Patents for G03B 27 - Photographic printing apparatus (25,157) |
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03/26/2009 | US20090081568 Exposure apparatus and method of manufacturing device |
03/26/2009 | US20090080068 Projection optical system, exposure apparatus, and method of manufacturing device |
03/26/2009 | US20090079953 Use of perfluoroalkanes in vacuum ultraviolet applications |
03/26/2009 | US20090079952 Six-mirror euv projection system with low incidence angles |
03/26/2009 | US20090079951 Lithographic apparatus and device manufacturing method |
03/26/2009 | US20090079950 Exposure apparatus, exposure method, and method for producing device |
03/26/2009 | US20090079949 Lithographic apparatus and device manufacturing method |
03/26/2009 | US20090079948 Developing method and developing apparatus |
03/26/2009 | US20090079525 Electrostatic clamp, lithographic apparatus and method of manufacturing an electrostatic clamp |
03/25/2009 | CN100471697C Transparent measuring device with enhanced visibility lines |
03/24/2009 | US7508598 Apparatus for measuring aerial images produced by an optical lithography system |
03/24/2009 | US7508580 8-mirror microlithography projection objective |
03/24/2009 | US7508570 Gray level method for slim-based optical lithography |
03/24/2009 | US7508555 System and method for selecting photographic images using index prints |
03/24/2009 | US7508551 Image reading apparatus |
03/24/2009 | US7508495 Positioning stage, bump forming apparatus equipped with the positioning stage, and bump forming method performed using the positioning stage |
03/24/2009 | US7508494 Lithographic apparatus and a subtrate table for exciting a shockwave in a substrate |
03/24/2009 | US7508493 Exposure apparatus and device manufacturing method |
03/24/2009 | US7508492 Surface light source control apparatus and surface light source control method |
03/24/2009 | US7508491 Lithographic apparatus and device manufacturing method utilized to reduce quantization influence of datapath SLM interface to dose uniformity |
03/24/2009 | US7508490 Exposure apparatus and device manufacturing method |
03/24/2009 | US7508489 Method of manufacturing a miniaturized device |
03/24/2009 | US7508488 Projection exposure system and method of manufacturing a miniaturized device |
03/24/2009 | US7508487 Lithographic apparatus, device manufacturing method, and device manufactured thereby |
03/24/2009 | US7508486 Exposure apparatus, exposure and developing system, and method of manufacturing a device |
03/19/2009 | WO2009035780A1 Device and method for altering the path of magnetic waves to record the activity thereof |
03/19/2009 | WO2005114330A3 Image device with belt type processing member |
03/19/2009 | US20090075217 Tapered edge bead removal process for immersion lithography |
03/19/2009 | US20090075216 Storage medium storing exposure condition determination program, exposure condition determination method, exposure method, and device manufacturing method |
03/19/2009 | US20090075212 Immersion lithography fluid control system |
03/19/2009 | US20090075211 Immersion lithography fluid control system |
03/19/2009 | US20090075210 Exposure apparatus and method of manufacturing device |
03/19/2009 | US20090075012 Lithographic apparatus and device manufacturing method |
03/19/2009 | US20090073441 Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method |
03/19/2009 | US20090073415 Apparatus and method for mounting pellicle |
03/19/2009 | US20090073414 Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method |
03/19/2009 | US20090073413 Write-Pattern Determination for Maskless Lithography |
03/19/2009 | US20090073412 Off-axis objectives with rotatable optical element |
03/19/2009 | US20090073410 Illumination system particularly for microlithography |
03/19/2009 | US20090073409 Exposure system and method of manufacturing a semiconductor device |
03/19/2009 | US20090073408 Lithographic apparatus and device manufacturing method |
03/19/2009 | US20090073407 Exposure apparatus and exposure method |
03/19/2009 | US20090073406 Marker structure, mask pattern, alignment method, and lithographic method and apparatus |
03/19/2009 | US20090073405 Movable body drive method and movable body drive system, and pattern formation method and pattern formation apparatus |
03/19/2009 | US20090073404 Variable slit device, illumination device, exposure apparatus, exposure method, and device manufacturing method |
03/19/2009 | US20090073403 Methods of characterizing similarity or consistency in a set of entities |
03/19/2009 | US20090073402 Lithographic apparatus and exposure method |
03/19/2009 | US20090073401 Lithographic apparatus with rotation filter device |
03/19/2009 | US20090073400 Device and method for manufacturing a particulate filter with regularly spaced micropores |
03/19/2009 | US20090073399 Exposure apparatus |
03/19/2009 | US20090073398 Microlithographic projection exposure apparatus |
03/19/2009 | US20090073397 Laminar Flow Gas Curtains for Lithographic Applications |
03/19/2009 | US20090073396 Lithographic apparatus and device manufacturing method |
