| Patents for G21G 5 - Alleged conversion of chemical elements by chemical reaction (927) |
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| 08/26/2008 | US7417241 Ion implantation method and method for manufacturing semiconductor device |
| 08/26/2008 | US7417239 Method and device for electron beam irradiation |
| 08/21/2008 | WO2008100895A2 Universal multidetection system for microplates |
| 08/19/2008 | US7414252 Method and apparatus for the automated process of in-situ lift-out |
| 08/14/2008 | US20080191150 Multidirectional Electromagnetic Wave Irradiation System of Workpiece and Laser Material Processing System Employing It |
| 08/14/2008 | US20080191149 Universal multidetection system for microplates |
| 08/12/2008 | US7411201 Projection objective for a microlithographic projection exposure apparatus |
| 07/22/2008 | US7402819 Respiration phantom for quality assurance |
| 07/15/2008 | US7399978 Method and device for irradiating spots on a layer |
| 07/10/2008 | US20080164424 Reducing Background Fluorescence in Arrays |
| 07/08/2008 | US7397538 Radiation system and lithographic apparatus |
| 07/08/2008 | US7397044 Imaging mode for linear accelerators |
| 07/03/2008 | US20080157006 Debris mitigation system and lithographic apparatus |
| 07/03/2008 | US20080157004 Projection system and light tunnel thereof |
| 06/26/2008 | WO2008027543A3 Confocal secondary electron imaging |
| 06/26/2008 | US20080149855 Imaging of two-dimensional arrays |
| 06/26/2008 | US20080149854 Illumination system, lithographic apparatus, mirror, method of removing contamination from a mirror and device manufacturing method |
| 06/26/2008 | US20080149853 Light shaping apparatus |
| 06/25/2008 | CN100397550C Swinging retarding immersion type lens electron optics focusing, deflection and signal collection system |
| 06/25/2008 | CN100397549C System and method for fast focal length alterations |
| 06/19/2008 | US20080142739 Synchronous raster scanning lithographic system |
| 06/19/2008 | US20080142738 Generator for flux specific bursts on nano-particles |
| 06/19/2008 | US20080142735 Charged-particle-beam processing using a cluster source |
| 06/19/2008 | US20080142734 Tactical integrated illumination countermeasure system |
| 06/12/2008 | US20080135782 Apparatus and method for the irradiation of radiation sensitive materials |
| 06/12/2008 | US20080135751 Sample Inspection method, Sample Inspection Apparatus, and Sample Holder |
| 06/12/2008 | US20080135041 Kitchen ventilator system |
| 06/10/2008 | US7385205 Method and device for aligning a charged particle beam column |
| 05/27/2008 | US7378672 Particle beam therapeutic apparatus |
| 05/27/2008 | US7377228 System for and method of gas cluster ion beam processing |
| 05/20/2008 | US7375351 Micro-column electron beam apparatus |
| 05/15/2008 | US20080111087 Infrared Detector and Process for Fabricating the Same |
| 05/13/2008 | US7372052 Electron beam method and apparatus for reducing or patterning the birefringence of halogenated optical materials |
| 05/13/2008 | US7372049 Lithographic apparatus including a cleaning device and method for cleaning an optical element |
| 05/13/2008 | US7371485 Multi-step process for etching photomasks |
| 05/13/2008 | US7371483 Monitoring apertures in radiation transparent substrate; masking; halftone film; stacks of radiation transparent materials and opacque film ; etching |
| 05/06/2008 | US7368731 Method and apparatus which enable high resolution particle beam profile measurement |
| 05/02/2008 | WO2008051478A2 Photobleaching by high power pulses |
| 05/01/2008 | US20080099695 Sample Preparation System |
| 04/29/2008 | US7365321 Methods and systems for measuring a characteristic of a substrate or preparing a substrate for analysis |
| 04/24/2008 | US20080094614 Photobleaching by high power pulses |
| 04/24/2008 | US20080094544 Surface modification method for polarizer, method of manufacturing polarizer, polarizer, polarizing plate, image display apparatus, liquid crystal panel, and liquid crystal display |
| 04/22/2008 | US7362416 Exposure apparatus, evaluation method and device fabrication method |
| 04/17/2008 | US20080088384 Manufacturing method of tuning-fork type quartz crystal resonator |
| 04/15/2008 | US7358507 Liquid removal in a method and device for irradiating spots on a layer |
| 04/10/2008 | US20080085559 Micro-pixelated active-matrix fluid-assay performance |
| 04/09/2008 | CN100380582C Mask and producing method, producing method for semiconductor device with this mask |
| 04/08/2008 | US7355189 Charged particle therapy system, range modulation wheel device, and method of installing range modulation wheel device |
| 04/08/2008 | US7355186 Charged particle beam device with cleaning unit and method of operation thereof |
| 04/03/2008 | US20080078946 Medical device and manufactuing method of colored medical device |
