| Patents for B08B 6 - Cleaning by electrostatic means (1,400) |
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| 01/20/2010 | EP1463434B1 A powder charging and delivery device |
| 01/19/2010 | US7648581 Substrate cleaning method, substrate cleaning apparatus, substrate processing system, substrate cleaning program and storage medium |
| 01/19/2010 | US7648580 Substrate processing method and substrate processing device |
| 01/14/2010 | WO2009138231A3 Method and device for removing contaminatting particles from containers |
| 01/14/2010 | US20100006121 Plasma cleaning method |
| 01/13/2010 | CN100580135C Method for cleaning reaction chamber |
| 12/29/2009 | US7637269 Low damage method for ashing a substrate using CO2/CO-based process |
| 12/24/2009 | US20090314951 Ion source cleaning method and apparatus |
| 12/15/2009 | US7632357 Silicon wafer cleaning method |
| 12/03/2009 | US20090293907 Method of substrate polymer removal |
| 12/03/2009 | US20090293808 Light-Emitting Device, Film-Forming Method and Manufacturing Apparatus Thereof, and Cleaning Method of the Manufacturing Apparatus |
| 12/01/2009 | US7624742 Cleaning the surfaces of anodized aluminum or sprayed aluminum-containing ceramic of chemical reactors using an aqueous solution of hydrofluoric acid and an anhydrous acid, acetic or citric with minmal damage to the surface; aluminum fluoride a by-product of fluoride etching photoresists for circuits |
| 11/26/2009 | US20090291562 Helium descumming |
| 11/18/2009 | EP2119512A1 Method and device for removing contaminating particles from containers on automatic production lines |
| 11/17/2009 | US7617832 Automatic car wash system |
| 11/12/2009 | US20090280650 Flowable dielectric equipment and processes |
| 11/05/2009 | US20090272402 Method and apparatus for detecting plasma unconfinement |
| 10/29/2009 | US20090269506 Method and apparatus for cleaning of a CVD reactor |
| 10/21/2009 | EP1352449B1 Device for electric contact for textile material and use thereof for joule heating |
| 10/15/2009 | US20090258159 Novel treatment for mask surface chemical reduction |
| 10/14/2009 | CN101557885A Plasma processing reactor with multiple capacitive and inductive power sources |
| 10/08/2009 | US20090250077 Apparatus for removing foreign material from substrate and method for removing foreign material from substrate |
| 10/07/2009 | EP2107420A1 Compositions for removing etching residue and use thereof |
| 10/01/2009 | US20090246399 Method for activating reactive oxygen species for cleaning carbon-based film deposition |
| 09/24/2009 | WO2009117234A1 Water blasting head with through feeding hydraulic motor |
| 09/24/2009 | WO2009116568A1 Sheet laminate cleaning apparatus and sheet laminate cleaning method |
| 09/17/2009 | US20090229640 Cooking apparatus with plasma cleaning |
| 09/10/2009 | US20090223538 Method for Cleaning a Workpiece With the Aid of Halogen Ions |
| 09/01/2009 | US7582168 Method and apparatus for cleaning semiconductor wafer |
| 09/01/2009 | US7581550 Method of cleaning reaction chamber using substrate having catalyst layer thereon |
| 08/20/2009 | US20090205678 Deposit removing method and substrate processing method |
| 08/19/2009 | CN101511497A An apparatus and a method for cleaning a dielectric film |
| 08/11/2009 | US7571735 Nozzle for online and offline washing of gas turbine compressors |
| 08/11/2009 | US7571732 Ignition control of remote plasma unit |
| 08/06/2009 | WO2009096380A1 Substrate cleaning apparatus, substrate cleaning method and computer storage medium |
| 08/04/2009 | US7569112 Scanning probe apparatus with in-situ measurement probe tip cleaning capability |
| 08/04/2009 | US7569111 Method of cleaning deposition chamber |
| 07/30/2009 | US20090188524 Automatic insitu post process cleaning for processing systems having turbo pumps |
| 07/08/2009 | CN100509189C Self-cleaning electrostatic dust collection roller |
| 07/07/2009 | US7556048 Cleaning semiconductor; preexposure to nitrogen gas at low temperature |
| 07/01/2009 | EP1991373A4 Enhancement of remote plasma source clean for dielectric films |
| 06/30/2009 | US7552503 Apparatus and method for cleaning a surface with high pressure air |
| 06/25/2009 | US20090161719 Linear electron source, evaporator using linear electron source, and applications of electron sources |
| 06/25/2009 | US20090159104 Method and apparatus for chamber cleaning by in-situ plasma excitation |
| 06/25/2009 | US20090158537 Static electricity and dust removing apparatus |
| 06/04/2009 | US20090142513 Film formation method, cleaning method and film formation apparatus |
| 06/04/2009 | US20090139540 Repairing surface defects and cleaning residues from plasma chamber components |
| 05/28/2009 | US20090133714 Method for surface treating substrate and plasma treatment apparatus |
| 05/20/2009 | CN201239113Y Device for cleaning dust on surface of wooden floor |
