Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
03/2015
03/05/2015WO2015027609A1 Array substrate and manufacturing method therefor, and display device
03/05/2015WO2015027596A1 Via hole etching method
03/05/2015WO2015027588A1 Thin-film transistor and preparation method therefor, array substrate and preparation method therefor, and display device
03/05/2015WO2015027585A1 Array substrate, manufacturing method therefor, and display device
03/05/2015WO2015027577A1 Method for detecting ion-implantation blocking capability of photoresist layer
03/05/2015WO2015027569A1 Array substrate and manufacturing method therefor, and display device
03/05/2015WO2015027561A1 Semiconductor device and method of manufacturing same
03/05/2015US20150066183 Method of making semiconductor devices and a control system for performing the same
03/05/2015US20150066177 Method of dispatching semiconductor batch production
03/05/2015US20150064934 Multi charged particle beam writing apparatus and multi charged particle beam writing method
03/05/2015US20150064933 Crystallization of amorphous films and grain growth using combination of laser and rapid thermal annealing
03/05/2015US20150064932 Method For Restoring Porous Surface Of Dielectric Layer By UV Light-Assisted ALD
03/05/2015US20150064931 Film formation method and film formation apparatus
03/05/2015US20150064930 Process of manufacturing the gate oxide layer
03/05/2015US20150064929 Method of gap filling
03/05/2015US20150064928 Photoresist removal
03/05/2015US20150064927 Surface planarization method of thin film and preparing method of array substrate
03/05/2015US20150064926 Plasma processing method
03/05/2015US20150064925 Deposit removing method and gas processing apparatus
03/05/2015US20150064924 Method for etching organic film and plasma etching device
03/05/2015US20150064923 Plasma processing device and plasma processing method
03/05/2015US20150064922 Method of selectively removing a region formed of silicon oxide and plasma processing apparatus
03/05/2015US20150064921 Low temperature plasma anneal process for sublimative etch processes
03/05/2015US20150064920 System, Method and Apparatus for Generating Pressure Pulses in Small Volume Confined Process Reactor
03/05/2015US20150064919 Aspect ratio dependent etch (arde) lag reduction process by selective oxidation with inert gas sputtering
03/05/2015US20150064918 Method for Laterally Trimming a Hardmask
03/05/2015US20150064917 UV-Assisted Stripping of Hardened Photoresist to Create Chemical Templates for Directed Self-Assembly
03/05/2015US20150064916 Method For Integrated Circuit Patterning
03/05/2015US20150064915 Methods for providing spaced lithography features on a substrate by self-assembly of block copolymers
03/05/2015US20150064914 Method of etching a boron doped carbon hardmask
03/05/2015US20150064913 Method of manufacturing a semiconductor device
03/05/2015US20150064912 Methods of forming integrated circuits and multiple critical dimension self-aligned double patterning processes
03/05/2015US20150064911 Substrate processing method, substrate processing apparatus and storage medium
03/05/2015US20150064910 Substrate processing method, substrate processing system and memory medium
03/05/2015US20150064909 Resin mold material composition for imprinting
03/05/2015US20150064908 Substrate processing apparatus, method for processing substrate and method for manufacturing semiconductor device
03/05/2015US20150064907 Triple Patterning NAND Flash Memory with Stepped Mandrel
03/05/2015US20150064906 Triple Patterning NAND Flash Memory
03/05/2015US20150064904 Stable metal compounds as hardmasks and filling materials, their compositions and methods of use
03/05/2015US20150064903 Methods for fabricating integrated circuits using chemical mechanical planarization to recess metal
03/05/2015US20150064902 Methods of Fabricating Semiconductor Devices
03/05/2015US20150064901 Method for producing semiconductor device
03/05/2015US20150064900 Three dimensional semiconductor device including pads
03/05/2015US20150064899 Method of fabricating semiconductor devices having through-silicon via (tsv) structures
03/05/2015US20150064898 Fabrication method of silicon carbide semiconductor device
03/05/2015US20150064897 Process variability tolerant hard mask for replacement metal gate finfet devices
03/05/2015US20150064896 Method of fabricating semiconductor device
03/05/2015US20150064895 Method of forming a semiconductor device
