| Patents for G21G 5 - Alleged conversion of chemical elements by chemical reaction (927) |
|---|
| 03/22/2006 | EP1240557A4 Imaging method using phase boundary masking with modified illumination |
| 03/21/2006 | US7015146 for die or wafer backside thinning prior to electrical probing and/or characterization of a site specific MOSFET device; using collimated ion plasma; avoids damaging or rupturing the gate film |
| 03/21/2006 | US7014960 Chelation cleaning process for repairing photomasks |
| 03/14/2006 | US7011927 Electron beam duplication lithography method and apparatus |
| 03/09/2006 | US20060049367 Cooling apparatus, exposure apparatus, and device fabrication method |
| 03/09/2006 | US20060049137 Multi-step process for etching photomasks |
| 02/28/2006 | US7005651 Liquid metal ion gun |
| 02/28/2006 | US7005640 Method and apparatus for the characterization of a depth structure in a substrate |
| 02/28/2006 | US7005219 Defect repair method employing non-defective pattern overlay and photoexposure |
| 02/21/2006 | US7002164 Source multiplexing in lithography |
| 02/16/2006 | US20060033042 Apparatus and method for compensation of movements of a target volume during ion beam irradiation |
| 02/09/2006 | WO2006014633A2 Electrostatic lens for ion beams |
| 02/09/2006 | US20060027762 Light irradiation apparatus, crystallization apparatus, crystallization method and device |
| 01/31/2006 | US6992308 Modulating ion beam current |
| 01/31/2006 | US6992307 Electron beam source and electron beam exposure apparatus employing the electron beam source |
| 01/31/2006 | US6992287 Apparatus and method for image optimization of samples in a scanning electron microscope |
| 01/26/2006 | US20060019199 applying a crosslinkable polyvinyllphenol homo or copolymer, a bishydroxymethylbenze or naphthalene a crosslinking compound, a triphenylsulfonium hexaflate photoacid generator and propylene glycol/1,2-/, 1-methyl ether 2-acetate solvent on a substrate having prestructure gate electrode, photocrosslinking |
| 01/26/2006 | US20060017020 Electron beam lithography method, patterned master carrier for magnetic transfer, lithography method for patterned master carrier for magnetic transfer, and method for producing performatted magnetic recording media |
| 01/26/2006 | US20060017014 Patterned wafer inspection method and apparatus therefor |
| 01/26/2006 | US20060017013 Charged particle beam drawing equipment, method of adjusting aperture mask, and method of manufacturing semiconductor device |
| 01/26/2006 | US20060017012 Ion implantation apparatus |
| 01/26/2006 | US20060017011 Ion source with particular grid assembly |
| 01/26/2006 | US20060017010 Magnet for scanning ion beams |
| 01/19/2006 | US20060015837 System and method for designing and manufacturing LSI |
| 01/19/2006 | US20060011869 Measurement method of electron beam current, electron beam lithography method and system |
| 01/19/2006 | US20060011863 Electron beam method and apparatus for improved melt point temperatures and optical clarity of halogenated optical materials |
| 01/17/2006 | US6987278 Gas flushing system with recovery system for use in lithographic apparatus |
| 01/17/2006 | US6986868 Method for sterilizing a medical device having a hydrophilic coating |
| 01/03/2006 | US6982428 Particle detection by electron multiplication |
| 12/22/2005 | WO2005029551A3 Processes and systems for laser crystallization processing of film regions on a substrate utilizing a line-type beam, and structures of such film regions |
| 12/22/2005 | US20050279951 Grazing incidence mirror, lithographic apparatus including a grazing incidence mirror, method for providing a grazing incidence mirror, method for enhancing EUV reflection of a grazing incidence mirror, device manufacturing method and device manufactured thereby |
| 12/08/2005 | US20050271949 Reticle manipulations |
| 12/06/2005 | US6972419 Extreme ultraviolet radiation imaging |
| 11/17/2005 | US20050253082 Electrooptic system array, charged-particle beam exposure apparatus using the same, and device manufacturing method |
| 11/15/2005 | US6965153 Electrooptic system array, charged-particle beam exposure apparatus using the same, and device manufacturing method |
| 11/15/2005 | US6965115 Airtight processing apparatus, airtight processing method, and electron beam processing apparatus |
| 11/10/2005 | US20050250017 Mask blank manufacturing method, transfer mask manufacturing method, sputtering target for manufacturing mask blank |
| 11/09/2005 | CN1695222A Particle-optical device and detection means |
| 11/03/2005 | US20050243390 Extreme ultraviolet radiation imaging |
| 11/01/2005 | US6960413 Multi-step process for etching photomasks |
| 10/25/2005 | US6958201 Electron beam exposure mask, electron beam exposure method, method of fabricating semiconductor device, and electron beam exposure apparatus |
| 10/06/2005 | WO2005092025A2 Methods and systems for measuring a characteristic of a substrate or preparing a substrate for analysis |
| 10/06/2005 | US20050221229 Methods and systems for measuring a characteristic of a substrate or preparing a substrate for analysis |
| 10/06/2005 | US20050221207 Method and apparatus for monitoring exposure process |
| 09/29/2005 | US20050214683 Method and apparatus for reforming film and controlling slimming amount thereof |
| 09/29/2005 | US20050211929 Charged particle beam photolithography machine, standard substrate for correcting misalignment factor of charged particle beam photolithography machine, correcting method for charged particle beam photolithography machine, and method of manufacturing electronic device |
| 09/29/2005 | US20050211928 Charged-particle-beam lithographic system |
| 09/29/2005 | US20050211922 Minute three dimensional structure producing apparatus and method |
