H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
03/1986
03/26/1986	EP0175378A2 Dynamic random access memory (DRAM)
03/26/1986	EP0175223A1 Method of making amorphous semiconductor alloys
03/26/1986	EP0175085A2 Wafer scale integrated circuit device
03/26/1986	EP0174986A1 Process for forming and locating buried layers.
03/26/1986	EP0174985A1 Conductive, protective layer for multilayer metallization
03/26/1986	EP0174954A1 Method for making integrated circuit devices using a layer of indium arsenide as an antireflective coating
03/26/1986	EP0174950A1 Wafer scale package system and header and method of manufacture thereof
03/26/1986	EP0174935A1 Dissimilar superimposed grating precision alignment and gap measurement systems.
03/25/1986	US4578697 Semiconductor device encapsulating a multi-chip array
03/25/1986	US4578696 Thin film semiconductor device
03/25/1986	US4578695 Monolithic autobiased resistor structure and application thereof to interface circuits
03/25/1986	US4578692 Integrated circuit with stress isolated Hall element
03/25/1986	US4578641 System for measuring carrier lifetime of semiconductor wafers
03/25/1986	US4578590 Continuous alignment target pattern and signal processing
03/25/1986	US4578587 Error-corrected corpuscular beam lithography
03/25/1986	US4578559 Plasma etching method
03/25/1986	US4578344 Improving resolution by applying arylinitrone in polymer binder expose to pattern light, and development into mask of uniform thickness
03/25/1986	US4578343 Forming a recess and gate electrode using resist layer as a mask
03/25/1986	US4578283 Polymeric boron nitrogen dopant
03/25/1986	US4578279 Inspection of multilayer ceramic circuit modules by electrical inspection of unfired green sheets
03/25/1986	US4578157 Laser induced deposition of GaAs
03/25/1986	US4578145 Method of making monocrystalline ternary semiconductor compounds
03/25/1986	US4578143 Method for forming a single crystal silicon layer
03/25/1986	US4578142 Method for growing monocrystalline silicon through mask layer
03/25/1986	US4578128 Process for forming retrograde dopant distributions utilizing simultaneous outdiffusion of dopants
03/25/1986	US4578127 Method of making an improved group III-V semiconductor device utilizing a getter-smoothing layer
03/25/1986	US4578126 Liquid phase epitaxial growth process
03/25/1986	US4578032 Workpiece heater
03/25/1986	US4577959 Exposure apparatus
03/25/1986	US4577945 Pattern transfer device and method
03/25/1986	US4577650 Vessel and system for treating wafers with fluids
03/25/1986	US4577398 Method for mounting a semiconductor chip
03/25/1986	US4577397 Method for manufacturing a semiconductor device having vertical and lateral transistors
03/25/1986	US4577396 Method of forming electrical contact to a semiconductor substrate via a metallic silicide or silicon alloy layer formed in the substrate
03/25/1986	US4577395 Method of manufacturing semiconductor memory device having trench memory capacitor
03/25/1986	US4577394 Reduction of field oxide encroachment in MOS fabrication
03/25/1986	US4577393 Process for the production of a solar cell
03/25/1986	US4577392 Fabrication technique for integrated circuits
03/25/1986	US4577391 Method of manufacturing CMOS devices
03/25/1986	US4577390 Fabrication of polysilicon to polysilicon capacitors with a composite dielectric layer
03/25/1986	CA1202430A1 Semiconductor device
03/25/1986	CA1202273A1 Gold plating process
03/19/1986	EP0174877A2 X-ray application system
03/19/1986	EP0174773A2 Semiconductor device having interconnection layers
03/19/1986	EP0174743A2 Process for transition metal nitrides thin film deposition
03/19/1986	EP0174712A2 Semiconductor devices having electrically conductive paths
03/19/1986	EP0174694A1 Circuit for generating a substrate bias
03/19/1986	EP0174673A1 Method of manufacturing a semiconductor device, in which a semiconductor substrate is subjected to a treatment in a reaction gas
03/19/1986	EP0174553A2 Method for production of silicon thin film piezoresistive devices
03/19/1986	EP0174473A1 Monolithic integrated power output stage
03/19/1986	EP0174469A2 Charge-up circuit