| 05/20/2009 | CN101437629A Novel methods for cleaning ion implanter components |
| 05/19/2009 | US7533629 Arrangement, method and electrode for generating a plasma |
| 05/14/2009 | US20090120456 Cleaning method and a vacuum processing apparatus |
| 05/13/2009 | CN101428285A Method for cleaning battle cap |
| 05/07/2009 | WO2007040716A3 Method and system for etching silicon oxide and silicon nitride with high selectivity relative to silicon |
| 05/07/2009 | WO2006138438A3 System and method of processing substrates using sonic energy having cavitation control |
| 05/07/2009 | US20090114246 Methods For Treating Surfaces |
| 05/07/2009 | US20090114245 In-situ chamber cleaning method |
| 05/06/2009 | CN100485859C Unit cleaning method and substrate treater for depressurizing chamber |
| 05/05/2009 | US7527695 Apparatus and method for cleaning substrate |
| 04/29/2009 | CN101421056A System, method and apparatus for self-cleaning dry etch |
| 04/23/2009 | WO2006105125A3 Systems and methods for single integrated substrate cleaning and rinsing |
| 04/23/2009 | US20090104376 Gas diffusion shower head design for large area plasma enhanced chemical vapor deposition |
| 04/23/2009 | US20090100616 Decontamination Of Flakes |
| 04/23/2009 | DE10003227B4 Verfahren zum Reinigung und Lackieren von Separatteilen von Kraftfahrzeugen und Vorrichtung zur Durchführung des Verfahrens A method of cleaning and painting of separate parts of motor vehicles and apparatus for performing the method |
| 04/22/2009 | CN101415291A Ion cleaning gun for eliminating electricity and dust |
| 04/21/2009 | US7520937 Thin film forming apparatus and method of cleaning the same |
| 04/21/2009 | CA2589982C Portable dusting tool |
| 04/15/2009 | EP1890828B1 Portable dusting tool |
| 04/14/2009 | US7516749 Methods of and apparatus for washing high-density microplates |
| 04/09/2009 | US20090090382 Method of self-cleaning of carbon-based film |
| 04/07/2009 | US7513955 Process for the plasma cleaning of a component |
| 04/07/2009 | US7513265 High pressure processing method and apparatus |
| 03/31/2009 | US7509962 Method and control system for treating a hafnium-based dielectric processing system |
| 03/19/2009 | WO2009036218A1 Apparatus and method for cleaning wafer edge using energetic particle beams |
| 03/11/2009 | CN201207281Y Device for cleaning the spindle support pad of a device for reading information from compact discs and/or for recording information thereon |
| 03/11/2009 | CN101381009A Ion gas cleaner for packaging container |
| 03/10/2009 | US7500800 Method of charging and distributing particles |
| 03/05/2009 | US20090056744 Wafer cleaning compositions and methods |
| 03/05/2009 | US20090056743 Method of cleaning plasma enhanced chemical vapor deposition chamber |
| 03/04/2009 | CN101378850A Enhancement of remote plasma source clean for dielectric films |
| 02/05/2009 | US20090035586 Cleaning method for duv optical elements to extend their lifetime |
| 02/04/2009 | CN201189519Y Bottle-cover full automatic electrostatic dust remover |
| 01/29/2009 | US20090025750 Method for removal of a deposition from an optical element, lithographic apparatus, and method for manufacturing a device |
| 01/28/2009 | EP2018909A1 Device for ionic emission |
| 01/22/2009 | US20090020137 Cleaning apparatus and method, exposure apparatus having the cleaning apparatus, and device manufacturing method |
| 01/20/2009 | US7479191 Method for endpointing CVD chamber cleans following ultra low-k film treatments |
| 01/20/2009 | US7478454 Manipulating device for photomasks that provides possibilities for cleaning and inspection of photomasks |
| 01/08/2009 | WO2007111893A3 Plasma etch and photoresist strip process with intervening chamber de-fluorination and wafer de-fluorination steps |
| 01/08/2009 | US20090011571 Wafer working method |
| 01/01/2009 | US20090000640 Surface treatment method, etching method, and method for manufacturing electronic device |
| 12/25/2008 | US20080318435 Composition for etching a metal hard mask material in semiconductor processing |
| 12/23/2008 | US7467636 Dishwasher pump and filtration system |
| 12/11/2008 | WO2007120276A3 An apparatus and a method for cleaning a dielectric film |
| 12/11/2008 | US20080303744 Plasma processing system, antenna, and use of plasma processing system |
| 12/10/2008 | EP1999784A2 Plasma etch and photoresist strip process with intervening chamber de-fluorination and wafer de-fluorination steps |
| 12/10/2008 | CN101320677A Method for cleaning elements in vacuum chamber and apparatus for processing substrates |
| 12/09/2008 | US7462569 Method of manufacturing semiconductor device |
| 12/04/2008 | WO2008147524A1 Methods and apparatus for efficient operation of an abatement system |
| 12/03/2008 | EP1997127A2 Plasma dielectric etch process including in-situ backside polymer removal for low-dielectric constant material |
| 11/27/2008 | WO2007143476A3 Apparatus and method for single substrate processing |