| Patents for G21G 5 - Alleged conversion of chemical elements by chemical reaction (927) |
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| 09/08/2009 | US7586093 Apparatus and method for inspecting a sample of a specimen by means of an electron beam |
| 09/03/2009 | US20090218489 Systems and methods for material treatment and characterization employing positron annihilation |
| 09/02/2009 | EP1644700A4 Methods and devices for charge management for three-dimensional and color sensing |
| 08/27/2009 | US20090212379 Semiconductor apparatus, manufacturing method for the semiconductor apparatus, and electronic information device |
| 08/20/2009 | US20090207356 Method of aligning alignment layer and liquid crystal display device having alignment layer aligned by the same |
| 08/13/2009 | US20090200487 Methods of Altering Surgical Fiber |
| 08/06/2009 | US20090199152 Methods and apparatuses for reducing mura effects in generated patterns |
| 08/06/2009 | US20090194709 Laser processing machine with a cutting guide |
| 08/04/2009 | US7569841 Deflection signal compensation for charged particle beam |
| 07/30/2009 | US20090191482 Device and method for preparing relief printing form |
| 07/30/2009 | US20090189093 Sub-wavelength imaging and irradiation with entangled particles |
| 07/30/2009 | US20090189092 Radiotherapy apparatus controller and radiation irradiation method |
| 07/29/2009 | CN100521062C Particle-optical device and detection means |
| 07/28/2009 | US7566888 Method and system for treating an interior surface of a workpiece using a charged particle beam |
| 07/28/2009 | US7566871 Method and apparatus for pattern inspection |
| 07/23/2009 | US20090184261 Imaging with a plurality of sources to a common detector |
| 07/23/2009 | US20090184260 Positioning device for positioning a patient and method for operating a positioning device |
| 07/14/2009 | US7560717 Particle beam irradiation apparatus, treatment planning unit, and particle beam irradiation method |
| 07/02/2009 | US20090166560 Sensing of biological molecules using carbon nanotubes as optical labels |
| 07/01/2009 | CN100508074C Lithographic systems and methods with extended depth of focus |
| 06/30/2009 | US7554082 Pattern observation apparatus, pattern observation method, method of manufacturing semiconductor device, and program |
| 06/18/2009 | US20090158236 Semiconductor device fabrication method and fabrication apparatus using a stencil mask |
| 06/18/2009 | US20090152475 Analyzer, Authenticity Judging Device, Authenticity Judging Method, and Underground Searching Method |
| 06/11/2009 | US20090145742 Energy transfer through surface plasmon resonance excitation on multisegmented nanowires |
| 06/04/2009 | WO2007061426A3 Laser-accelerated proton therapy units and superconducting eletromagnetig systems for same |
| 06/04/2009 | US20090139449 Silicon thin film in which an opening for selectively irradiating charged particles to a semiconductor substrate is provided and whose irradiation surface on which the charged particles are irradiated is implanted with an impurity, and selectively irradiating charged particles to semiconductor substrate |
| 05/26/2009 | US7537940 Method of manufacturing electronic device capable of controlling threshold voltage and ion implanter controller and system that perform the method |
| 05/14/2009 | US20090121158 Apparatus and method for specimen fabrication |
| 05/12/2009 | US7531818 Multiple room radiation treatment system |
| 05/05/2009 | US7528386 Submicron particle removal |
| 04/30/2009 | WO2007064951A3 Respiration phantom for quality assurance |
| 04/30/2009 | US20090111036 Scanning beam of metallic ions over defect to dope, reducing transparency; implanting gallium atoms to reduce transmission and quartz can be etched |
| 04/30/2009 | US20090108213 Large-angle uniform radiance source |
| 04/28/2009 | US7525107 Apparatus and method for forming an alignment layer |
| 04/21/2009 | US7521697 Method for fabricating semiconductor device and equipment for fabricating the same |
| 04/21/2009 | US7521691 Magnetic monitoring of a Faraday cup for an ion implanter |
| 04/16/2009 | WO2006093693A3 Method and apparatus for euv plasma source target delivery |
| 04/16/2009 | US20090095922 Method of repairing a polymer mask |
| 04/15/2009 | EP1774559B1 Electrostatic lens for ion beams |
| 04/07/2009 | US7515986 Methods and systems for controlling and adjusting heat distribution over a part bed |
| 04/07/2009 | US7514699 Method and device for irradiating spots on a layer |
| 04/01/2009 | EP2041756A2 A multi-source plasma focused ion beam system |
| 03/31/2009 | US7511289 Working method utilizing irradiation of charged particle beam onto sample through passage in gas blowing nozzle |
| 03/24/2009 | US7507956 Charged particle beam energy width reduction system for charged particle beam system |
| 03/19/2009 | US20090072161 Plasmonic Laser Nanoablation Methods |
| 03/17/2009 | US7504644 Method and devices for producing corpuscular radiation systems |
| 03/17/2009 | US7504643 Method for cleaning a lithographic apparatus module, a cleaning arrangement and a lithographic apparatus comprising the cleaning arrangement |
| 03/17/2009 | US7504625 Substrate inspection method, manufacturing method of semiconductor device and substrate inspection apparatus |