03/19/2009 | US20090073395 Lithographic apparatus and device manufacturing method |
03/19/2009 | US20090073394 Substrate processing apparatus with multi-speed drying |
03/19/2009 | US20090072167 Exposure apparatus, light source apparatus and device fabrication |
03/18/2009 | EP1256030B1 Laser thermal processing apparatus and method |
03/18/2009 | CN101390376A Linear light source device, and image reading device and planar display device using the linear light source device |
03/18/2009 | CN101387822A Stitching structure of stitching machine and producing process thereof |
03/18/2009 | CN100470372C System and method for calculating aerial image of a spatial light modulator |
03/17/2009 | US7505184 Adjusting method of image reading apparatus and image reading apparatus |
03/17/2009 | US7505182 Image processing apparatus, and image reading area setting method |
03/17/2009 | US7505118 Wafer carrier |
03/17/2009 | US7505117 Polarizing element, method of manufacturing polarizing element, method of evaluating exposure apparatus, method of manufacturing semiconductor device, and exposure apparatus |
03/17/2009 | US7505116 Lithographic apparatus and device manufacturing method |
03/17/2009 | US7505115 Exposure apparatus, method for producing device, and method for controlling exposure apparatus |
03/17/2009 | US7505114 Lithographic apparatus and device manufacturing method |
03/17/2009 | US7505113 Lithographic apparatus and device manufacturing method |
03/17/2009 | US7505112 Multiple exposure method |
03/17/2009 | US7505111 Exposure apparatus and device manufacturing method |
03/17/2009 | US7505068 Image processing apparatus for applying effects to a stored image |
03/12/2009 | US20090068598 Laser processing apparatus and laser processing method, debris collection mechanism and debris collection method, and method for producing display panel |
03/12/2009 | US20090068597 Exposure method and apparatus, and electronic device manufacturing method |
03/12/2009 | US20090066928 Alignment apparatus, exposure apparatus, and device manufacturing method using exposure apparatus |
03/12/2009 | US20090066927 Exposure apparatus, exposure method, and device manufacturing method |
03/12/2009 | US20090066925 Measurement apparatus, exposure apparatus, and device fabrication method |
03/12/2009 | US20090066924 Lithographic apparatus, device manufacturing method, and use of a radiation collector |
03/12/2009 | US20090066923 Exposure apparatus and device manufacturing method |
03/12/2009 | US20090066922 Exposure method and apparatus, maintenance method and device manufacturing method |
03/12/2009 | US20090066921 Method for producing a marker on a substrate, lithographic apparatus and device manufacturing method |
03/11/2009 | CN101385327A Image reading apparatus, and its manufacturing method |
03/11/2009 | CN101385326A Linear illuminating apparatus and image reader using it |
03/11/2009 | CN100467276C Compact printer module for imaging system |
03/10/2009 | US7502098 Exposure apparatus |
03/10/2009 | US7502097 Method and exposure apparatus for performing a tilted focus and a device manufactured accordingly |
03/10/2009 | US7502095 Lithographic apparatus, device manufacturing method, and device manufactured thereby |
03/10/2009 | US7501226 Removable seal ring covering a predetermined portion of a wafer edge for preventing immersion fluid from leaking through the covered portion; seal ring carrier attached to an arm with a vacuum channel and vacuum ports; prevents the immersion fluid from contact with the particulate contamination areas |
03/05/2009 | WO2009029823A1 Integrated interference-assisted lithography |
03/05/2009 | US20090061331 Exposure method and apparatus, maintenance method, and device manufacturing method |
03/05/2009 | US20090059200 Methods and apparatus for manufacturing display medium, and display medium |
03/05/2009 | US20090059199 Method of loading a substrate on a substrate table and lithographic apparatus and device manufacturing method |
03/05/2009 | US20090059198 Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, and device manufacturing method |
03/05/2009 | US20090059197 Exposure apparatus and method of exposing a semiconductor substrate |
03/05/2009 | US20090059196 Systems and Methods for In-Situ Reflectivity Degradation Monitoring of Optical Collectors Used in Extreme Ultraviolet (EUV) Lithography Processes |
03/05/2009 | US20090059195 Exposure device with mechanism for forming alignment marks and exposure process conducted by the same |
03/05/2009 | US20090059194 Position measurement system, exposure apparatus, position measurement method, exposure method and device manufacturing method, and tool and measurement method |
03/05/2009 | US20090059193 Image production apparatus |
03/05/2009 | US20090059192 Lithographic apparatus and device manufacturing method |
03/05/2009 | US20090059191 Support plate, exposure apparatus having the support plate, and a device manufacturing method using the exposure apparatus |
03/05/2009 | US20090059190 Movable body apparatus, exposure apparatus and optical system unit, and device manufacturing method |