| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
|---|
| 07/29/2010 | US20100190417 Apparatus for dressing a polishing pad, chemical mechanical polishing apparatus and method |
| 07/29/2010 | US20100190356 Reflectors, substrate processing apparatuses and methods for the same |
| 07/29/2010 | US20100190355 Substrate processing apparatus and manufacturing method of semiconductor device |
| 07/29/2010 | US20100190354 Interlayer dielectric under stress for an integrated circuit |
| 07/29/2010 | US20100190353 Nanolayer deposition process |
| 07/29/2010 | US20100190352 Use of a biased precoat for reduced first wafer defects in high-density plasma process |
| 07/29/2010 | US20100190351 Methods for removing dielectric materials |
| 07/29/2010 | US20100190350 Plasma etching apparatus, plasma etching method and storage medium |
| 07/29/2010 | US20100190349 Method for backside polymer reduction in dry-etch process |
| 07/29/2010 | US20100190348 Manufacturing method of semiconductor substrate and substrate processing apparatus |
| 07/29/2010 | US20100190347 Removal chemistry for selectively etching metal hard mask |
| 07/29/2010 | US20100190346 Method of processing resist, semiconductor device, and method of producing the same |
| 07/29/2010 | US20100190345 Selective Etch-Back Process for Semiconductor Devices |
| 07/29/2010 | US20100190344 Methods of Forming Semiconductor Constructions |
| 07/29/2010 | US20100190343 Load lock having secondary isolation chamber |
| 07/29/2010 | US20100190342 Pattern generating method, method of manufacturing semiconductor device, computer program product, and pattern-shape-determination-parameter generating method |
| 07/29/2010 | US20100190341 Apparatus, method for depositing thin film on wafer and method for gap-filling trench using the same |
| 07/29/2010 | US20100190340 Methods of forming fine patterns using a nanoimprint lithography |
| 07/29/2010 | US20100190339 Compositions and methods for chemical-mechanical polishing of phase change materials |
| 07/29/2010 | US20100190338 Method for manufacturing semiconductor device |
| 07/29/2010 | US20100190337 Method of Forming Metal Wirings of Semiconductor Device |
| 07/29/2010 | US20100190336 Semiconductor device manufacturing method |
| 07/29/2010 | US20100190335 Method of manufacturing semiconductor device |
| 07/29/2010 | US20100190334 Three-dimensional semiconductor structure and method of manufacturing the same |
| 07/29/2010 | US20100190333 Method of forming connection terminal |
| 07/29/2010 | US20100190332 Method of Forming a Copper Topped Interconnect Structure that has Thin and Thick Copper Traces |
| 07/29/2010 | US20100190331 System for Depositing a Film Onto a Substrate Using a Low Vapor Pressure Gas Precursor |
| 07/29/2010 | US20100190330 Nonvolatile semiconductor device and method of manufacturing nonvolatile semiconductor device |
| 07/29/2010 | US20100190329 Method and structure for performing a chemical mechanical polishing process |
| 07/29/2010 | US20100190328 Self Aligned Silicided Contacts |
| 07/29/2010 | US20100190327 Semiconductor device manufacturing method and design support apparatus |
| 07/29/2010 | US20100190326 Method for Fabricating Semiconductor Memory Device |
| 07/29/2010 | US20100190325 Semiconductor device having multi-channel and method of fabricating the same |
| 07/29/2010 | US20100190324 Reducing photoresist layer degradation in plasma immersion ion implantation |
| 07/29/2010 | US20100190323 Modifying catalytic behavior of nanocrystals |
| 07/29/2010 | US20100190322 Compound semiconductor substrate |
| 07/29/2010 | US20100190320 Methods of removing water from semiconductor substrates and methods of depositing atomic layers using the same |
| 07/29/2010 | US20100190319 Method of forming memory with floating gates including self-aligned metal nanodots using a coupling layer |
| 07/29/2010 | US20100190318 Method of recovering and reproducing substrates and method of producing semiconductor wafers |
| 07/29/2010 | US20100190317 Semiconductor device manufacturing method and silicon oxide film forming method |
| 07/29/2010 | US20100190316 Method of selective oxygen implantation to dielectricallly isolate semiconductor devices using no extra masks |
| 07/29/2010 | US20100190315 Method of manufacturing semiconductor memory device |
| 07/29/2010 | US20100190314 Methods Of Forming Semiconductor Structures |
| 07/29/2010 | US20100190313 Method for manufacturing nonvolatile storage element and method for manufacturing nonvolatile storage device |
| 07/29/2010 | US20100190312 Semiconductor device and manufacturing method thereof |
| 07/29/2010 | US20100190311 Method of Forming a MEMS Topped Integrated Circuit with a Stress Relief Layer |
| 07/29/2010 | US20100190310 Gap-filling composition with excellent shelf life by end-capping |
| 07/29/2010 | US20100190309 Method for adjusting the height of a gate electrode in a semiconductor device |
| 07/29/2010 | US20100190308 Electronic device including a fin-type transistor structure and a process for forming the electronic device |
