Patents for G03B 27 - Photographic printing apparatus (25,157) |
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10/21/2008 | US7440083 Printing a mask with maximum possible process window through adjustment of the source distribution |
10/21/2008 | US7440082 Method of predicting and minimizing model OPC deviation due to mix/match of exposure tools using a calibrated eigen decomposition model |
10/21/2008 | US7440081 Lithographic apparatus, device manufacturing method, and substrate table |
10/21/2008 | US7440080 Method and apparatus for automatic correction of direct exposure apparatus |
10/21/2008 | US7440079 Lithographic apparatus, alignment system, and device manufacturing method |
10/21/2008 | US7440078 Lithographic apparatus and device manufacturing method using interferometric and maskless exposure units |
10/21/2008 | US7440077 Exposure apparatus |
10/21/2008 | US7440076 Lithographic apparatus, device manufacturing method and device manufactured thereby |
10/21/2008 | US7438443 Lighting device, image-reading device, color-document reading apparatus, image-forming apparatus, projection apparatus |
10/21/2008 | US7438439 Temperature adjusting device for an LED light source |
10/16/2008 | US20080252872 Method of evaluating optical beam source of exposure device, method of designing illumination shape of exposure device, and software for optimizing illumination shape of exposure device |
10/16/2008 | US20080252871 Projection exposure apparatus |
10/16/2008 | US20080252870 Lithographic projection apparatus and a device manufacturing method using such lithographic projection apparatus |
10/16/2008 | US20080252869 Exposure apparatus and device fabrication method using the same |
10/16/2008 | US20080252868 Mask-less method and structure for patterning photosensitive material using optical fibers |
10/16/2008 | US20080252867 Overlay mark, and fabrication and application of the same |
10/16/2008 | US20080252866 Lithographic apparatus and device manufacturing method |
10/16/2008 | US20080252865 Exposure apparatus, method for cleaning member thereof, maintenance method for exposure apparatus, maintenance device, and method for producing device |
10/16/2008 | US20080252864 Immersion exposure technique |
10/15/2008 | EP1660925A4 Apparatus and method for providing fluid for immersion lithography |
10/15/2008 | EP1611482A4 Run-off path to collect liquid for an immersion lithography apparatus |
10/15/2008 | CN101286012A Projection exposure apparatus |
10/14/2008 | US7436589 Reflective-type projection optical system and exposure apparatus equipped with said reflective-type projection optical system |
10/14/2008 | US7436521 Optical measuring apparatus and operating method for imaging error correction in an optical imaging system |
10/14/2008 | US7436491 Exposure system, exposure method and method for manufacturing a semiconductor device |
10/14/2008 | US7436490 Exposure apparatus using blaze type diffraction grating to diffract EUV light and device manufacturing method using the exposure apparatus |
10/14/2008 | US7436489 Device for testing an exposure apparatus |
10/14/2008 | US7436488 Wide-angle lens and zoom lens |
10/14/2008 | US7436487 Exposure apparatus and method for producing device |
10/14/2008 | US7436486 Exposure apparatus and device manufacturing method |
10/14/2008 | US7436485 Lithographic apparatus, patterning assembly and contamination estimation method |
10/14/2008 | US7436484 Lithographic apparatus and device manufacturing method |
10/14/2008 | US7435609 Manufacturing method for exposure mask, generating method for mask substrate information, mask substrate, exposure mask, manufacturing method for semiconductor device and server |
10/14/2008 | US7435528 Processes and devices using polycyclic fluoroalkanes in vacuum and deep ultraviolet applications |
10/14/2008 | US7435021 Automatic development method of photosensitive lithographic printing plate and automatic development device thereof |
10/09/2008 | US20080248833 Mobile Telephone With An Internal Inkjet Printhead Arrangement And An Optical Sensing Arrangement |
10/09/2008 | US20080246941 Wavefront aberration measuring device, projection exposure apparatus, method for manufacturing projection optical system, and method for manufacturing device |
10/09/2008 | US20080246940 Illumination system for illuminating a pattering device and method for manufacturing an illumination system |
10/09/2008 | US20080246939 Exposure apparatus and original |
10/09/2008 | US20080246938 Exposure apparatus and device manufacturing method |
10/09/2008 | US20080246937 Exposing Method, Exposure Apparatus, Device Fabricating Method, and Film Evaluating Method |
10/09/2008 | US20080246936 Lithographic apparatus and device manufacturing method |
10/09/2008 | US20080246935 Lithographic apparatus and method for masking a substrate |
10/09/2008 | US20080246934 Lithographic apparatus having a drive system with coordinate transformation, and device manufacturing method |
10/09/2008 | US20080246933 Exposure Method And Apparatus, And Device Production Method |
10/09/2008 | US20080246932 Exposure apparatus, device manufacturing method and exposure method |
10/09/2008 | US20080246931 Substrate processing method, exposure apparatus, and method for producing device |