| 04/01/2008 | US7351988 Beam allocation apparatus and beam allocation method for medical particle accelerators |
| 03/27/2008 | US20080073571 Exposure apparatus, pressure control method for the same, and device manufacturing method |
| 03/27/2008 | US20080073570 Method of repeatedly using a control wafer to monitor treatments |
| 03/25/2008 | US7348574 Position measurement system and lithographic apparatus |
| 03/25/2008 | US7348104 Performing multilevel alignment; forming resist areas of different thicknesses using varied exposure characteristics; producing large focusing element arrays |
| 03/20/2008 | US20080067427 Via-hole processing method |
| 03/20/2008 | US20080067423 Writing error diagnosis method for charged particle beam photolithography apparatus and charged particle beam photolithography apparatus |
| 03/20/2008 | US20080067421 Electron Beam Etching Apparatus and Method for the same |
| 03/18/2008 | US7345291 Device for irradiation therapy with charged particles |
| 03/18/2008 | US7344805 Mask and method for producing thereof and a semiconductor device using the same |
| 03/06/2008 | US20080059070 Systems for autofluorescent imaging and target ablation |
| 03/06/2008 | US20080054191 Novel wafer repair method using direct-writing |
| 02/26/2008 | US7335901 Method of calibrating light delivery systems, light delivery systems and radiometer for use therewith |
| 02/26/2008 | US7335893 Method and device for aligning a charged particle beam column |
| 02/21/2008 | US20080044740 Photomask having haze reduction layer |
| 02/20/2008 | EP1292361B1 Methods utilizing scanning probe microscope tips and products therefor or produced thereby |
| 02/13/2008 | EP1540665A4 Photolithography mask repair |
| 02/07/2008 | US20080029823 Semiconductor Device Having a Dual Stress Liner and Light Exposure Apparatus for Forming the Dual Stress Liner |
| 02/05/2008 | US7326940 Exposure apparatus, exposure method and semiconductor device production method |
| 02/05/2008 | US7326927 Focusing lens and charged particle beam device for titled landing angle operation |
| 01/24/2008 | US20080020304 Electrical, Plating And Catalytic Uses Of Metal Nanomaterial Compositions |
| 01/17/2008 | US20080011969 Apparatus and Method for Forming an Alignment Layer |
| 01/17/2008 | US20080011966 Direct production of thermal antineutrons and antiprotons |
| 01/08/2008 | US7317192 High energy polyenergetic ion selection systems, ion beam therapy systems, and ion beam treatment centers |
| 01/03/2008 | WO2006083415A3 Improving beam neutralization in low-energy high-current ribbon-beam implanters |
| 12/20/2007 | US20070290148 Sensor and sytem for sensing an electron beam |
| 12/11/2007 | US7307262 Lithographic apparatus and device manufacturing method |
| 12/11/2007 | US7306896 Electron beam duplication lithography method |
| 12/04/2007 | US7304318 System and method for maskless lithography using an array of sources and an array of focusing elements |
| 11/27/2007 | US7301162 Particle beam irradiation system |
| 11/22/2007 | WO2007133308A2 Centralized processing and management system |
| 11/22/2007 | US20070267579 Photomask correction method using composite charged particle beam, and device used in the correction method |
| 11/15/2007 | US20070264501 Multi-photon reactive compositions with inorganic particles and method for fabricating structures |
| 11/15/2007 | US20070262272 Semiconductor mask correcting device and semiconductor mask correcting method |
| 11/15/2007 | US20070262268 Method for imaging a pattern onto a target portion of a substrate |
| 11/08/2007 | US20070257200 Liquid metal ion gun |
| 11/08/2007 | US20070256703 Method for removing contaminant from surface of glass substrate |
| 10/24/2007 | EP1846508A2 Laser-accelerated proton therapy units and superconducting eletromagnetig systems for same |
| 10/23/2007 | US7285792 Scratch repairing processing method and scanning probe microscope (SPM) used therefor |
| 10/16/2007 | US7282706 Advanced optics for rapidly patterned laser profiles in analytical spectrometry |
| 10/11/2007 | WO2007035389A8 Vacuum reaction chamber with x-lamp heater |
| 10/11/2007 | US20070235663 Insulator system for a terminal structure of an ion implantation system |
| 10/11/2007 | US20070235659 Method and device for aligning a charged particle beam column |
| 10/04/2007 | US20070228525 Substrate earthing mechanism for use in charged-particle beam writing apparatus |
| 10/04/2007 | US20070228293 Pattern writing and forming method |
| 10/04/2007 | US20070228289 Apparatus and method for exposing a substrate to uv radiation while monitoring deterioration of the uv source and reflectors |
| 09/18/2007 | US7271400 Methods, apparatus, and systems involving ion beam generation |
| 09/18/2007 | US7271396 Method and device for aligning a charged particle beam column |
| 09/13/2007 | US20070210264 UV-C Sensitive composition and dosimeter |
| 09/11/2007 | US7268356 Method and apparatus for specimen fabrication |