| 07/29/2010 | US20100190307 High density trench mosfet with single mask pre-defined gate and contact trenches |
| 07/29/2010 | US20100190306 Method of manufacturing semiconductor device capable of suppressing impurity concentration reduction in doped channel region arising from formation of gate insulating film |
| 07/29/2010 | US20100190305 Method for forming semiconductor device |
| 07/29/2010 | US20100190304 Semiconductor storage device and method of fabricating the same |
| 07/29/2010 | US20100190303 Semiconductor device having sufficient process margin and method of forming same |
| 07/29/2010 | US20100190302 Electronic Packages with Fine Particle Wetting and Non-Wetting Zones |
| 07/29/2010 | US20100190301 Cavity closure process for at least one microelectronic device |
| 07/29/2010 | US20100190300 Method of making a semiconductor chip assembly with a base heat spreader and a cavity in the base |
| 07/29/2010 | US20100190299 Semiconductor Device with Two or More Bond Pad Connections for Each Input/Output Cell and Method of Manufacture Thereof |
| 07/29/2010 | US20100190298 Semiconductor device and production method therefor |
| 07/29/2010 | US20100190297 Method of making a semiconductor chip assembly with a post/base heat spreader and a cavity in the post |
| 07/29/2010 | US20100190296 Method of manufacturing semiconductor device |
| 07/29/2010 | US20100190295 Method of manufacturing semiconductor device |
| 07/29/2010 | US20100190294 Methods for controlling wafer and package warpage during assembly of very thin die |
| 07/29/2010 | US20100190293 Manufacturing Method of Semiconductor Device |
| 07/29/2010 | US20100190292 Method for the preparation of group ib-iiia-via quaternary or higher alloy semiconductor films |
| 07/29/2010 | US20100190291 Semiconductor memory device with three dimensional solid electrolyte structure, and manufacturing method thereof |
| 07/29/2010 | US20100190290 Solar cell patterning and metallization |
| 07/29/2010 | US20100190288 Thin silicon or germanium sheets and photovolatics formed from thin sheets |
| 07/29/2010 | US20100190287 Semiconductor image sensor and method for fabricating the same |
| 07/29/2010 | US20100190286 Method for manufacturing solar cell |
| 07/29/2010 | US20100190285 Microeletromechanical systems having stored charge and methods for fabricating and using same |
| 07/29/2010 | US20100190284 Method of fabricating nitride-based semiconductor optical device |
| 07/29/2010 | US20100190283 Method to form semiconductor laser diode with mesa structure buried by current blocking layer |
| 07/29/2010 | US20100190282 Method for manufacturing multiple-wavelength semiconductor laser |
| 07/29/2010 | US20100190281 Organic electroluminescent device, method of manufacturing the same, and electronic apparatus |
| 07/29/2010 | US20100190280 Manufacturing method of light-emitting diode |
| 07/29/2010 | US20100190279 Light emitting device |
| 07/29/2010 | US20100190278 Testing for correct undercutting of an electrode during an etching step |
| 07/29/2010 | US20100190277 Power Network Stacked Via Removal For Congestion Reduction |
| 07/29/2010 | US20100190276 Method and apparatus for irradiating laser |
| 07/29/2010 | US20100190275 Scribing device and method of producing a thin-film solar cell module |
| 07/29/2010 | US20100190274 Rtp spike annealing for semiconductor substrate dopant activation |
| 07/29/2010 | US20100190273 Method for manufacturing high-frequency signal transmission circuit and high-frequency signal transmission circuit device |
| 07/29/2010 | US20100190272 Rework method of metal hard mask |
| 07/29/2010 | US20100190215 Penetrable cap |
| 07/29/2010 | US20100190107 Cyclic compound, photoresist base material and photoresist composition |
| 07/29/2010 | US20100190097 Pellicle for photolithography |
| 07/29/2010 | US20100189533 Method of transporting work and apparatus with work handover mechanism |
| 07/29/2010 | US20100189532 Inline-type wafer conveyance device |
| 07/29/2010 | US20100189153 Method of Producing a Radiation-Emitting Component and Radiation-Emitting Component |
| 07/29/2010 | US20100189148 Group iii nitride semiconductor laser |
| 07/29/2010 | US20100189147 Semiconductor Devices and Methods for Generating Light |
| 07/29/2010 | US20100188893 Heat assisted switching and separated read-write MRAM |
| 07/29/2010 | US20100188892 Electric device comprising phase change material and heating element |
| 07/29/2010 | US20100188879 Cross-point semiconductor memory device and method of manufacturing the same |
| 07/29/2010 | US20100188823 Method for Manufacturing an Electronic Module |
| 07/29/2010 | US20100188798 Multilayer capacitor and method of manufacturing same |
| 07/29/2010 | US20100188794 Electrostatic chuck and device of manufacturing organic light emitting diode having the same |
| 07/29/2010 | US20100188593 Thin-film transistor array substrate, method of manufacturing same and liquid crystal display device |
| 07/29/2010 | US20100188592 Method for forming multilayer structure, method for manufacturing display panel, and display panel |