| 03/17/2009 | US7504182 Scanning beam of metallic ions over defect to dope to reducing transparency; implanting gallium atoms to reduce transmission and quartz can be etched |
| 03/10/2009 | US7501214 Semiconductor device fabrication method and fabrication apparatus using a stencil mask |
| 03/03/2009 | US7498591 Critical dimension effects correction in raster pattern generator |
| 02/26/2009 | US20090050820 Ion implantation apparatus |
| 02/24/2009 | US7495239 Method for cleaning a lithographic apparatus module, a cleaning arrangement and a lithographic apparatus comprising the cleaning arrangement |
| 02/19/2009 | US20090046757 Laser irradiation apparatus, laser irradiation method, and manufacturing method of semiconductor device |
| 02/17/2009 | US7491950 Method for retrofitting concrete structures |
| 02/12/2009 | US20090039475 Apparatus and Method for Manufacturing Semiconductor |
| 02/03/2009 | US7485881 Lithographic apparatus, illumination system, filter system and method for cooling a support of such a filter system |
| 02/03/2009 | US7485858 Inspection method for semiconductor wafer and apparatus for reviewing defects |
| 01/29/2009 | US20090026583 Method of Producing 3-D Mold, Method of Producing Finely Processed Product, Method of Producing Fine-Pattern Molded Product, 3-D Mold, Finely Processed Product, Fine-Pattern Molded Product and Optical Component |
| 01/27/2009 | US7482606 Apparatus and method for compensation of movements of a target volume during ion beam irradiation |
| 01/27/2009 | US7482604 Electron beam lithography apparatus, lithography method, lithography program, and manufacturing method of a semiconductor device |
| 01/27/2009 | US7482603 Apparatus and method for specimen fabrication |
| 01/22/2009 | WO2006071419A3 Electrical, plating and catalytic uses of metal nanomaterial compositions |
| 01/22/2009 | US20090022257 Direct production of thermal antineutrons and antiprotons |
| 01/13/2009 | US7476882 Calibration method for electron-beam system and electron-beam system |
| 01/13/2009 | US7476879 Placement effects correction in raster pattern generator |
| 01/06/2009 | US7473915 System and method to pattern an object through control of a radiation source |
| 01/06/2009 | US7473908 Getter and cleaning arrangement for a lithographic apparatus and method for cleaning a surface |
| 01/06/2009 | US7473905 Electrostatic deflector |
| 12/25/2008 | US20080315128 Method and Apparatus For Flattening Solid Surface |
| 12/25/2008 | US20080315124 Space tolerance with stitching |
| 12/23/2008 | US7468521 Lithographic apparatus and device manufacturing method |
| 12/16/2008 | US7465922 Accelerating electrostatic lens gun for high-speed electron beam inspection |
| 12/11/2008 | US20080304069 Systems and methods for inspecting a specimen with light at varying power levels |
| 12/09/2008 | US7464351 Method enabling a standard CMOS fab to produce an IC to sense three-dimensional information using augmented rules creating mask patterns not otherwise expressible with existing fab rules |
| 12/02/2008 | US7459700 Anthrax remediation and response |
| 12/02/2008 | US7459246 Method for manufacturing a semiconductor device, stencil mask and method for manufacturing a the same |
| 12/02/2008 | US7459242 Method and system for repairing defected photomasks |
| 11/18/2008 | US7453076 Bi-polar treatment facility for treating target cells with both positive and negative ions |
| 11/13/2008 | US20080280227 Exposing printing plates using light emitting diodes |
| 11/06/2008 | US20080272316 Path tracing apparatus and method |
| 11/04/2008 | US7446328 Patient alignment system with external measurement and object coordination for radiation therapy system |
| 11/04/2008 | US7446324 Methods utilizing scanning probe microscope tips and products thereof or produced thereby |
| 10/30/2008 | US20080264905 Methods and systems for measuring a characteristic of a substrate or preparing a substrate for analysis |
| 10/23/2008 | US20080258082 Plasma Processing Method and Plasma Processing Apparatus |
| 10/14/2008 | US7435981 Electron beam sterilizer |
| 10/09/2008 | WO2008094297A3 A multi-source plasma focused ion beam system |
| 10/02/2008 | US20080237488 Method to Analyze Physical and Chemical Properties on the Surface Layer of a Solid |
| 10/02/2008 | US20080237487 Multiple directional scans of test structures on semiconductor integrated circuits |
| 09/25/2008 | US20080230720 Method and System For Irradiating and Inspecting Liquid-Carrying Containers |
| 09/23/2008 | US7427765 Electron beam column for writing shaped electron beams |
| 09/23/2008 | US7427764 Laser crystallization apparatus and laser crystallization method |
| 09/16/2008 | US7426018 Lithographic apparatus, illumination system and filter system |
| 09/11/2008 | US20080219695 Ozone removal device, image forming apparatus having the same, and method for removing ozone |
| 09/04/2008 | WO2007121142A3 Improved light source employing laser-produced plasma |
| 09/04/2008 | US20080212045 optical system with at least a semiconductor light source and a method for removing contaminations and/or heating the systems |
| 09/04/2008 | US20080210883 Liquid metal ion gun |
| 09/03/2008 | CN101257944A Beam neutralization in low-energy high-current ribbon-beam implanters |
| 09/02/2008 | US7420181 Liquid metal ion gun |
| 08/28/2008 | US20080203322 Resist collapse prevention using immersed hardening |