03/05/2015US20150064892 Semiconductor devices and methods of manufacture
03/05/2015US20150064891 Stacked nanowire
03/05/2015US20150064890 Method for producing a semiconductor
03/05/2015US20150064889 Method for Dopant Implantation of FinFET Structures
03/05/2015US20150064888 Ion implantation apparatus, beam parallelizing apparatus, and ion implantation method
03/05/2015US20150064887 Ion implantation apparatus and ion implantation method
03/05/2015US20150064886 Methods for passivating a carbonic nanolayer
03/05/2015US20150064885 Methods of forming semiconductor devices including vertical channels and semiconductor devices formed using such methods
03/05/2015US20150064884 Trench sidewall protection for selective epitaxial semiconductor material formation
03/05/2015US20150064883 Method and system for manufacturing a semi-conducting backplane
03/05/2015US20150064882 Process for producing semiconductor device and semiconductor device
03/05/2015US20150064881 Method for treating a gallium nitride layer comprising dislocations
03/05/2015US20150064880 Post etch treatment technology for enhancing plasma-etched silicon surface stability in ambient
03/05/2015US20150064879 Separation of Chips on a Substrate
03/05/2015US20150064878 Wafer dicing method for improving die packaging quality
03/05/2015US20150064877 Methods for processing a semiconductor wafer
03/05/2015US20150064876 Separating device and separating method
03/05/2015US20150064875 Method for manufacturing soi wafer
03/05/2015US20150064874 Dummy fin formation by gas cluster ion beam
03/05/2015US20150064872 Top corner rounding by implant-enhanced wet etching
03/05/2015US20150064871 Forming Source/Drain Zones with a Delectric Plug Over an Isolation Region Between Active Regions
03/05/2015US20150064870 Semiconductor device having embedded strain-inducing pattern and method of forming the same
03/05/2015US20150064866 Semiconductor memory device and method of manufacturing the same
03/05/2015US20150064864 Method and apparatus for a diffusion bridged cell library
03/05/2015US20150064863 Maskless dual silicide contact formation
03/05/2015US20150064862 Semiconductor device and manufacturing method thereof
03/05/2015US20150064860 Methods of forming semiconductor films and methods of manufacturing transistors including semiconductor films
03/05/2015US20150064857 Mask for exposure, method of fabricating the same, and method of fabricating display panel using the mask
03/05/2015US20150064855 Finfet with dielectric isolation by silicon-on-nothing and method of fabrication
03/05/2015US20150064853 Integrated circuit including dram and sram/logic
03/05/2015US20150064852 Method for manufacturing semiconductor device
03/05/2015US20150064851 Pre-applied underfill
03/05/2015US20150064846 Semiconductor Device
03/05/2015US20150064844 Multichip Power Semiconductor Device
03/05/2015US20150064843 Stacked semiconductor package and method for manufacturing the same
03/05/2015US20150064840 Method for forming oxide film, and method for manufacturing semiconductor device
03/05/2015US20150064839 Method of forming tin oxide semiconductor thin film
03/05/2015US20150064815 Method of Making Molded LED Package
03/05/2015US20150064814 Mechanisms for monitoring ion beam in ion implanter system
03/05/2015US20150064813 Microprocessor image correction and method for the detection of potential defects
03/05/2015US20150064812 Method of forming a semiconductor device employing an optical planarization layer
03/05/2015US20150064811 Method of manufacturing nitride semiconductor device, and burn-in apparatus
03/05/2015US20150064810 Low Contamination Chamber for Surface Activation
03/05/2015US20150064809 Substrate support system
03/05/2015US20150064450 Anodization architecture for electro-plate adhesion
03/05/2015US20150064385 Dual-layer bonding material process for temporary bonding of microelectronic substrates to carrier substrates
03/05/2015US20150064363 Localized atmospheric laser chemical vapor deposition
03/05/2015US20150063977 Methods and structures for handling integrated circuits
03/05/2015US20150063969 Method and Apparatus for Dynamic Alignment of Semiconductor Devices
03/05/2015US20150063958 Integrated systems for interfacing with substrate container storage systems
03/05/2015US20150063957 Segmented substrate loading for multiple substrate processing
03/05/2015US20150063955 Load port device and substrate processing apparatus
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