| 09/22/2005 | US20050205805 Scratch repairing processing method and scanning probe microscope (SPM) used therefor |
| 09/22/2005 | US20050205804 Method for manufacturing light guide plate stamper |
| 09/22/2005 | US20050205108 Method and system for immersion lithography lens cleaning |
| 09/01/2005 | US20050189498 Irradiation apparatus |
| 08/18/2005 | US20050181314 Light emitting diodes; semiconductor lasers |
| 08/18/2005 | US20050178979 Light generator and exposure apparatus |
| 08/18/2005 | US20050178977 Irradiation system and method |
| 08/16/2005 | US6930315 Method and apparatus for irradiation of active energy beam |
| 08/11/2005 | US20050176225 Method of manufacturing electronic device capable of controlling threshold voltage and ion implanter controller and system that perform the method |
| 08/11/2005 | DE10393131T5 Verfahren zum Herstellen von Maskenrohlingen, Verfahren zum Herstellen von Transfermasken, Sputtertarget zum Herstellen von Maskenrohlingen A method for producing mask blanks, A method for producing transfer masks, sputtering target for fabricating mask blanks |
| 08/04/2005 | US20050170268 Circuit patterning substrate, providing mask, collimating incident direction of particles, irradiating |
| 08/04/2005 | US20050167615 Charged beam writing apparatus and writing method |
| 08/04/2005 | US20050167614 Gas blowingnozzle of charged particle beam apparatus and charged particle beam apparatus as well as working method |
| 07/27/2005 | CN2713515Y Dim light phase shift light cover having double embedded layers |
| 07/21/2005 | US20050156121 Methods and devices for charge management for three-dimensional and color sensing |
| 07/19/2005 | US6919164 Applying photosensitive layer to substrate; electron beam exposure; contacting developers |
| 07/12/2005 | US6917046 Positioning apparatus, charged-particle-beam exposure apparatus, and device manufacturing method |
| 07/05/2005 | US6914249 Particle-optical apparatus, electron microscopy system and electron lithography system |
| 06/23/2005 | DE10359148A1 Low activity radioisotope deactivation unit, comprises focussing lenses in the form of regular pyramids |
| 06/22/2005 | CN1630926A Swinging retarding immersion type lens electron optics focusing, deflection and signal collection system and method |
| 06/16/2005 | US20050127304 Liquid metal ion gun |
| 06/15/2005 | EP1540665A2 Photolithography mask repair |
| 06/14/2005 | US6906793 Methods and devices for charge management for three-dimensional sensing |
| 06/09/2005 | US20050121623 Electron beam duplication lithography method and apparatus |
| 06/09/2005 | DE10354252A1 Device for the accelerated deactivation of fuel cassettes comprises focusing lenses in the form of regular pyramids made from metal with metal plates as side surfaces which lie on the side surfaces of the lenses |
| 06/02/2005 | US20050116183 Radiation source, lithographic apparatus, and device manufacturing method |
| 05/19/2005 | WO2005021048A3 Method of irradiating frozen material |
| 05/19/2005 | DE10297658T5 Verfahren und System zum Reparieren defekter Photomasken Method and system for repairing defective photomasks |
| 05/17/2005 | US6894435 Method and device for rastering source redundancy |
| 05/17/2005 | US6894292 System and method for maskless lithography using an array of sources and an array of focusing elements |
| 05/12/2005 | WO2005022553A3 Radiation system |
| 04/28/2005 | US20050089773 System and method for measuring overlay errors |
| 04/26/2005 | US6885011 Irradiation system and method |
| 04/21/2005 | US20050084767 directing pulsed laser beams through substrates and focusing it on a target located in the substrate adjacent to coating layers, to write a diffractive optical element, thus changing the scattering properties of the substrate at the target location; masks for use in photolithography |
| 04/20/2005 | EP1524012A1 Device for positioning a patient with a tumor in the head or neck region in a heavy-ion therapy chamber |
| 04/14/2005 | WO2004086143A3 Multi-step process for etching photomasks |
| 04/14/2005 | US20050077485 System and method for passing high energy particles through a mask |
| 03/31/2005 | WO2005029551A2 Processes and systems for laser crystallization processing of film regions on a substrate utilizing a line-type beam, and structures of such film regions |
| 03/31/2005 | US20050069786 Stencil mask, production method thereof, exposure apparatus, exposure method and electronic device production method |
| 03/30/2005 | EP1519226A2 Stencil mask, production method thereof, exposure apparatus, exposure method and electronic device production method |
| 03/30/2005 | CN1602537A System and method for fast focal length alterations |
| 03/29/2005 | US6872959 Thermoelectron generating source and ion beam radiating apparatus with the same |
| 03/24/2005 | WO2005001876A3 Electrostatic parallelizing lens for ion beams |
| 03/10/2005 | WO2005022553A2 Radiation system |
| 03/10/2005 | WO2005021048A2 Method of irradiating frozen material |
| 03/10/2005 | WO2004114369A3 Three-dimensional and color sensing |
| 03/10/2005 | US20050051740 Charged particle therapy system, range modulation wheel device, and method of installing range modulation wheel device |
| 03/01/2005 | US6861657 Electron beam exposure mask, electron beam exposure method, method of fabricating semiconductor device, and electron beam exposure apparatus |
| 02/24/2005 | US20050040339 Method of irradiating frozen material |
| 02/15/2005 | US6855481 Apparatus and a method for forming a pattern using a crystal structure of material |
| 02/10/2005 | US20050031965 Removing the defect area by gallium chelation with a water-soluble amine polymer containing carboxyl, hydroxyl and amine groups; polymer is never specified |
| 02/02/2005 | CN1573538A Attenuated phase shifting mask having embedded bi-layer structure for and method for making same |