Process and apparatus for treating a workpiece such as a semiconductor wafer |
| 05/10/2001 | WO2000038484A9 Gas-purged ionizers and methods of achieving static neutralization thereof |
| 05/09/2001 | CN1294034A Method and equipment for cleaning electrode unit for apparatus to electrostatically collect oily dust |
| 04/10/2001 | US6214160 Method and apparatus for removing particulates from semiconductor substrates in plasma processing chambers |
| 04/05/2001 | DE19946195C1 Removal of alumina particle layer sintered onto sintered multilayer ceramic substrate, employs two stages of dry grit blasting followed by electrostatic repulsion of submicron residue |