10/09/2008 | US20080246930 Exposure Apparatus and Device Manufacturing Method |
10/09/2008 | US20080246827 Modular Pen-Shaped Imaging And Printing Assembly Having A Timer Module |
10/09/2008 | US20080245975 Electrically Programmable Reticle and System |
10/07/2008 | US7433094 Image reading apparatus and light source |
10/07/2008 | US7433050 Exposure apparatus and exposure method |
10/07/2008 | US7433020 Apparatus having photoelectric converting element, and device manufacturing method |
10/07/2008 | US7433019 Exposure apparatus and device manufacturing method |
10/07/2008 | US7433018 Pattern alignment method and lithographic apparatus |
10/07/2008 | US7433017 Method of measuring the position of a mask surface along the height direction, exposure device, and exposure method |
10/07/2008 | US7433016 Lithographic apparatus and device manufacturing method |
10/07/2008 | US7433015 Lithographic apparatus and device manufacturing method |
10/02/2008 | US20080241714 Imaging asymmetric pattern with lens system and measuring alignment offset; low cost monitoring; preventing damage during extreme ultraviolet photolithography integrated circuit manufacturing |
10/02/2008 | US20080239503 Projection objective of a microlithographic projection exposure apparatus |
10/02/2008 | US20080239277 Method of forming a substrate for use in calibrating a metrology tool, calibration substrate and metrology tool calibration method |
10/02/2008 | US20080239276 Stage apparatus, fixation method, exposure apparatus, exposure method, and device-producing method |
10/02/2008 | US20080239275 Substrate holding apparatus, exposure apparatus, exposing method, and device fabricating method |
10/02/2008 | US20080239274 Illumination optical system, exposure apparatus, and exposure method |
10/02/2008 | US20080239273 Illumination system and polarizer for a microlithographic projection exposure apparatus |
10/02/2008 | US20080239271 Aberration measurement method, exposure apparatus, and device manufacturing method |
10/02/2008 | US20080239270 Optical element module |
10/02/2008 | US20080239269 Laser beam formatting module and method for fabricating semiconductor dies using same |
10/02/2008 | US20080239268 Lithographic apparatus and method |
10/02/2008 | US20080239267 Exposure apparatus and exposure method for exposure apparatus |
10/02/2008 | US20080239266 Exposure method, exposure apparatus, light converging pattern formation member, mask, and device manufacturing method |
10/02/2008 | US20080239264 Lithographic apparatus having feedthrough control system |
10/02/2008 | US20080239263 Lithographic system and device manufacturing method |
10/02/2008 | US20080239261 Run-off path to collect liquid for an immersion lithography apparatus |
10/02/2008 | US20080239260 Exposure apparatus and device manufacturing method |
10/02/2008 | US20080239259 Heat treatment apparatus and methods for thermally processing a substrate using a pressurized gaseous environment |
10/02/2008 | US20080239258 Residual Pupil Asymmetry Compensator for a Lithography Scanner |
10/02/2008 | US20080239257 Stage Apparatus and Exposure Apparatus |
10/02/2008 | US20080239256 Exposure apparatus, exposing method, and device fabricating method |
10/02/2008 | US20080239255 Device and Method for Optically Detecting and Receiving Interconnected Sheets |
10/01/2008 | EP1616220A4 Maintaining immersion fluid under a lithographic projection lens |
10/01/2008 | CN101277885A Photosensitive material transfer system and image forming apparatus |
10/01/2008 | CN101276157A Exposure device |
10/01/2008 | CN101276156A Exposure device |
10/01/2008 | CN100422847C Automatic photography processor and paper feeder, box, camera mechanism and credentials picture |
09/30/2008 | US7430037 Reticle cassette and exposure apparatus using reticle cassette |
09/30/2008 | US7430036 Maskless exposure apparatus using optical modulator, and method for monitoring pattern generating performance by the optical modulator |
09/30/2008 | US7430035 Automatic device for turning the pages of a bound document |
09/25/2008 | US20080232855 Exposure apparatus, image forming apparatus, exposure apparatus manufacturing method and image forming method |
09/25/2008 | US20080231825 Exposure Apparatus and method for producing device |
09/25/2008 | US20080231824 Liquid recovery member, exposure apparatus, exposing method, and device fabricating method |
09/25/2008 | US20080231823 Apparatus and methods for reducing the escape of immersion liquid from immersion lithography apparatus |
09/25/2008 | US20080231822 Nozzle to help reduce the escape of immersion liquid from an immersion lithography tool |
09/25/2008 | US20080231821 Exposure Method Of A Semiconductor Device |
09/25/2008 | US20080231820 Contamination prevention system, a lithographic apparatus, a radiation source and a method for manufacturing a device |
09/25/2008 | US20080230695 Method of imaging radiation from an object on a detection device and an inspection device for inspecting an object |
09/25/2008 | US20080230677 Lithographic apparatus comprising a vibration isolation support device |
09/24/2008 | CN100421447C Image reading apparatus |
09/24/2008 | CN100421028C Photo processor |
09/24/2008 | CN100421024C Photoetching device and device manufacturing method |