03/19/1986	EP0174391A1 Baffle plate moving device
03/19/1986	EP0174363A1 Scan controller for ion implanter device
03/19/1986	EP0174330A1 Installation for vacuum processing of substrates
03/19/1986	EP0080492B1 Gold plating process
03/19/1986	EP0042380B1 Method for achieving ideal impurity base profile in a transistor
03/18/1986	US4577233 Solid image-pickup device
03/18/1986	US4577212 Structure for inhibiting forward bias beta degradation
03/18/1986	US4577211 Integrated circuit and method for biasing an epitaxial layer
03/18/1986	US4577208 Bidirectional power FET with integral avalanche protection
03/18/1986	US4577123 Integrated logic circuit having collector node with pull-up and clamp
03/18/1986	US4577111 Apparatus for electron beam lithography
03/18/1986	US4577095 Automatic focusing apparatus for a semiconductor pattern inspection system
03/18/1986	US4576902 O-nitrobenxyl acrylate containing polymer
03/18/1986	US4576901 Process for producing negative copies by means of a material based on 1,2-quinone diazides with 4-ester or amide substitution
03/18/1986	US4576900 Integrated circuit multilevel interconnect system and method
03/18/1986	US4576884 Semiconductor fabrication
03/18/1986	US4576851 Silicon single crystal with silicon dioxide and ailicon nitride layers
03/18/1986	US4576834 Method for forming trench isolation structures
03/18/1986	US4576829 Low temperature growth of silicon dioxide on silicon
03/18/1986	US4576691 Etching optical surfaces on GaAs
03/18/1986	US4576678 Pattern forming method
03/18/1986	US4576670 Method for making contact with the electrode on the adhesive-coated side of an electrical component and the article made by such method
03/18/1986	US4576659 Process for inhibiting metal migration during heat cycling of multilayer thin metal film structures
03/18/1986	US4576652 Incoherent light annealing of gallium arsenide substrate
03/18/1986	US4576326 Method of bonding semiconductor devices to heatsinks
03/18/1986	US4576322 Machine for ultrasonically bonding wires to cavity-down integrated circuit packages
03/18/1986	US4576109 Apparatus for applying a coating on a substrate
03/18/1986	US4575942 Ultra-precision two-dimensional moving apparatus
03/18/1986	US4575925 Method for fabricating a SOI type semiconductor device
03/18/1986	US4575924 Process for fabricating quantum-well devices utilizing etch and refill techniques
03/18/1986	US4575923 Method of manufacturing a high resistance layer having a low temperature coefficient of resistance and semiconductor device having such high resistance layer
03/18/1986	US4575922 Method of fabricating integrated circuits incorporating steps to detect presence of gettering sites
03/18/1986	US4575921 Silicon nitride formation and use in self-aligned semiconductor device manufacturing method
03/18/1986	US4575920 Method of manufacturing an insulated-gate field-effect transistor
03/18/1986	US4575919 Method of making heteroepitaxial ridge overgrown laser
03/18/1986	EP0087462A4 Process for manufacturing an integrated circuit structure.
03/18/1986	CA1202123A1 Method and apparatus for captivating a substrate within a holder
03/18/1986	CA1202121A1 Photolithographic process for fabricating thin film transistors
03/13/1986	WO1986001676A1 Method of mounting electronic parts and an apparatus therefor
03/13/1986	WO1986001641A1 Mos transistors having schottky layer electrode regions and method of their production
03/13/1986	WO1986001640A1 Diffusion barrier layer for integrated-circuit devices
03/13/1986	WO1986001639A1 Electrical contact in semiconductor devices
03/13/1986	WO1986001638A1 Semiconductor integrated circuits gettered with phosphorus
03/13/1986	WO1986001616A1 Fabrication of devices involving lithographic procedures
03/13/1986	WO1986001591A1 Interferometric methods for device fabrication
03/13/1986	WO1986001367A2 The fabrication of grooved semiconductor devices
03/12/1986	EP0174252A1 Delivery apparatus
03/12/1986	EP0174249A1 A dry etching method for a chromium or chromium oxide film
03/12/1986	EP0174236A1 Semiconductor integrated circuit device having a test circuit

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